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和 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分压分掉，想让栅更能控制沟道电势，就要让 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相对更大、或者",[317,897,899,922],{"className":898},[320],[317,900,902],{"className":901},[324],[326,903,904],{"xmlns":328},[330,905,906,920],{},[333,907,908],{},[336,909,910,912],{},[339,911,654],{},[333,913,914,916,918],{},[339,915,745],{},[339,917,748],{},[339,919,234],{},[353,921,753],{"encoding":355},[317,923,925],{"className":924,"ariaHidden":361},[360],[317,926,928,931],{"className":927},[365],[317,929],{"className":930,"style":763},[369],[317,932,934,937],{"className":933},[374],[317,935,654],{"className":936,"style":681},[374,378],[317,938,940],{"className":939},[383],[317,941,943,972],{"className":942},[387,388],[317,944,946,969],{"className":945},[392],[317,947,949],{"className":948,"style":782},[396],[317,950,951,954],{"style":697},[317,952],{"className":953,"style":405},[404],[317,955,957],{"className":956},[409,410,411,412],[317,958,960,963,966],{"className":959},[374,412],[317,961,745],{"className":962},[374,378,412],[317,964,748],{"className":965},[374,378,412],[317,967,234],{"className":968},[374,378,412],[317,970,431],{"className":971},[430],[317,973,975],{"className":974},[392],[317,976,978],{"className":977,"style":812},[396],[317,979],{},"更小",[234,982,983],{},"亚阈值斜率\u002F摆幅也说明了这点",[317,985,988],{"className":986},[987],"katex-display",[317,989,991,1077],{"className":990},[320],[317,992,994],{"className":993},[324],[326,995,997],{"xmlns":328,"display":996},"block",[330,998,999,1074],{},[333,1000,1001,1003,1007,1011,1014,1017,1021,1024,1038],{},[339,1002,577],{},[1004,1005,1006],"mo",{},"≈",[1004,1008,1010],{"stretchy":1009},"false","(",[339,1012,1013],{},"ln",[1004,1015,1016],{},"⁡",[1018,1019,1020],"mn",{},"10",[1004,1022,1023],{"stretchy":1009},")",[1025,1026,1027,1035],"mfrac",{},[333,1028,1029,1032],{},[339,1030,1031],{},"k",[339,1033,1034],{},"T",[339,1036,1037],{},"q",[333,1039,1040,1042,1045,1048,1072],{},[1004,1041,1010],{"fence":361},[1018,1043,1044],{},"1",[1004,1046,1047],{},"+",[1025,1049,1050,1062],{},[336,1051,1052,1054],{},[339,1053,654],{},[333,1055,1056,1058,1060],{},[339,1057,745],{},[339,1059,748],{},[339,1061,234],{},[336,1063,1064,1066],{},[339,1065,654],{},[333,1067,1068,1070],{},[339,1069,659],{},[339,1071,662],{},[1004,1073,1023],{"fence":361},[353,1075,1076],{"encoding":355},"S 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10)\\frac{kT}{q}\\left(1+\\frac{C_{dep}}{C_{ox}}\\right)",[317,1078,1080,1102],{"className":1079,"ariaHidden":361},[360],[317,1081,1083,1087,1090,1095,1099],{"className":1082},[365],[317,1084],{"className":1085,"style":1086},[369],"height:0.6833em;",[317,1088,577],{"className":1089,"style":624},[374,378],[317,1091],{"className":1092,"style":1094},[1093],"mspace","margin-right:0.2778em;",[317,1096,1006],{"className":1097},[1098],"mrel",[317,1100],{"className":1101,"style":1094},[1093],[317,1103,1105,1109,1113,1117,1121,1124,1128,1204,1207],{"className":1104},[365],[317,1106],{"className":1107,"style":1108},[369],"height:2.4em;vertical-align:-0.95em;",[317,1110,1010],{"className":1111},[1112],"mopen",[317,1114,1013],{"className":1115},[1116],"mop",[317,1118],{"className":1119,"style":1120},[1093],"margin-right:0.1667em;",[317,1122,1020],{"className":1123},[374],[317,1125,1023],{"className":1126},[1127],"mclose",[317,1129,1131,1135,1201],{"className":1130},[374],[317,1132],{"className":1133},[1112,1134],"nulldelimiter",[317,1136,1138],{"className":1137},[1025],[317,1139,1141,1192],{"className":1140},[387,388],[317,1142,1144,1189],{"className":1143},[392],[317,1145,1148,1162,1173],{"className":1146,"style":1147},[396],"height:1.3714em;",[317,1149,1151,1155],{"style":1150},"top:-2.314em;",[317,1152],{"className":1153,"style":1154},[404],"height:3em;",[317,1156,1158],{"className":1157},[374],[317,1159,1037],{"className":1160,"style":1161},[374,378],"margin-right:0.0359em;",[317,1163,1165,1168],{"style":1164},"top:-3.23em;",[317,1166],{"className":1167,"style":1154},[404],[317,1169],{"className":1170,"style":1172},[1171],"frac-line","border-bottom-width:0.04em;",[317,1174,1176,1179],{"style":1175},"top:-3.677em;",[317,1177],{"className":1178,"style":1154},[404],[317,1180,1182,1186],{"className":1181},[374],[317,1183,1031],{"className":1184,"style":1185},[374,378],"margin-right:0.0315em;",[317,1187,1034],{"className":1188,"style":423},[374,378],[317,1190,431],{"className":1191},[430],[317,1193,1195],{"className":1194},[392],[317,1196,1199],{"className":1197,"style":1198},[396],"height:0.8804em;",[317,1200],{},[317,1202],{"className":1203},[1127,1134],[317,1205],{"className":1206,"style":1120},[1093],[317,1208,1211,1220,1223,1226,1230,1233,1386],{"className":1209},[1210],"minner",[317,1212,1216],{"className":1213,"style":1215},[1112,1214],"delimcenter","top:0em;",[317,1217,1010],{"className":1218},[1219,411],"delimsizing",[317,1221,1044],{"className":1222},[374],[317,1224],{"className":1225,"style":596},[1093],[317,1227,1047],{"className":1228},[1229],"mbin",[317,1231],{"className":1232,"style":596},[1093],[317,1234,1236,1239,1383],{"className":1235},[374],[317,1237],{"className":1238},[1112,1134],[317,1240,1242],{"className":1241},[1025],[317,1243,1245,1374],{"className":1244},[387,388],[317,1246,1248,1371],{"className":1247},[392],[317,1249,1252,1306,1314],{"className":1250,"style":1251},[396],"height:1.3603em;",[317,1253,1254,1257],{"style":1150},[317,1255],{"className":1256,"style":1154},[404],[317,1258,1260],{"className":1259},[374],[317,1261,1263,1266],{"className":1262},[374],[317,1264,654],{"className":1265,"style":681},[374,378],[317,1267,1269],{"className":1268},[383],[317,1270,1272,1298],{"className":1271},[387,388],[317,1273,1275,1295],{"className":1274},[392],[317,1276,1278],{"className":1277,"style":694},[396],[317,1279,1280,1283],{"style":697},[317,1281],{"className":1282,"style":405},[404],[317,1284,1286],{"className":1285},[409,410,411,412],[317,1287,1289,1292],{"className":1288},[374,412],[317,1290,659],{"className":1291},[374,378,412],[317,1293,662],{"className":1294},[374,378,412],[317,1296,431],{"className":1297},[430],[317,1299,1301],{"className":1300},[392],[317,1302,1304],{"className":1303,"style":438},[396],[317,1305],{},[317,1307,1308,1311],{"style":1164},[317,1309],{"className":1310,"style":1154},[404],[317,1312],{"className":1313,"style":1172},[1171],[317,1315,1316,1319],{"style":1175},[317,1317],{"className":1318,"style":1154},[404],[317,1320,1322],{"className":1321},[374],[317,1323,1325,1328],{"className":1324},[374],[317,1326,654],{"className":1327,"style":681},[374,378],[317,1329,1331],{"className":1330},[383],[317,1332,1334,1363],{"className":1333},[387,388],[317,1335,1337,1360],{"className":1336},[392],[317,1338,1340],{"className":1339,"style":782},[396],[317,1341,1342,1345],{"style":697},[317,1343],{"className":1344,"style":405},[404],[317,1346,1348],{"className":1347},[409,410,411,412],[317,1349,1351,1354,1357],{"className":1350},[374,412],[317,1352,745],{"className":1353},[374,378,412],[317,1355,748],{"className":1356},[374,378,412],[317,1358,234],{"className":1359},[374,378,412],[317,1361,431],{"className":1362},[430],[317,1364,1366],{"className":1365},[392],[317,1367,1369],{"className":1368,"style":812},[396],[317,1370],{},[317,1372,431],{"className":1373},[430],[317,1375,1377],{"className":1376},[392],[317,1378,1381],{"className":1379,"style":1380},[396],"height:0.836em;",[317,1382],{},[317,1384],{"className":1385},[1127,1134],[317,1387,1389],{"className":1388,"style":1215},[1127,1214],[317,1390,1023],{"className":1391},[1219,411],[234,1393,1394,895,1473,1557,1558],{},[317,1395,1397,1418],{"className":1396},[320],[317,1398,1400],{"className":1399},[324],[326,1401,1402],{"xmlns":328},[330,1403,1404,1416],{},[333,1405,1406],{},[336,1407,1408,1410],{},[339,1409,654],{},[333,1411,1412,1414],{},[339,1413,659],{},[339,1415,662],{},[353,1417,665],{"encoding":355},[317,1419,1421],{"className":1420,"ariaHidden":361},[360],[317,1422,1424,1427],{"className":1423},[365],[317,1425],{"className":1426,"style":370},[369],[317,1428,1430,1433],{"className":1429},[374],[317,1431,654],{"className":1432,"style":681},[374,378],[317,1434,1436],{"className":1435},[383],[317,1437,1439,1465],{"className":1438},[387,388],[317,1440,1442,1462],{"className":1441},[392],[317,1443,1445],{"className":1444,"style":694},[396],[317,1446,1447,1450],{"style":697},[317,1448],{"className":1449,"style":405},[404],[317,1451,1453],{"className":1452},[409,410,411,412],[317,1454,1456,1459],{"className":1455},[374,412],[317,1457,659],{"className":1458},[374,378,412],[317,1460,662],{"className":1461},[374,378,412],[317,1463,431],{"className":1464},[430],[317,1466,1468],{"className":1467},[392],[317,1469,1471],{"className":1470,"style":438},[396],[317,1472],{},[317,1474,1476,1499],{"className":1475},[320],[317,1477,1479],{"className":1478},[324],[326,1480,1481],{"xmlns":328},[330,1482,1483,1497],{},[333,1484,1485],{},[336,1486,1487,1489],{},[339,1488,654],{},[333,1490,1491,1493,1495],{},[339,1492,745],{},[339,1494,748],{},[339,1496,234],{},[353,1498,753],{"encoding":355},[317,1500,1502],{"className":1501,"ariaHidden":361},[360],[317,1503,1505,1508],{"className":1504},[365],[317,1506],{"className":1507,"style":763},[369],[317,1509,1511,1514],{"className":1510},[374],[317,1512,654],{"className":1513,"style":681},[374,378],[317,1515,1517],{"className":1516},[383],[317,1518,1520,1549],{"className":1519},[387,388],[317,1521,1523,1546],{"className":1522},[392],[317,1524,1526],{"className":1525,"style":782},[396],[317,1527,1528,1531],{"style":697},[317,1529],{"className":1530,"style":405},[404],[317,1532,1534],{"className":1533},[409,410,411,412],[317,1535,1537,1540,1543],{"className":1536},[374,412],[317,1538,745],{"className":1539},[374,378,412],[317,1541,748],{"className":1542},[374,378,412],[317,1544,234],{"className":1545},[374,378,412],[317,1547,431],{"className":1548},[430],[317,1550,1552],{"className":1551},[392],[317,1553,1555],{"className":1554,"style":812},[396],[317,1556],{},"更小，就会使",[252,1559,1560],{},"S越小，开关速度更快",[234,1562,1563],{},[245,1564],{"alt":247,"src":1565},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-30.png",[234,1567,1568,1649,1650,1737],{},[317,1569,1571,1594],{"className":1570},[320],[317,1572,1574],{"className":1573},[324],[326,1575,1576],{"xmlns":328},[330,1577,1578,1591],{},[333,1579,1580],{},[336,1581,1582,1584],{},[339,1583,569],{},[333,1585,1586,1588],{},[339,1587,745],{},[339,1589,1590],{},"s",[353,1592,1593],{"encoding":355},"V_{ds}",[317,1595,1597],{"className":1596,"ariaHidden":361},[360],[317,1598,1600,1603],{"className":1599},[365],[317,1601],{"className":1602,"style":370},[369],[317,1604,1606,1609],{"className":1605},[374],[317,1607,569],{"className":1608,"style":596},[374,378],[317,1610,1612],{"className":1611},[383],[317,1613,1615,1641],{"className":1614},[387,388],[317,1616,1618,1638],{"className":1617},[392],[317,1619,1621],{"className":1620,"style":782},[396],[317,1622,1623,1626],{"style":611},[317,1624],{"className":1625,"style":405},[404],[317,1627,1629],{"className":1628},[409,410,411,412],[317,1630,1632,1635],{"className":1631},[374,412],[317,1633,745],{"className":1634},[374,378,412],[317,1636,1590],{"className":1637},[374,378,412],[317,1639,431],{"className":1640},[430],[317,1642,1644],{"className":1643},[392],[317,1645,1647],{"className":1646,"style":438},[396],[317,1648],{},"增大——DIBL效应会导致",[317,1651,1653,1678],{"className":1652},[320],[317,1654,1656],{"className":1655},[324],[326,1657,1658],{"xmlns":328},[330,1659,1660,1675],{},[333,1661,1662],{},[336,1663,1664,1666],{},[339,1665,341],{},[333,1667,1668,1670,1673],{},[339,1669,659],{},[339,1671,1672],{},"f",[339,1674,1672],{},[353,1676,1677],{"encoding":355},"I_{off}",[317,1679,1681],{"className":1680,"ariaHidden":361},[360],[317,1682,1684,1687],{"className":1683},[365],[317,1685],{"className":1686,"style":763},[369],[317,1688,1690,1693],{"className":1689},[374],[317,1691,341],{"className":1692,"style":379},[374,378],[317,1694,1696],{"className":1695},[383],[317,1697,1699,1729],{"className":1698},[387,388],[317,1700,1702,1726],{"className":1701},[392],[317,1703,1705],{"className":1704,"style":782},[396],[317,1706,1707,1710],{"style":400},[317,1708],{"className":1709,"style":405},[404],[317,1711,1713],{"className":1712},[409,410,411,412],[317,1714,1716,1719,1723],{"className":1715},[374,412],[317,1717,659],{"className":1718},[374,378,412],[317,1720,1672],{"className":1721,"style":1722},[374,378,412],"margin-right:0.1076em;",[317,1724,1672],{"className":1725,"style":1722},[374,378,412],[317,1727,431],{"className":1728},[430],[317,1730,1732],{"className":1731},[392],[317,1733,1735],{"className":1734,"style":812},[396],[317,1736],{},"的增大",[234,1739,1740,1741,1825],{},"在scaling过程中",[317,1742,1744,1767],{"className":1743},[320],[317,1745,1747],{"className":1746},[324],[326,1748,1749],{"xmlns":328},[330,1750,1751,1765],{},[333,1752,1753],{},[336,1754,1755,1757],{},[339,1756,341],{},[333,1758,1759,1761,1763],{},[339,1760,659],{},[339,1762,1672],{},[339,1764,1672],{},[353,1766,1677],{"encoding":355},[317,1768,1770],{"className":1769,"ariaHidden":361},[360],[317,1771,1773,1776],{"className":1772},[365],[317,1774],{"className":1775,"style":763},[369],[317,1777,1779,1782],{"className":1778},[374],[317,1780,341],{"className":1781,"style":379},[374,378],[317,1783,1785],{"className":1784},[383],[317,1786,1788,1817],{"className":1787},[387,388],[317,1789,1791,1814],{"className":1790},[392],[317,1792,1794],{"className":1793,"style":782},[396],[317,1795,1796,1799],{"style":400},[317,1797],{"className":1798,"style":405},[404],[317,1800,1802],{"className":1801},[409,410,411,412],[317,1803,1805,1808,1811],{"className":1804},[374,412],[317,1806,659],{"className":1807},[374,378,412],[317,1809,1672],{"className":1810,"style":1722},[374,378,412],[317,1812,1672],{"className":1813,"style":1722},[374,378,412],[317,1815,431],{"className":1816},[430],[317,1818,1820],{"className":1819},[392],[317,1821,1823],{"className":1822,"style":812},[396],[317,1824],{},"会变得越来越大",[234,1827,1828],{},[245,1829],{"alt":247,"src":1830},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-11.png",[537,1832,1834],{"id":1833},"新的晶体管结构new-transistor-structures","新的晶体管结构｜New Transistor Structures",[234,1836,1837,1838,1911,1912,1996,1997,2081,2082,2164,2165,2246,2247,2337],{},"当 ",[317,1839,1841,1861],{"className":1840},[320],[317,1842,1844],{"className":1843},[324],[326,1845,1846],{"xmlns":328},[330,1847,1848,1858],{},[333,1849,1850],{},[336,1851,1852,1855],{},[339,1853,1854],{},"L",[339,1856,1857],{},"g",[353,1859,1860],{"encoding":355},"L_g",[317,1862,1864],{"className":1863,"ariaHidden":361},[360],[317,1865,1867,1870],{"className":1866},[365],[317,1868],{"className":1869,"style":763},[369],[317,1871,1873,1876],{"className":1872},[374],[317,1874,1854],{"className":1875},[374,378],[317,1877,1879],{"className":1878},[383],[317,1880,1882,1903],{"className":1881},[387,388],[317,1883,1885,1900],{"className":1884},[392],[317,1886,1888],{"className":1887,"style":694},[396],[317,1889,1891,1894],{"style":1890},"top:-2.55em;margin-left:0em;margin-right:0.05em;",[317,1892],{"className":1893,"style":405},[404],[317,1895,1897],{"className":1896},[409,410,411,412],[317,1898,1857],{"className":1899,"style":1161},[374,378,412],[317,1901,431],{"className":1902},[430],[317,1904,1906],{"className":1905},[392],[317,1907,1909],{"className":1908,"style":812},[396],[317,1910],{}," 一直缩小（scaling）时，短沟道效应会让关断漏电 ",[317,1913,1915,1938],{"className":1914},[320],[317,1916,1918],{"className":1917},[324],[326,1919,1920],{"xmlns":328},[330,1921,1922,1936],{},[333,1923,1924],{},[336,1925,1926,1928],{},[339,1927,341],{},[333,1929,1930,1932,1934],{},[339,1931,346],{},[339,1933,349],{},[339,1935,349],{},[353,1937,356],{"encoding":355},[317,1939,1941],{"className":1940,"ariaHidden":361},[360],[317,1942,1944,1947],{"className":1943},[365],[317,1945],{"className":1946,"style":370},[369],[317,1948,1950,1953],{"className":1949},[374],[317,1951,341],{"className":1952,"style":379},[374,378],[317,1954,1956],{"className":1955},[383],[317,1957,1959,1988],{"className":1958},[387,388],[317,1960,1962,1985],{"className":1961},[392],[317,1963,1965],{"className":1964,"style":397},[396],[317,1966,1967,1970],{"style":400},[317,1968],{"className":1969,"style":405},[404],[317,1971,1973],{"className":1972},[409,410,411,412],[317,1974,1976,1979,1982],{"className":1975},[374,412],[317,1977,346],{"className":1978,"style":419},[374,378,412],[317,1980,349],{"className":1981,"style":423},[374,378,412],[317,1983,349],{"className":1984,"style":423},[374,378,412],[317,1986,431],{"className":1987},[430],[317,1989,1991],{"className":1990},[392],[317,1992,1994],{"className":1993,"style":438},[396],[317,1995],{}," 变大；如果不把 ",[317,1998,2000,2023],{"className":1999},[320],[317,2001,2003],{"className":2002},[324],[326,2004,2005],{"xmlns":328},[330,2006,2007,2021],{},[333,2008,2009],{},[336,2010,2011,2013],{},[339,2012,341],{},[333,2014,2015,2017,2019],{},[339,2016,346],{},[339,2018,349],{},[339,2020,349],{},[353,2022,356],{"encoding":355},[317,2024,2026],{"className":2025,"ariaHidden":361},[360],[317,2027,2029,2032],{"className":2028},[365],[317,2030],{"className":2031,"style":370},[369],[317,2033,2035,2038],{"className":2034},[374],[317,2036,341],{"className":2037,"style":379},[374,378],[317,2039,2041],{"className":2040},[383],[317,2042,2044,2073],{"className":2043},[387,388],[317,2045,2047,2070],{"className":2046},[392],[317,2048,2050],{"className":2049,"style":397},[396],[317,2051,2052,2055],{"style":400},[317,2053],{"className":2054,"style":405},[404],[317,2056,2058],{"className":2057},[409,410,411,412],[317,2059,2061,2064,2067],{"className":2060},[374,412],[317,2062,346],{"className":2063,"style":419},[374,378,412],[317,2065,349],{"className":2066,"style":423},[374,378,412],[317,2068,349],{"className":2069,"style":423},[374,378,412],[317,2071,431],{"className":2072},[430],[317,2074,2076],{"className":2075},[392],[317,2077,2079],{"className":2078,"style":438},[396],[317,2080],{}," 压下去，就很难继续降低 ",[317,2083,2085,2108],{"className":2084},[320],[317,2086,2088],{"className":2087},[324],[326,2089,2090],{"xmlns":328},[330,2091,2092,2105],{},[333,2093,2094],{},[336,2095,2096,2098],{},[339,2097,569],{},[333,2099,2100,2102],{},[339,2101,1034],{},[339,2103,2104],{},"H",[353,2106,2107],{"encoding":355},"V_{TH}",[317,2109,2111],{"className":2110,"ariaHidden":361},[360],[317,2112,2114,2117],{"className":2113},[365],[317,2115],{"className":2116,"style":370},[369],[317,2118,2120,2123],{"className":2119},[374],[317,2121,569],{"className":2122,"style":596},[374,378],[317,2124,2126],{"className":2125},[383],[317,2127,2129,2156],{"className":2128},[387,388],[317,2130,2132,2153],{"className":2131},[392],[317,2133,2135],{"className":2134,"style":397},[396],[317,2136,2137,2140],{"style":611},[317,2138],{"className":2139,"style":405},[404],[317,2141,2143],{"className":2142},[409,410,411,412],[317,2144,2146,2149],{"className":2145},[374,412],[317,2147,1034],{"className":2148,"style":423},[374,378,412],[317,2150,2104],{"className":2151,"style":2152},[374,378,412],"margin-right:0.0813em;",[317,2154,431],{"className":2155},[430],[317,2157,2159],{"className":2158},[392],[317,2160,2162],{"className":2161,"style":438},[396],[317,2163],{},"，也就很难进一步降低 ",[317,2166,2168,2191],{"className":2167},[320],[317,2169,2171],{"className":2170},[324],[326,2172,2173],{"xmlns":328},[330,2174,2175,2188],{},[333,2176,2177],{},[336,2178,2179,2181],{},[339,2180,569],{},[333,2182,2183,2186],{},[339,2184,2185],{},"D",[339,2187,2185],{},[353,2189,2190],{"encoding":355},"V_{DD}",[317,2192,2194],{"className":2193,"ariaHidden":361},[360],[317,2195,2197,2200],{"className":2196},[365],[317,2198],{"className":2199,"style":370},[369],[317,2201,2203,2206],{"className":2202},[374],[317,2204,569],{"className":2205,"style":596},[374,378],[317,2207,2209],{"className":2208},[383],[317,2210,2212,2238],{"className":2211},[387,388],[317,2213,2215,2235],{"className":2214},[392],[317,2216,2218],{"className":2217,"style":397},[396],[317,2219,2220,2223],{"style":611},[317,2221],{"className":2222,"style":405},[404],[317,2224,2226],{"className":2225},[409,410,411,412],[317,2227,2229,2232],{"className":2228},[374,412],[317,2230,2185],{"className":2231,"style":419},[374,378,412],[317,2233,2185],{"className":2234,"style":419},[374,378,412],[317,2236,431],{"className":2237},[430],[317,2239,2241],{"className":2240},[392],[317,2242,2244],{"className":2243,"style":438},[396],[317,2245],{},"（省功耗的关键路径之一就是 ",[317,2248,2250,2275],{"className":2249},[320],[317,2251,2253],{"className":2252},[324],[326,2254,2255],{"xmlns":328},[330,2256,2257,2272],{},[333,2258,2259,2269],{},[336,2260,2261,2263],{},[339,2262,569],{},[333,2264,2265,2267],{},[339,2266,2185],{},[339,2268,2185],{},[1004,2270,2271],{},"↓",[353,2273,2274],{"encoding":355},"V_{DD}\\downarrow",[317,2276,2278],{"className":2277,"ariaHidden":361},[360],[317,2279,2281,2285,2331,2334],{"className":2280},[365],[317,2282],{"className":2283,"style":2284},[369],"height:0.8889em;vertical-align:-0.1944em;",[317,2286,2288,2291],{"className":2287},[374],[317,2289,569],{"className":2290,"style":596},[374,378],[317,2292,2294],{"className":2293},[383],[317,2295,2297,2323],{"className":2296},[387,388],[317,2298,2300,2320],{"className":2299},[392],[317,2301,2303],{"className":2302,"style":397},[396],[317,2304,2305,2308],{"style":611},[317,2306],{"className":2307,"style":405},[404],[317,2309,2311],{"className":2310},[409,410,411,412],[317,2312,2314,2317],{"className":2313},[374,412],[317,2315,2185],{"className":2316,"style":419},[374,378,412],[317,2318,2185],{"className":2319,"style":419},[374,378,412],[317,2321,431],{"className":2322},[430],[317,2324,2326],{"className":2325},[392],[317,2327,2329],{"className":2328,"style":438},[396],[317,2330],{},[317,2332],{"className":2333,"style":1094},[1093],[317,2335,2271],{"className":2336},[1098],"）",[234,2339,2340,2341,2344],{},"很多漏电并不是发生在理想沟道表面那一小层，而是发生在",[252,2342,2343],{},"离表面更深的体区（body）内部","，例如源漏之间在体内形成的泄漏通道（punch-through \u002F bulk leakage）。一个很工程化的想法：既然漏电常发生在“离沟道表面远的区域”，那就把这块区域“拿掉”——也就是把硅体做得足够薄。",[234,2346,2347],{},[252,2348,2349],{},"Ultra-Thin-Body MOSFET（UTB）与 SOI｜Ultra-Thin-Body on SOI",[257,2351,2352],{"style":259},[261,2353,2354],{},[264,2355,267,2356,267,2364],{"style":266},[269,2357,2359,267],{"style":2358},"width: 73.7%; text-align: center; border: none; padding: 0.3em; margin: 0;",[234,2360,2361],{},[245,2362],{"alt":247,"src":2363},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-02.png",[269,2365,2367,267],{"style":2366},"width: 26.3%; text-align: center; border: none; padding: 0.3em; margin: 0;",[234,2368,2369],{},[245,2370],{"alt":247,"src":2371},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-04.png",[234,2373,2374,2375,2378,2379,2378,2461,2464],{},"图里给的是 SOI（Silicon-on-Insulator）晶圆：上面一层薄硅做器件，中间是埋氧（Buried Oxide, BOX），下面是衬底。UTB 的关键点是：",[252,2376,2377],{},"硅体厚度"," ",[317,2380,2382,2405],{"className":2381},[320],[317,2383,2385],{"className":2384},[324],[326,2386,2387],{"xmlns":328},[330,2388,2389,2402],{},[333,2390,2391],{},[336,2392,2393,2395],{},[339,2394,1034],{},[333,2396,2397,2399],{},[339,2398,577],{},[339,2400,2401],{},"i",[353,2403,2404],{"encoding":355},"T_{Si}",[317,2406,2408],{"className":2407,"ariaHidden":361},[360],[317,2409,2411,2414],{"className":2410},[365],[317,2412],{"className":2413,"style":370},[369],[317,2415,2417,2420],{"className":2416},[374],[317,2418,1034],{"className":2419,"style":423},[374,378],[317,2421,2423],{"className":2422},[383],[317,2424,2426,2453],{"className":2425},[387,388],[317,2427,2429,2450],{"className":2428},[392],[317,2430,2432],{"className":2431,"style":397},[396],[317,2433,2435,2438],{"style":2434},"top:-2.55em;margin-left:-0.1389em;margin-right:0.05em;",[317,2436],{"className":2437,"style":405},[404],[317,2439,2441],{"className":2440},[409,410,411,412],[317,2442,2444,2447],{"className":2443},[374,412],[317,2445,577],{"className":2446,"style":624},[374,378,412],[317,2448,2401],{"className":2449},[374,378,412],[317,2451,431],{"className":2452},[430],[317,2454,2456],{"className":2455},[392],[317,2457,2459],{"className":2458,"style":438},[396],[317,2460],{},[252,2462,2463],{},"做到足够薄","，让栅电场能“管住”整个硅体厚度，源漏电场就不容易在体内绕开栅控制形成漏电通道。",[234,2466,2467],{},"结果是：",[2469,2470,2471,2868],"ul",{},[299,2472,2473,2557,2558,2637,2638,2717,2718,2867],{},[317,2474,2476,2499],{"className":2475},[320],[317,2477,2479],{"className":2478},[324],[326,2480,2481],{"xmlns":328},[330,2482,2483,2497],{},[333,2484,2485],{},[336,2486,2487,2489],{},[339,2488,341],{},[333,2490,2491,2493,2495],{},[339,2492,346],{},[339,2494,349],{},[339,2496,349],{},[353,2498,356],{"encoding":355},[317,2500,2502],{"className":2501,"ariaHidden":361},[360],[317,2503,2505,2508],{"className":2504},[365],[317,2506],{"className":2507,"style":370},[369],[317,2509,2511,2514],{"className":2510},[374],[317,2512,341],{"className":2513,"style":379},[374,378],[317,2515,2517],{"className":2516},[383],[317,2518,2520,2549],{"className":2519},[387,388],[317,2521,2523,2546],{"className":2522},[392],[317,2524,2526],{"className":2525,"style":397},[396],[317,2527,2528,2531],{"style":400},[317,2529],{"className":2530,"style":405},[404],[317,2532,2534],{"className":2533},[409,410,411,412],[317,2535,2537,2540,2543],{"className":2536},[374,412],[317,2538,346],{"className":2539,"style":419},[374,378,412],[317,2541,349],{"className":2542,"style":423},[374,378,412],[317,2544,349],{"className":2545,"style":423},[374,378,412],[317,2547,431],{"className":2548},[430],[317,2550,2552],{"className":2551},[392],[317,2553,2555],{"className":2554,"style":438},[396],[317,2556],{}," 被抑制 → 允许更低的 ",[317,2559,2561,2582],{"className":2560},[320],[317,2562,2564],{"className":2563},[324],[326,2565,2566],{"xmlns":328},[330,2567,2568,2580],{},[333,2569,2570],{},[336,2571,2572,2574],{},[339,2573,569],{},[333,2575,2576,2578],{},[339,2577,1034],{},[339,2579,2104],{},[353,2581,2107],{"encoding":355},[317,2583,2585],{"className":2584,"ariaHidden":361},[360],[317,2586,2588,2591],{"className":2587},[365],[317,2589],{"className":2590,"style":370},[369],[317,2592,2594,2597],{"className":2593},[374],[317,2595,569],{"className":2596,"style":596},[374,378],[317,2598,2600],{"className":2599},[383],[317,2601,2603,2629],{"className":2602},[387,388],[317,2604,2606,2626],{"className":2605},[392],[317,2607,2609],{"className":2608,"style":397},[396],[317,2610,2611,2614],{"style":611},[317,2612],{"className":2613,"style":405},[404],[317,2615,2617],{"className":2616},[409,410,411,412],[317,2618,2620,2623],{"className":2619},[374,412],[317,2621,1034],{"className":2622,"style":423},[374,378,412],[317,2624,2104],{"className":2625,"style":2152},[374,378,412],[317,2627,431],{"className":2628},[430],[317,2630,2632],{"className":2631},[392],[317,2633,2635],{"className":2634,"style":438},[396],[317,2636],{}," → 进而可以把 ",[317,2639,2641,2662],{"className":2640},[320],[317,2642,2644],{"className":2643},[324],[326,2645,2646],{"xmlns":328},[330,2647,2648,2660],{},[333,2649,2650],{},[336,2651,2652,2654],{},[339,2653,569],{},[333,2655,2656,2658],{},[339,2657,2185],{},[339,2659,2185],{},[353,2661,2190],{"encoding":355},[317,2663,2665],{"className":2664,"ariaHidden":361},[360],[317,2666,2668,2671],{"className":2667},[365],[317,2669],{"className":2670,"style":370},[369],[317,2672,2674,2677],{"className":2673},[374],[317,2675,569],{"className":2676,"style":596},[374,378],[317,2678,2680],{"className":2679},[383],[317,2681,2683,2709],{"className":2682},[387,388],[317,2684,2686,2706],{"className":2685},[392],[317,2687,2689],{"className":2688,"style":397},[396],[317,2690,2691,2694],{"style":611},[317,2692],{"className":2693,"style":405},[404],[317,2695,2697],{"className":2696},[409,410,411,412],[317,2698,2700,2703],{"className":2699},[374,412],[317,2701,2185],{"className":2702,"style":419},[374,378,412],[317,2704,2185],{"className":2705,"style":419},[374,378,412],[317,2707,431],{"className":2708},[430],[317,2710,2712],{"className":2711},[392],[317,2713,2715],{"className":2714,"style":438},[396],[317,2716],{}," 降下来（在保持目标 ",[317,2719,2721,2759],{"className":2720},[320],[317,2722,2724],{"className":2723},[324],[326,2725,2726],{"xmlns":328},[330,2727,2728,2756],{},[333,2729,2730,2740,2744],{},[336,2731,2732,2734],{},[339,2733,341],{},[333,2735,2736,2738],{},[339,2737,346],{},[339,2739,468],{},[339,2741,2743],{"mathvariant":2742},"normal","\u002F",[336,2745,2746,2748],{},[339,2747,341],{},[333,2749,2750,2752,2754],{},[339,2751,346],{},[339,2753,349],{},[339,2755,349],{},[353,2757,2758],{"encoding":355},"I_{ON}\u002FI_{OFF}",[317,2760,2762],{"className":2761,"ariaHidden":361},[360],[317,2763,2765,2769,2815,2818],{"className":2764},[365],[317,2766],{"className":2767,"style":2768},[369],"height:1em;vertical-align:-0.25em;",[317,2770,2772,2775],{"className":2771},[374],[317,2773,341],{"className":2774,"style":379},[374,378],[317,2776,2778],{"className":2777},[383],[317,2779,2781,2807],{"className":2780},[387,388],[317,2782,2784,2804],{"className":2783},[392],[317,2785,2787],{"className":2786,"style":397},[396],[317,2788,2789,2792],{"style":400},[317,2790],{"className":2791,"style":405},[404],[317,2793,2795],{"className":2794},[409,410,411,412],[317,2796,2798,2801],{"className":2797},[374,412],[317,2799,346],{"className":2800,"style":419},[374,378,412],[317,2802,468],{"className":2803,"style":516},[374,378,412],[317,2805,431],{"className":2806},[430],[317,2808,2810],{"className":2809},[392],[317,2811,2813],{"className":2812,"style":438},[396],[317,2814],{},[317,2816,2743],{"className":2817},[374],[317,2819,2821,2824],{"className":2820},[374],[317,2822,341],{"className":2823,"style":379},[374,378],[317,2825,2827],{"className":2826},[383],[317,2828,2830,2859],{"className":2829},[387,388],[317,2831,2833,2856],{"className":2832},[392],[317,2834,2836],{"className":2835,"style":397},[396],[317,2837,2838,2841],{"style":400},[317,2839],{"className":2840,"style":405},[404],[317,2842,2844],{"className":2843},[409,410,411,412],[317,2845,2847,2850,2853],{"className":2846},[374,412],[317,2848,346],{"className":2849,"style":419},[374,378,412],[317,2851,349],{"className":2852,"style":423},[374,378,412],[317,2854,349],{"className":2855,"style":423},[374,378,412],[317,2857,431],{"className":2858},[430],[317,2860,2862],{"className":2861},[392],[317,2863,2865],{"className":2864,"style":438},[396],[317,2866],{}," 的前提下）。",[299,2869,2870],{},"漏电“发生在体内”的那条路被堵住（因为体变薄 + BOX 隔离）。",[2872,2873,2875],"h4",{"id":2874},"thin-body-mosfet","Thin-Body MOSFET",[234,2877,2878],{},[245,2879],{"alt":247,"src":2880},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-13.png",[2469,2882,2883,2971,3062,3289],{},[299,2884,2885,2886,2970],{},"用足够薄的 body 可以压制 ",[317,2887,2889,2912],{"className":2888},[320],[317,2890,2892],{"className":2891},[324],[326,2893,2894],{"xmlns":328},[330,2895,2896,2910],{},[333,2897,2898],{},[336,2899,2900,2902],{},[339,2901,341],{},[333,2903,2904,2906,2908],{},[339,2905,346],{},[339,2907,349],{},[339,2909,349],{},[353,2911,356],{"encoding":355},[317,2913,2915],{"className":2914,"ariaHidden":361},[360],[317,2916,2918,2921],{"className":2917},[365],[317,2919],{"className":2920,"style":370},[369],[317,2922,2924,2927],{"className":2923},[374],[317,2925,341],{"className":2926,"style":379},[374,378],[317,2928,2930],{"className":2929},[383],[317,2931,2933,2962],{"className":2932},[387,388],[317,2934,2936,2959],{"className":2935},[392],[317,2937,2939],{"className":2938,"style":397},[396],[317,2940,2941,2944],{"style":400},[317,2942],{"className":2943,"style":405},[404],[317,2945,2947],{"className":2946},[409,410,411,412],[317,2948,2950,2953,2956],{"className":2949},[374,412],[317,2951,346],{"className":2952,"style":419},[374,378,412],[317,2954,349],{"className":2955,"style":423},[374,378,412],[317,2957,349],{"className":2958,"style":423},[374,378,412],[317,2960,431],{"className":2961},[430],[317,2963,2965],{"className":2964},[392],[317,2966,2968],{"className":2967,"style":438},[396],[317,2969],{},"。",[299,2972,2973,2974],{},"体掺杂（body doping）可以减少甚至消除：",[2469,2975,2976,3059],{},[299,2977,2978,2979,3058],{},"掺杂少 → 载流子迁移率更高 → 驱动电流更强（",[317,2980,2982,3003],{"className":2981},[320],[317,2983,2985],{"className":2984},[324],[326,2986,2987],{"xmlns":328},[330,2988,2989,3001],{},[333,2990,2991],{},[336,2992,2993,2995],{},[339,2994,341],{},[333,2996,2997,2999],{},[339,2998,346],{},[339,3000,468],{},[353,3002,471],{"encoding":355},[317,3004,3006],{"className":3005,"ariaHidden":361},[360],[317,3007,3009,3012],{"className":3008},[365],[317,3010],{"className":3011,"style":370},[369],[317,3013,3015,3018],{"className":3014},[374],[317,3016,341],{"className":3017,"style":379},[374,378],[317,3019,3021],{"className":3020},[383],[317,3022,3024,3050],{"className":3023},[387,388],[317,3025,3027,3047],{"className":3026},[392],[317,3028,3030],{"className":3029,"style":397},[396],[317,3031,3032,3035],{"style":400},[317,3033],{"className":3034,"style":405},[404],[317,3036,3038],{"className":3037},[409,410,411,412],[317,3039,3041,3044],{"className":3040},[374,412],[317,3042,346],{"className":3043,"style":419},[374,378,412],[317,3045,468],{"className":3046,"style":516},[374,378,412],[317,3048,431],{"className":3049},[430],[317,3051,3053],{"className":3052},[392],[317,3054,3056],{"className":3055,"style":438},[396],[317,3057],{}," 更大）。",[299,3060,3061],{},"掺杂少 → 随机掺杂涨落（RDF, random dopant fluctuations）影响更小 → 器件阈值\u002F性能离散性更小。\n经验尺度条件判断——体要薄到什么程度才算对短沟道有效：",[299,3063,3064,3065],{},"UTB：",[317,3066,3068,3106],{"className":3067},[320],[317,3069,3071],{"className":3070},[324],[326,3072,3073],{"xmlns":328},[330,3074,3075,3103],{},[333,3076,3077,3087,3090,3097],{},[336,3078,3079,3081],{},[339,3080,1034],{},[333,3082,3083,3085],{},[339,3084,577],{},[339,3086,2401],{},[1004,3088,3089],{},"\u003C",[1025,3091,3092,3094],{},[1018,3093,1044],{},[1018,3095,3096],{},"4",[336,3098,3099,3101],{},[339,3100,1854],{},[339,3102,1857],{},[353,3104,3105],{"encoding":355},"T_{Si} \u003C \\frac{1}{4}L_g",[317,3107,3109,3170],{"className":3108,"ariaHidden":361},[360],[317,3110,3112,3115,3161,3164,3167],{"className":3111},[365],[317,3113],{"className":3114,"style":370},[369],[317,3116,3118,3121],{"className":3117},[374],[317,3119,1034],{"className":3120,"style":423},[374,378],[317,3122,3124],{"className":3123},[383],[317,3125,3127,3153],{"className":3126},[387,388],[317,3128,3130,3150],{"className":3129},[392],[317,3131,3133],{"className":3132,"style":397},[396],[317,3134,3135,3138],{"style":2434},[317,3136],{"className":3137,"style":405},[404],[317,3139,3141],{"className":3140},[409,410,411,412],[317,3142,3144,3147],{"className":3143},[374,412],[317,3145,577],{"className":3146,"style":624},[374,378,412],[317,3148,2401],{"className":3149},[374,378,412],[317,3151,431],{"className":3152},[430],[317,3154,3156],{"className":3155},[392],[317,3157,3159],{"className":3158,"style":438},[396],[317,3160],{},[317,3162],{"className":3163,"style":1094},[1093],[317,3165,3089],{"className":3166},[1098],[317,3168],{"className":3169,"style":1094},[1093],[317,3171,3173,3177,3249],{"className":3172},[365],[317,3174],{"className":3175,"style":3176},[369],"height:1.1901em;vertical-align:-0.345em;",[317,3178,3180,3183,3246],{"className":3179},[374],[317,3181],{"className":3182},[1112,1134],[317,3184,3186],{"className":3185},[1025],[317,3187,3189,3237],{"className":3188},[387,388],[317,3190,3192,3234],{"className":3191},[392],[317,3193,3196,3211,3219],{"className":3194,"style":3195},[396],"height:0.8451em;",[317,3197,3199,3202],{"style":3198},"top:-2.655em;",[317,3200],{"className":3201,"style":1154},[404],[317,3203,3205],{"className":3204},[409,410,411,412],[317,3206,3208],{"className":3207},[374,412],[317,3209,3096],{"className":3210},[374,412],[317,3212,3213,3216],{"style":1164},[317,3214],{"className":3215,"style":1154},[404],[317,3217],{"className":3218,"style":1172},[1171],[317,3220,3222,3225],{"style":3221},"top:-3.394em;",[317,3223],{"className":3224,"style":1154},[404],[317,3226,3228],{"className":3227},[409,410,411,412],[317,3229,3231],{"className":3230},[374,412],[317,3232,1044],{"className":3233},[374,412],[317,3235,431],{"className":3236},[430],[317,3238,3240],{"className":3239},[392],[317,3241,3244],{"className":3242,"style":3243},[396],"height:0.345em;",[317,3245],{},[317,3247],{"className":3248},[1127,1134],[317,3250,3252,3255],{"className":3251},[374],[317,3253,1854],{"className":3254},[374,378],[317,3256,3258],{"className":3257},[383],[317,3259,3261,3281],{"className":3260},[387,388],[317,3262,3264,3278],{"className":3263},[392],[317,3265,3267],{"className":3266,"style":694},[396],[317,3268,3269,3272],{"style":1890},[317,3270],{"className":3271,"style":405},[404],[317,3273,3275],{"className":3274},[409,410,411,412],[317,3276,1857],{"className":3277,"style":1161},[374,378,412],[317,3279,431],{"className":3280},[430],[317,3282,3284],{"className":3283},[392],[317,3285,3287],{"className":3286,"style":812},[396],[317,3288],{},[299,3290,3291,3292,3511,3512,3591],{},"Double-Gate（DG）：",[317,3293,3295,3333],{"className":3294},[320],[317,3296,3298],{"className":3297},[324],[326,3299,3300],{"xmlns":328},[330,3301,3302,3330],{},[333,3303,3304,3314,3316,3324],{},[336,3305,3306,3308],{},[339,3307,1034],{},[333,3309,3310,3312],{},[339,3311,577],{},[339,3313,2401],{},[1004,3315,3089],{},[1025,3317,3318,3321],{},[1018,3319,3320],{},"2",[1018,3322,3323],{},"3",[336,3325,3326,3328],{},[339,3327,1854],{},[339,3329,1857],{},[353,3331,3332],{"encoding":355},"T_{Si} \u003C \\frac{2}{3}L_g",[317,3334,3336,3397],{"className":3335,"ariaHidden":361},[360],[317,3337,3339,3342,3388,3391,3394],{"className":3338},[365],[317,3340],{"className":3341,"style":370},[369],[317,3343,3345,3348],{"className":3344},[374],[317,3346,1034],{"className":3347,"style":423},[374,378],[317,3349,3351],{"className":3350},[383],[317,3352,3354,3380],{"className":3353},[387,388],[317,3355,3357,3377],{"className":3356},[392],[317,3358,3360],{"className":3359,"style":397},[396],[317,3361,3362,3365],{"style":2434},[317,3363],{"className":3364,"style":405},[404],[317,3366,3368],{"className":3367},[409,410,411,412],[317,3369,3371,3374],{"className":3370},[374,412],[317,3372,577],{"className":3373,"style":624},[374,378,412],[317,3375,2401],{"className":3376},[374,378,412],[317,3378,431],{"className":3379},[430],[317,3381,3383],{"className":3382},[392],[317,3384,3386],{"className":3385,"style":438},[396],[317,3387],{},[317,3389],{"className":3390,"style":1094},[1093],[317,3392,3089],{"className":3393},[1098],[317,3395],{"className":3396,"style":1094},[1093],[317,3398,3400,3403,3471],{"className":3399},[365],[317,3401],{"className":3402,"style":3176},[369],[317,3404,3406,3409,3468],{"className":3405},[374],[317,3407],{"className":3408},[1112,1134],[317,3410,3412],{"className":3411},[1025],[317,3413,3415,3460],{"className":3414},[387,388],[317,3416,3418,3457],{"className":3417},[392],[317,3419,3421,3435,3443],{"className":3420,"style":3195},[396],[317,3422,3423,3426],{"style":3198},[317,3424],{"className":3425,"style":1154},[404],[317,3427,3429],{"className":3428},[409,410,411,412],[317,3430,3432],{"className":3431},[374,412],[317,3433,3323],{"className":3434},[374,412],[317,3436,3437,3440],{"style":1164},[317,3438],{"className":3439,"style":1154},[404],[317,3441],{"className":3442,"style":1172},[1171],[317,3444,3445,3448],{"style":3221},[317,3446],{"className":3447,"style":1154},[404],[317,3449,3451],{"className":3450},[409,410,411,412],[317,3452,3454],{"className":3453},[374,412],[317,3455,3320],{"className":3456},[374,412],[317,3458,431],{"className":3459},[430],[317,3461,3463],{"className":3462},[392],[317,3464,3466],{"className":3465,"style":3243},[396],[317,3467],{},[317,3469],{"className":3470},[1127,1134],[317,3472,3474,3477],{"className":3473},[374],[317,3475,1854],{"className":3476},[374,378],[317,3478,3480],{"className":3479},[383],[317,3481,3483,3503],{"className":3482},[387,388],[317,3484,3486,3500],{"className":3485},[392],[317,3487,3489],{"className":3488,"style":694},[396],[317,3490,3491,3494],{"style":1890},[317,3492],{"className":3493,"style":405},[404],[317,3495,3497],{"className":3496},[409,410,411,412],[317,3498,1857],{"className":3499,"style":1161},[374,378,412],[317,3501,431],{"className":3502},[430],[317,3504,3506],{"className":3505},[392],[317,3507,3509],{"className":3508,"style":812},[396],[317,3510],{},"\n直觉上：栅“包得越多”（从单栅到双栅），允许的 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就可以更厚一些，因为电势控制更强。",[3593,3594,3596,3675,3676,3755],"h5",{"id":3595},"tsit_sitsi-对漏电的影响用数值图说明effect-of-tsit_sitsi-on-leakage",[317,3597,3599,3620],{"className":3598},[320],[317,3600,3602],{"className":3601},[324],[326,3603,3604],{"xmlns":328},[330,3605,3606,3618],{},[333,3607,3608],{},[336,3609,3610,3612],{},[339,3611,1034],{},[333,3613,3614,3616],{},[339,3615,577],{},[339,3617,2401],{},[353,3619,2404],{"encoding":355},[317,3621,3623],{"className":3622,"ariaHidden":361},[360],[317,3624,3626,3629],{"className":3625},[365],[317,3627],{"className":3628,"style":370},[369],[317,3630,3632,3635],{"className":3631},[374],[317,3633,1034],{"className":3634,"style":423},[374,378],[317,3636,3638],{"className":3637},[383],[317,3639,3641,3667],{"className":3640},[387,388],[317,3642,3644,3664],{"className":3643},[392],[317,3645,3647],{"className":3646,"style":397},[396],[317,3648,3649,3652],{"style":2434},[317,3650],{"className":3651,"style":405},[404],[317,3653,3655],{"className":3654},[409,410,411,412],[317,3656,3658,3661],{"className":3657},[374,412],[317,3659,577],{"className":3660,"style":624},[374,378,412],[317,3662,2401],{"className":3663},[374,378,412],[317,3665,431],{"className":3666},[430],[317,3668,3670],{"className":3669},[392],[317,3671,3673],{"className":3672,"style":438},[396],[317,3674],{}," 对漏电的影响（用数值图说明）｜Effect of 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on Leakage",[234,3757,3758],{},[245,3759],{"alt":247,"src":3760},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-01.png",[234,3762,3763,3764,3876,3877,3876,4051,4167],{},"在 ",[317,3765,3767,3798],{"className":3766},[320],[317,3768,3770],{"className":3769},[324],[326,3771,3772],{"xmlns":328},[330,3773,3774,3795],{},[333,3775,3776,3782,3785,3788,3792],{},[336,3777,3778,3780],{},[339,3779,1854],{},[339,3781,1857],{},[1004,3783,3784],{},"=",[1018,3786,3787],{},"25",[3789,3790,3791],"mtext",{}," ",[3789,3793,3794],{},"nm",[353,3796,3797],{"encoding":355},"L_g = 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下",[2469,4169,4170,4437],{},[299,4171,4172,4291,4292],{},[317,4173,4175,4205],{"className":4174},[320],[317,4176,4178],{"className":4177},[324],[326,4179,4180],{"xmlns":328},[330,4181,4182,4202],{},[333,4183,4184,4194,4196,4198,4200],{},[336,4185,4186,4188],{},[339,4187,1034],{},[333,4189,4190,4192],{},[339,4191,577],{},[339,4193,2401],{},[1004,4195,3784],{},[1018,4197,1020],{},[1004,4199,3901],{"separator":361},[3789,4201,3794],{},[353,4203,4204],{"encoding":355},"T_{Si}=10,\\text{nm}",[317,4206,4208,4269],{"className":4207,"ariaHidden":361},[360],[317,4209,4211,4214,4260,4263,4266],{"className":4210},[365],[317,4212],{"className":4213,"style":370},[369],[317,4215,4217,4220],{"className":4216},[374],[317,4218,1034],{"className":4219,"style":423},[374,378],[317,4221,4223],{"className":4222},[383],[317,4224,4226,4252],{"className":4225},[387,388],[317,4227,4229,4249],{"className":4228},[392],[317,4230,4232],{"className":4231,"style":397},[396],[317,4233,4234,4237],{"style":2434},[317,4235],{"className":4236,"style":405},[404],[317,4238,4240],{"className":4239},[409,410,411,412],[317,4241,4243,4246],{"className":4242},[374,412],[317,4244,577],{"className":4245,"style":624},[374,378,412],[317,4247,2401],{"className":4248},[374,378,412],[317,4250,431],{"className":4251},[430],[317,4253,4255],{"className":4254},[392],[317,4256,4258],{"className":4257,"style":438},[396],[317,4259],{},[317,4261],{"className":4262,"style":1094},[1093],[317,4264,3784],{"className":4265},[1098],[317,4267],{"className":4268,"style":1094},[1093],[317,4270,4272,4276,4279,4282,4285],{"className":4271},[365],[317,4273],{"className":4274,"style":4275},[369],"height:0.8389em;vertical-align:-0.1944em;",[317,4277,1020],{"className":4278},[374],[317,4280,3901],{"className":4281},[3972],[317,4283],{"className":4284,"style":1120},[1093],[317,4286,4288],{"className":4287},[374,3872],[317,4289,3794],{"className":4290},[374]," 时，",[317,4293,4295,4337],{"className":4294},[320],[317,4296,4298],{"className":4297},[324],[326,4299,4300],{"xmlns":328},[330,4301,4302,4334],{},[333,4303,4304,4316,4318,4321,4323,4326,4328,4331],{},[336,4305,4306,4308],{},[339,4307,341],{},[333,4309,4310,4312,4314],{},[339,4311,346],{},[339,4313,349],{},[339,4315,349],{},[1004,4317,3784],{},[1018,4319,4320],{},"2.1",[1004,4322,3901],{"separator":361},[3789,4324,4325],{},"nA",[339,4327,2743],{"mathvariant":2742},[339,4329,4330],{},"μ",[3789,4332,4333],{},"m",[353,4335,4336],{"encoding":355},"I_{OFF}=2.1,\\text{nA}\u002F\\mu\\text{m}",[317,4338,4340,4404],{"className":4339,"ariaHidden":361},[360],[317,4341,4343,4346,4395,4398,4401],{"className":4342},[365],[317,4344],{"className":4345,"style":370},[369],[317,4347,4349,4352],{"className":4348},[374],[317,4350,341],{"className":4351,"style":379},[374,378],[317,4353,4355],{"className":4354},[383],[317,4356,4358,4387],{"className":4357},[387,388],[317,4359,4361,4384],{"className":4360},[392],[317,4362,4364],{"className":4363,"style":397},[396],[317,4365,4366,4369],{"style":400},[317,4367],{"className":4368,"style":405},[404],[317,4370,4372],{"className":4371},[409,410,411,412],[317,4373,4375,4378,4381],{"className":4374},[374,412],[317,4376,346],{"className":4377,"style":419},[374,378,412],[317,4379,349],{"className":4380,"style":423},[374,378,412],[317,4382,349],{"className":4383,"style":423},[374,378,412],[317,4385,431],{"className":4386},[430],[317,4388,4390],{"className":4389},[392],[317,4391,4393],{"className":4392,"style":438},[396],[317,4394],{},[317,4396],{"className":4397,"style":1094},[1093],[317,4399,3784],{"className":4400},[1098],[317,4402],{"className":4403,"style":1094},[1093],[317,4405,4407,4410,4413,4416,4419,4425,4428,4431],{"className":4406},[365],[317,4408],{"className":4409,"style":2768},[369],[317,4411,4320],{"className":4412},[374],[317,4414,3901],{"className":4415},[3972],[317,4417],{"className":4418,"style":1120},[1093],[317,4420,4422],{"className":4421},[374,3872],[317,4423,4325],{"className":4424},[374],[317,4426,2743],{"className":4427},[374],[317,4429,4330],{"className":4430},[374,378],[317,4432,4434],{"className":4433},[374,3872],[317,4435,4333],{"className":4436},[374],[299,4438,4439,4291,4558,4705],{},[317,4440,4442,4473],{"className":4441},[320],[317,4443,4445],{"className":4444},[324],[326,4446,4447],{"xmlns":328},[330,4448,4449,4470],{},[333,4450,4451,4461,4463,4466,4468],{},[336,4452,4453,4455],{},[339,4454,1034],{},[333,4456,4457,4459],{},[339,4458,577],{},[339,4460,2401],{},[1004,4462,3784],{},[1018,4464,4465],{},"20",[1004,4467,3901],{"separator":361},[3789,4469,3794],{},[353,4471,4472],{"encoding":355},"T_{Si}=20,\\text{nm}",[317,4474,4476,4537],{"className":4475,"ariaHidden":361},[360],[317,4477,4479,4482,4528,4531,4534],{"className":4478},[365],[317,4480],{"className":4481,"style":370},[369],[317,4483,4485,4488],{"className":4484},[374],[317,4486,1034],{"className":4487,"style":423},[374,378],[317,4489,4491],{"className":4490},[383],[317,4492,4494,4520],{"className":4493},[387,388],[317,4495,4497,4517],{"className":4496},[392],[317,4498,4500],{"className":4499,"style":397},[396],[317,4501,4502,4505],{"style":2434},[317,4503],{"className":4504,"style":405},[404],[317,4506,4508],{"className":4507},[409,410,411,412],[317,4509,4511,4514],{"className":4510},[374,412],[317,4512,577],{"className":4513,"style":624},[374,378,412],[317,4515,2401],{"className":4516},[374,378,412],[317,4518,431],{"className":4519},[430],[317,4521,4523],{"className":4522},[392],[317,4524,4526],{"className":4525,"style":438},[396],[317,4527],{},[317,4529],{"className":4530,"style":1094},[1093],[317,4532,3784],{"className":4533},[1098],[317,4535],{"className":4536,"style":1094},[1093],[317,4538,4540,4543,4546,4549,4552],{"className":4539},[365],[317,4541],{"className":4542,"style":4275},[369],[317,4544,4465],{"className":4545},[374],[317,4547,3901],{"className":4548},[3972],[317,4550],{"className":4551,"style":1120},[1093],[317,4553,4555],{"className":4554},[374,3872],[317,4556,3794],{"className":4557},[374],[317,4559,4561,4602],{"className":4560},[320],[317,4562,4564],{"className":4563},[324],[326,4565,4566],{"xmlns":328},[330,4567,4568,4599],{},[333,4569,4570,4582,4584,4587,4589,4591,4593,4595,4597],{},[336,4571,4572,4574],{},[339,4573,341],{},[333,4575,4576,4578,4580],{},[339,4577,346],{},[339,4579,349],{},[339,4581,349],{},[1004,4583,3784],{},[1018,4585,4586],{},"19",[1004,4588,3901],{"separator":361},[339,4590,4330],{},[3789,4592,3918],{},[339,4594,2743],{"mathvariant":2742},[339,4596,4330],{},[3789,4598,4333],{},[353,4600,4601],{"encoding":355},"I_{OFF}=19,\\mu\\text{A}\u002F\\mu\\text{m}",[317,4603,4605,4669],{"className":4604,"ariaHidden":361},[360],[317,4606,4608,4611,4660,4663,4666],{"className":4607},[365],[317,4609],{"className":4610,"style":370},[369],[317,4612,4614,4617],{"className":4613},[374],[317,4615,341],{"className":4616,"style":379},[374,378],[317,4618,4620],{"className":4619},[38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10nm 变到 20nm，关断漏电增大很多数量级。配合中间的彩色分布图可以理解为：体更厚时，源漏电场在体内更容易“拉通”一条泄漏通道（更像 bulk punch-through），栅就更难压住它；体更薄时，势垒被栅更强地控制，漏电路径被压缩\u002F切断。",[2872,4707,4709],{"id":4708},"double-gate-mosfet-structures-双栅多栅结构的动机与形态","Double-Gate MOSFET Structures ｜ 双栅\u002F多栅结构的动机与形态",[234,4711,4712],{},[245,4713],{"alt":247,"src":4714},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-29.png",[234,4716,4717],{},"当平面单栅越来越难压住短沟道效应时，结构上就走向“多面包围\u002F多栅控制”。",[234,4719,4720,4721,4805],{},"从 UTB\u002FSOI 往后走，思路其实很统一：沟道越短，漏端电场越容易“伸进来”拉低源端势垒（DIBL）→ ",[317,4722,4724,4747],{"className":4723},[320],[317,4725,4727],{"className":4726},[324],[326,4728,4729],{"xmlns":328},[330,4730,4731,4745],{},[333,4732,4733],{},[336,4734,4735,4737],{},[339,4736,341],{},[333,4738,4739,4741,4743],{},[339,4740,346],{},[339,4742,349],{},[339,4744,349],{},[353,4746,356],{"encoding":355},[317,4748,4750],{"className":4749,"ariaHidden":361},[360],[317,4751,4753,4756],{"className":4752},[365],[317,4754],{"className":4755,"style":370},[369],[317,4757,4759,4762],{"className":4758},[374],[317,4760,341],{"className":4761,"style":379},[374,378],[317,4763,4765],{"className":4764},[383],[317,4766,4768,4797],{"className":4767},[387,388],[317,4769,4771,4794],{"className":4770},[392],[317,4772,4774],{"className":4773,"style":397},[396],[317,4775,4776,4779],{"style":400},[317,4777],{"className":4778,"style":405},[404],[317,4780,4782],{"className":4781},[409,410,411,412],[317,4783,4785,4788,4791],{"className":4784},[374,412],[317,4786,346],{"className":4787,"style":419},[374,378,412],[317,4789,349],{"className":4790,"style":423},[374,378,412],[317,4792,349],{"className":4793,"style":423},[374,378,412],[317,4795,431],{"className":4796},[430],[317,4798,4800],{"className":4799},[392],[317,4801,4803],{"className":4802,"style":438},[396],[317,4804],{}," 上升；所以要把“栅对沟道电势的控制权”拿回来。做法就是让栅从更多方向包围沟道（double-gate \u002F tri-gate \u002F fin），把沟道做成“窄\u002F薄”的形状，让电势几乎完全由栅决定。",[2872,4807,4809],{"id":4808},"delta-mosfet1990fully-depleted-lean-channel-vertical-ultrathin-soi-mosfet","DELTA MOSFET（1990）｜Fully depleted lean-channel vertical ultrathin SOI MOSFET",[234,4811,4812],{},[245,4813],{"alt":247,"src":4814},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-12.png",[234,4816,4817],{},"这张是早期非常典型的“把沟道做薄 + 强栅控”的代表：在 SOI\u002F超薄硅体上做垂直结构（vertical），使器件处于 fully depleted（全耗尽）状态。",[2469,4819,4820,4868],{},[299,4821,4822,4823,4867],{},"实验里显示出很强的栅控：曲线给出的亚阈值区接近理想极限（图里标了约 ",[317,4824,4826,4846],{"className":4825},[320],[317,4827,4829],{"className":4828},[324],[326,4830,4831],{"xmlns":328},[330,4832,4833,4843],{},[333,4834,4835,4838,4840],{},[1018,4836,4837],{},"62",[3789,4839,3791],{},[3789,4841,4842],{},"mV\u002Fdec",[353,4844,4845],{"encoding":355},"62\\,\\text{mV\u002Fdec}",[317,4847,4849],{"className":4848,"ariaHidden":361},[360],[317,4850,4852,4855,4858,4861],{"className":4851},[365],[317,4853],{"className":4854,"style":2768},[369],[317,4856,4837],{"className":4857},[374],[317,4859],{"className":4860,"style":1120},[1093],[317,4862,4864],{"className":4863},[374,3872],[317,4865,4842],{"className":4866},[374]," 量级的 swing）。",[299,4869,4870,4871,4983,4984,5113,5114,5198,5199,5227],{},"当栅相关的几何尺寸 ",[317,4872,4874,4904],{"className":4873},[320],[317,4875,4877],{"className":4876},[324],[326,4878,4879],{"xmlns":328},[330,4880,4881,4901],{},[333,4882,4883,4890,4892,4895,4897,4899],{},[336,4884,4885,4888],{},[339,4886,4887],{},"W",[339,4889,1857],{},[1004,4891,3089],{},[1018,4893,4894],{},"0.3",[3789,4896,3791],{},[339,4898,4330],{},[3789,4900,4333],{},[353,4902,4903],{"encoding":355},"W_g\u003C0.3\\,\\mu\\text{m}",[317,4905,4907,4962],{"className":4906,"ariaHidden":361},[360],[317,4908,4910,4913,4953,4956,4959],{"className":4909},[365],[317,4911],{"className":4912,"style":763},[369],[317,4914,4916,4919],{"className":4915},[374],[317,4917,4887],{"className":4918,"style":423},[374,378],[317,4920,4922],{"className":4921},[383],[317,4923,4925,4945],{"className":4924},[387,388],[317,4926,4928,4942],{"className":4927},[392],[317,4929,4931],{"className":4930,"style":694},[396],[317,4932,4933,4936],{"style":2434},[317,4934],{"className":4935,"style":405},[404],[317,4937,4939],{"className":4938},[409,410,411,412],[317,4940,1857],{"className":4941,"style":1161},[374,378,412],[317,4943,431],{"className":4944},[430],[317,4946,4948],{"className":4947},[392],[317,4949,4951],{"className":4950,"style":812},[396],[317,4952],{},[317,4954],{"className":4955,"style":1094},[1093],[317,4957,3089],{"className":4958},[1098],[317,4960],{"className":4961,"style":1094},[1093],[317,4963,4965,4968,4971,4974,4977],{"className":4964},[365],[317,4966],{"className":4967,"style":4275},[369],[317,4969,4894],{"className":4970},[374],[317,4972],{"className":4973,"style":1120},[1093],[317,4975,4330],{"className":4976},[374,378],[317,4978,4980],{"className":4979},[374,3872],[317,4981,4333],{"className":4982},[374]," 时观察到更好的 gate control，并给了一个有效沟道长度 ",[317,4985,4987,5022],{"className":4986},[320],[317,4988,4990],{"className":4989},[324],[326,4991,4992],{"xmlns":328},[330,4993,4994,5019],{},[333,4995,4996,5008,5010,5013,5015,5017],{},[336,4997,4998,5000],{},[339,4999,1854],{},[333,5001,5002,5004,5006],{},[339,5003,748],{},[339,5005,1672],{},[339,5007,1672],{},[1004,5009,3784],{},[1018,5011,5012],{},"0.57",[1004,5014,3901],{"separator":361},[339,5016,4330],{},[3789,5018,4333],{},[353,5020,5021],{"encoding":355},"L_{eff}=0.57,\\mu\\text{m}",[317,5023,5025,5089],{"className":5024,"ariaHidden":361},[360],[317,5026,5028,5031,5080,5083,5086],{"className":5027},[365],[317,5029],{"className":5030,"style":763},[369],[317,5032,5034,5037],{"className":5033},[374],[317,5035,1854],{"className":5036},[374,378],[317,5038,5040],{"className":5039},[383],[317,5041,5043,5072],{"className":5042},[387,388],[317,5044,5046,5069],{"className":5045},[392],[317,5047,5049],{"className":5048,"style":782},[396],[317,5050,5051,5054],{"style":1890},[317,5052],{"className":5053,"style":405},[404],[317,5055,5057],{"className":5056},[409,410,411,412],[317,5058,5060,5063,5066],{"className":5059},[374,412],[317,5061,748],{"className":5062},[374,378,412],[317,5064,1672],{"className":5065,"style":1722},[374,378,412],[317,5067,1672],{"className":5068,"style":1722},[374,378,412],[317,5070,431],{"className":5071},[430],[317,5073,5075],{"className":5074},[392],[317,5076,5078],{"className":5077,"style":812},[396],[317,5079],{},[317,5081],{"className":5082,"style":1094},[1093],[317,5084,3784],{"className":5085},[1098],[317,5087],{"className":5088,"style":1094},[1093],[317,5090,5092,5095,5098,5101,5104,5107],{"className":5091},[365],[317,5093],{"className":5094,"style":4275},[369],[317,5096,5012],{"className":5097},[374],[317,5099,3901],{"className":5100},[3972],[317,5102],{"className":5103,"style":1120},[1093],[317,5105,4330],{"className":5106},[374,378],[317,5108,5110],{"className":5109},[374,3872],[317,5111,4333],{"className":5112},[374],"。\n把“硅体\u002F沟道”做得更细、更薄 → 泄漏通道更难在体内形成 → 栅更容易压住势垒 → ",[317,5115,5117,5140],{"className":5116},[320],[317,5118,5120],{"className":5119},[324],[326,5121,5122],{"xmlns":328},[330,5123,5124,5138],{},[333,5125,5126],{},[336,5127,5128,5130],{},[339,5129,341],{},[333,5131,5132,5134,5136],{},[339,5133,346],{},[339,5135,349],{},[339,5137,349],{},[353,5139,356],{"encoding":355},[317,5141,5143],{"className":5142,"ariaHidden":361},[360],[317,5144,5146,5149],{"className":5145},[365],[317,5147],{"className":5148,"style":370},[369],[317,5150,5152,5155],{"className":5151},[374],[317,5153,341],{"className":5154,"style":379},[374,378],[317,5156,5158],{"className":5157},[383],[317,5159,5161,5190],{"className":5160},[387,388],[317,5162,5164,5187],{"className":5163},[392],[317,5165,5167],{"className":5166,"style":397},[396],[317,5168,5169,5172],{"style":400},[317,5170],{"className":5171,"style":405},[404],[317,5173,5175],{"className":5174},[409,410,411,412],[317,5176,5178,5181,5184],{"className":5177},[374,412],[317,5179,346],{"className":5180,"style":419},[374,378,412],[317,5182,349],{"className":5183,"style":423},[374,378,412],[317,5185,349],{"className":5186,"style":423},[374,378,412],[317,5188,431],{"className":5189},[430],[317,5191,5193],{"className":5192},[392],[317,5194,5196],{"className":5195,"style":438},[396],[317,5197],{}," 下降、",[317,5200,5202,5215],{"className":5201},[320],[317,5203,5205],{"className":5204},[324],[326,5206,5207],{"xmlns":328},[330,5208,5209,5213],{},[333,5210,5211],{},[339,5212,577],{},[353,5214,577],{"encoding":355},[317,5216,5218],{"className":5217,"ariaHidden":361},[360],[317,5219,5221,5224],{"className":5220},[365],[317,5222],{"className":5223,"style":1086},[369],[317,5225,577],{"className":5226,"style":624},[374,378]," 更小。",[2872,5229,5231],{"id":5230},"double-gate-finfetself-aligned-gates-straddle-narrow-silicon-fin","Double-Gate FinFET｜Self-aligned gates straddle narrow silicon fin",[234,5233,5234],{},[245,5235],{"alt":247,"src":5236},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-15.png",[234,5238,5239,2970],{},[252,5240,5241],{},"FinFET：把沟道做成一片很窄的 “fin”，然后让两侧的 gate 把它夹住（double-gate）",[2469,5243,5244,5250,5253],{},[299,5245,5246,5249],{},[252,5247,5248],{},"Self-aligned gates straddle narrow silicon fin","：强调 gate 和 fin 的对准是 self-aligned 的，这对短沟道电学以及可制造性很关键。",[299,5251,5252],{},"电流方向仍然是平行于晶圆表面（source → drain），只是沟道的横截面从“平面”变成“立起来的一片 fin”",[299,5254,5255,5256,5325,5326,5410,5411,5494,5495,5586,5587,5671],{},"图里标了几何参数：",[317,5257,5259,5276],{"className":5258},[320],[317,5260,5262],{"className":5261},[324],[326,5263,5264],{"xmlns":328},[330,5265,5266,5274],{},[333,5267,5268],{},[336,5269,5270,5272],{},[339,5271,1854],{},[339,5273,1857],{},[353,5275,1860],{"encoding":355},[317,5277,5279],{"className":5278,"ariaHidden":361},[360],[317,5280,5282,5285],{"className":5281},[365],[317,5283],{"className":5284,"style":763},[369],[317,5286,5288,5291],{"className":5287},[374],[317,5289,1854],{"className":5290},[374,378],[317,5292,5294],{"className":5293},[383],[317,5295,5297,5317],{"className":5296},[387,388],[317,5298,5300,5314],{"className":5299},[392],[317,5301,5303],{"className":5302,"style":694},[396],[317,5304,5305,5308],{"style":1890},[317,5306],{"className":5307,"style":405},[404],[317,5309,5311],{"className":5310},[409,410,411,412],[317,5312,1857],{"className":5313,"style":1161},[374,378,412],[317,5315,431],{"className":5316},[430],[317,5318,5320],{"className":5319},[392],[317,5321,5323],{"className":5322,"style":812},[396],[317,5324],{},"（栅长）、",[317,5327,5329,5354],{"className":5328},[320],[317,5330,5332],{"className":5331},[324],[326,5333,5334],{"xmlns":328},[330,5335,5336,5351],{},[333,5337,5338],{},[336,5339,5340,5342],{},[339,5341,4887],{},[333,5343,5344,5346,5348],{},[339,5345,1672],{},[339,5347,2401],{},[339,5349,5350],{},"n",[353,5352,5353],{"encoding":355},"W_{fin}",[317,5355,5357],{"className":5356,"ariaHidden":361},[360],[317,5358,5360,5363],{"className":5359},[365],[317,5361],{"className":5362,"style":763},[369],[317,5364,5366,5369],{"className":5365},[374],[317,5367,4887],{"className":5368,"style":423},[374,378],[317,5370,5372],{"className":5371},[383],[317,5373,5375,5402],{"className":5374},[387,388],[317,5376,5378,5399],{"className":5377},[392],[317,5379,5381],{"className":5380,"style":782},[396],[317,5382,5383,5386],{"style":2434},[317,5384],{"className":5385,"style":405},[404],[317,5387,5389],{"className":5388},[409,410,411,412],[317,5390,5392,5395],{"className":5391},[374,412],[317,5393,1672],{"className":5394,"style":1722},[374,378,412],[317,5396,5398],{"className":5397},[374,378,412],"in",[317,5400,431],{"className":5401},[430],[317,5403,5405],{"className":5404},[392],[317,5406,5408],{"className":5407,"style":812},[396],[317,5409],{},"（fin 宽）、",[317,5412,5414,5438],{"className":5413},[320],[317,5415,5417],{"className":5416},[324],[326,5418,5419],{"xmlns":328},[330,5420,5421,5435],{},[333,5422,5423],{},[336,5424,5425,5427],{},[339,5426,2104],{},[333,5428,5429,5431,5433],{},[339,5430,1672],{},[339,5432,2401],{},[339,5434,5350],{},[353,5436,5437],{"encoding":355},"H_{fin}",[317,5439,5441],{"className":5440,"ariaHidden":361},[360],[317,5442,5444,5447],{"className":5443},[365],[317,5445],{"className":5446,"style":763},[369],[317,5448,5450,5453],{"className":5449},[374],[317,5451,2104],{"className":5452,"style":2152},[374,378],[317,5454,5456],{"className":5455},[383],[317,5457,5459,5486],{"className":5458},[387,388],[317,5460,5462,5483],{"className":5461},[392],[317,5463,5465],{"className":5464,"style":782},[396],[317,5466,5468,5471],{"style":5467},"top:-2.55em;margin-left:-0.0813em;margin-right:0.05em;",[317,5469],{"className":5470,"style":405},[404],[317,5472,5474],{"className":5473},[409,410,411,412],[317,5475,5477,5480],{"className":5476},[374,412],[317,5478,1672],{"className":5479,"style":1722},[374,378,412],[317,5481,5398],{"className":5482},[374,378,412],[317,5484,431],{"className":5485},[430],[317,5487,5489],{"className":5488},[392],[317,5490,5492],{"className":5491,"style":812},[396],[317,5493],{},"（fin 高）。\nfin 越窄",[317,5496,5498,5524],{"className":5497},[320],[317,5499,5501],{"className":5500},[324],[326,5502,5503],{"xmlns":328},[330,5504,5505,5521],{},[333,5506,5507,5519],{},[336,5508,5509,5511],{},[339,5510,4887],{},[333,5512,5513,5515,5517],{},[339,5514,1672],{},[339,5516,2401],{},[339,5518,5350],{},[1004,5520,2271],{},[353,5522,5523],{"encoding":355},"W_{fin}\\downarrow",[317,5525,5527],{"className":5526,"ariaHidden":361},[360],[317,5528,5530,5534,5580,5583],{"className":5529},[365],[317,5531],{"className":5532,"style":5533},[369],"height:0.9805em;vertical-align:-0.2861em;",[317,5535,5537,5540],{"className":5536},[374],[317,5538,4887],{"className":5539,"style":423},[374,378],[317,5541,5543],{"className":5542},[383],[317,5544,5546,5572],{"className":5545},[387,388],[317,5547,5549,5569],{"className":5548},[392],[317,5550,5552],{"className":5551,"style":782},[396],[317,5553,5554,5557],{"style":2434},[317,5555],{"className":5556,"style":405},[404],[317,5558,5560],{"className":5559},[409,410,411,412],[317,5561,5563,5566],{"className":5562},[374,412],[317,5564,1672],{"className":5565,"style":1722},[374,378,412],[317,5567,5398],{"className":5568},[374,378,412],[317,5570,431],{"className":5571},[430],[317,5573,5575],{"className":5574},[392],[317,5576,5578],{"className":5577,"style":812},[396],[317,5579],{},[317,5581],{"className":5582,"style":1094},[1093],[317,5584,2271],{"className":5585},[1098],"，两侧 gate 越容易把整个沟道电势压住 → DIBL 变小 → ",[317,5588,5590,5613],{"className":5589},[320],[317,5591,5593],{"className":5592},[324],[326,5594,5595],{"xmlns":328},[330,5596,5597,5611],{},[333,5598,5599],{},[336,5600,5601,5603],{},[339,5602,341],{},[333,5604,5605,5607,5609],{},[339,5606,346],{},[339,5608,349],{},[339,5610,349],{},[353,5612,356],{"encoding":355},[317,5614,5616],{"className":5615,"ariaHidden":361},[360],[317,5617,5619,5622],{"className":5618},[365],[317,5620],{"className":5621,"style":370},[369],[317,5623,5625,5628],{"className":5624},[374],[317,5626,341],{"className":5627,"style":379},[374,378],[317,5629,5631],{"className":5630},[383],[317,5632,5634,5663],{"className":5633},[387,388],[317,5635,5637,5660],{"className":5636},[392],[317,5638,5640],{"className":5639,"style":397},[396],[317,5641,5642,5645],{"style":400},[317,5643],{"className":5644,"style":405},[404],[317,5646,5648],{"className":5647},[409,410,411,412],[317,5649,5651,5654,5657],{"className":5650},[374,412],[317,5652,346],{"className":5653,"style":419},[374,378,412],[317,5655,349],{"className":5656,"style":423},[374,378,412],[317,5658,349],{"className":5659,"style":423},[374,378,412],[317,5661,431],{"className":5662},[430],[317,5664,5666],{"className":5665},[392],[317,5667,5669],{"className":5668,"style":438},[396],[317,5670],{}," 变小。",[2872,5673,5675],{"id":5674},"_1998first-n-channel-finfetsfolded-channel-mosfet","1998：First N-channel FinFETs｜Folded-channel MOSFET",[234,5677,5678],{},[245,5679],{"alt":247,"src":5680},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-22.png",[234,5682,5683],{},"n-FinFET 的“第一次系统展示\u002F成型”：",[2469,5685,5686,6242],{},[299,5687,5688,5689,3876,5795,3876,5912,6030,6031,6160,6161,6241],{},"图里直接给了一个典型尺寸例子：",[317,5690,5692,5719],{"className":5691},[320],[317,5693,5695],{"className":5694},[324],[326,5696,5697],{"xmlns":328},[330,5698,5699,5716],{},[333,5700,5701,5707,5709,5712,5714],{},[336,5702,5703,5705],{},[339,5704,1854],{},[339,5706,1857],{},[1004,5708,3784],{},[1018,5710,5711],{},"30",[3789,5713,3791],{},[3789,5715,3794],{},[353,5717,5718],{"encoding":355},"L_g=30\\,\\text{nm}",[317,5720,5722,5777],{"className":5721,"ariaHidden":361},[360],[317,5723,5725,5728,5768,5771,5774],{"className":5724},[365],[317,5726],{"className":5727,"style":763},[369],[317,5729,5731,5734],{"className":5730},[374],[317,5732,1854],{"className":5733},[374,378],[317,5735,5737],{"className":5736},[383],[317,5738,5740,5760],{"className":5739},[387,388],[317,5741,5743,5757],{"className":5742},[392],[317,5744,5746],{"className":5745,"style":694},[396],[317,5747,5748,5751],{"style":1890},[317,5749],{"className":5750,"style":405},[404],[317,5752,5754],{"className":5753},[409,410,411,412],[317,5755,1857],{"className":5756,"style":1161},[374,378,412],[317,5758,431],{"className":5759},[430],[317,5761,5763],{"className":5762},[392],[317,5764,5766],{"className":5765,"style":812},[396],[317,5767],{},[317,5769],{"className":5770,"style":1094},[1093],[317,5772,3784],{"className":5773},[1098],[317,5775],{"className":5776,"style":1094},[1093],[317,5778,5780,5783,5786,5789],{"className":5779},[365],[317,5781],{"className":5782,"style":3862},[369],[317,5784,5711],{"className":5785},[374],[317,5787],{"className":5788,"style":1120},[1093],[317,5790,5792],{"className":5791},[374,3872],[317,5793,3794],{"className":5794},[374],[317,5796,5798,5830],{"className":5797},[320],[317,5799,5801],{"className":5800},[324],[326,5802,5803],{"xmlns":328},[330,5804,5805,5827],{},[333,5806,5807,5819,5821,5823,5825],{},[336,5808,5809,5811],{},[339,5810,4887],{},[333,5812,5813,5815,5817],{},[339,5814,1672],{},[339,5816,2401],{},[339,5818,5350],{},[1004,5820,3784],{},[1018,5822,4465],{},[3789,5824,3791],{},[3789,5826,3794],{},[353,5828,5829],{"encoding":355},"W_{fin}=20\\,\\text{nm}",[317,5831,5833,5894],{"className":5832,"ariaHidden":361},[360],[317,5834,5836,5839,5885,5888,5891],{"className":5835},[365],[317,5837],{"className":5838,"style":763},[369],[317,5840,5842,5845],{"className":5841},[374],[317,5843,4887],{"className":5844,"style":423},[374,378],[317,5846,5848],{"className":5847},[383],[317,5849,5851,5877],{"className":5850},[387,388],[317,5852,5854,5874],{"className":5853},[392],[317,5855,5857],{"className":5856,"style":782},[396],[317,5858,5859,5862],{"style":2434},[317,5860],{"className":5861,"style":405},[404],[317,5863,5865],{"className":5864},[409,410,411,412],[317,5866,5868,5871],{"className":5867},[374,412],[317,5869,1672],{"className":5870,"style":1722},[374,378,412],[317,5872,5398],{"className":5873},[374,378,412],[317,5875,431],{"className":5876},[430],[317,5878,5880],{"className":5879},[392],[317,5881,5883],{"className":5882,"style":812},[396],[317,5884],{},[317,5886],{"className":5887,"style":1094},[1093],[317,5889,3784],{"className":5890},[1098],[317,5892],{"className":5893,"style":1094},[1093],[317,5895,5897,5900,5903,5906],{"className":5896},[365],[317,5898],{"className":5899,"style":3862},[369],[317,5901,4465],{"className":5902},[374],[317,5904],{"className":5905,"style":1120},[1093],[317,5907,5909],{"className":5908},[374,3872],[317,5910,3794],{"className":5911},[374],[317,5913,5915,5948],{"className":5914},[320],[317,5916,5918],{"className":5917},[324],[326,5919,5920],{"xmlns":328},[330,5921,5922,5945],{},[333,5923,5924,5936,5938,5941,5943],{},[336,5925,5926,5928],{},[339,5927,2104],{},[333,5929,5930,5932,5934],{},[339,5931,1672],{},[339,5933,2401],{},[339,5935,5350],{},[1004,5937,3784],{},[1018,5939,5940],{},"50",[3789,5942,3791],{},[3789,5944,3794],{},[353,5946,5947],{"encoding":355},"H_{fin}=50\\,\\text{nm}",[317,5949,5951,6012],{"className":5950,"ariaHidden":361},[360],[317,5952,5954,5957,6003,6006,6009],{"className":5953},[365],[317,5955],{"className":5956,"style":763},[369],[317,5958,5960,5963],{"className":5959},[374],[317,5961,2104],{"className":5962,"style":2152},[374,378],[317,5964,5966],{"className":5965},[383],[317,5967,5969,5995],{"className":5968},[387,388],[317,5970,5972,5992],{"className":5971},[392],[317,5973,5975],{"className":5974,"style":782},[396],[317,5976,5977,5980],{"style":5467},[317,5978],{"className":5979,"style":405},[404],[317,5981,5983],{"className":5982},[409,410,411,412],[317,5984,5986,5989],{"className":5985},[374,412],[317,5987,1672],{"className":5988,"style":1722},[374,378,412],[317,5990,5398],{"className":5991},[374,378,412],[317,5993,431],{"className":5994},[430],[317,5996,5998],{"className":5997},[392],[317,5999,6001],{"className":6000,"style":812},[396],[317,6002],{},[317,6004],{"className":6005,"style":1094},[1093],[317,6007,3784],{"className":6008},[1098],[317,6010],{"className":6011,"style":1094},[1093],[317,6013,6015,6018,6021,6024],{"className":6014},[365],[317,6016],{"className":6017,"style":3862},[369],[317,6019,5940],{"className":6020},[374],[317,6022],{"className":6023,"style":1120},[1093],[317,6025,6027],{"className":6026},[374,3872],[317,6028,3794],{"className":6029},[374],"，并展示了 ",[317,6032,6034,6065],{"className":6033},[320],[317,6035,6037],{"className":6036},[324],[326,6038,6039],{"xmlns":328},[330,6040,6041,6062],{},[333,6042,6043,6049,6052],{},[336,6044,6045,6047],{},[339,6046,341],{},[339,6048,2185],{},[3789,6050,6051],{},"–",[336,6053,6054,6056],{},[339,6055,569],{},[333,6057,6058,6060],{},[339,6059,574],{},[339,6061,577],{},[353,6063,6064],{"encoding":355},"I_D–V_{GS}",[317,6066,6068],{"className":6067,"ariaHidden":361},[360],[317,6069,6071,6074,6114,6117],{"className":6070},[365],[317,6072],{"className":6073,"style":370},[369],[317,6075,6077,6080],{"className":6076},[374],[317,6078,341],{"className":6079,"style":379},[374,378],[317,6081,6083],{"className":6082},[383],[317,6084,6086,6106],{"className":6085},[387,388],[317,6087,6089,6103],{"className":6088},[392],[317,6090,6092],{"className":6091,"style":397},[396],[317,6093,6094,6097],{"style":400},[317,6095],{"className":6096,"style":405},[404],[317,6098,6100],{"className":6099},[409,410,411,412],[317,6101,2185],{"className":6102,"style":419},[374,378,412],[317,6104,431],{"className":6105},[430],[317,6107,6109],{"className":6108},[392],[317,6110,6112],{"className":6111,"style":438},[396],[317,6113],{},[317,6115,6051],{"className":6116},[374],[317,6118,6120,6123],{"className":6119},[374],[317,6121,569],{"className":6122,"style":596},[374,378],[317,6124,6126],{"className":6125},[383],[317,6127,6129,6152],{"className":6128},[387,388],[317,6130,6132,6149],{"className":6131},[392],[317,6133,6135],{"className":6134,"style":397},[396],[317,6136,6137,6140],{"style":611},[317,6138],{"className":6139,"style":405},[404],[317,6141,6143],{"className":6142},[409,410,411,412],[317,6144,6146],{"className":6145},[374,412],[317,6147,625],{"className":6148,"style":624},[374,378,412],[317,6150,431],{"className":6151},[430],[317,6153,6155],{"className":6154},[392],[317,6156,6158],{"className":6157,"style":438},[396],[317,6159],{},"（不同 ",[317,6162,6164,6186],{"className":6163},[320],[317,6165,6167],{"className":6166},[324],[326,6168,6169],{"xmlns":328},[330,6170,6171,6183],{},[333,6172,6173],{},[336,6174,6175,6177],{},[339,6176,569],{},[333,6178,6179,6181],{},[339,6180,2185],{},[339,6182,577],{},[353,6184,6185],{"encoding":355},"V_{DS}",[317,6187,6189],{"className":6188,"ariaHidden":361},[360],[317,6190,6192,6195],{"className":6191},[365],[317,6193],{"className":6194,"style":370},[369],[317,6196,6198,6201],{"className":6197},[374],[317,6199,569],{"className":6200,"style":596},[374,378],[317,6202,6204],{"className":6203},[383],[317,6205,6207,6233],{"className":6206},[387,388],[317,6208,6210,6230],{"className":6209},[392],[317,6211,6213],{"className":6212,"style":397},[396],[317,6214,6215,6218],{"style":611},[317,6216],{"className":6217,"style":405},[404],[317,6219,6221],{"className":6220},[409,410,411,412],[317,6222,6224,6227],{"className":6223},[374,412],[317,6225,2185],{"className":6226,"style":419},[374,378,412],[317,6228,577],{"className":6229,"style":624},[374,378,412],[317,6231,431],{"className":6232},[430],[317,6234,6236],{"className":6235},[392],[317,6237,6239],{"className":6238,"style":438},[396],[317,6240],{},"）和输出特性。",[299,6243,6244,6245,6314,6315,6358,6359],{},"器件做到 ",[317,6246,6248,6265],{"className":6247},[320],[317,6249,6251],{"className":6250},[324],[326,6252,6253],{"xmlns":328},[330,6254,6255,6263],{},[333,6256,6257],{},[336,6258,6259,6261],{},[339,6260,1854],{},[339,6262,1857],{},[353,6264,1860],{"encoding":355},[317,6266,6268],{"className":6267,"ariaHidden":361},[360],[317,6269,6271,6274],{"className":6270},[365],[317,6272],{"className":6273,"style":763},[369],[317,6275,6277,6280],{"className":6276},[374],[317,6278,1854],{"className":6279},[374,378],[317,6281,6283],{"className":6282},[383],[317,6284,6286,6306],{"className":6285},[387,388],[317,6287,6289,6303],{"className":6288},[392],[317,6290,6292],{"className":6291,"style":694},[396],[317,6293,6294,6297],{"style":1890},[317,6295],{"className":6296,"style":405},[404],[317,6298,6300],{"className":6299},[409,410,411,412],[317,6301,1857],{"className":6302,"style":1161},[374,378,412],[317,6304,431],{"className":6305},[430],[317,6307,6309],{"className":6308},[392],[317,6310,6312],{"className":6311,"style":812},[396],[317,6313],{}," down to ",[317,6316,6318,6337],{"className":6317},[320],[317,6319,6321],{"className":6320},[324],[326,6322,6323],{"xmlns":328},[330,6324,6325,6334],{},[333,6326,6327,6330,6332],{},[1018,6328,6329],{},"17",[3789,6331,3791],{},[3789,6333,3794],{},[353,6335,6336],{"encoding":355},"17\\,\\text{nm}",[317,6338,6340],{"className":6339,"ariaHidden":361},[360],[317,6341,6343,6346,6349,6352],{"className":6342},[365],[317,6344],{"className":6345,"style":3862},[369],[317,6347,6329],{"className":6348},[374],[317,6350],{"className":6351,"style":1120},[1093],[317,6353,6355],{"className":6354},[374,3872],[317,6356,3794],{"className":6357},[374]," 也能成功制备。\n",[289,6360,6361],{},[252,6362,6363],{},"FinFET 的“窄沟道 + 双侧栅控”让深亚微米（deep-sub-tenth micron）时代仍然能维持可用的栅控与漏电水平。",[2872,6365,6367],{"id":6366},"_1999-first-p-channel-finfetspmos-finfet","1999: First P-channel FinFETs｜PMOS FinFET",[234,6369,6370],{},[245,6371],{"alt":247,"src":6372},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-31.png",[234,6374,6375],{},"这页对应 p-FinFET：补齐 CMOS 的另一半。",[2469,6377,6378,6721],{},[299,6379,6380,6381,3876,6487,3876,6605,2970],{},"例子尺寸：",[317,6382,6384,6411],{"className":6383},[320],[317,6385,6387],{"className":6386},[324],[326,6388,6389],{"xmlns":328},[330,6390,6391,6408],{},[333,6392,6393,6399,6401,6404,6406],{},[336,6394,6395,6397],{},[339,6396,1854],{},[339,6398,1857],{},[1004,6400,3784],{},[1018,6402,6403],{},"18",[3789,6405,3791],{},[3789,6407,3794],{},[353,6409,6410],{"encoding":355},"L_g=18\\,\\text{nm}",[317,6412,6414,6469],{"className":6413,"ariaHidden":361},[360],[317,6415,6417,6420,6460,6463,6466],{"className":6416},[365],[317,6418],{"className":6419,"style":763},[369],[317,6421,6423,6426],{"className":6422},[374],[317,6424,1854],{"className":6425},[374,378],[317,6427,6429],{"className":6428},[383],[317,6430,6432,6452],{"className":6431},[387,388],[317,6433,6435,6449],{"className":6434},[392],[317,6436,6438],{"className":6437,"style":694},[396],[317,6439,6440,6443],{"style":1890},[317,6441],{"className":6442,"style":405},[404],[317,6444,6446],{"className":6445},[409,410,411,412],[317,6447,1857],{"className":6448,"style":1161},[374,378,412],[317,6450,431],{"className":6451},[430],[317,6453,6455],{"className":6454},[392],[317,6456,6458],{"className":6457,"style":812},[396],[317,6459],{},[317,6461],{"className":6462,"style":1094},[1093],[317,6464,3784],{"className":6465},[1098],[317,6467],{"className":6468,"style":1094},[1093],[317,6470,6472,6475,6478,6481],{"className":6471},[365],[317,6473],{"className":6474,"style":3862},[369],[317,6476,6403],{"className":6477},[374],[317,6479],{"className":6480,"style":1120},[1093],[317,6482,6484],{"className":6483},[374,3872],[317,6485,3794],{"className":6486},[374],[317,6488,6490,6523],{"className":6489},[320],[317,6491,6493],{"className":6492},[324],[326,6494,6495],{"xmlns":328},[330,6496,6497,6520],{},[333,6498,6499,6511,6513,6516,6518],{},[336,6500,6501,6503],{},[339,6502,4887],{},[333,6504,6505,6507,6509],{},[339,6506,1672],{},[339,6508,2401],{},[339,6510,5350],{},[1004,6512,3784],{},[1018,6514,6515],{},"15",[3789,6517,3791],{},[3789,6519,3794],{},[353,6521,6522],{"encoding":355},"W_{fin}=15\\,\\text{nm}",[317,6524,6526,6587],{"className":6525,"ariaHidden":361},[360],[317,6527,6529,6532,6578,6581,6584],{"className":6528},[365],[317,6530],{"className":6531,"style":763},[369],[317,6533,6535,6538],{"className":6534},[374],[317,6536,4887],{"className":6537,"style":423},[374,378],[317,6539,6541],{"className":6540},[383],[317,6542,6544,6570],{"className":6543},[387,388],[317,6545,6547,6567],{"className":6546},[392],[317,6548,6550],{"className":6549,"style":782},[396],[317,6551,6552,6555],{"style":2434},[317,6553],{"className":6554,"style":405},[404],[317,6556,6558],{"className":6557},[409,410,411,412],[317,6559,6561,6564],{"className":6560},[374,412],[317,6562,1672],{"className":6563,"style":1722},[374,378,412],[317,6565,5398],{"className":6566},[374,378,412],[317,6568,431],{"className":6569},[430],[317,6571,6573],{"className":6572},[392],[317,6574,6576],{"className":6575,"style":812},[396],[317,6577],{},[317,6579],{"className":6580,"style":1094},[1093],[317,6582,3784],{"className":6583},[1098],[317,6585],{"className":6586,"style":1094},[1093],[317,6588,6590,6593,6596,6599],{"className":6589},[365],[317,6591],{"className":6592,"style":3862},[369],[317,6594,6515],{"className":6595},[374],[317,6597],{"className":6598,"style":1120},[1093],[317,6600,6602],{"className":6601},[374,3872],[317,6603,3794],{"className":6604},[374],[317,6606,6608,6639],{"className":6607},[320],[317,6609,6611],{"className":6610},[324],[326,6612,6613],{"xmlns":328},[330,6614,6615,6637],{},[333,6616,6617,6629,6631,6633,6635],{},[336,6618,6619,6621],{},[339,6620,2104],{},[333,6622,6623,6625,6627],{},[339,6624,1672],{},[339,6626,2401],{},[339,6628,5350],{},[1004,6630,3784],{},[1018,6632,5940],{},[3789,6634,3791],{},[3789,6636,3794],{},[353,6638,5947],{"encoding":355},[317,6640,6642,6703],{"className":6641,"ariaHidden":361},[360],[317,6643,6645,6648,6694,6697,6700],{"className":6644},[365],[317,6646],{"className":6647,"style":763},[369],[317,6649,6651,6654],{"className":6650},[374],[317,6652,2104],{"className":6653,"style":2152},[374,378],[317,6655,6657],{"className":6656},[383],[317,6658,6660,6686],{"className":6659},[387,388],[317,6661,6663,6683],{"className":6662},[392],[317,6664,6666],{"className":6665,"style":782},[396],[317,6667,6668,6671],{"style":5467},[317,6669],{"className":6670,"style":405},[404],[317,6672,6674],{"className":6673},[409,410,411,412],[317,6675,6677,6680],{"className":6676},[374,412],[317,6678,1672],{"className":6679,"style":1722},[374,378,412],[317,6681,5398],{"className":6682},[374,378,412],[317,6684,431],{"className":6685},[430],[317,6687,6689],{"className":6688},[392],[317,6690,6692],{"className":6691,"style":812},[396],[317,6693],{},[317,6695],{"className":6696,"style":1094},[1093],[317,6698,3784],{"className":6699},[1098],[317,6701],{"className":6702,"style":1094},[1093],[317,6704,6706,6709,6712,6715],{"className":6705},[365],[317,6707],{"className":6708,"style":3862},[369],[317,6710,5940],{"className":6711},[374],[317,6713],{"className":6714,"style":1120},[1093],[317,6716,6718],{"className":6717},[374,3872],[317,6719,3794],{"className":6720},[374],[299,6722,6723,6724,6794,6795,6051,6865,6935],{},"右侧曲线展示 pMOS 在不同 ",[317,6725,6727,6745],{"className":6726},[320],[317,6728,6730],{"className":6729},[324],[326,6731,6732],{"xmlns":328},[330,6733,6734,6742],{},[333,6735,6736],{},[336,6737,6738,6740],{},[339,6739,569],{},[339,6741,2185],{},[353,6743,6744],{"encoding":355},"V_D",[317,6746,6748],{"className":6747,"ariaHidden":361},[360],[317,6749,6751,6754],{"className":6750},[365],[317,6752],{"className":6753,"style":370},[369],[317,6755,6757,6760],{"className":6756},[374],[317,6758,569],{"className":6759,"style":596},[374,378],[317,6761,6763],{"className":6762},[383],[317,6764,6766,6786],{"className":6765},[387,388],[317,6767,6769,6783],{"className":6768},[392],[317,6770,6772],{"className":6771,"style":397},[396],[317,6773,6774,6777],{"style":611},[317,6775],{"className":6776,"style":405},[404],[317,6778,6780],{"className":6779},[409,410,411,412],[317,6781,2185],{"className":6782,"style":419},[374,378,412],[317,6784,431],{"className":6785},[430],[317,6787,6789],{"className":6788},[392],[317,6790,6792],{"className":6791,"style":438},[396],[317,6793],{}," 下的 ",[317,6796,6798,6816],{"className":6797},[320],[317,6799,6801],{"className":6800},[324],[326,6802,6803],{"xmlns":328},[330,6804,6805,6813],{},[333,6806,6807],{},[336,6808,6809,6811],{},[339,6810,341],{},[339,6812,2185],{},[353,6814,6815],{"encoding":355},"I_D",[317,6817,6819],{"className":6818,"ariaHidden":361},[360],[317,6820,6822,6825],{"className":6821},[365],[317,6823],{"className":6824,"style":370},[369],[317,6826,6828,6831],{"className":6827},[374],[317,6829,341],{"className":6830,"style":379},[374,378],[317,6832,6834],{"className":6833},[383],[317,6835,6837,6857],{"className":6836},[387,388],[317,6838,6840,6854],{"className":6839},[392],[317,6841,6843],{"className":6842,"style":397},[396],[317,6844,6845,6848],{"style":400},[317,6846],{"className":6847,"style":405},[404],[317,6849,6851],{"className":6850},[409,410,411,412],[317,6852,2185],{"className":6853,"style":419},[374,378,412],[317,6855,431],{"className":6856},[430],[317,6858,6860],{"className":6859},[392],[317,6861,6863],{"className":6862,"style":438},[396],[317,6864],{},[317,6866,6868,6886],{"className":6867},[320],[317,6869,6871],{"className":6870},[324],[326,6872,6873],{"xmlns":328},[330,6874,6875,6883],{},[333,6876,6877],{},[336,6878,6879,6881],{},[339,6880,569],{},[339,6882,574],{},[353,6884,6885],{"encoding":355},"V_G",[317,6887,6889],{"className":6888,"ariaHidden":361},[360],[317,6890,6892,6895],{"className":6891},[365],[317,6893],{"className":6894,"style":370},[369],[317,6896,6898,6901],{"className":6897},[374],[317,6899,569],{"className":6900,"style":596},[374,378],[317,6902,6904],{"className":6903},[383],[317,6905,6907,6927],{"className":6906},[387,388],[317,6908,6910,6924],{"className":6909},[392],[317,6911,6913],{"className":6912,"style":397},[396],[317,6914,6915,6918],{"style":611},[317,6916],{"className":6917,"style":405},[404],[317,6919,6921],{"className":6920},[409,410,411,412],[317,6922,574],{"className":6923},[374,378,412],[317,6925,431],{"className":6926},[430],[317,6928,6930],{"className":6929},[392],[317,6931,6933],{"className":6932,"style":438},[396],[317,6934],{}," 和输出特性，说明 p 端也能用 fin 结构把短沟道效应压住。\n叙事上：1998 做出 n，1999 做出 p，才意味着 “FinFET 结构能支撑 CMOS”。",[2872,6937,6939],{"id":6938},"finfet-structuresgate-last-vs-gate-first-process-flow","FinFET structures｜Gate-last vs Gate-first process flow",[234,6941,6942],{},[245,6943],{"alt":247,"src":6944},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-32.png",[234,6946,6947],{},"两种不同的几何结构——后者是改良版本：",[2469,6949,6950,6953],{},[299,6951,6952],{},"Original：Gate-last",[299,6954,6955],{},"Improved：Gate-first",[2872,6957,6959],{"id":6958},"sub-lithographic-fin-patterningspacer-lithographysit-sadp","Sub-lithographic Fin Patterning｜Spacer Lithography（SIT \u002F SADP）",[234,6961,6962],{},[245,6963],{"alt":247,"src":6964},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-19.png",[234,6966,6967],{},"Fin 要非常窄，但光刻本身可能达不到这么细，所以用 spacer 来“倍频\u002F缩小”。流程就是典型的 Sidewall Image Transfer \u002F Self-Aligned Double Patterning：",[296,6969,6970,6973,7181,7184],{},[299,6971,6972],{},"先沉积并图形化 sacrificial layer（牺牲层）",[299,6974,6975,6976,7058,7059,2337],{},"再沉积 mask layer（比如 ",[317,6977,6979,7001],{"className":6978},[320],[317,6980,6982],{"className":6981},[324],[326,6983,6984],{"xmlns":328},[330,6985,6986,6998],{},[333,6987,6988,6990,6992],{},[339,6989,577],{},[339,6991,2401],{},[336,6993,6994,6996],{},[339,6995,346],{},[1018,6997,3320],{},[353,6999,7000],{"encoding":355},"SiO_2",[317,7002,7004],{"className":7003,"ariaHidden":361},[360],[317,7005,7007,7010,7013,7016],{"className":7006},[365],[317,7008],{"className":7009,"style":370},[369],[317,7011,577],{"className":7012,"style":624},[374,378],[317,7014,2401],{"className":7015},[374,378],[317,7017,7019,7022],{"className":7018},[374],[317,7020,346],{"className":7021,"style":419},[374,378],[317,7023,7025],{"className":7024},[383],[317,7026,7028,7050],{"className":7027},[387,388],[317,7029,7031,7047],{"className":7030},[392],[317,7032,7035],{"className":7033,"style":7034},[396],"height:0.3011em;",[317,7036,7038,7041],{"style":7037},"top:-2.55em;margin-left:-0.0278em;margin-right:0.05em;",[317,7039],{"className":7040,"style":405},[404],[317,7042,7044],{"className":7043},[409,410,411,412],[317,7045,3320],{"className":7046},[374,412],[317,7048,431],{"className":7049},[430],[317,7051,7053],{"className":7052},[392],[317,7054,7056],{"className":7055,"style":438},[396],[317,7057],{}," 或 ",[317,7060,7062,7088],{"className":7061},[320],[317,7063,7065],{"className":7064},[324],[326,7066,7067],{"xmlns":328},[330,7068,7069,7085],{},[333,7070,7071,7073,7079],{},[339,7072,577],{},[336,7074,7075,7077],{},[339,7076,2401],{},[1018,7078,3323],{},[336,7080,7081,7083],{},[339,7082,468],{},[1018,7084,3096],{},[353,7086,7087],{"encoding":355},"Si_3N_4",[317,7089,7091],{"className":7090,"ariaHidden":361},[360],[317,7092,7094,7097,7100,7140],{"className":7093},[365],[317,7095],{"className":7096,"style":370},[369],[317,7098,577],{"className":7099,"style":624},[374,378],[317,7101,7103,7106],{"className":7102},[374],[317,7104,2401],{"className":7105},[374,378],[317,7107,7109],{"className":7108},[383],[317,7110,7112,7132],{"className":7111},[387,388],[317,7113,7115,7129],{"className":7114},[392],[317,7116,7118],{"className":7117,"style":7034},[396],[317,7119,7120,7123],{"style":1890},[317,7121],{"className":7122,"style":405},[404],[317,7124,7126],{"className":7125},[409,410,411,412],[317,7127,3323],{"className":7128},[374,412],[317,7130,431],{"className":7131},[430],[317,7133,7135],{"className":7134},[392],[317,7136,7138],{"className":7137,"style":438},[396],[317,7139],{},[317,7141,7143,7146],{"className":7142},[374],[317,7144,468],{"className":7145,"style":516},[374,378],[317,7147,7149],{"className":7148},[383],[317,7150,7152,7173],{"className":7151},[387,388],[317,7153,7155,7170],{"className":7154},[392],[317,7156,7158],{"className":7157,"style":7034},[396],[317,7159,7161,7164],{"style":7160},"top:-2.55em;margin-left:-0.109em;margin-right:0.05em;",[317,7162],{"className":7163,"style":405},[404],[317,7165,7167],{"className":7166},[409,410,411,412],[317,7168,3096],{"className":7169},[374,412],[317,7171,431],{"className":7172},[430],[317,7174,7176],{"className":7175},[392],[317,7177,7179],{"className":7178,"style":438},[396],[317,7180],{},[299,7182,7183],{},"回刻（etch back）把 mask 变成侧墙 spacers",[299,7185,7186,7187],{},"去掉 sacrificial layer，用 spacers 去刻 SOI 层形成 fins\n",[252,7188,7189],{},"Fin pitch 是 patterned layer 的一半 → 直觉上就是“间距倍频”，让你用较粗的光刻先做一个模板，再靠 spacer 生成更密、更细的 fin 阵列。",[2872,7191,7193],{"id":7192},"_200210-nm-finfetsat-amd-optical-lithography","2002：10 nm FinFETs（at AMD, optical lithography）",[234,7195,7196],{},[245,7197],{"alt":247,"src":7198},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-21.png",[234,7200,7201,7202,7271,7272,7314],{},"FinFET 早期已经把 ",[317,7203,7205,7222],{"className":7204},[320],[317,7206,7208],{"className":7207},[324],[326,7209,7210],{"xmlns":328},[330,7211,7212,7220],{},[333,7213,7214],{},[336,7215,7216,7218],{},[339,7217,1854],{},[339,7219,1857],{},[353,7221,1860],{"encoding":355},[317,7223,7225],{"className":7224,"ariaHidden":361},[360],[317,7226,7228,7231],{"className":7227},[365],[317,7229],{"className":7230,"style":763},[369],[317,7232,7234,7237],{"className":7233},[374],[317,7235,1854],{"className":7236},[374,378],[317,7238,7240],{"className":7239},[383],[317,7241,7243,7263],{"className":7242},[387,388],[317,7244,7246,7260],{"className":7245},[392],[317,7247,7249],{"className":7248,"style":694},[396],[317,7250,7251,7254],{"style":1890},[317,7252],{"className":7253,"style":405},[404],[317,7255,7257],{"className":7256},[409,410,411,412],[317,7258,1857],{"className":7259,"style":1161},[374,378,412],[317,7261,431],{"className":7262},[430],[317,7264,7266],{"className":7265},[392],[317,7267,7269],{"className":7268,"style":812},[396],[317,7270],{}," 推到 ",[317,7273,7275,7293],{"className":7274},[320],[317,7276,7278],{"className":7277},[324],[326,7279,7280],{"xmlns":328},[330,7281,7282,7290],{},[333,7283,7284,7286,7288],{},[1018,7285,1020],{},[3789,7287,3791],{},[3789,7289,3794],{},[353,7291,7292],{"encoding":355},"10\\,\\text{nm}",[317,7294,7296],{"className":7295,"ariaHidden":361},[360],[317,7297,7299,7302,7305,7308],{"className":7298},[365],[317,7300],{"className":7301,"style":3862},[369],[317,7303,1020],{"className":7304},[374],[317,7306],{"className":7307,"style":1120},[1093],[317,7309,7311],{"className":7310},[374,3872],[317,7312,3794],{"className":7313},[374]," 量级，并且给了 SEM\u002FTEM 和器件输出特性。",[2469,7316,7317,7320],{},[299,7318,7319],{},"右侧输出特性图把 p-FinFET 和 n-FinFET 放在一起，强调两极性都能工作并给出可观的驱动电流。",[299,7321,7322],{},"这些器件在 AMD 制作，并使用 optical lithography（结合前面 spacer\u002F图形转移等方法理解）",[231,7324,7325],{},[234,7326,7327],{},[252,7328,7329],{},"The first author is Bin Yu！！！！！",[234,7331,7332,2378,7335,2378,7404],{},[252,7333,7334],{},"在很短",[317,7336,7338,7355],{"className":7337},[320],[317,7339,7341],{"className":7340},[324],[326,7342,7343],{"xmlns":328},[330,7344,7345,7353],{},[333,7346,7347],{},[336,7348,7349,7351],{},[339,7350,1854],{},[339,7352,1857],{},[353,7354,1860],{"encoding":355},[317,7356,7358],{"className":7357,"ariaHidden":361},[360],[317,7359,7361,7364],{"className":7360},[365],[317,7362],{"className":7363,"style":763},[369],[317,7365,7367,7370],{"className":7366},[374],[317,7368,1854],{"className":7369},[374,378],[317,7371,7373],{"className":7372},[383],[317,7374,7376,7396],{"className":7375},[387,388],[317,7377,7379,7393],{"className":7378},[392],[317,7380,7382],{"className":7381,"style":694},[396],[317,7383,7384,7387],{"style":1890},[317,7385],{"className":7386,"style":405},[404],[317,7388,7390],{"className":7389},[409,410,411,412],[317,7391,1857],{"className":7392,"style":1161},[374,378,412],[317,7394,431],{"className":7395},[430],[317,7397,7399],{"className":7398},[392],[317,7400,7402],{"className":7401,"style":812},[396],[317,7403],{},[252,7405,7406],{},"下还能保持可用输出特性，背后依赖的就是多栅控带来的电势控制能力。",[2872,7408,7410],{"id":7409},"tri-gate-fetintel-2003","Tri-Gate FET（Intel, 2003）",[234,7412,7413],{},[245,7414],{"alt":247,"src":7415},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-09.png",[234,7417,7418],{},"Tri-gate 可以理解成：在 fin 的两侧 gate 之外，把 fin 顶部也纳入 gate 控制（等效三面包围）。",[2469,7420,7421,7974],{},[299,7422,7423,7424,3876,7530,3876,7648,7766,7767,6051,7836,6160,7905,6241],{},"图里给了一个示例几何：",[317,7425,7427,7454],{"className":7426},[320],[317,7428,7430],{"className":7429},[324],[326,7431,7432],{"xmlns":328},[330,7433,7434,7451],{},[333,7435,7436,7442,7444,7447,7449],{},[336,7437,7438,7440],{},[339,7439,1854],{},[339,7441,1857],{},[1004,7443,3784],{},[1018,7445,7446],{},"60",[3789,7448,3791],{},[3789,7450,3794],{},[353,7452,7453],{"encoding":355},"L_g=60\\,\\text{nm}",[317,7455,7457,7512],{"className":7456,"ariaHidden":361},[360],[317,7458,7460,7463,7503,7506,7509],{"className":7459},[365],[317,7461],{"className":7462,"style":763},[369],[317,7464,7466,7469],{"className":7465},[374],[317,7467,1854],{"className":7468},[374,378],[317,7470,7472],{"className":7471},[383],[317,7473,7475,7495],{"className":7474},[387,388],[317,7476,7478,7492],{"className":7477},[392],[317,7479,7481],{"className":7480,"style":694},[396],[317,7482,7483,7486],{"style":1890},[317,7484],{"className":7485,"style":405},[404],[317,7487,7489],{"className":7488},[409,410,411,412],[317,7490,1857],{"className":7491,"style":1161},[374,378,412],[317,7493,431],{"className":7494},[430],[317,7496,7498],{"className":7497},[392],[317,7499,7501],{"className":7500,"style":812},[396],[317,7502],{},[317,7504],{"className":7505,"style":1094},[1093],[317,7507,3784],{"className":7508},[1098],[317,7510],{"className":7511,"style":1094},[1093],[317,7513,7515,7518,7521,7524],{"className":7514},[365],[317,7516],{"className":7517,"style":3862},[369],[317,7519,7446],{"className":7520},[374],[317,7522],{"className":7523,"style":1120},[1093],[317,7525,7527],{"className":7526},[374,3872],[317,7528,3794],{"className":7529},[374],[317,7531,7533,7566],{"className":7532},[320],[317,7534,7536],{"className":7535},[324],[326,7537,7538],{"xmlns":328},[330,7539,7540,7563],{},[333,7541,7542,7554,7556,7559,7561],{},[336,7543,7544,7546],{},[339,7545,4887],{},[333,7547,7548,7550,7552],{},[339,7549,1672],{},[339,7551,2401],{},[339,7553,5350],{},[1004,7555,3784],{},[1018,7557,7558],{},"55",[3789,7560,3791],{},[3789,7562,3794],{},[353,7564,7565],{"encoding":355},"W_{fin}=55\\,\\text{nm}",[317,7567,7569,7630],{"className":7568,"ariaHidden":361},[360],[317,7570,7572,7575,7621,7624,7627],{"className":7571},[365],[317,7573],{"className":7574,"style":763},[369],[317,7576,7578,7581],{"className":7577},[374],[317,7579,4887],{"className":7580,"style":423},[374,378],[317,7582,7584],{"className":7583},[383],[317,7585,7587,7613],{"className":7586},[387,388],[317,7588,7590,7610],{"className":7589},[392],[317,7591,7593],{"className":7592,"style":782},[396],[317,7594,7595,7598],{"style":2434},[317,7596],{"className":7597,"style":405},[404],[317,7599,7601],{"className":7600},[409,410,411,412],[317,7602,7604,7607],{"className":7603},[374,412],[317,7605,1672],{"className":7606,"style":1722},[374,378,412],[317,7608,5398],{"className":7609},[374,378,412],[317,7611,431],{"className":7612},[430],[317,7614,7616],{"className":7615},[392],[317,7617,7619],{"className":7618,"style":812},[396],[317,7620],{},[317,7622],{"className":7623,"style":1094},[1093],[317,7625,3784],{"className":7626},[1098],[317,7628],{"className":7629,"style":1094},[1093],[317,7631,7633,7636,7639,7642],{"className":7632},[365],[317,7634],{"className":7635,"style":3862},[369],[317,7637,7558],{"className":7638},[374],[317,7640],{"className":7641,"style":1120},[1093],[317,7643,7645],{"className":7644},[374,3872],[317,7646,3794],{"className":7647},[374],[317,7649,7651,7684],{"className":7650},[320],[317,7652,7654],{"className":7653},[324],[326,7655,7656],{"xmlns":328},[330,7657,7658,7681],{},[333,7659,7660,7672,7674,7677,7679],{},[336,7661,7662,7664],{},[339,7663,2104],{},[333,7665,7666,7668,7670],{},[339,7667,1672],{},[339,7669,2401],{},[339,7671,5350],{},[1004,7673,3784],{},[1018,7675,7676],{},"36",[3789,7678,3791],{},[3789,7680,3794],{},[353,7682,7683],{"encoding":355},"H_{fin}=36\\,\\text{nm}",[317,7685,7687,7748],{"className":7686,"ariaHidden":361},[360],[317,7688,7690,7693,7739,7742,7745],{"className":7689},[365],[317,7691],{"className":7692,"style":763},[369],[317,7694,7696,7699],{"className":7695},[374],[317,7697,2104],{"className":7698,"style":2152},[374,378],[317,7700,7702],{"className":7701},[383],[317,7703,7705,7731],{"className":7704},[387,388],[317,7706,7708,7728],{"className":7707},[392],[317,7709,7711],{"className":7710,"style":782},[396],[317,7712,7713,7716],{"style":5467},[317,7714],{"className":7715,"style":405},[404],[317,7717,7719],{"className":7718},[409,410,411,412],[317,7720,7722,7725],{"className":7721},[374,412],[317,7723,1672],{"className":7724,"style":1722},[374,378,412],[317,7726,5398],{"className":7727},[374,378,412],[317,7729,431],{"className":7730},[430],[317,7732,7734],{"className":7733},[392],[317,7735,7737],{"className":7736,"style":812},[396],[317,7738],{},[317,7740],{"className":7741,"style":1094},[1093],[317,7743,3784],{"className":7744},[1098],[317,7746],{"className":7747,"style":1094},[1093],[317,7749,7751,7754,7757,7760],{"className":7750},[365],[317,7752],{"className":7753,"style":3862},[369],[317,7755,7676],{"className":7756},[374],[317,7758],{"className":7759,"style":1120},[1093],[317,7761,7763],{"className":7762},[374,3872],[317,7764,3794],{"className":7765},[374],"，并展示了 pMOS\u002FnMOS 的 ",[317,7768,7770,7787],{"className":7769},[320],[317,7771,7773],{"className":7772},[324],[326,7774,7775],{"xmlns":328},[330,7776,7777,7785],{},[333,7778,7779],{},[336,7780,7781,7783],{},[339,7782,341],{},[339,7784,2185],{},[353,7786,6815],{"encoding":355},[317,7788,7790],{"className":7789,"ariaHidden":361},[360],[317,7791,7793,7796],{"className":7792},[365],[317,7794],{"className":7795,"style":370},[369],[317,7797,7799,7802],{"className":7798},[374],[317,7800,341],{"className":7801,"style":379},[374,378],[317,7803,7805],{"className":7804},[383],[317,7806,7808,7828],{"className":7807},[387,388],[317,7809,7811,7825],{"className":7810},[392],[317,7812,7814],{"className":7813,"style":397},[396],[317,7815,7816,7819],{"style":400},[317,7817],{"className":7818,"style":405},[404],[317,7820,7822],{"className":7821},[409,410,411,412],[317,7823,2185],{"className":7824,"style":419},[374,378,412],[317,7826,431],{"className":7827},[430],[317,7829,7831],{"className":7830},[392],[317,7832,7834],{"className":7833,"style":438},[396],[317,7835],{},[317,7837,7839,7856],{"className":7838},[320],[317,7840,7842],{"className":7841},[324],[326,7843,7844],{"xmlns":328},[330,7845,7846,7854],{},[333,7847,7848],{},[336,7849,7850,7852],{},[339,7851,569],{},[339,7853,574],{},[353,7855,6885],{"encoding":355},[317,7857,7859],{"className":7858,"ariaHidden":361},[360],[317,7860,7862,7865],{"className":7861},[365],[317,7863],{"className":7864,"style":370},[369],[317,7866,7868,7871],{"className":7867},[374],[317,7869,569],{"className":7870,"style":596},[374,378],[317,7872,7874],{"className":7873},[383],[317,7875,7877,7897],{"className":7876},[387,388],[317,7878,7880,7894],{"className":7879},[392],[317,7881,7883],{"className":7882,"style":397},[396],[317,7884,7885,7888],{"style":611},[317,7886],{"className":7887,"style":405},[404],[317,7889,7891],{"className":7890},[409,410,411,412],[317,7892,574],{"className":7893},[374,378,412],[317,7895,431],{"className":7896},[430],[317,7898,7900],{"className":7899},[392],[317,7901,7903],{"className":7902,"style":438},[396],[317,7904],{},[317,7906,7908,7925],{"className":7907},[320],[317,7909,7911],{"className":7910},[324],[326,7912,7913],{"xmlns":328},[330,7914,7915,7923],{},[333,7916,7917],{},[336,7918,7919,7921],{},[339,7920,569],{},[339,7922,2185],{},[353,7924,6744],{"encoding":355},[317,7926,7928],{"className":7927,"ariaHidden":361},[360],[317,7929,7931,7934],{"className":7930},[365],[317,7932],{"className":7933,"style":370},[369],[317,7935,7937,7940],{"className":7936},[374],[317,7938,569],{"className":7939,"style":596},[374,378],[317,7941,7943],{"className":7942},[383],[317,7944,7946,7966],{"className":7945},[387,388],[317,7947,7949,7963],{"className":7948},[392],[317,7950,7952],{"className":7951,"style":397},[396],[317,7953,7954,7957],{"style":611},[317,7955],{"className":7956,"style":405},[404],[317,7958,7960],{"className":7959},[409,410,411,412],[317,7961,2185],{"className":7962,"style":419},[374,378,412],[317,7964,431],{"className":7965},[430],[317,7967,7969],{"className":7968},[392],[317,7970,7972],{"className":7971,"style":438},[396],[317,7973],{},[299,7975,7976,7977,8061,8062,8141],{},"物理意义：更多表面被 gate 控制 → electrostatics 更强 → DIBL 更小、",[317,7978,7980,8003],{"className":7979},[320],[317,7981,7983],{"className":7982},[324],[326,7984,7985],{"xmlns":328},[330,7986,7987,8001],{},[333,7988,7989],{},[336,7990,7991,7993],{},[339,7992,341],{},[333,7994,7995,7997,7999],{},[339,7996,346],{},[339,7998,349],{},[339,8000,349],{},[353,8002,356],{"encoding":355},[317,8004,8006],{"className":8005,"ariaHidden":361},[360],[317,8007,8009,8012],{"className":8008},[365],[317,8010],{"className":8011,"style":370},[369],[317,8013,8015,8018],{"className":8014},[374],[317,8016,341],{"className":8017,"style":379},[374,378],[317,8019,8021],{"className":8020},[383],[317,8022,8024,8053],{"className":8023},[387,388],[317,8025,8027,8050],{"className":8026},[392],[317,8028,8030],{"className":8029,"style":397},[396],[317,8031,8032,8035],{"style":400},[317,8033],{"className":8034,"style":405},[404],[317,8036,8038],{"className":8037},[409,410,411,412],[317,8039,8041,8044,8047],{"className":8040},[374,412],[317,8042,346],{"className":8043,"style":419},[374,378,412],[317,8045,349],{"className":8046,"style":423},[374,378,412],[317,8048,349],{"className":8049,"style":423},[374,378,412],[317,8051,431],{"className":8052},[430],[317,8054,8056],{"className":8055},[392],[317,8057,8059],{"className":8058,"style":438},[396],[317,8060],{}," 更低；同时 ON 态时“可导电的界面\u002F截面”也更多 → ",[317,8063,8065,8086],{"className":8064},[320],[317,8066,8068],{"className":8067},[324],[326,8069,8070],{"xmlns":328},[330,8071,8072,8084],{},[333,8073,8074],{},[336,8075,8076,8078],{},[339,8077,341],{},[333,8079,8080,8082],{},[339,8081,346],{},[339,8083,468],{},[353,8085,471],{"encoding":355},[317,8087,8089],{"className":8088,"ariaHidden":361},[360],[317,8090,8092,8095],{"className":8091},[365],[317,8093],{"className":8094,"style":370},[369],[317,8096,8098,8101],{"className":8097},[374],[317,8099,341],{"className":8100,"style":379},[374,378],[317,8102,8104],{"className":8103},[383],[317,8105,8107,8133],{"className":8106},[387,388],[317,8108,8110,8130],{"className":8109},[392],[317,8111,8113],{"className":8112,"style":397},[396],[317,8114,8115,8118],{"style":400},[317,8116],{"className":8117,"style":405},[404],[317,8119,8121],{"className":8120},[409,410,411,412],[317,8122,8124,8127],{"className":8123},[374,412],[317,8125,346],{"className":8126,"style":419},[374,378,412],[317,8128,468],{"className":8129,"style":516},[374,378,412],[317,8131,431],{"className":8132},[430],[317,8134,8136],{"className":8135},[392],[317,8137,8139],{"className":8138,"style":438},[396],[317,8140],{}," 更有利。",[2872,8143,8145],{"id":8144},"double-gate-vs-tri-gate-fet-两者区别","Double-Gate vs. Tri-Gate FET ｜ 两者区别",[234,8147,8148],{},[245,8149],{"alt":247,"src":8150},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-24.png",[234,8152,8153],{},"比较两者的“工艺与寄生”：",[2469,8155,8156,8159],{},[299,8157,8158],{},"Double-Gate：不需要非常苛刻的 gate etch selective（因为有 protective dielectric hard mask），工艺窗口相对友好。",[299,8160,8161,8162],{},"Tri-Gate：fringing capacitance 的问题相对没那么糟，因为 fin 顶面也参与 ON 态导电；换句话说，DG 里顶面可能更多是“寄生电容”，而 tri-gate 里顶面变成“既有电容也有电流贡献”的有效部分。\n",[252,8163,8164],{},"DG 强在结构清晰、工艺可控；Tri-gate 强在更强的栅包围与更好的“把寄生变有效”的利用方式，适合继续 scaling。",[2872,8166,8168],{"id":8167},"bulk-finfet","Bulk FinFET",[234,8170,8171],{},[245,8172],{"alt":247,"src":8173},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-06.png",[234,8175,8176,8177,8180],{},"FinFET 不一定非要做在 SOI 上，也可以做在 ",[252,8178,8179],{},"体硅（bulk-Si）"," 晶圆上。这样做的核心动机是“更便宜、散热更好”，但为了抑制短沟道效应，需要在鳍底部做一些“止穿通\u002F止漏”的电势工程。",[2469,8182,8183,8194,8210],{},[299,8184,8185,8186],{},"FinFETs can be made on bulk-Si wafers\n",[2469,8187,8188,8191],{},[299,8189,8190],{},"✓ lower cost（不用 SOI 晶圆）",[299,8192,8193],{},"✓ improved thermal conduction（体硅导热更好，SOI 的 BOX 会更像“隔热层”）",[299,8195,8196,8197],{},"关键难点：bulk 下方不是 BOX 绝缘层，漏端电场更容易“钻到鳍底\u002F体区”去影响沟道\n",[2469,8198,8199],{},[299,8200,8201,8202,8205,8206,8209],{},"所以会用 ",[252,8203,8204],{},"SSRW（super-steep retrograde well）"," 或者 ",[252,8207,8208],{},"punch-through stopper","（在鳍底部做一层高掺杂\u002F势垒区）来阻断穿通与 DIBL",[299,8211,8212,8213,8282],{},"90 nm ",[317,8214,8216,8233],{"className":8215},[320],[317,8217,8219],{"className":8218},[324],[326,8220,8221],{"xmlns":328},[330,8222,8223,8231],{},[333,8224,8225],{},[336,8226,8227,8229],{},[339,8228,1854],{},[339,8230,1857],{},[353,8232,1860],{"encoding":355},[317,8234,8236],{"className":8235,"ariaHidden":361},[360],[317,8237,8239,8242],{"className":8238},[365],[317,8240],{"className":8241,"style":763},[369],[317,8243,8245,8248],{"className":8244},[374],[317,8246,1854],{"className":8247},[374,378],[317,8249,8251],{"className":8250},[383],[317,8252,8254,8274],{"className":8253},[387,388],[317,8255,8257,8271],{"className":8256},[392],[317,8258,8260],{"className":8259,"style":694},[396],[317,8261,8262,8265],{"style":1890},[317,8263],{"className":8264,"style":405},[404],[317,8266,8268],{"className":8267},[409,410,411,412],[317,8269,1857],{"className":8270,"style":1161},[374,378,412],[317,8272,431],{"className":8273},[430],[317,8275,8277],{"className":8276},[392],[317,8278,8280],{"className":8279,"style":812},[396],[317,8281],{}," 的 bulk FinFET 已经做出来，DIBL=25mV（说明短沟道控制确实可行）",[2872,8284,8286],{"id":8285},"fin-设计要考虑什么fin-design-considerations","Fin 设计要考虑什么｜Fin Design Considerations",[234,8288,8289],{},[245,8290],{"alt":247,"src":8291},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-05.png",[234,8293,8294,8295,8298],{},"FinFET 的",[252,8296,8297],{},"电学特性","很大程度由鳍的几何参数决定，尤其是宽度、⾼度、间距。",[2469,8300,8301,8479,8574],{},[299,8302,8303,8304,8385,8386],{},"Fin Width（鳍宽 ",[317,8305,8307,8330],{"className":8306},[320],[317,8308,8310],{"className":8309},[324],[326,8311,8312],{"xmlns":328},[330,8313,8314,8328],{},[333,8315,8316],{},[336,8317,8318,8320],{},[339,8319,4887],{},[333,8321,8322,8324,8326],{},[339,8323,1672],{},[339,8325,2401],{},[339,8327,5350],{},[353,8329,5353],{"encoding":355},[317,8331,8333],{"className":8332,"ariaHidden":361},[360],[317,8334,8336,8339],{"className":8335},[365],[317,8337],{"className":8338,"style":763},[369],[317,8340,8342,8345],{"className":8341},[374],[317,8343,4887],{"className":8344,"style":423},[374,378],[317,8346,8348],{"className":8347},[383],[317,8349,8351,8377],{"className":8350},[387,388],[317,8352,8354,8374],{"className":8353},[392],[317,8355,8357],{"className":8356,"style":782},[396],[317,8358,8359,8362],{"style":2434},[317,8360],{"className":8361,"style":405},[404],[317,8363,8365],{"className":8364},[409,410,411,412],[317,8366,8368,8371],{"className":8367},[374,412],[317,8369,1672],{"className":8370,"style":1722},[374,378,412],[317,8372,5398],{"className":8373},[374,378,412],[317,8375,431],{"className":8376},[430],[317,8378,8380],{"className":8379},[392],[317,8381,8383],{"className":8382,"style":812},[396],[317,8384],{},"）\n",[2469,8387,8388],{},[299,8389,8390,8393,8394,8478],{},[252,8391,8392],{},"决定 DIBL","：鳍越窄，门对沟道的控制越强，漏端电场越难把势垒拉低 → DIBL 越小 → ",[317,8395,8397,8420],{"className":8396},[320],[317,8398,8400],{"className":8399},[324],[326,8401,8402],{"xmlns":328},[330,8403,8404,8418],{},[333,8405,8406],{},[336,8407,8408,8410],{},[339,8409,341],{},[333,8411,8412,8414,8416],{},[339,8413,659],{},[339,8415,1672],{},[339,8417,1672],{},[353,8419,1677],{"encoding":355},[317,8421,8423],{"className":8422,"ariaHidden":361},[360],[317,8424,8426,8429],{"className":8425},[365],[317,8427],{"className":8428,"style":763},[369],[317,8430,8432,8435],{"className":8431},[374],[317,8433,341],{"className":8434,"style":379},[374,378],[317,8436,8438],{"className":8437},[383],[317,8439,8441,8470],{"className":8440},[387,388],[317,8442,8444,8467],{"className":8443},[392],[317,8445,8447],{"className":8446,"style":782},[396],[317,8448,8449,8452],{"style":400},[317,8450],{"className":8451,"style":405},[404],[317,8453,8455],{"className":8454},[409,410,411,412],[317,8456,8458,8461,8464],{"className":8457},[374,412],[317,8459,659],{"className":8460},[374,378,412],[317,8462,1672],{"className":8463,"style":1722},[374,378,412],[317,8465,1672],{"className":8466,"style":1722},[374,378,412],[317,8468,431],{"className":8469},[430],[317,8471,8473],{"className":8472},[392],[317,8474,8476],{"className":8475,"style":812},[396],[317,8477],{}," 越好压",[299,8480,8481,8482,8385,8563],{},"Fin Height（鳍高 ",[317,8483,8485,8508],{"className":8484},[320],[317,8486,8488],{"className":8487},[324],[326,8489,8490],{"xmlns":328},[330,8491,8492,8506],{},[333,8493,8494],{},[336,8495,8496,8498],{},[339,8497,2104],{},[333,8499,8500,8502,8504],{},[339,8501,1672],{},[339,8503,2401],{},[339,8505,5350],{},[353,8507,5437],{"encoding":355},[317,8509,8511],{"className":8510,"ariaHidden":361},[360],[317,8512,8514,8517],{"className":8513},[365],[317,8515],{"className":8516,"style":763},[369],[317,8518,8520,8523],{"className":8519},[374],[317,8521,2104],{"className":8522,"style":2152},[374,378],[317,8524,8526],{"className":8525},[383],[317,8527,8529,8555],{"className":8528},[387,388],[317,8530,8532,8552],{"className":8531},[392],[317,8533,8535],{"className":8534,"style":782},[396],[317,8536,8537,8540],{"style":5467},[317,8538],{"className":8539,"style":405},[404],[317,8541,8543],{"className":8542},[409,410,411,412],[317,8544,8546,8549],{"className":8545},[374,412],[317,8547,1672],{"className":8548,"style":1722},[374,378,412],[317,8550,5398],{"className":8551},[374,378,412],[317,8553,431],{"className":8554},[430],[317,8556,8558],{"className":8557},[392],[317,8559,8561],{"className":8560,"style":812},[396],[317,8562],{},[2469,8564,8565,8571],{},[299,8566,8567,8570],{},[252,8568,8569],{},"受限于刻蚀工艺","：鳍想做得很高不容易（高深宽比刻蚀、倒塌、粗糙度、均匀性）",[299,8572,8573],{},"tradeoff：做高了等效宽度增大（驱动电流更大），但工艺难度\u002F变异性也上升",[299,8575,8576,8577,8385,8660],{},"Fin Pitch（鳍间距 ",[317,8578,8580,8605],{"className":8579},[320],[317,8581,8583],{"className":8582},[324],[326,8584,8585],{"xmlns":328},[330,8586,8587,8602],{},[333,8588,8589],{},[336,8590,8591,8594],{},[339,8592,8593],{},"P",[333,8595,8596,8598,8600],{},[339,8597,1672],{},[339,8599,2401],{},[339,8601,5350],{},[353,8603,8604],{"encoding":355},"P_{fin}",[317,8606,8608],{"className":8607,"ariaHidden":361},[360],[317,8609,8611,8614],{"className":8610},[365],[317,8612],{"className":8613,"style":763},[369],[317,8615,8617,8620],{"className":8616},[374],[317,8618,8593],{"className":8619,"style":423},[374,378],[317,8621,8623],{"className":8622},[383],[317,8624,8626,8652],{"className":8625},[387,388],[317,8627,8629,8649],{"className":8628},[392],[317,8630,8632],{"className":8631,"style":782},[396],[317,8633,8634,8637],{"style":2434},[317,8635],{"className":8636,"style":405},[404],[317,8638,8640],{"className":8639},[409,410,411,412],[317,8641,8643,8646],{"className":8642},[374,412],[317,8644,1672],{"className":8645,"style":1722},[374,378,412],[317,8647,5398],{"className":8648},[374,378,412],[317,8650,431],{"className":8651},[430],[317,8653,8655],{"className":8654},[392],[317,8656,8658],{"className":8657,"style":812},[396],[317,8659],{},[2469,8661,8662,8668,8671],{},[299,8663,8664,8667],{},[252,8665,8666],{},"决定版图面积密度","：pitch 越小，单位面积能塞更多 fins",[299,8669,8670],{},"也会限制 S\u002FD 的离子注入倾角（pitch 太密会挡住注入）",[299,8672,8673],{},"tradeoff：性能 vs. layout efficiency（密一点面积更小但工艺窗口更窄、寄生更难搞）",[2872,8675,8677],{"id":8676},"finfet-的版图直觉finfet-layout","FinFET 的版图直觉｜FinFET Layout",[234,8679,8680],{},[245,8681],{"alt":247,"src":8682},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-27.png",[234,8684,8685],{},"FinFET 的沟道宽度不是连续可调，而是“按鳍数离散量化”。",[2469,8687,8688,8720,9285],{},[299,8689,8690,8691,8719],{},"平面 MOSFET：你画多宽就是多宽（",[317,8692,8694,8707],{"className":8693},[320],[317,8695,8697],{"className":8696},[324],[326,8698,8699],{"xmlns":328},[330,8700,8701,8705],{},[333,8702,8703],{},[339,8704,4887],{},[353,8706,4887],{"encoding":355},[317,8708,8710],{"className":8709,"ariaHidden":361},[360],[317,8711,8713,8716],{"className":8712},[365],[317,8714],{"className":8715,"style":1086},[369],[317,8717,4887],{"className":8718,"style":423},[374,378]," 连续）",[299,8721,8722,8723,8805,8806],{},"FinFET：你靠 “几根鳍” 来决定等效宽度（",[317,8724,8726,8750],{"className":8725},[320],[317,8727,8729],{"className":8728},[324],[326,8730,8731],{"xmlns":328},[330,8732,8733,8747],{},[333,8734,8735],{},[336,8736,8737,8739],{},[339,8738,468],{},[333,8740,8741,8743,8745],{},[339,8742,1672],{},[339,8744,2401],{},[339,8746,5350],{},[353,8748,8749],{"encoding":355},"N_{fin}",[317,8751,8753],{"className":8752,"ariaHidden":361},[360],[317,8754,8756,8759],{"className":8755},[365],[317,8757],{"className":8758,"style":763},[369],[317,8760,8762,8765],{"className":8761},[374],[317,8763,468],{"className":8764,"style":516},[374,378],[317,8766,8768],{"className":8767},[383],[317,8769,8771,8797],{"className":8770},[387,388],[317,8772,8774,8794],{"className":8773},[392],[317,8775,8777],{"className":8776,"style":782},[396],[317,8778,8779,8782],{"style":7160},[317,8780],{"className":8781,"style":405},[404],[317,8783,8785],{"className":8784},[409,410,411,412],[317,8786,8788,8791],{"className":8787},[374,412],[317,8789,1672],{"className":8790,"style":1722},[374,378,412],[317,8792,5398],{"className":8793},[374,378,412],[317,8795,431],{"className":8796},[430],[317,8798,8800],{"className":8799},[392],[317,8801,8803],{"className":8802,"style":812},[396],[317,8804],{}," 离散）\n",[2469,8807,8808,8973],{},[299,8809,8810,8811],{},"常用的近似是：一根鳍贡献的导电“周长”大约是 ",[317,8812,8814,8854],{"className":8813},[320],[317,8815,8817],{"className":8816},[324],[326,8818,8819],{"xmlns":328},[330,8820,8821,8851],{},[333,8822,8823,8825,8837,8839],{},[1018,8824,3320],{},[336,8826,8827,8829],{},[339,8828,2104],{},[333,8830,8831,8833,8835],{},[339,8832,1672],{},[339,8834,2401],{},[339,8836,5350],{},[1004,8838,1047],{},[336,8840,8841,8843],{},[339,8842,4887],{},[333,8844,8845,8847,8849],{},[339,8846,1672],{},[339,8848,2401],{},[339,8850,5350],{},[353,8852,8853],{"encoding":355},"2H_{fin}+W_{fin}",[317,8855,8857,8921],{"className":8856,"ariaHidden":361},[360],[317,8858,8860,8863,8866,8912,8915,8918],{"className":8859},[365],[317,8861],{"className":8862,"style":763},[369],[317,8864,3320],{"className":8865},[374],[317,8867,8869,8872],{"className":8868},[374],[317,8870,2104],{"className":8871,"style":2152},[374,378],[317,8873,8875],{"className":8874},[383],[317,8876,8878,8904],{"className":8877},[387,388],[317,8879,8881,8901],{"className":8880},[392],[317,8882,8884],{"className":8883,"style":782},[396],[317,8885,8886,8889],{"style":5467},[317,8887],{"className":8888,"style":405},[404],[317,8890,8892],{"className":8891},[409,410,411,412],[317,8893,8895,8898],{"className":8894},[374,412],[317,8896,1672],{"className":8897,"style":1722},[374,378,412],[317,8899,5398],{"className":8900},[374,378,412],[317,8902,431],{"className":8903},[430],[317,8905,8907],{"className":8906},[392],[317,8908,8910],{"className":8909,"style":812},[396],[317,8911],{},[317,8913],{"className":8914,"style":596},[1093],[317,8916,1047],{"className":8917},[1229],[317,8919],{"className":8920,"style":596},[1093],[317,8922,8924,8927],{"className":8923},[365],[317,8925],{"className":8926,"style":763},[369],[317,8928,8930,8933],{"className":8929},[374],[317,8931,4887],{"className":8932,"style":423},[374,378],[317,8934,8936],{"className":8935},[383],[317,8937,8939,8965],{"className":8938},[387,388],[317,8940,8942,8962],{"className":8941},[392],[317,8943,8945],{"className":8944,"style":782},[396],[317,8946,8947,8950],{"style":2434},[317,8948],{"className":8949,"style":405},[404],[317,8951,8953],{"className":8952},[409,410,411,412],[317,8954,8956,8959],{"className":8955},[374,412],[317,8957,1672],{"className":8958,"style":1722},[374,378,412],[317,8960,5398],{"className":8961},[374,378,412],[317,8963,431],{"className":8964},[430],[317,8966,8968],{"className":8967},[392],[317,8969,8971],{"className":8970,"style":812},[396],[317,8972],{},[299,8974,8975,8976],{},"所以 ",[317,8977,8979,9049],{"className":8978},[320],[317,8980,8982],{"className":8981},[324],[326,8983,8984],{"xmlns":328},[330,8985,8986,9046],{},[333,8987,8988,9000,9002,9014,9016,9018,9030,9032,9044],{},[336,8989,8990,8992],{},[339,8991,4887],{},[333,8993,8994,8996,8998],{},[339,8995,748],{},[339,8997,1672],{},[339,8999,1672],{},[1004,9001,1006],{},[336,9003,9004,9006],{},[339,9005,468],{},[333,9007,9008,9010,9012],{},[339,9009,1672],{},[339,9011,2401],{},[339,9013,5350],{},[1004,9015,1010],{"stretchy":1009},[1018,9017,3320],{},[336,9019,9020,9022],{},[339,9021,2104],{},[333,9023,9024,9026,9028],{},[339,9025,1672],{},[339,9027,2401],{},[339,9029,5350],{},[1004,9031,1047],{},[336,9033,9034,9036],{},[339,9035,4887],{},[333,9037,9038,9040,9042],{},[339,9039,1672],{},[339,9041,2401],{},[339,9043,5350],{},[1004,9045,1023],{"stretchy":1009},[353,9047,9048],{"encoding":355},"W_{eff}\\approx N_{fin}(2H_{fin}+W_{fin})",[317,9050,9052,9116,9230],{"className":9051,"ariaHidden":361},[360],[317,9053,9055,9058,9107,9110,9113],{"className":9054},[365],[317,9056],{"className":9057,"style":763},[369],[317,9059,9061,9064],{"className":9060},[374],[317,9062,4887],{"className":9063,"style":423},[374,378],[317,9065,9067],{"className":9066},[383],[317,9068,9070,9099],{"className":9069},[387,388],[317,9071,9073,9096],{"className":9072},[392],[317,9074,9076],{"className":9075,"style":782},[396],[317,9077,9078,9081],{"style":2434},[317,9079],{"className":9080,"style":405},[404],[317,9082,9084],{"className":9083},[409,410,411,412],[317,9085,9087,9090,9093],{"className":9086},[374,412],[317,9088,748],{"className":9089},[374,378,412],[317,9091,1672],{"className":9092,"style":1722},[374,378,412],[317,9094,1672],{"className":9095,"style":1722},[374,378,412],[317,9097,431],{"className":9098},[430],[317,9100,9102],{"className":9101},[392],[317,9103,9105],{"className":9104,"style":812},[396],[317,9106],{},[317,9108],{"className":9109,"style":1094},[1093],[317,9111,1006],{"className":9112},[1098],[317,9114],{"className":9115,"style":1094},[1093],[317,9117,9119,9123,9169,9172,9175,9221,9224,9227],{"className":9118},[365],[317,9120],{"className":9121,"style":9122},[369],"height:1.0361em;vertical-align:-0.2861em;",[317,9124,9126,9129],{"className":9125},[374],[317,9127,468],{"className":9128,"style":516},[374,378],[317,9130,9132],{"className":9131},[383],[317,9133,9135,9161],{"className":9134},[387,388],[317,9136,9138,9158],{"className":9137},[392],[317,9139,9141],{"className":9140,"style":782},[396],[317,9142,9143,9146],{"style":7160},[317,9144],{"className":9145,"style":405},[404],[317,9147,9149],{"className":9148},[409,410,411,412],[317,9150,9152,9155],{"className":9151},[374,412],[317,9153,1672],{"className":9154,"style":1722},[374,378,412],[317,9156,5398],{"className":9157},[374,378,412],[317,9159,431],{"className":9160},[430],[317,9162,9164],{"className":9163},[392],[317,9165,9167],{"className":9166,"style":812},[396],[317,9168],{},[317,9170,1010],{"className":9171},[1112],[317,9173,3320],{"className":9174},[374],[317,9176,9178,9181],{"className":9177},[374],[317,9179,2104],{"className":9180,"style":2152},[374,378],[317,9182,9184],{"className":9183},[383],[317,9185,9187,9213],{"className":9186},[387,388],[317,9188,9190,9210],{"className":9189},[392],[317,9191,9193],{"className":9192,"style":782},[396],[317,9194,9195,9198],{"style":5467},[317,9196],{"className":9197,"style":405},[404],[317,9199,9201],{"className":9200},[409,410,411,412],[317,9202,9204,9207],{"className":9203},[374,412],[317,9205,1672],{"className":9206,"style":1722},[374,378,412],[317,9208,5398],{"className":9209},[374,378,412],[317,9211,431],{"className":9212},[430],[317,9214,9216],{"className":9215},[392],[317,9217,9219],{"className":9218,"style":812},[396],[317,9220],{},[317,9222],{"className":9223,"style":596},[1093],[317,9225,1047],{"className":9226},[1229],[317,9228],{"className":9229,"style":596},[1093],[317,9231,9233,9236,9282],{"className":9232},[365],[317,9234],{"className":9235,"style":9122},[369],[317,9237,9239,9242],{"className":9238},[374],[317,9240,4887],{"className":9241,"style":423},[374,378],[317,9243,9245],{"className":9244},[383],[317,9246,9248,9274],{"className":9247},[387,388],[317,9249,9251,9271],{"className":9250},[392],[317,9252,9254],{"className":9253,"style":782},[396],[317,9255,9256,9259],{"style":2434},[317,9257],{"className":9258,"style":405},[404],[317,9260,9262],{"className":9261},[409,410,411,412],[317,9263,9265,9268],{"className":9264},[374,412],[317,9266,1672],{"className":9267,"style":1722},[374,378,412],[317,9269,5398],{"className":9270},[374,378,412],[317,9272,431],{"className":9273},[430],[317,9275,9277],{"className":9276},[392],[317,9278,9280],{"className":9279,"style":812},[396],[317,9281],{},[317,9283,1023],{"className":9284},[1127],[299,9286,9287],{},"另外提到：S\u002FD fins 可以通过选择性外延（selective epitaxy）“长肉合并”，让接触更容易、降低串联电阻、也利于互连",[2872,9289,9291],{"id":9290},"finfet-进入-sramfinfet-based-sram-design","FinFET 进入 SRAM｜FinFET-Based SRAM Design",[234,9293,9294],{},[245,9295],{"alt":247,"src":9296},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-03.png",[234,9298,9299,9300,9303],{},"FinFET 除了逻辑门电路，也能用于 SRAM，并且 ",[252,9301,9302],{},"通过器件结构\u002F鳍数选择"," 改善SRAM 的稳定性与面积。",[2469,9305,9306,9391,9399],{},[299,9307,9308,9309,9390],{},"6T SRAM cell 仍然是同一套拓扑，但器件的“驱动强弱”变成用 ",[317,9310,9312,9335],{"className":9311},[320],[317,9313,9315],{"className":9314},[324],[326,9316,9317],{"xmlns":328},[330,9318,9319,9333],{},[333,9320,9321],{},[336,9322,9323,9325],{},[339,9324,468],{},[333,9326,9327,9329,9331],{},[339,9328,1672],{},[339,9330,2401],{},[339,9332,5350],{},[353,9334,8749],{"encoding":355},[317,9336,9338],{"className":9337,"ariaHidden":361},[360],[317,9339,9341,9344],{"className":9340},[365],[317,9342],{"className":9343,"style":763},[369],[317,9345,9347,9350],{"className":9346},[374],[317,9348,468],{"className":9349,"style":516},[374,378],[317,9351,9353],{"className":9352},[383],[317,9354,9356,9382],{"className":9355},[387,388],[317,9357,9359,9379],{"className":9358},[392],[317,9360,9362],{"className":9361,"style":782},[396],[317,9363,9364,9367],{"style":7160},[317,9365],{"className":9366,"style":405},[404],[317,9368,9370],{"className":9369},[409,410,411,412],[317,9371,9373,9376],{"className":9372},[374,412],[317,9374,1672],{"className":9375,"style":1722},[374,378,412],[317,9377,5398],{"className":9378},[374,378,412],[317,9380,431],{"className":9381},[430],[317,9383,9385],{"className":9384},[392],[317,9386,9388],{"className":9387,"style":812},[396],[317,9389],{},"（或者不同器件的 fin 数）去配比",[299,9392,9393,9394],{},"slide 给了 butterfly curves（静态噪声容限 SNM 的直观展示）\n",[2469,9395,9396],{},[299,9397,9398],{},"多 fin \u002F 更强的器件通常能带来更大的保持裕量（曲线“蝴蝶”更胖更稳）",[299,9400,9401],{},"还提到 “independently gated PGs（pass gates）” 可以帮助缩小 cell area：本质是让版图组织更高密、器件功能划分更灵活",[2872,9403,9405],{"id":9404},"remaining-finfet-challenges","Remaining FinFET Challenges",[234,9407,9408],{},[245,9409],{"alt":247,"src":9410},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-34.png",[234,9412,9413],{},"FinFET 解决了很多短沟道问题，但也引入了新的“工程代价”。",[2469,9415,9416,9672,9683,9694],{},[299,9417,9418,9497,9498],{},[317,9419,9421,9442],{"className":9420},[320],[317,9422,9424],{"className":9423},[324],[326,9425,9426],{"xmlns":328},[330,9427,9428,9440],{},[333,9429,9430],{},[336,9431,9432,9434],{},[339,9433,569],{},[333,9435,9436,9438],{},[339,9437,1034],{},[339,9439,2104],{},[353,9441,2107],{"encoding":355},[317,9443,9445],{"className":9444,"ariaHidden":361},[360],[317,9446,9448,9451],{"className":9447},[365],[317,9449],{"className":9450,"style":370},[369],[317,9452,9454,9457],{"className":9453},[374],[317,9455,569],{"className":9456,"style":596},[374,378],[317,9458,9460],{"className":9459},[383],[317,9461,9463,9489],{"className":9462},[387,388],[317,9464,9466,9486],{"className":9465},[392],[317,9467,9469],{"className":9468,"style":397},[396],[317,9470,9471,9474],{"style":611},[317,9472],{"className":9473,"style":405},[404],[317,9475,9477],{"className":9476},[409,410,411,412],[317,9478,9480,9483],{"className":9479},[374,412],[317,9481,1034],{"className":9482,"style":423},[374,378,412],[317,9484,2104],{"className":9485,"style":2152},[374,378,412],[317,9487,431],{"className":9488},[430],[317,9490,9492],{"className":9491},[392],[317,9493,9495],{"className":9494,"style":438},[396],[317,9496],{}," adjustment（阈值调节）\n",[2469,9499,9500,9589],{},[299,9501,9502,9503,9588],{},"主要靠 gate work-function（WF）工程或 ",[317,9504,9506,9530],{"className":9505},[320],[317,9507,9509],{"className":9508},[324],[326,9510,9511],{"xmlns":328},[330,9512,9513,9527],{},[333,9514,9515],{},[336,9516,9517,9519],{},[339,9518,1854],{},[333,9520,9521,9523,9525],{},[339,9522,748],{},[339,9524,1672],{},[339,9526,1672],{},[353,9528,9529],{"encoding":355},"L_{eff}",[317,9531,9533],{"className":9532,"ariaHidden":361},[360],[317,9534,9536,9539],{"className":9535},[365],[317,9537],{"className":9538,"style":763},[369],[317,9540,9542,9545],{"className":9541},[374],[317,9543,1854],{"className":9544},[374,378],[317,9546,9548],{"className":9547},[383],[317,9549,9551,9580],{"className":9550},[387,388],[317,9552,9554,9577],{"className":9553},[392],[317,9555,9557],{"className":9556,"style":782},[396],[317,9558,9559,9562],{"style":1890},[317,9560],{"className":9561,"style":405},[404],[317,9563,9565],{"className":9564},[409,410,411,412],[317,9566,9568,9571,9574],{"className":9567},[374,412],[317,9569,748],{"className":9570},[374,378,412],[317,9572,1672],{"className":9573,"style":1722},[374,378,412],[317,9575,1672],{"className":9576,"style":1722},[374,378,412],[317,9578,431],{"className":9579},[430],[317,9581,9583],{"className":9582},[392],[317,9584,9586],{"className":9585,"style":812},[396],[317,9587],{}," tuning",[299,9590,9591,9592,9671],{},"对高深宽比、多鳍器件，很多“动态 ",[317,9593,9595,9616],{"className":9594},[320],[317,9596,9598],{"className":9597},[324],[326,9599,9600],{"xmlns":328},[330,9601,9602,9614],{},[333,9603,9604],{},[336,9605,9606,9608],{},[339,9607,569],{},[333,9609,9610,9612],{},[339,9611,1034],{},[339,9613,2104],{},[353,9615,2107],{"encoding":355},[317,9617,9619],{"className":9618,"ariaHidden":361},[360],[317,9620,9622,9625],{"className":9621},[365],[317,9623],{"className":9624,"style":370},[369],[317,9626,9628,9631],{"className":9627},[374],[317,9629,569],{"className":9630,"style":596},[374,378],[317,9632,9634],{"className":9633},[383],[317,9635,9637,9663],{"className":9636},[387,388],[317,9638,9640,9660],{"className":9639},[392],[317,9641,9643],{"className":9642,"style":397},[396],[317,9644,9645,9648],{"style":611},[317,9646],{"className":9647,"style":405},[404],[317,9649,9651],{"className":9650},[409,410,411,412],[317,9652,9654,9657],{"className":9653},[374,412],[317,9655,1034],{"className":9656,"style":423},[374,378,412],[317,9658,2104],{"className":9659,"style":2152},[374,378,412],[317,9661,431],{"className":9662},[430],[317,9664,9666],{"className":9665},[392],[317,9667,9669],{"className":9668,"style":438},[396],[317,9670],{}," 控制”（比如强 body effect 的那类玩法）不太好做",[299,9673,9674,9675],{},"Fringing capacitance（门与 S\u002FD 顶部\u002F底部的边缘电容）\n",[2469,9676,9677,9680],{},[299,9678,9679],{},"Fin 结构三维边缘多，寄生电容更复杂",[299,9681,9682],{},"缓解：缩小 fin pitch、做 via-contacted \u002F merged S\u002FD（让互连与接触更“干净”）",[299,9684,9685,9686],{},"Parasitic resistance（寄生电阻）\n",[2469,9687,9688,9691],{},[299,9689,9690],{},"三维结构导致 S\u002FD 掺杂要“包裹式”更均匀才行",[299,9692,9693],{},"传统离子注入很难把鳍侧壁\u002F底部都打匀 → 需要更“conformal”的掺杂手段",[299,9695,9696,9697],{},"Variability（变异性）\n",[2469,9698,9699,9784],{},[299,9700,9701,9702,9783],{},"性能对 ",[317,9703,9705,9728],{"className":9704},[320],[317,9706,9708],{"className":9707},[324],[326,9709,9710],{"xmlns":328},[330,9711,9712,9726],{},[333,9713,9714],{},[336,9715,9716,9718],{},[339,9717,4887],{},[333,9719,9720,9722,9724],{},[339,9721,1672],{},[339,9723,2401],{},[339,9725,5350],{},[353,9727,5353],{"encoding":355},[317,9729,9731],{"className":9730,"ariaHidden":361},[360],[317,9732,9734,9737],{"className":9733},[365],[317,9735],{"className":9736,"style":763},[369],[317,9738,9740,9743],{"className":9739},[374],[317,9741,4887],{"className":9742,"style":423},[374,378],[317,9744,9746],{"className":9745},[383],[317,9747,9749,9775],{"className":9748},[387,388],[317,9750,9752,9772],{"className":9751},[392],[317,9753,9755],{"className":9754,"style":782},[396],[317,9756,9757,9760],{"style":2434},[317,9758],{"className":9759,"style":405},[404],[317,9761,9763],{"className":9762},[409,410,411,412],[317,9764,9766,9769],{"className":9765},[374,412],[317,9767,1672],{"className":9768,"style":1722},[374,378,412],[317,9770,5398],{"className":9771},[374,378,412],[317,9773,431],{"className":9774},[430],[317,9776,9778],{"className":9777},[392],[317,9779,9781],{"className":9780,"style":812},[396],[317,9782],{}," 极敏感：鳍宽一点点波动，电学差很多",[299,9785,9786,9787,9790],{},"若用 undoped channel，则 ",[252,9788,9789],{},"WF variation"," 可能变成主导随机源（反而不是传统的 RDF）",[2872,9792,9794],{"id":9793},"为什么开始大量用仿真device-and-process-simulation","为什么开始大量用仿真｜Device and Process Simulation",[257,9796,9797],{"style":259},[261,9798,9799],{},[264,9800,267,9801,267,9809],{"style":266},[269,9802,9804,267],{"style":9803},"width: 51.9%; text-align: center; border: none; padding: 0.3em; margin: 0;",[234,9805,9806],{},[245,9807],{"alt":247,"src":9808},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-07.png",[269,9810,9812,267],{"style":9811},"width: 48.1%; text-align: center; border: none; padding: 0.3em; margin: 0;",[234,9813,9814],{},[245,9815],{"alt":247,"src":9816},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-16.png",[2469,9818,9819,9959],{},[299,9820,9821,9822],{},"Device simulation（器件仿真）\n",[2469,9823,9824,9827],{},[299,9825,9826],{},"商用仿真能把你书里那些方程几乎同时解掉（漂移扩散\u002F泊松\u002F连续性等），近似更少",[299,9828,9829,9830,9873,9874,9958],{},"价值：在流片前，就能快速看到 ",[317,9831,9833,9852],{"className":9832},[320],[317,9834,9836],{"className":9835},[324],[326,9837,9838],{"xmlns":328},[330,9839,9840,9849],{},[333,9841,9842,9844,9847],{},[339,9843,341],{},[3789,9845,9846],{},"-",[339,9848,569],{},[353,9850,9851],{"encoding":355},"I\\text{-}V",[317,9853,9855],{"className":9854,"ariaHidden":361},[360],[317,9856,9858,9861,9864,9870],{"className":9857},[365],[317,9859],{"className":9860,"style":1086},[369],[317,9862,341],{"className":9863,"style":379},[374,378],[317,9865,9867],{"className":9866},[374,3872],[317,9868,9846],{"className":9869},[374],[317,9871,569],{"className":9872,"style":596},[374,378],"、DIBL、",[317,9875,9877,9900],{"className":9876},[320],[317,9878,9880],{"className":9879},[324],[326,9881,9882],{"xmlns":328},[330,9883,9884,9898],{},[333,9885,9886],{},[336,9887,9888,9890],{},[339,9889,341],{},[333,9891,9892,9894,9896],{},[339,9893,659],{},[339,9895,1672],{},[339,9897,1672],{},[353,9899,1677],{"encoding":355},[317,9901,9903],{"className":9902,"ariaHidden":361},[360],[317,9904,9906,9909],{"className":9905},[365],[317,9907],{"className":9908,"style":763},[369],[317,9910,9912,9915],{"className":9911},[374],[317,9913,341],{"className":9914,"style":379},[374,378],[317,9916,9918],{"className":9917},[383],[317,9919,9921,9950],{"className":9920},[387,388],[317,9922,9924,9947],{"className":9923},[392],[317,9925,9927],{"className":9926,"style":782},[396],[317,9928,9929,9932],{"style":400},[317,9930],{"className":9931,"style":405},[404],[317,9933,9935],{"className":9934},[409,410,411,412],[317,9936,9938,9941,9944],{"className":9937},[374,412],[317,9939,659],{"className":9940},[374,378,412],[317,9942,1672],{"className":9943,"style":1722},[374,378,412],[317,9945,1672],{"className":9946,"style":1722},[374,378,412],[317,9948,431],{"className":9949},[430],[317,9951,9953],{"className":9952},[392],[317,9954,9956],{"className":9955,"style":812},[396],[317,9957],{}," 等趋势",[299,9960,9961,9962],{},"Process simulation（工艺仿真）\n",[2469,9963,9964,9967,9970],{},[299,9965,9966],{},"输入：光刻版图、注入剂量\u002F能量、氧化\u002F退火温度与时间等",[299,9968,9969],{},"输出：2D\u002F3D 的“真实结构”（薄膜沉积\u002F生长\u002F刻蚀 + 掺杂分布）",[299,9971,9972],{},"然后把这个结构喂给 device simulator，再加电压去算电特性（工艺→结构→电学）",[2872,9974,9976],{"id":9975},"corner-effect角落效应","Corner effect｜角落效应",[234,9978,9979],{},[245,9980],{"alt":247,"src":9981},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-08.png",[234,9983,9984,9985,10067],{},"FinFET 的反型层不是一张“无限薄的皮”，它有明显厚度 ",[317,9986,9988,10012],{"className":9987},[320],[317,9989,9991],{"className":9990},[324],[326,9992,9993],{"xmlns":328},[330,9994,9995,10009],{},[333,9996,9997],{},[336,9998,9999,10001],{},[339,10000,1034],{},[333,10002,10003,10006],{},[339,10004,10005],{},"c",[339,10007,10008],{},"h",[353,10010,10011],{"encoding":355},"T_{ch}",[317,10013,10015],{"className":10014,"ariaHidden":361},[360],[317,10016,10018,10021],{"className":10017},[365],[317,10019],{"className":10020,"style":370},[369],[317,10022,10024,10027],{"className":10023},[374],[317,10025,1034],{"className":10026,"style":423},[374,378],[317,10028,10030],{"className":10029},[383],[317,10031,10033,10059],{"className":10032},[387,388],[317,10034,10036,10056],{"className":10035},[392],[317,10037,10039],{"className":10038,"style":782},[396],[317,10040,10041,10044],{"style":2434},[317,10042],{"className":10043,"style":405},[404],[317,10045,10047],{"className":10046},[409,410,411,412],[317,10048,10050,10053],{"className":10049},[374,412],[317,10051,10005],{"className":10052},[374,378,412],[317,10054,10008],{"className":10055},[374,378,412],[317,10057,431],{"className":10058},[430],[317,10060,10062],{"className":10061},[392],[317,10063,10065],{"className":10064,"style":438},[396],[317,10066],{},"，而且在鳍的角落更容易出现亚阈值反型电荷。",[2469,10069,10070,10152,10155],{},[299,10071,10072,10073],{},"inversion layer has significant thickness ",[317,10074,10076,10097],{"className":10075},[320],[317,10077,10079],{"className":10078},[324],[326,10080,10081],{"xmlns":328},[330,10082,10083,10095],{},[333,10084,10085],{},[336,10086,10087,10089],{},[339,10088,1034],{},[333,10090,10091,10093],{},[339,10092,10005],{},[339,10094,10008],{},[353,10096,10011],{"encoding":355},[317,10098,10100],{"className":10099,"ariaHidden":361},[360],[317,10101,10103,10106],{"className":10102},[365],[317,10104],{"className":10105,"style":370},[369],[317,10107,10109,10112],{"className":10108},[374],[317,10110,1034],{"className":10111,"style":423},[374,378],[317,10113,10115],{"className":10114},[383],[317,10116,10118,10144],{"className":10117},[387,388],[317,10119,10121,10141],{"className":10120},[392],[317,10122,10124],{"className":10123,"style":782},[396],[317,10125,10126,10129],{"style":2434},[317,10127],{"className":10128,"style":405},[404],[317,10130,10132],{"className":10131},[409,410,411,412],[317,10133,10135,10138],{"className":10134},[374,412],[317,10136,10005],{"className":10137},[374,378,412],[317,10139,10008],{"className":10140},[374,378,412],[317,10142,431],{"className":10143},[430],[317,10145,10147],{"className":10146},[392],[317,10148,10150],{"className":10149,"style":438},[396],[317,10151],{},[299,10153,10154],{},"corners 上更容易聚集 subthreshold inversion electrons",[299,10156,10157,10158,10242],{},"这会影响：亚阈值斜率、",[317,10159,10161,10184],{"className":10160},[320],[317,10162,10164],{"className":10163},[324],[326,10165,10166],{"xmlns":328},[330,10167,10168,10182],{},[333,10169,10170],{},[336,10171,10172,10174],{},[339,10173,341],{},[333,10175,10176,10178,10180],{},[339,10177,659],{},[339,10179,1672],{},[339,10181,1672],{},[353,10183,1677],{"encoding":355},[317,10185,10187],{"className":10186,"ariaHidden":361},[360],[317,10188,10190,10193],{"className":10189},[365],[317,10191],{"className":10192,"style":763},[369],[317,10194,10196,10199],{"className":10195},[374],[317,10197,341],{"className":10198,"style":379},[374,378],[317,10200,10202],{"className":10201},[383],[317,10203,10205,10234],{"className":10204},[387,388],[317,10206,10208,10231],{"className":10207},[392],[317,10209,10211],{"className":10210,"style":782},[396],[317,10212,10213,10216],{"style":400},[317,10214],{"className":10215,"style":405},[404],[317,10217,10219],{"className":10218},[409,410,411,412],[317,10220,10222,10225,10228],{"className":10221},[374,412],[317,10223,659],{"className":10224},[374,378,412],[317,10226,1672],{"className":10227,"style":1722},[374,378,412],[317,10229,1672],{"className":10230,"style":1722},[374,378,412],[317,10232,431],{"className":10233},[430],[317,10235,10237],{"className":10236},[392],[317,10238,10240],{"className":10239,"style":812},[396],[317,10241],{},"、以及器件之间的一致性（角落的几何\u002F粗糙度也更敏感）",[2872,10244,10246],{"id":10245},"mosfet-compact-modeling-for-circuit-simulation","MOSFET Compact Modeling for Circuit Simulation",[234,10248,10249],{},[245,10250],{"alt":247,"src":10251},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-28.png",[234,10253,10254],{},"电路仿真需要的是紧凑模型，而不是把 TCAD 全套方程塞进 SPICE。",[2469,10256,10257,10260,10268,10279],{},[299,10258,10259],{},"circuit simulation 里 MOSFET 用解析型方程（compact model）表示",[299,10261,10262,10263],{},"device model 是 technology\u002Fmanufacturing ↔ design\u002Fproduct 的桥梁\n",[2469,10264,10265],{},[299,10266,10267],{},"另一个桥梁是 design rules（版图规则）",[299,10269,10270,10271],{},"电路设计可以：\n",[2469,10272,10273,10276],{},[299,10274,10275],{},"A. 直接做电路仿真",[299,10277,10278],{},"B. 用已经预先仿真\u002F表征好的 cell library（标准单元库）",[299,10280,10281],{},"BSIM：最早\u002F最典型的 industry standard MOSFET model，后续不断扩展以覆盖更多物理效应与工艺节点",[2872,10283,10285],{"id":10284},"从平面到全包围soi-mosfet-evolution","从平面到全包围｜SOI MOSFET Evolution",[234,10287,10288],{},[245,10289],{"alt":247,"src":10290},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-17.png",[234,10292,10293,10296,10380,10383],{},[252,10294,10295],{},"门-沟道电容耦合越强，短沟道效应越容易压，",[317,10297,10299,10322],{"className":10298},[320],[317,10300,10302],{"className":10301},[324],[326,10303,10304],{"xmlns":328},[330,10305,10306,10320],{},[333,10307,10308],{},[336,10309,10310,10312],{},[339,10311,341],{},[333,10313,10314,10316,10318],{},[339,10315,659],{},[339,10317,1672],{},[339,10319,1672],{},[353,10321,1677],{"encoding":355},[317,10323,10325],{"className":10324,"ariaHidden":361},[360],[317,10326,10328,10331],{"className":10327},[365],[317,10329],{"className":10330,"style":763},[369],[317,10332,10334,10337],{"className":10333},[374],[317,10335,341],{"className":10336,"style":379},[374,378],[317,10338,10340],{"className":10339},[383],[317,10341,10343,10372],{"className":10342},[387,388],[317,10344,10346,10369],{"className":10345},[392],[317,10347,10349],{"className":10348,"style":782},[396],[317,10350,10351,10354],{"style":400},[317,10352],{"className":10353,"style":405},[404],[317,10355,10357],{"className":10356},[409,410,411,412],[317,10358,10360,10363,10366],{"className":10359},[374,412],[317,10361,659],{"className":10362},[374,378,412],[317,10364,1672],{"className":10365,"style":1722},[374,378,412],[317,10367,1672],{"className":10368,"style":1722},[374,378,412],[317,10370,431],{"className":10371},[430],[317,10373,10375],{"className":10374},[392],[317,10376,10378],{"className":10377,"style":812},[396],[317,10379],{},[252,10381,10382],{},"越好控","。所以结构演进基本就是“门包得越来越多”。",[2469,10385,10386,10389],{},[299,10387,10388],{},"Bulk-Si planar → SOI UTB planar → Double gate → FinFET → Tri-gate → Pi-gate \u002F Ω-gate → GAA",[299,10390,10391],{},"其中 GAA（gate-all-around）被认为给了“最大”的 gate-to-channel coupling（门把沟道完全包起来）",[2872,10393,10395],{"id":10394},"_3-d-器件结构-3-d-device-structures","3-D 器件结构 ｜ 3-D Device Structures",[234,10397,10398],{},[245,10399],{"alt":247,"src":10400},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-23.png",[2469,10402,10403,10409,10415,10425,10563],{},[299,10404,10405,10408],{},[252,10406,10407],{},"Planar SOI（平面SOI）","：二维沟道，栅控能力相对有限，但结构简单。",[299,10410,10411,10414],{},[252,10412,10413],{},"FinFET（鳍式）","：把沟道“竖起来”，栅对沟道侧壁的控制更强，更适合高密度集成。",[299,10416,10417,10420,10421,10424],{},[252,10418,10419],{},"DG-FinFET \u002F RG-FinFET \u002F Stacked FinFET","：在 FinFET 基础上进一步增强栅控或“堆叠沟道”，提升单位面积有效沟道宽度（area efficiency）。\n图里用“Area Efficiency（面积效率）”来表达",[252,10422,10423],{},"同样占地（pitch）下，能提供多少等效沟道周长\u002F宽度","：",[299,10426,10427,10428,10431,10432],{},"对 ",[252,10429,10430],{},"DG-FinFET","（只主要利用两侧壁）：",[317,10433,10435,10462],{"className":10434},[320],[317,10436,10438],{"className":10437},[324],[326,10439,10440],{"xmlns":328},[330,10441,10442,10459],{},[333,10443,10444,10447,10449],{},[339,10445,10446],{},"r",[1004,10448,3784],{},[1025,10450,10451,10457],{},[333,10452,10453,10455],{},[1018,10454,3320],{},[339,10456,2104],{},[339,10458,8593],{},[353,10460,10461],{"encoding":355},"r = \\frac{2H}{P}",[317,10463,10465,10484],{"className":10464,"ariaHidden":361},[360],[317,10466,10468,10472,10475,10478,10481],{"className":10467},[365],[317,10469],{"className":10470,"style":10471},[369],"height:0.4306em;",[317,10473,10446],{"className":10474,"style":419},[374,378],[317,10476],{"className":10477,"style":1094},[1093],[317,10479,3784],{"className":10480},[1098],[317,10482],{"className":10483,"style":1094},[1093],[317,10485,10487,10491],{"className":10486},[365],[317,10488],{"className":10489,"style":10490},[369],"height:1.2173em;vertical-align:-0.345em;",[317,10492,10494,10497,10560],{"className":10493},[374],[317,10495],{"className":10496},[1112,1134],[317,10498,10500],{"className":10499},[1025],[317,10501,10503,10552],{"className":10502},[387,388],[317,10504,10506,10549],{"className":10505},[392],[317,10507,10510,10524,10532],{"className":10508,"style":10509},[396],"height:0.8723em;",[317,10511,10512,10515],{"style":3198},[317,10513],{"className":10514,"style":1154},[404],[317,10516,10518],{"className":10517},[409,410,411,412],[317,10519,10521],{"className":10520},[374,412],[317,10522,8593],{"className":10523,"style":423},[374,378,412],[317,10525,10526,10529],{"style":1164},[317,10527],{"className":10528,"style":1154},[404],[317,10530],{"className":10531,"style":1172},[1171],[317,10533,10534,10537],{"style":3221},[317,10535],{"className":10536,"style":1154},[404],[317,10538,10540],{"className":10539},[409,410,411,412],[317,10541,10543,10546],{"className":10542},[374,412],[317,10544,3320],{"className":10545},[374,412],[317,10547,2104],{"className":10548,"style":2152},[374,378,412],[317,10550,431],{"className":10551},[430],[317,10553,10555],{"className":10554},[392],[317,10556,10558],{"className":10557,"style":3243},[396],[317,10559],{},[317,10561],{"className":10562},[1127,1134],[299,10564,10427,10565,10568,10569,10719],{},[252,10566,10567],{},"RG-FinFET","（侧壁 + 顶部也参与导电\u002F受栅控）：",[317,10570,10572,10606],{"className":10571},[320],[317,10573,10575],{"className":10574},[324],[326,10576,10577],{"xmlns":328},[330,10578,10579,10603],{},[333,10580,10581,10583,10585],{},[339,10582,10446],{},[1004,10584,3784],{},[1025,10586,10587,10601],{},[333,10588,10589,10591,10593,10595,10597,10599],{},[1018,10590,3320],{},[1004,10592,1010],{"stretchy":1009},[339,10594,2104],{},[1004,10596,1047],{},[339,10598,1034],{},[1004,10600,1023],{"stretchy":1009},[339,10602,8593],{},[353,10604,10605],{"encoding":355},"r = \\frac{2(H+T)}{P}",[317,10607,10609,10627],{"className":10608,"ariaHidden":361},[360],[317,10610,10612,10615,10618,10621,10624],{"className":10611},[365],[317,10613],{"className":10614,"style":10471},[369],[317,10616,10446],{"className":10617,"style":419},[374,378],[317,10619],{"className":10620,"style":1094},[1093],[317,10622,3784],{"className":10623},[1098],[317,10625],{"className":10626,"style":1094},[1093],[317,10628,10630,10634],{"className":10629},[365],[317,10631],{"className":10632,"style":10633},[369],"height:1.355em;vertical-align:-0.345em;",[317,10635,10637,10640,10716],{"className":10636},[374],[317,10638],{"className":10639},[1112,1134],[317,10641,10643],{"className":10642},[1025],[317,10644,10646,10708],{"className":10645},[387,388],[317,10647,10649,10705],{"className":10648},[392],[317,10650,10653,10667,10675],{"className":10651,"style":10652},[396],"height:1.01em;",[317,10654,10655,10658],{"style":3198},[317,10656],{"className":10657,"style":1154},[404],[317,10659,10661],{"className":10660},[409,410,411,412],[317,10662,10664],{"className":10663},[374,412],[317,10665,8593],{"className":10666,"style":423},[374,378,412],[317,10668,10669,10672],{"style":1164},[317,10670],{"className":10671,"style":1154},[404],[317,10673],{"className":10674,"style":1172},[1171],[317,10676,10678,10681],{"style":10677},"top:-3.485em;",[317,10679],{"className":10680,"style":1154},[404],[317,10682,10684],{"className":10683},[409,410,411,412],[317,10685,10687,10690,10693,10696,10699,10702],{"className":10686},[374,412],[317,10688,3320],{"className":10689},[374,412],[317,10691,1010],{"className":10692},[1112,412],[317,10694,2104],{"className":10695,"style":2152},[374,378,412],[317,10697,1047],{"className":10698},[1229,412],[317,10700,1034],{"className":10701,"style":423},[374,378,412],[317,10703,1023],{"className":10704},[1127,412],[317,10706,431],{"className":10707},[430],[317,10709,10711],{"className":10710},[392],[317,10712,10714],{"className":10713,"style":3243},[396],[317,10715],{},[317,10717],{"className":10718},[1127,1134],"\n其中：",[234,10721,10722],{},"从 Planar → FinFET →（更强的包围\u002F堆叠）结构，本质是在“同样占地”里塞进更多可控沟道，提高密度与性能\u002F功耗潜力。",[2872,10724,10726],{"id":10725},"缩放到路线图尽头-scaling-to-the-end-of-the-roadmap","缩放到路线图尽头 ｜ Scaling to the End of the Roadmap",[234,10728,10729],{},[245,10730],{"alt":247,"src":10731},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-10.png",[234,10733,10734,10737,10738,10737,10741],{},[252,10735,10736],{},"32 nm planar"," → ",[252,10739,10740],{},"22 nm multi-gate（多栅\u002FFinFET）",[252,10742,10743],{},"beyond 10 nm stacked nanowires（堆叠纳米线\u002FGAA）",[2469,10745,10746,10749,10752],{},[299,10747,10748],{},"左：平面器件的截面（NMOS\u002FPMOS）随着缩放，短沟道效应更难压制。",[299,10750,10751],{},"中：多栅\u002F3D（FinFET 类）通过更强的栅包围提升静电控制。",[299,10753,10754,10755,10758,10759],{},"右：",[252,10756,10757],{},"纳米线\u002F堆叠GAA","把“栅包围”做到更彻底，并通过“垂直堆叠沟道”提高单位面积驱动能力——是往 10nm 以下走的重要路线。\n",[289,10760,10761],{},[252,10762,10763],{},"堆叠的 GAA FET（Gate-All-Around）有最高的 layout efficiency（版图效率）",[2872,10765,10767],{"id":10766},"三维晶体管持续演进-3-d-transistor-keeps-evolution","三维晶体管持续演进 ｜ 3-D Transistor Keeps Evolution",[234,10769,10770],{},[245,10771],{"alt":247,"src":10772},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-14.png",[234,10774,10775],{},"图给出一条很典型的演进链：",[296,10777,10778,10783,10788,10793],{},[299,10779,10780],{},[252,10781,10782],{},"Triple-gate FinFETs（三栅 FinFET）",[299,10784,10785],{},[252,10786,10787],{},"GAA vertically stacked lateral nanosheet FETs（堆叠纳米片GAA）",[299,10789,10790],{},[252,10791,10792],{},"Forksheet (FS) FET（分叉片\u002F叉形片结构）",[299,10794,10795],{},[252,10796,10797],{},"CFET（把 N\u002FP MOS 垂直堆叠）",[2469,10799,10800,10806,10816],{},[299,10801,10802,10805],{},[252,10803,10804],{},"Nanosheet GAA","：把沟道从“鳍”变成“片”，并做垂直堆叠，通常更易获得更高驱动与更好电控。",[299,10807,10808,10811,10812,10815],{},[252,10809,10810],{},"Forksheet","：核心目的是",[252,10813,10814],{},"把 n\u002Fp 器件之间的隔离\u002F间距做得更紧凑","，从而继续压缩标准单元尺寸（更高密度）。",[299,10817,10818,10821,10822,10825],{},[252,10819,10820],{},"CFET","：把 ",[252,10823,10824],{},"NMOS 和 PMOS 直接上下堆叠","，理论上能显著减少占地（尤其对逻辑单元高度很关键），但工艺集成难度也最高。",[2872,10827,10829],{"id":10828},"finfet-延续摩尔定律20年-finfet-extend-moores-law-for-20-years","FinFET 延续摩尔定律20年 ｜ FinFET: Extend Moore’s Law for 20 Years",[234,10831,10832],{},[245,10833],{"alt":247,"src":10834},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture13-20.png",[234,10836,10837,10838,2970],{},"节点从 ",[252,10839,10840],{},"N7 → N5 → N3 → N2 → A14 → A10 → A7 → A5 → A3 → A2 → sub-A2",[234,10842,10843],{},[252,10844,10845],{},"工艺从FinFET → Nanosheet → CFET → 2DFET（?）",[2469,10847,10848,10854],{},[299,10849,10850,10853],{},[252,10851,10852],{},"Continued dimensional scaling（继续几何缩放）","：下面用金属间距（metal pitch）等指标从 ~40nm 降到 ~14–10nm 级别，暗示互连\u002F布线也在同步成为关键瓶颈。",[299,10855,10856,10859,10860],{},[252,10857,10858],{},"Chip Interconnect Architecture（互连架构）","：出现 ",[252,10861,10862],{},"Back-side Power（背面供电）",{"title":10864,"searchDepth":10865,"depth":10865,"links":10866},"",4,[10867],{"id":240,"depth":10868,"text":241,"children":10869},2,[10870,10872],{"id":539,"depth":10871,"text":539},3,{"id":1833,"depth":10871,"text":1834,"children":10873},[10874,10879,10880,10881,10882,10883,10884,10885,10886,10887,10888,10889,10890,10891,10892,10893,10894,10895,10896,10897,10898,10899,10900,10901],{"id":2874,"depth":10865,"text":2875,"children":10875},[10876],{"id":3595,"depth":10877,"text":10878},5,"TSiT_{Si}TSi​ 对漏电的影响（用数值图说明）｜Effect of TSiT_{Si}TSi​ on Leakage",{"id":4708,"depth":10865,"text":4709},{"id":4808,"depth":10865,"text":4809},{"id":5230,"depth":10865,"text":5231},{"id":5674,"depth":10865,"text":5675},{"id":6366,"depth":10865,"text":6367},{"id":6938,"depth":10865,"text":6939},{"id":6958,"depth":10865,"text":6959},{"id":7192,"depth":10865,"text":7193},{"id":7409,"depth":10865,"text":7410},{"id":8144,"depth":10865,"text":8145},{"id":8167,"depth":10865,"text":8168},{"id":8285,"depth":10865,"text":8286},{"id":8676,"depth":10865,"text":8677},{"id":9290,"depth":10865,"text":9291},{"id":9404,"depth":10865,"text":9405},{"id":9793,"depth":10865,"text":9794},{"id":9975,"depth":10865,"text":9976},{"id":10245,"depth":10865,"text":10246},{"id":10284,"depth":10865,"text":10285},{"id":10394,"depth":10865,"text":10395},{"id":10725,"depth":10865,"text":10726},{"id":10766,"depth":10865,"text":10767},{"id":10828,"depth":10865,"text":10829},[189],"栅极控制能力与新晶体管结构、Thin-Body MOSFET、双栅\u002F三栅结构、FinFET 的发明与演进、SOI 与 3-D 器件结构、FinFET 延续摩尔定律","md",null,{"slots":10907},{},{"text":10909,"minutes":10910,"time":10911,"words":10912},"21 min read",20.49,1229400,4098,{"title":121,"description":10903},{"loc":120,"images":10915},[10916,10917,10918,10919,10920,10921,10922,10923,10924,10925,10926,10927,10928,10929,10930,10931,10932,10933,10934,10935,10936,10937,10938,10939,10940,10941,10942,10943,10944,10945,10946,10947,10948,10949],{"loc":248},{"loc":276},{"loc":284},{"loc":549},{"loc":1565},{"loc":1830},{"loc":2363},{"loc":2371},{"loc":2880},{"loc":3760},{"loc":4714},{"loc":4814},{"loc":5236},{"loc":5680},{"loc":6372},{"loc":6944},{"loc":6964},{"loc":7198},{"loc":7415},{"loc":8150},{"loc":8173},{"loc":8291},{"loc":8682},{"loc":9296},{"loc":9410},{"loc":9808},{"loc":9816},{"loc":9981},{"loc":10251},{"loc":10290},{"loc":10400},{"loc":10731},{"loc":10772},{"loc":10834},[176,10951],"课程笔记","tech","E1OVue0we_P6R4unVBAW2mBR5aTAdBLvWVsvQiz-5DY",[10955,10956],{"title":116,"path":115,"stem":114,"date":117,"type":10952,"children":-1},{"title":171,"path":170,"stem":169,"date":172,"type":10952,"children":-1},1789011908299]