[{"data":1,"prerenderedAt":18239},["ShallowReactive",2],{"series:index":3,"content:\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices\u002Flecture12":225,"surround:\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices\u002Flecture12":18236},[4,10,15,20,25,30,35,40,45,50,55,60,65,70,75,80,84,89,94,98,103,108,113,118,123,128,133,138,143,148,153,158,163,168,173,178,182,186,190,195,200,204,208,212,216,220],{"stem":5,"path":6,"title":7,"date":8,"collapsed":9},"posts\u002F2024\u002FXZZD-Aquire-Score","\u002F2024\u002F10\u002F23\u002FXZZD-Aquire-Score","XZZD_Aquire_Score","2024-10-23 15:08:30",false,{"stem":11,"path":12,"title":13,"date":14,"collapsed":9},"posts\u002F2024\u002Felec-design-contest-2024","\u002F2024\u002F07\u002F07\u002Felec-design-contest-2024","东四——隐秘的角落","2024-07-07 11:44:32",{"stem":16,"path":17,"title":18,"date":19,"collapsed":9},"posts\u002F2024\u002Fmechanics","\u002F2024\u002F07\u002F08\u002Fmechanics","about力学","2024-07-08 14:14:07",{"stem":21,"path":22,"title":23,"date":24,"collapsed":9},"posts\u002F2025\u002F25GElecDesignContest","\u002F2025\u002F08\u002F26\u002F25GElecDesignContest","纪念最好的大二五组 - Soleil 的 电赛回忆录","2025-08-26 11:06:33",{"stem":26,"path":27,"title":28,"date":29,"collapsed":9},"posts\u002F2025\u002FEngineering-Innovation","\u002F2025\u002F01\u002F20\u002FEngineering-Innovation","工程实践与创新能力大赛","2025-01-20 22:20:59",{"stem":31,"path":32,"title":33,"date":34,"collapsed":9},"posts\u002F2025\u002FTOP","\u002F2025\u002F01\u002F20\u002FTOP","置顶","3025-01-20 21:53:36",{"stem":36,"path":37,"title":38,"date":39,"collapsed":9},"posts\u002FUGCourses\u002F1.freshman-spring\u002Fengineering-drawing-notes","\u002F2024\u002F06\u002F30\u002Fengineering-drawing-notes","工程图学期末复习","2024-06-30 21:02:09",{"stem":41,"path":42,"title":43,"date":44,"collapsed":9},"posts\u002FUGCourses\u002F1.freshman-spring\u002Findex","\u002Fugcourses\u002Ffreshman-spring","大一春夏","2024-06-30 19:15:28",{"stem":46,"path":47,"title":48,"date":49,"collapsed":9},"posts\u002FUGCourses\u002F2.sophomore-autumn\u002FComplex-Analysis","\u002F2025\u002F01\u002F21\u002FComplex-Analysis","复变函数与积分变换","2025-01-21 13:23:59",{"stem":51,"path":52,"title":53,"date":54,"collapsed":9},"posts\u002FUGCourses\u002F2.sophomore-autumn\u002FFundamentalsMarxism","\u002F2025\u002F06\u002F06\u002FFundamentalsMarxism","马克思主义基本原理","2025-06-06 00:22:45",{"stem":56,"path":57,"title":58,"date":59,"collapsed":9},"posts\u002FUGCourses\u002F2.sophomore-autumn\u002FMathematical-Modeling","\u002F2024\u002F09\u002F22\u002FMathematical-Modeling","数学建模（课程）","2024-09-22 19:07:42",{"stem":61,"path":62,"title":63,"date":64,"collapsed":9},"posts\u002FUGCourses\u002F2.sophomore-autumn\u002FMicroelectronic-Circuits","\u002F2025\u002F01\u002F20\u002FMicroelectronic-Circuits","电基小子","2025-01-20 23:02:49",{"stem":66,"path":67,"title":68,"date":69,"collapsed":9},"posts\u002FUGCourses\u002F2.sophomore-autumn\u002FMumerical-Analysis","\u002F2024\u002F09\u002F19\u002FMumerical-Analysis","数值分析方法","2024-09-19 17:12:56",{"stem":71,"path":72,"title":73,"date":74,"collapsed":9},"posts\u002FUGCourses\u002F2.sophomore-autumn\u002FProbability-Theory","\u002F2025\u002F01\u002F21\u002FProbability-Theory","概率论与数理统计","2025-01-21 12:52:11",{"stem":76,"path":77,"title":78,"date":79,"collapsed":9},"posts\u002FUGCourses\u002F2.sophomore-autumn\u002Fengineering-training","\u002F2024\u002F09\u002F17\u002Fengineering-training","工程训练","2024-09-17 21:40:26",{"stem":81,"path":82,"title":83,"date":44,"collapsed":9},"posts\u002FUGCourses\u002F2.sophomore-autumn\u002Findex","\u002Fugcourses\u002Fsophomore-autumn","大二秋冬",{"stem":85,"path":86,"title":87,"date":88,"collapsed":9},"posts\u002FUGCourses\u002F2.sophomore-autumn\u002Fsolid-state-physics","\u002F2024\u002F09\u002F11\u002Fsolid-state-physics","固体物理基础","2024-09-11 19:15:26",{"stem":90,"path":91,"title":92,"date":93,"collapsed":9},"posts\u002FUGCourses\u002F3.sophomore-spring\u002FMaoTheory","\u002F2025\u002F06\u002F12\u002FMaoTheory","毛概","2025-06-12 14:58:16",{"stem":95,"path":96,"title":97,"date":44,"collapsed":9},"posts\u002FUGCourses\u002F3.sophomore-spring\u002Findex","\u002Fugcourses\u002Fsophomore-spring","大二春夏",{"stem":99,"path":100,"title":101,"date":102,"collapsed":9},"posts\u002FUGCourses\u002F4.junior-autumn\u002F1.microelectronic-devices\u002FLecture1","\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices\u002Flecture1","Lecture 1：摩尔定律与 CMOS","2026-09-09 19:39:00",{"stem":104,"path":105,"title":106,"date":107,"collapsed":9},"posts\u002FUGCourses\u002F4.junior-autumn\u002F1.microelectronic-devices\u002FLecture10","\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices\u002Flecture10","Lecture 10：从 MOS 电容到 MOSFET","2026-09-10 00:10:00",{"stem":109,"path":110,"title":111,"date":112,"collapsed":9},"posts\u002FUGCourses\u002F4.junior-autumn\u002F1.microelectronic-devices\u002FLecture11","\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices\u002Flecture11","Lecture 11：亚阈值效应与 MOSFET 尺寸缩放","2026-09-10 00:20:00",{"stem":114,"path":115,"title":116,"date":117,"collapsed":9},"posts\u002FUGCourses\u002F4.junior-autumn\u002F1.microelectronic-devices\u002FLecture12","\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices\u002Flecture12","Lecture 12：MOSFET 尺寸缩微","2026-09-10 00:30:00",{"stem":119,"path":120,"title":121,"date":122,"collapsed":9},"posts\u002FUGCourses\u002F4.junior-autumn\u002F1.microelectronic-devices\u002FLecture13","\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices\u002Flecture13","Lecture 13：MOS 新范式","2026-09-10 00:40:00",{"stem":124,"path":125,"title":126,"date":127,"collapsed":9},"posts\u002FUGCourses\u002F4.junior-autumn\u002F1.microelectronic-devices\u002FLecture2","\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices\u002Flecture2","Lecture 2：半导体基础","2026-09-09 19:39:31",{"stem":129,"path":130,"title":131,"date":132,"collapsed":9},"posts\u002FUGCourses\u002F4.junior-autumn\u002F1.microelectronic-devices\u002FLecture3","\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices\u002Flecture3","Lecture 3：费米能级、载流子散射与迁移率","2026-09-09 21:00:00",{"stem":134,"path":135,"title":136,"date":137,"collapsed":9},"posts\u002FUGCourses\u002F4.junior-autumn\u002F1.microelectronic-devices\u002FLecture4","\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices\u002Flecture4","Lecture 4：漂移电流、扩散电流与产生复合","2026-09-09 23:00:00",{"stem":139,"path":140,"title":141,"date":142,"collapsed":9},"posts\u002FUGCourses\u002F4.junior-autumn\u002F1.microelectronic-devices\u002FLecture5","\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices\u002Flecture5","Lecture 5：PN 结与耗尽区","2026-09-09 23:10:00",{"stem":144,"path":145,"title":146,"date":147,"collapsed":9},"posts\u002FUGCourses\u002F4.junior-autumn\u002F1.microelectronic-devices\u002FLecture6","\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices\u002Flecture6","Lecture 6：正向偏置 PN 结与理想二极管方程","2026-09-09 23:20:00",{"stem":149,"path":150,"title":151,"date":152,"collapsed":9},"posts\u002FUGCourses\u002F4.junior-autumn\u002F1.microelectronic-devices\u002FLecture7","\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices\u002Flecture7","Lecture 7：金半接触","2026-09-09 23:40:00",{"stem":154,"path":155,"title":156,"date":157,"collapsed":9},"posts\u002FUGCourses\u002F4.junior-autumn\u002F1.microelectronic-devices\u002FLecture8","\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices\u002Flecture8","Lecture 8：PN 结在光电领域的应用","2026-09-09 23:50:00",{"stem":159,"path":160,"title":161,"date":162,"collapsed":9},"posts\u002FUGCourses\u002F4.junior-autumn\u002F1.microelectronic-devices\u002FLecture9","\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices\u002Flecture9","Lecture 9：MOS 电容","2026-09-10 00:00:00",{"stem":164,"path":165,"title":166,"date":167,"collapsed":9},"posts\u002FUGCourses\u002F4.junior-autumn\u002F1.microelectronic-devices\u002FMidtermExam","\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices\u002Fmidtermexam","期中复习题","2026-09-09 23:30:00",{"stem":169,"path":170,"title":171,"date":172,"collapsed":9},"posts\u002FUGCourses\u002F4.junior-autumn\u002F1.microelectronic-devices\u002FMockExam","\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices\u002Fmockexam","押题密卷","2026-09-10 00:50:00",{"stem":174,"path":175,"title":176,"date":102,"collapsed":177},"posts\u002FUGCourses\u002F4.junior-autumn\u002F1.microelectronic-devices\u002Findex","\u002Fugcourses\u002Fjunior-autumn\u002Fmicroelectronic-devices","微电子器件",true,{"stem":179,"path":180,"title":181,"date":44,"collapsed":9},"posts\u002FUGCourses\u002F4.junior-autumn\u002Findex","\u002Fugcourses\u002Fjunior-autumn","大三秋冬",{"stem":183,"path":184,"title":185,"date":44,"collapsed":9},"posts\u002FUGCourses\u002F5.junior-spring\u002Findex","\u002Fugcourses\u002Fjunior-spring","大三春夏",{"stem":187,"path":188,"title":189,"date":44,"collapsed":9},"posts\u002FUGCourses\u002Findex","\u002Fugcourses","本科课程",{"stem":191,"path":192,"title":193,"date":194,"collapsed":9},"posts\u002Fubuntu\u002F1.config","\u002Fubuntu\u002Fconfig","ubuntu 系统配置","2025-08-26 19:38:06",{"stem":196,"path":197,"title":198,"date":199,"collapsed":9},"posts\u002Fubuntu\u002F2.cadence\u002F1.mmsim","\u002Fubuntu\u002Fcadence\u002Fmmsim","在 Ubuntu 24.04 上安装 Cadence MMSIM 15.1 的兼容性问题","2026-09-09 14:06:40",{"stem":201,"path":202,"title":203,"date":199,"collapsed":9},"posts\u002Fubuntu\u002F2.cadence\u002F2.innovus","\u002Fubuntu\u002Fcadence\u002Finnovus","Innovus安装",{"stem":205,"path":206,"title":207,"date":199,"collapsed":9},"posts\u002Fubuntu\u002F2.cadence\u002Findex","\u002Fubuntu\u002Fcadence","Ubuntu24.04安装Cadence 系列软件",{"stem":209,"path":210,"title":211,"date":199,"collapsed":9},"posts\u002Fubuntu\u002F3.synopsys","\u002Fubuntu\u002Fsynopsys","Ubuntu 24.04 安装 Synopsys",{"stem":213,"path":214,"title":215,"date":199,"collapsed":9},"posts\u002Fubuntu\u002F4.vivado","\u002Fubuntu\u002Fvivado","Ubuntu 24.04 安装 Vivado 2020.1",{"stem":217,"path":218,"title":219,"date":199,"collapsed":9},"posts\u002Fubuntu\u002F5.migrate","\u002Fubuntu\u002Fmigrate","硬盘迁移系统",{"stem":221,"path":222,"title":223,"date":224,"collapsed":9},"posts\u002Fubuntu\u002Findex","\u002Fubuntu","Ubuntu装进移动硬盘","2025-08-25 19:38:06",{"id":226,"title":116,"body":227,"categories":18194,"collapsed":9,"date":117,"description":18195,"draft":9,"extension":18196,"hideInArchive":177,"hideInList":177,"image":18197,"meta":18198,"navigation":177,"path":115,"permalink":18197,"published":18197,"readingTime":18200,"recommend":18197,"references":18197,"seo":18205,"sitemap":18206,"stem":114,"tags":18232,"type":18234,"updated":117,"__hash__":18235},"content\u002Fposts\u002FUGCourses\u002F4.junior-autumn\u002F1.microelectronic-devices\u002FLecture12.md",{"type":228,"value":229,"toc":18138},"minimark",[230,235,239,243,261,269,274,587,602,607,610,624,634,650,2141,2767,2771,2778,2781,2788,2814,2820,2903,2989,3177,3180,3267,3378,3382,3385,3388,3398,3403,3406,3412,3416,3420,3506,3509,3636,3640,4012,4017,4125,4296,4301,4307,5214,5220,5223,5253,5395,5400,5405,5494,5579,5584,5590,5736,5951,5956,5963,6049,6122,6298,6594,6601,7185,7362,7814,7819,7892,8894,8899,9400,9409,9616,9623,9628,9704,9710,9788,9795,9938,9943,9946,10381,10470,10926,10999,11732,11806,11811,11815,12056,12148,12233,12238,12241,12249,12252,12264,12272,12275,12278,12283,12311,12318,12574,12832,13398,13401,13950,14239,14244,14249,15035,15041,15198,15343,15349,15352,16689,16695,16699,16851,16855,16861,16937,16943,16947,17107,17111,17280,17365,17369,17521,17751,17756,17763,17839,17845,17850,17857,17860,18110,18117,18126,18131],[231,232,234],"h2",{"id":233},"技术微缩与摩尔定律-technology-scaling-moores-law","技术微缩与摩尔定律 | Technology Scaling & Moore's Law",[236,237,238],"h3",{"id":238},"摩尔定律",[240,241,242],"p",{},"Godon Moore 在1965年总结了一个规律：",[244,245,246,250,253],"ul",{},[247,248,249],"li",{},"芯片中的器件数目每18-24个月左右会翻一倍。",[247,251,252],{},"每一代技术节点（Node）通常由最小线宽\u002F间距定义，特征尺寸约为上一代的70%。",[247,254,255,256],{},"电路面积减少约2倍，有利于降低成本和提高速度。\n",[257,258],"img",{"alt":259,"src":260},"image.png","\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-15.png",[236,262,264,265],{"id":263},"技术路线图-technology-roadmap-example","技术路线图 | ",[266,267,268],"strong",{},"Technology Roadmap (Example)",[270,271,273],"h4",{"id":272},"缩微的变化趋势-scaling-trends","缩微的变化趋势 | Scaling Trends",[244,275,276,398,575,581],{},[247,277,278,393,394,397],{},[279,280,283,316],"span",{"className":281},[282],"katex",[279,284,287],{"className":285},[286],"katex-mathml",[288,289,291],"math",{"xmlns":290},"http:\u002F\u002Fwww.w3.org\u002F1998\u002FMath\u002FMathML",[292,293,294,311],"semantics",{},[295,296,297],"mrow",{},[298,299,300,304],"msub",{},[301,302,303],"mi",{},"V",[295,305,306,309],{},[301,307,308],{},"d",[301,310,308],{},[312,313,315],"annotation",{"encoding":314},"application\u002Fx-tex","V_{dd}",[279,317,321],{"className":318,"ariaHidden":320},[319],"katex-html","true",[279,322,325,330],{"className":323},[324],"base",[279,326],{"className":327,"style":329},[328],"strut","height:0.8333em;vertical-align:-0.15em;",[279,331,334,339],{"className":332},[333],"mord",[279,335,303],{"className":336,"style":338},[333,337],"mathnormal","margin-right:0.2222em;",[279,340,343],{"className":341},[342],"msupsub",[279,344,348,384],{"className":345},[346,347],"vlist-t","vlist-t2",[279,349,352,379],{"className":350},[351],"vlist-r",[279,353,357],{"className":354,"style":356},[355],"vlist","height:0.3361em;",[279,358,360,365],{"style":359},"top:-2.55em;margin-left:-0.2222em;margin-right:0.05em;",[279,361],{"className":362,"style":364},[363],"pstrut","height:2.7em;",[279,366,372],{"className":367},[368,369,370,371],"sizing","reset-size6","size3","mtight",[279,373,375],{"className":374},[333,371],[279,376,378],{"className":377},[333,337,371],"dd",[279,380,383],{"className":381},[382],"vlist-s","​",[279,385,387],{"className":386},[351],[279,388,391],{"className":389,"style":390},[355],"height:0.15em;",[279,392],{}," ",[266,395,396],{},"(电源电压)"," 随节点缩小而降低，以控制功耗，与此同时晶体管密度和频率持续提升。",[247,399,400,393,486,489,490,574],{},[279,401,403,428],{"className":402},[282],[279,404,406],{"className":405},[286],[288,407,408],{"xmlns":290},[292,409,410,425],{},[295,411,412],{},[298,413,414,417],{},[301,415,416],{},"T",[295,418,419,422],{},[301,420,421],{},"o",[301,423,424],{},"x",[312,426,427],{"encoding":314},"T_{ox}",[279,429,431],{"className":430,"ariaHidden":320},[319],[279,432,434,437],{"className":433},[324],[279,435],{"className":436,"style":329},[328],[279,438,440,444],{"className":439},[333],[279,441,416],{"className":442,"style":443},[333,337],"margin-right:0.1389em;",[279,445,447],{"className":446},[342],[279,448,450,478],{"className":449},[346,347],[279,451,453,475],{"className":452},[351],[279,454,457],{"className":455,"style":456},[355],"height:0.1514em;",[279,458,460,463],{"style":459},"top:-2.55em;margin-left:-0.1389em;margin-right:0.05em;",[279,461],{"className":462,"style":364},[363],[279,464,466],{"className":465},[368,369,370,371],[279,467,469,472],{"className":468},[333,371],[279,470,421],{"className":471},[333,337,371],[279,473,424],{"className":474},[333,337,371],[279,476,383],{"className":477},[382],[279,479,481],{"className":480},[351],[279,482,484],{"className":483,"style":390},[355],[279,485],{},[266,487,488],{},"(氧化层厚度)"," 被减小以提高 ",[279,491,493,517],{"className":492},[282],[279,494,496],{"className":495},[286],[288,497,498],{"xmlns":290},[292,499,500,514],{},[295,501,502],{},[298,503,504,507],{},[301,505,506],{},"I",[295,508,509,511],{},[301,510,421],{},[301,512,513],{},"n",[312,515,516],{"encoding":314},"I_{on}",[279,518,520],{"className":519,"ariaHidden":320},[319],[279,521,523,526],{"className":522},[324],[279,524],{"className":525,"style":329},[328],[279,527,529,533],{"className":528},[333],[279,530,506],{"className":531,"style":532},[333,337],"margin-right:0.0785em;",[279,534,536],{"className":535},[342],[279,537,539,566],{"className":538},[346,347],[279,540,542,563],{"className":541},[351],[279,543,545],{"className":544,"style":456},[355],[279,546,548,551],{"style":547},"top:-2.55em;margin-left:-0.0785em;margin-right:0.05em;",[279,549],{"className":550,"style":364},[363],[279,552,554],{"className":553},[368,369,370,371],[279,555,557,560],{"className":556},[333,371],[279,558,421],{"className":559},[333,337,371],[279,561,513],{"className":562},[333,337,371],[279,564,383],{"className":565},[382],[279,567,569],{"className":568},[351],[279,570,572],{"className":571,"style":390},[355],[279,573],{}," 并保持良好的晶体管特性。",[247,576,577,580],{},[266,578,579],{},"性能","分类：HP (High Performance) 和 LSTP (Low Stand-by Power)。",[247,582,583,586],{},[266,584,585],{},"技术演进","：从应变硅 (Strained Silicon) ，High-k\u002FMetal-Gate，到湿法光刻（Wet Lithography）再到新结构（如FinFET\u002FUTB）。",[588,589,590,593,596,599],"blockquote",{},[240,591,592],{},"英文版",[240,594,595],{},"Vdd is reduced at each node to contain power consumption in spite of rising transistor density and frequency",[240,597,598],{},"Tox is reduced to raise Ion and retain good transistor behaviors",[240,600,601],{},"HP: High performance; LSTP: Low stand-by power",[240,603,604],{},[257,605],{"alt":259,"src":606},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-14.png",[270,608,609],{"id":609},"两种性能的对比",[240,611,612,615,616,619,620,623],{},[266,613,614],{},"HP（High Performance）","是指高性能计算处理器工艺，追求极致的",[266,617,618],{},"运算速度","和",[266,621,622],{},"开关频率","。",[240,625,626,629,630,633],{},[266,627,628],{},"LSTP（Low Stand-by Power）","是指低功率待机的产品，如手机，追求极致的",[266,631,632],{},"低漏电流","（Low Leakage），以延长电池寿命。",[588,635,636,638,644],{},[240,637,592],{},[240,639,640,643],{},[266,641,642],{},"HP (High Performance)"," refers to the process technology for high-performance computing processors, which pursues ultimate computing speed and switching frequency.",[240,645,646,649],{},[266,647,648],{},"LSTP (Low Stand-by Power)"," refers to products designed for low standby power consumption, such as mobile phones, which pursue extreme low leakage current to extend battery life.",[651,652,654,659],"alert",{"type":653},"tip",[240,655,656],{},[266,657,658],{},"Trade-off",[244,660,661,1882],{},[247,662,663,666,738,741,830,833,834],{},[266,664,665],{},"阈值电压 (",[279,667,669,688],{"className":668},[282],[279,670,672],{"className":671},[286],[288,673,674],{"xmlns":290},[292,675,676,685],{},[295,677,678],{},[298,679,680,682],{},[301,681,303],{},[301,683,684],{},"t",[312,686,687],{"encoding":314},"V_t",[279,689,691],{"className":690,"ariaHidden":320},[319],[279,692,694,697],{"className":693},[324],[279,695],{"className":696,"style":329},[328],[279,698,700,703],{"className":699},[333],[279,701,303],{"className":702,"style":338},[333,337],[279,704,706],{"className":705},[342],[279,707,709,730],{"className":708},[346,347],[279,710,712,727],{"className":711},[351],[279,713,716],{"className":714,"style":715},[355],"height:0.2806em;",[279,717,718,721],{"style":359},[279,719],{"className":720,"style":364},[363],[279,722,724],{"className":723},[368,369,370,371],[279,725,684],{"className":726},[333,337,371],[279,728,383],{"className":729},[382],[279,731,733],{"className":732},[351],[279,734,736],{"className":735,"style":390},[355],[279,737],{},[266,739,740],{},") 与 漏电流 (",[279,742,744,769],{"className":743},[282],[279,745,747],{"className":746},[286],[288,748,749],{"xmlns":290},[292,750,751,766],{},[295,752,753],{},[298,754,755,757],{},[301,756,506],{},[295,758,759,761,764],{},[301,760,421],{},[301,762,763],{},"f",[301,765,763],{},[312,767,768],{"encoding":314},"I_{off}",[279,770,772],{"className":771,"ariaHidden":320},[319],[279,773,775,779],{"className":774},[324],[279,776],{"className":777,"style":778},[328],"height:0.9694em;vertical-align:-0.2861em;",[279,780,782,785],{"className":781},[333],[279,783,506],{"className":784,"style":532},[333,337],[279,786,788],{"className":787},[342],[279,789,791,821],{"className":790},[346,347],[279,792,794,818],{"className":793},[351],[279,795,797],{"className":796,"style":356},[355],[279,798,799,802],{"style":547},[279,800],{"className":801,"style":364},[363],[279,803,805],{"className":804},[368,369,370,371],[279,806,808,811,815],{"className":807},[333,371],[279,809,421],{"className":810},[333,337,371],[279,812,763],{"className":813,"style":814},[333,337,371],"margin-right:0.1076em;",[279,816,763],{"className":817,"style":814},[333,337,371],[279,819,383],{"className":820},[382],[279,822,824],{"className":823},[351],[279,825,828],{"className":826,"style":827},[355],"height:0.2861em;",[279,829],{},[266,831,832],{},")","：\n",[244,835,836,1638],{},[247,837,838,841,842,393,845,914,915,1186,1187,1256,1257,1336,1337,1552,1553,1637],{},[266,839,840],{},"HP"," 通常具有",[266,843,844],{},"较低的",[279,846,848,865],{"className":847},[282],[279,849,851],{"className":850},[286],[288,852,853],{"xmlns":290},[292,854,855,863],{},[295,856,857],{},[298,858,859,861],{},[301,860,303],{},[301,862,684],{},[312,864,687],{"encoding":314},[279,866,868],{"className":867,"ariaHidden":320},[319],[279,869,871,874],{"className":870},[324],[279,872],{"className":873,"style":329},[328],[279,875,877,880],{"className":876},[333],[279,878,303],{"className":879,"style":338},[333,337],[279,881,883],{"className":882},[342],[279,884,886,906],{"className":885},[346,347],[279,887,889,903],{"className":888},[351],[279,890,892],{"className":891,"style":715},[355],[279,893,894,897],{"style":359},[279,895],{"className":896,"style":364},[363],[279,898,900],{"className":899},[368,369,370,371],[279,901,684],{"className":902},[333,337,371],[279,904,383],{"className":905},[382],[279,907,909],{"className":908},[351],[279,910,912],{"className":911,"style":390},[355],[279,913],{},"。根据公式 ",[279,916,918,976],{"className":917},[282],[279,919,921],{"className":920},[286],[288,922,923],{"xmlns":290},[292,924,925,973],{},[295,926,927,937,941,945,955,958,964],{},[298,928,929,931],{},[301,930,506],{},[295,932,933,935],{},[301,934,421],{},[301,936,513],{},[938,939,940],"mo",{},"∝",[938,942,944],{"stretchy":943},"false","(",[298,946,947,949],{},[301,948,303],{},[295,950,951,953],{},[301,952,308],{},[301,954,308],{},[938,956,957],{},"−",[298,959,960,962],{},[301,961,303],{},[301,963,684],{},[965,966,967,969],"msup",{},[938,968,832],{"stretchy":943},[970,971,972],"mn",{},"2",[312,974,975],{"encoding":314},"I_{on} \\propto (V_{dd} - V_t)^2",[279,977,979,1043,1107],{"className":978,"ariaHidden":320},[319],[279,980,982,985,1031,1036,1040],{"className":981},[324],[279,983],{"className":984,"style":329},[328],[279,986,988,991],{"className":987},[333],[279,989,506],{"className":990,"style":532},[333,337],[279,992,994],{"className":993},[342],[279,995,997,1023],{"className":996},[346,347],[279,998,1000,1020],{"className":999},[351],[279,1001,1003],{"className":1002,"style":456},[355],[279,1004,1005,1008],{"style":547},[279,1006],{"className":1007,"style":364},[363],[279,1009,1011],{"className":1010},[368,369,370,371],[279,1012,1014,1017],{"className":1013},[333,371],[279,1015,421],{"className":1016},[333,337,371],[279,1018,513],{"className":1019},[333,337,371],[279,1021,383],{"className":1022},[382],[279,1024,1026],{"className":1025},[351],[279,1027,1029],{"className":1028,"style":390},[355],[279,1030],{},[279,1032],{"className":1033,"style":1035},[1034],"mspace","margin-right:0.2778em;",[279,1037,940],{"className":1038},[1039],"mrel",[279,1041],{"className":1042,"style":1035},[1034],[279,1044,1046,1050,1054,1097,1100,1104],{"className":1045},[324],[279,1047],{"className":1048,"style":1049},[328],"height:1em;vertical-align:-0.25em;",[279,1051,944],{"className":1052},[1053],"mopen",[279,1055,1057,1060],{"className":1056},[333],[279,1058,303],{"className":1059,"style":338},[333,337],[279,1061,1063],{"className":1062},[342],[279,1064,1066,1089],{"className":1065},[346,347],[279,1067,1069,1086],{"className":1068},[351],[279,1070,1072],{"className":1071,"style":356},[355],[279,1073,1074,1077],{"style":359},[279,1075],{"className":1076,"style":364},[363],[279,1078,1080],{"className":1079},[368,369,370,371],[279,1081,1083],{"className":1082},[333,371],[279,1084,378],{"className":1085},[333,337,371],[279,1087,383],{"className":1088},[382],[279,1090,1092],{"className":1091},[351],[279,1093,1095],{"className":1094,"style":390},[355],[279,1096],{},[279,1098],{"className":1099,"style":338},[1034],[279,1101,957],{"className":1102},[1103],"mbin",[279,1105],{"className":1106,"style":338},[1034],[279,1108,1110,1114,1154],{"className":1109},[324],[279,1111],{"className":1112,"style":1113},[328],"height:1.0641em;vertical-align:-0.25em;",[279,1115,1117,1120],{"className":1116},[333],[279,1118,303],{"className":1119,"style":338},[333,337],[279,1121,1123],{"className":1122},[342],[279,1124,1126,1146],{"className":1125},[346,347],[279,1127,1129,1143],{"className":1128},[351],[279,1130,1132],{"className":1131,"style":715},[355],[279,1133,1134,1137],{"style":359},[279,1135],{"className":1136,"style":364},[363],[279,1138,1140],{"className":1139},[368,369,370,371],[279,1141,684],{"className":1142},[333,337,371],[279,1144,383],{"className":1145},[382],[279,1147,1149],{"className":1148},[351],[279,1150,1152],{"className":1151,"style":390},[355],[279,1153],{},[279,1155,1158,1161],{"className":1156},[1157],"mclose",[279,1159,832],{"className":1160},[1157],[279,1162,1164],{"className":1163},[342],[279,1165,1167],{"className":1166},[346],[279,1168,1170],{"className":1169},[351],[279,1171,1174],{"className":1172,"style":1173},[355],"height:0.8141em;",[279,1175,1177,1180],{"style":1176},"top:-3.063em;margin-right:0.05em;",[279,1178],{"className":1179,"style":364},[363],[279,1181,1183],{"className":1182},[368,369,370,371],[279,1184,972],{"className":1185},[333,371],"，低 ",[279,1188,1190,1207],{"className":1189},[282],[279,1191,1193],{"className":1192},[286],[288,1194,1195],{"xmlns":290},[292,1196,1197,1205],{},[295,1198,1199],{},[298,1200,1201,1203],{},[301,1202,303],{},[301,1204,684],{},[312,1206,687],{"encoding":314},[279,1208,1210],{"className":1209,"ariaHidden":320},[319],[279,1211,1213,1216],{"className":1212},[324],[279,1214],{"className":1215,"style":329},[328],[279,1217,1219,1222],{"className":1218},[333],[279,1220,303],{"className":1221,"style":338},[333,337],[279,1223,1225],{"className":1224},[342],[279,1226,1228,1248],{"className":1227},[346,347],[279,1229,1231,1245],{"className":1230},[351],[279,1232,1234],{"className":1233,"style":715},[355],[279,1235,1236,1239],{"style":359},[279,1237],{"className":1238,"style":364},[363],[279,1240,1242],{"className":1241},[368,369,370,371],[279,1243,684],{"className":1244},[333,337,371],[279,1246,383],{"className":1247},[382],[279,1249,1251],{"className":1250},[351],[279,1252,1254],{"className":1253,"style":390},[355],[279,1255],{}," 可以提高 ",[279,1258,1260,1281],{"className":1259},[282],[279,1261,1263],{"className":1262},[286],[288,1264,1265],{"xmlns":290},[292,1266,1267,1279],{},[295,1268,1269],{},[298,1270,1271,1273],{},[301,1272,506],{},[295,1274,1275,1277],{},[301,1276,421],{},[301,1278,513],{},[312,1280,516],{"encoding":314},[279,1282,1284],{"className":1283,"ariaHidden":320},[319],[279,1285,1287,1290],{"className":1286},[324],[279,1288],{"className":1289,"style":329},[328],[279,1291,1293,1296],{"className":1292},[333],[279,1294,506],{"className":1295,"style":532},[333,337],[279,1297,1299],{"className":1298},[342],[279,1300,1302,1328],{"className":1301},[346,347],[279,1303,1305,1325],{"className":1304},[351],[279,1306,1308],{"className":1307,"style":456},[355],[279,1309,1310,1313],{"style":547},[279,1311],{"className":1312,"style":364},[363],[279,1314,1316],{"className":1315},[368,369,370,371],[279,1317,1319,1322],{"className":1318},[333,371],[279,1320,421],{"className":1321},[333,337,371],[279,1323,513],{"className":1324},[333,337,371],[279,1326,383],{"className":1327},[382],[279,1329,1331],{"className":1330},[351],[279,1332,1334],{"className":1333,"style":390},[355],[279,1335],{},"（速度），但根据亚阈值漏电公式 ",[279,1338,1340,1388],{"className":1339},[282],[279,1341,1343],{"className":1342},[286],[288,1344,1345],{"xmlns":290},[292,1346,1347,1385],{},[295,1348,1349,1361,1363],{},[298,1350,1351,1353],{},[301,1352,506],{},[295,1354,1355,1357,1359],{},[301,1356,421],{},[301,1358,763],{},[301,1360,763],{},[938,1362,940],{},[965,1364,1365,1368],{},[970,1366,1367],{},"10",[295,1369,1370,1372,1378,1382],{},[938,1371,957],{},[298,1373,1374,1376],{},[301,1375,303],{},[301,1377,684],{},[301,1379,1381],{"mathvariant":1380},"normal","\u002F",[301,1383,1384],{},"S",[312,1386,1387],{"encoding":314},"I_{off} \\propto 10^{-V_t\u002FS}",[279,1389,1391,1455],{"className":1390,"ariaHidden":320},[319],[279,1392,1394,1397,1446,1449,1452],{"className":1393},[324],[279,1395],{"className":1396,"style":778},[328],[279,1398,1400,1403],{"className":1399},[333],[279,1401,506],{"className":1402,"style":532},[333,337],[279,1404,1406],{"className":1405},[342],[279,1407,1409,1438],{"className":1408},[346,347],[279,1410,1412,1435],{"className":1411},[351],[279,1413,1415],{"className":1414,"style":356},[355],[279,1416,1417,1420],{"style":547},[279,1418],{"className":1419,"style":364},[363],[279,1421,1423],{"className":1422},[368,369,370,371],[279,1424,1426,1429,1432],{"className":1425},[333,371],[279,1427,421],{"className":1428},[333,337,371],[279,1430,763],{"className":1431,"style":814},[333,337,371],[279,1433,763],{"className":1434,"style":814},[333,337,371],[279,1436,383],{"className":1437},[382],[279,1439,1441],{"className":1440},[351],[279,1442,1444],{"className":1443,"style":827},[355],[279,1445],{},[279,1447],{"className":1448,"style":1035},[1034],[279,1450,940],{"className":1451},[1039],[279,1453],{"className":1454,"style":1035},[1034],[279,1456,1458,1462,1466],{"className":1457},[324],[279,1459],{"className":1460,"style":1461},[328],"height:0.888em;",[279,1463,1465],{"className":1464},[333],"1",[279,1467,1469,1473],{"className":1468},[333],[279,1470,1472],{"className":1471},[333],"0",[279,1474,1476],{"className":1475},[342],[279,1477,1479],{"className":1478},[346],[279,1480,1482],{"className":1481},[351],[279,1483,1485],{"className":1484,"style":1461},[355],[279,1486,1487,1490],{"style":1176},[279,1488],{"className":1489,"style":364},[363],[279,1491,1493],{"className":1492},[368,369,370,371],[279,1494,1496,1499,1545,1548],{"className":1495},[333,371],[279,1497,957],{"className":1498},[333,371],[279,1500,1502,1505],{"className":1501},[333,371],[279,1503,303],{"className":1504,"style":338},[333,337,371],[279,1506,1508],{"className":1507},[342],[279,1509,1511,1536],{"className":1510},[346,347],[279,1512,1514,1533],{"className":1513},[351],[279,1515,1518],{"className":1516,"style":1517},[355],"height:0.2963em;",[279,1519,1521,1525],{"style":1520},"top:-2.357em;margin-left:-0.2222em;margin-right:0.0714em;",[279,1522],{"className":1523,"style":1524},[363],"height:2.5em;",[279,1526,1530],{"className":1527},[368,1528,1529,371],"reset-size3","size1",[279,1531,684],{"className":1532},[333,337,371],[279,1534,383],{"className":1535},[382],[279,1537,1539],{"className":1538},[351],[279,1540,1543],{"className":1541,"style":1542},[355],"height:0.143em;",[279,1544],{},[279,1546,1381],{"className":1547},[333,371],[279,1549,1384],{"className":1550,"style":1551},[333,337,371],"margin-right:0.0576em;","，这会导致 ",[279,1554,1556,1579],{"className":1555},[282],[279,1557,1559],{"className":1558},[286],[288,1560,1561],{"xmlns":290},[292,1562,1563,1577],{},[295,1564,1565],{},[298,1566,1567,1569],{},[301,1568,506],{},[295,1570,1571,1573,1575],{},[301,1572,421],{},[301,1574,763],{},[301,1576,763],{},[312,1578,768],{"encoding":314},[279,1580,1582],{"className":1581,"ariaHidden":320},[319],[279,1583,1585,1588],{"className":1584},[324],[279,1586],{"className":1587,"style":778},[328],[279,1589,1591,1594],{"className":1590},[333],[279,1592,506],{"className":1593,"style":532},[333,337],[279,1595,1597],{"className":1596},[342],[279,1598,1600,1629],{"className":1599},[346,347],[279,1601,1603,1626],{"className":1602},[351],[279,1604,1606],{"className":1605,"style":356},[355],[279,1607,1608,1611],{"style":547},[279,1609],{"className":1610,"style":364},[363],[279,1612,1614],{"className":1613},[368,369,370,371],[279,1615,1617,1620,1623],{"className":1616},[333,371],[279,1618,421],{"className":1619},[333,337,371],[279,1621,763],{"className":1622,"style":814},[333,337,371],[279,1624,763],{"className":1625,"style":814},[333,337,371],[279,1627,383],{"className":1628},[382],[279,1630,1632],{"className":1631},[351],[279,1633,1635],{"className":1634,"style":827},[355],[279,1636],{}," 指数级上升。",[247,1639,1640,1643,1644,393,1647,1716,1717,1796,1797,1881],{},[266,1641,1642],{},"LSTP"," 采用",[266,1645,1646],{},"较高的",[279,1648,1650,1667],{"className":1649},[282],[279,1651,1653],{"className":1652},[286],[288,1654,1655],{"xmlns":290},[292,1656,1657,1665],{},[295,1658,1659],{},[298,1660,1661,1663],{},[301,1662,303],{},[301,1664,684],{},[312,1666,687],{"encoding":314},[279,1668,1670],{"className":1669,"ariaHidden":320},[319],[279,1671,1673,1676],{"className":1672},[324],[279,1674],{"className":1675,"style":329},[328],[279,1677,1679,1682],{"className":1678},[333],[279,1680,303],{"className":1681,"style":338},[333,337],[279,1683,1685],{"className":1684},[342],[279,1686,1688,1708],{"className":1687},[346,347],[279,1689,1691,1705],{"className":1690},[351],[279,1692,1694],{"className":1693,"style":715},[355],[279,1695,1696,1699],{"style":359},[279,1697],{"className":1698,"style":364},[363],[279,1700,1702],{"className":1701},[368,369,370,371],[279,1703,684],{"className":1704},[333,337,371],[279,1706,383],{"className":1707},[382],[279,1709,1711],{"className":1710},[351],[279,1712,1714],{"className":1713,"style":390},[355],[279,1715],{},"。这牺牲了部分 ",[279,1718,1720,1741],{"className":1719},[282],[279,1721,1723],{"className":1722},[286],[288,1724,1725],{"xmlns":290},[292,1726,1727,1739],{},[295,1728,1729],{},[298,1730,1731,1733],{},[301,1732,506],{},[295,1734,1735,1737],{},[301,1736,421],{},[301,1738,513],{},[312,1740,516],{"encoding":314},[279,1742,1744],{"className":1743,"ariaHidden":320},[319],[279,1745,1747,1750],{"className":1746},[324],[279,1748],{"className":1749,"style":329},[328],[279,1751,1753,1756],{"className":1752},[333],[279,1754,506],{"className":1755,"style":532},[333,337],[279,1757,1759],{"className":1758},[342],[279,1760,1762,1788],{"className":1761},[346,347],[279,1763,1765,1785],{"className":1764},[351],[279,1766,1768],{"className":1767,"style":456},[355],[279,1769,1770,1773],{"style":547},[279,1771],{"className":1772,"style":364},[363],[279,1774,1776],{"className":1775},[368,369,370,371],[279,1777,1779,1782],{"className":1778},[333,371],[279,1780,421],{"className":1781},[333,337,371],[279,1783,513],{"className":1784},[333,337,371],[279,1786,383],{"className":1787},[382],[279,1789,1791],{"className":1790},[351],[279,1792,1794],{"className":1793,"style":390},[355],[279,1795],{},"（速度），但能将 ",[279,1798,1800,1823],{"className":1799},[282],[279,1801,1803],{"className":1802},[286],[288,1804,1805],{"xmlns":290},[292,1806,1807,1821],{},[295,1808,1809],{},[298,1810,1811,1813],{},[301,1812,506],{},[295,1814,1815,1817,1819],{},[301,1816,421],{},[301,1818,763],{},[301,1820,763],{},[312,1822,768],{"encoding":314},[279,1824,1826],{"className":1825,"ariaHidden":320},[319],[279,1827,1829,1832],{"className":1828},[324],[279,1830],{"className":1831,"style":778},[328],[279,1833,1835,1838],{"className":1834},[333],[279,1836,506],{"className":1837,"style":532},[333,337],[279,1839,1841],{"className":1840},[342],[279,1842,1844,1873],{"className":1843},[346,347],[279,1845,1847,1870],{"className":1846},[351],[279,1848,1850],{"className":1849,"style":356},[355],[279,1851,1852,1855],{"style":547},[279,1853],{"className":1854,"style":364},[363],[279,1856,1858],{"className":1857},[368,369,370,371],[279,1859,1861,1864,1867],{"className":1860},[333,371],[279,1862,421],{"className":1863},[333,337,371],[279,1865,763],{"className":1866,"style":814},[333,337,371],[279,1868,763],{"className":1869,"style":814},[333,337,371],[279,1871,383],{"className":1872},[382],[279,1874,1876],{"className":1875},[351],[279,1877,1879],{"className":1878,"style":827},[355],[279,1880],{}," 压低几个数量级，确保设备在待机时不耗电。",[247,1883,1884,1887,1966,833,1969],{},[266,1885,1886],{},"氧化层厚度 (",[279,1888,1890,1911],{"className":1889},[282],[279,1891,1893],{"className":1892},[286],[288,1894,1895],{"xmlns":290},[292,1896,1897,1909],{},[295,1898,1899],{},[298,1900,1901,1903],{},[301,1902,416],{},[295,1904,1905,1907],{},[301,1906,421],{},[301,1908,424],{},[312,1910,427],{"encoding":314},[279,1912,1914],{"className":1913,"ariaHidden":320},[319],[279,1915,1917,1920],{"className":1916},[324],[279,1918],{"className":1919,"style":329},[328],[279,1921,1923,1926],{"className":1922},[333],[279,1924,416],{"className":1925,"style":443},[333,337],[279,1927,1929],{"className":1928},[342],[279,1930,1932,1958],{"className":1931},[346,347],[279,1933,1935,1955],{"className":1934},[351],[279,1936,1938],{"className":1937,"style":456},[355],[279,1939,1940,1943],{"style":459},[279,1941],{"className":1942,"style":364},[363],[279,1944,1946],{"className":1945},[368,369,370,371],[279,1947,1949,1952],{"className":1948},[333,371],[279,1950,421],{"className":1951},[333,337,371],[279,1953,424],{"className":1954},[333,337,371],[279,1956,383],{"className":1957},[382],[279,1959,1961],{"className":1960},[351],[279,1962,1964],{"className":1963,"style":390},[355],[279,1965],{},[266,1967,1968],{},") 与 栅极漏电",[244,1970,1971,2138],{},[247,1972,1973,1974,2053,2054,2137],{},"HP 使用极薄的",[279,1975,1977,1998],{"className":1976},[282],[279,1978,1980],{"className":1979},[286],[288,1981,1982],{"xmlns":290},[292,1983,1984,1996],{},[295,1985,1986],{},[298,1987,1988,1990],{},[301,1989,416],{},[295,1991,1992,1994],{},[301,1993,421],{},[301,1995,424],{},[312,1997,427],{"encoding":314},[279,1999,2001],{"className":2000,"ariaHidden":320},[319],[279,2002,2004,2007],{"className":2003},[324],[279,2005],{"className":2006,"style":329},[328],[279,2008,2010,2013],{"className":2009},[333],[279,2011,416],{"className":2012,"style":443},[333,337],[279,2014,2016],{"className":2015},[342],[279,2017,2019,2045],{"className":2018},[346,347],[279,2020,2022,2042],{"className":2021},[351],[279,2023,2025],{"className":2024,"style":456},[355],[279,2026,2027,2030],{"style":459},[279,2028],{"className":2029,"style":364},[363],[279,2031,2033],{"className":2032},[368,369,370,371],[279,2034,2036,2039],{"className":2035},[333,371],[279,2037,421],{"className":2038},[333,337,371],[279,2040,424],{"className":2041},[333,337,371],[279,2043,383],{"className":2044},[382],[279,2046,2048],{"className":2047},[351],[279,2049,2051],{"className":2050,"style":390},[355],[279,2052],{},"来获得更大的栅电容 ",[279,2055,2057,2080],{"className":2056},[282],[279,2058,2060],{"className":2059},[286],[288,2061,2062],{"xmlns":290},[292,2063,2064,2077],{},[295,2065,2066],{},[298,2067,2068,2071],{},[301,2069,2070],{},"C",[295,2072,2073,2075],{},[301,2074,421],{},[301,2076,424],{},[312,2078,2079],{"encoding":314},"C_{ox}",[279,2081,2083],{"className":2082,"ariaHidden":320},[319],[279,2084,2086,2089],{"className":2085},[324],[279,2087],{"className":2088,"style":329},[328],[279,2090,2092,2096],{"className":2091},[333],[279,2093,2070],{"className":2094,"style":2095},[333,337],"margin-right:0.0715em;",[279,2097,2099],{"className":2098},[342],[279,2100,2102,2129],{"className":2101},[346,347],[279,2103,2105,2126],{"className":2104},[351],[279,2106,2108],{"className":2107,"style":456},[355],[279,2109,2111,2114],{"style":2110},"top:-2.55em;margin-left:-0.0715em;margin-right:0.05em;",[279,2112],{"className":2113,"style":364},[363],[279,2115,2117],{"className":2116},[368,369,370,371],[279,2118,2120,2123],{"className":2119},[333,371],[279,2121,421],{"className":2122},[333,337,371],[279,2124,424],{"className":2125},[333,337,371],[279,2127,383],{"className":2128},[382],[279,2130,2132],{"className":2131},[351],[279,2133,2135],{"className":2134,"style":390},[355],[279,2136],{},"，从而提升电流。但这会面临栅极隧穿漏电流（Gate Tunneling Leakage）的问题。",[247,2139,2140],{},"LSTP 适当增加 EOT 厚度（例如high K 材料），以物理上阻挡电子隧穿，减少这一部分的功耗。",[651,2142,2144,2148,2237,2330],{"type":2143},"info",[270,2145,2147],{"id":2146},"eot-equivalent-oxide-thickness-等效sio2氧化层厚度","EOT (Equivalent Oxide Thickness, 等效SiO2氧化层厚度)",[240,2149,2150,2151,2236],{},"EOT 是为了在使用高介电常数（High-k）材料替代二氧化硅（",[279,2152,2154,2178],{"className":2153},[282],[279,2155,2157],{"className":2156},[286],[288,2158,2159],{"xmlns":290},[292,2160,2161,2175],{},[295,2162,2163,2165,2168],{},[301,2164,1384],{},[301,2166,2167],{},"i",[298,2169,2170,2173],{},[301,2171,2172],{},"O",[970,2174,972],{},[312,2176,2177],{"encoding":314},"SiO_2",[279,2179,2181],{"className":2180,"ariaHidden":320},[319],[279,2182,2184,2187,2190,2193],{"className":2183},[324],[279,2185],{"className":2186,"style":329},[328],[279,2188,1384],{"className":2189,"style":1551},[333,337],[279,2191,2167],{"className":2192},[333,337],[279,2194,2196,2200],{"className":2195},[333],[279,2197,2172],{"className":2198,"style":2199},[333,337],"margin-right:0.0278em;",[279,2201,2203],{"className":2202},[342],[279,2204,2206,2228],{"className":2205},[346,347],[279,2207,2209,2225],{"className":2208},[351],[279,2210,2213],{"className":2211,"style":2212},[355],"height:0.3011em;",[279,2214,2216,2219],{"style":2215},"top:-2.55em;margin-left:-0.0278em;margin-right:0.05em;",[279,2217],{"className":2218,"style":364},[363],[279,2220,2222],{"className":2221},[368,369,370,371],[279,2223,972],{"className":2224},[333,371],[279,2226,383],{"className":2227},[382],[279,2229,2231],{"className":2230},[351],[279,2232,2234],{"className":2233,"style":390},[355],[279,2235],{},"）时，能有一个统一的衡量标准。",[244,2238,2239,2325],{},[247,2240,2241,2244,2245,2324],{},[266,2242,2243],{},"定义","：指产生与 High-k 绝缘层相同单位面积电容所需的 ",[279,2246,2248,2269],{"className":2247},[282],[279,2249,2251],{"className":2250},[286],[288,2252,2253],{"xmlns":290},[292,2254,2255,2267],{},[295,2256,2257,2259,2261],{},[301,2258,1384],{},[301,2260,2167],{},[298,2262,2263,2265],{},[301,2264,2172],{},[970,2266,972],{},[312,2268,2177],{"encoding":314},[279,2270,2272],{"className":2271,"ariaHidden":320},[319],[279,2273,2275,2278,2281,2284],{"className":2274},[324],[279,2276],{"className":2277,"style":329},[328],[279,2279,1384],{"className":2280,"style":1551},[333,337],[279,2282,2167],{"className":2283},[333,337],[279,2285,2287,2290],{"className":2286},[333],[279,2288,2172],{"className":2289,"style":2199},[333,337],[279,2291,2293],{"className":2292},[342],[279,2294,2296,2316],{"className":2295},[346,347],[279,2297,2299,2313],{"className":2298},[351],[279,2300,2302],{"className":2301,"style":2212},[355],[279,2303,2304,2307],{"style":2215},[279,2305],{"className":2306,"style":364},[363],[279,2308,2310],{"className":2309},[368,369,370,371],[279,2311,972],{"className":2312},[333,371],[279,2314,383],{"className":2315},[382],[279,2317,2319],{"className":2318},[351],[279,2320,2322],{"className":2321,"style":390},[355],[279,2323],{}," 层理论物理厚度。",[247,2326,2327],{},[266,2328,2329],{},"计算公式：",[279,2331,2334],{"className":2332},[2333],"katex-display",[279,2335,2337,2428],{"className":2336},[282],[279,2338,2340],{"className":2339},[286],[288,2341,2343],{"xmlns":290,"display":2342},"block",[292,2344,2345,2425],{},[295,2346,2347,2350,2352,2354,2357,2378,2381],{},[301,2348,2349],{},"E",[301,2351,2172],{},[301,2353,416],{},[938,2355,2356],{},"=",[298,2358,2359,2361],{},[301,2360,684],{},[295,2362,2363,2366,2368,2371,2373,2375],{},[301,2364,2365],{},"h",[301,2367,2167],{},[301,2369,2370],{},"g",[301,2372,2365],{},[938,2374,957],{},[301,2376,2377],{},"k",[938,2379,2380],{},"⋅",[295,2382,2383,2385,2423],{},[938,2384,944],{"fence":320},[2386,2387,2388,2405],"mfrac",{},[298,2389,2390,2393],{},[301,2391,2392],{},"ϵ",[295,2394,2395,2397,2399],{},[301,2396,1384],{},[301,2398,2167],{},[298,2400,2401,2403],{},[301,2402,2172],{},[970,2404,972],{},[298,2406,2407,2409],{},[301,2408,2392],{},[295,2410,2411,2413,2415,2417,2419,2421],{},[301,2412,2365],{},[301,2414,2167],{},[301,2416,2370],{},[301,2418,2365],{},[938,2420,957],{},[301,2422,2377],{},[938,2424,832],{"fence":320},[312,2426,2427],{"encoding":314},"EOT = t_{high-k} \\cdot \\left( \\frac{\\epsilon_{SiO_2}}{\\epsilon_{high-k}} \\right)",[279,2429,2431,2456,2531],{"className":2430,"ariaHidden":320},[319],[279,2432,2434,2438,2441,2444,2447,2450,2453],{"className":2433},[324],[279,2435],{"className":2436,"style":2437},[328],"height:0.6833em;",[279,2439,2349],{"className":2440,"style":1551},[333,337],[279,2442,2172],{"className":2443,"style":2199},[333,337],[279,2445,416],{"className":2446,"style":443},[333,337],[279,2448],{"className":2449,"style":1035},[1034],[279,2451,2356],{"className":2452},[1039],[279,2454],{"className":2455,"style":1035},[1034],[279,2457,2459,2463,2522,2525,2528],{"className":2458},[324],[279,2460],{"className":2461,"style":2462},[328],"height:0.9012em;vertical-align:-0.2861em;",[279,2464,2466,2469],{"className":2465},[333],[279,2467,684],{"className":2468},[333,337],[279,2470,2472],{"className":2471},[342],[279,2473,2475,2514],{"className":2474},[346,347],[279,2476,2478,2511],{"className":2477},[351],[279,2479,2481],{"className":2480,"style":356},[355],[279,2482,2484,2487],{"style":2483},"top:-2.55em;margin-left:0em;margin-right:0.05em;",[279,2485],{"className":2486,"style":364},[363],[279,2488,2490],{"className":2489},[368,369,370,371],[279,2491,2493,2497,2501,2504,2507],{"className":2492},[333,371],[279,2494,2496],{"className":2495},[333,337,371],"hi",[279,2498,2370],{"className":2499,"style":2500},[333,337,371],"margin-right:0.0359em;",[279,2502,2365],{"className":2503},[333,337,371],[279,2505,957],{"className":2506},[1103,371],[279,2508,2377],{"className":2509,"style":2510},[333,337,371],"margin-right:0.0315em;",[279,2512,383],{"className":2513},[382],[279,2515,2517],{"className":2516},[351],[279,2518,2520],{"className":2519,"style":827},[355],[279,2521],{},[279,2523],{"className":2524,"style":338},[1034],[279,2526,2380],{"className":2527},[1103],[279,2529],{"className":2530,"style":338},[1034],[279,2532,2534,2538],{"className":2533},[324],[279,2535],{"className":2536,"style":2537},[328],"height:2.4221em;vertical-align:-0.9721em;",[279,2539,2542,2551,2761],{"className":2540},[2541],"minner",[279,2543,2547],{"className":2544,"style":2546},[1053,2545],"delimcenter","top:0em;",[279,2548,944],{"className":2549},[2550,370],"delimsizing",[279,2552,2554,2558,2758],{"className":2553},[333],[279,2555],{"className":2556},[1053,2557],"nulldelimiter",[279,2559,2561],{"className":2560},[2386],[279,2562,2564,2749],{"className":2563},[346,347],[279,2565,2567,2746],{"className":2566},[351],[279,2568,2571,2636,2647],{"className":2569,"style":2570},[355],"height:1.1076em;",[279,2572,2574,2578],{"style":2573},"top:-2.314em;",[279,2575],{"className":2576,"style":2577},[363],"height:3em;",[279,2579,2581],{"className":2580},[333],[279,2582,2584,2587],{"className":2583},[333],[279,2585,2392],{"className":2586},[333,337],[279,2588,2590],{"className":2589},[342],[279,2591,2593,2628],{"className":2592},[346,347],[279,2594,2596,2625],{"className":2595},[351],[279,2597,2599],{"className":2598,"style":356},[355],[279,2600,2601,2604],{"style":2483},[279,2602],{"className":2603,"style":364},[363],[279,2605,2607],{"className":2606},[368,369,370,371],[279,2608,2610,2613,2616,2619,2622],{"className":2609},[333,371],[279,2611,2496],{"className":2612},[333,337,371],[279,2614,2370],{"className":2615,"style":2500},[333,337,371],[279,2617,2365],{"className":2618},[333,337,371],[279,2620,957],{"className":2621},[1103,371],[279,2623,2377],{"className":2624,"style":2510},[333,337,371],[279,2626,383],{"className":2627},[382],[279,2629,2631],{"className":2630},[351],[279,2632,2634],{"className":2633,"style":827},[355],[279,2635],{},[279,2637,2639,2642],{"style":2638},"top:-3.23em;",[279,2640],{"className":2641,"style":2577},[363],[279,2643],{"className":2644,"style":2646},[2645],"frac-line","border-bottom-width:0.04em;",[279,2648,2650,2653],{"style":2649},"top:-3.677em;",[279,2651],{"className":2652,"style":2577},[363],[279,2654,2656],{"className":2655},[333],[279,2657,2659,2662],{"className":2658},[333],[279,2660,2392],{"className":2661},[333,337],[279,2663,2665],{"className":2664},[342],[279,2666,2668,2737],{"className":2667},[346,347],[279,2669,2671,2734],{"className":2670},[351],[279,2672,2675],{"className":2673,"style":2674},[355],"height:0.3283em;",[279,2676,2677,2680],{"style":2483},[279,2678],{"className":2679,"style":364},[363],[279,2681,2683],{"className":2682},[368,369,370,371],[279,2684,2686,2689,2692],{"className":2685},[333,371],[279,2687,1384],{"className":2688,"style":1551},[333,337,371],[279,2690,2167],{"className":2691},[333,337,371],[279,2693,2695,2698],{"className":2694},[333,371],[279,2696,2172],{"className":2697,"style":2199},[333,337,371],[279,2699,2701],{"className":2700},[342],[279,2702,2704,2726],{"className":2703},[346,347],[279,2705,2707,2723],{"className":2706},[351],[279,2708,2711],{"className":2709,"style":2710},[355],"height:0.3173em;",[279,2712,2714,2717],{"style":2713},"top:-2.357em;margin-left:-0.0278em;margin-right:0.0714em;",[279,2715],{"className":2716,"style":1524},[363],[279,2718,2720],{"className":2719},[368,1528,1529,371],[279,2721,972],{"className":2722},[333,371],[279,2724,383],{"className":2725},[382],[279,2727,2729],{"className":2728},[351],[279,2730,2732],{"className":2731,"style":1542},[355],[279,2733],{},[279,2735,383],{"className":2736},[382],[279,2738,2740],{"className":2739},[351],[279,2741,2744],{"className":2742,"style":2743},[355],"height:0.2501em;",[279,2745],{},[279,2747,383],{"className":2748},[382],[279,2750,2752],{"className":2751},[351],[279,2753,2756],{"className":2754,"style":2755},[355],"height:0.9721em;",[279,2757],{},[279,2759],{"className":2760},[1157,2557],[279,2762,2764],{"className":2763,"style":2546},[1157,2545],[279,2765,832],{"className":2766},[2550,370],[270,2768,2770],{"id":2769},"tox分类和对比","Tox分类和对比",[2772,2773,2775],"h5",{"id":2774},"物理光学厚度-physical-thickness",[266,2776,2777],{},"物理（光学）厚度 | Physical Thickness",[240,2779,2780],{},"指的是栅介质层实际的几何厚度。",[240,2782,2783,2784,2787],{},"物理厚度决定了",[266,2785,2786],{},"栅极泄漏电流 (Gate Leakage Current)","。物理厚度越薄，电子越容易发生直接隧穿效应，导致漏电流指数级增加。",[588,2789,2790,2792,2799],{},[240,2791,592],{},[240,2793,2794,2795,2798],{},"It refers to the ",[266,2796,2797],{},"actual geometric thickness"," of the gate dielectric layer.",[240,2800,2801,2802,2805,2806,2809,2810,2813],{},"Physical thickness determines the ",[266,2803,2804],{},"gate leakage current",".As physical thickness decreases, it becomes easier for electrons to undergo the ",[266,2807,2808],{},"direct tunneling effect",", which causes the leakage current to ",[266,2811,2812],{},"increase exponentially",".",[2772,2815,2817],{"id":2816},"电学厚度-electrical-thickness",[266,2818,2819],{},"电学厚度 | Electrical Thickness",[240,2821,2822,2823,2902],{},"是指从电学特性（主要是栅电容 ",[279,2824,2826,2847],{"className":2825},[282],[279,2827,2829],{"className":2828},[286],[288,2830,2831],{"xmlns":290},[292,2832,2833,2845],{},[295,2834,2835],{},[298,2836,2837,2839],{},[301,2838,2070],{},[295,2840,2841,2843],{},[301,2842,421],{},[301,2844,424],{},[312,2846,2079],{"encoding":314},[279,2848,2850],{"className":2849,"ariaHidden":320},[319],[279,2851,2853,2856],{"className":2852},[324],[279,2854],{"className":2855,"style":329},[328],[279,2857,2859,2862],{"className":2858},[333],[279,2860,2070],{"className":2861,"style":2095},[333,337],[279,2863,2865],{"className":2864},[342],[279,2866,2868,2894],{"className":2867},[346,347],[279,2869,2871,2891],{"className":2870},[351],[279,2872,2874],{"className":2873,"style":456},[355],[279,2875,2876,2879],{"style":2110},[279,2877],{"className":2878,"style":364},[363],[279,2880,2882],{"className":2881},[368,369,370,371],[279,2883,2885,2888],{"className":2884},[333,371],[279,2886,421],{"className":2887},[333,337,371],[279,2889,424],{"className":2890},[333,337,371],[279,2892,383],{"className":2893},[382],[279,2895,2897],{"className":2896},[351],[279,2898,2900],{"className":2899,"style":390},[355],[279,2901],{},"）推导出的等效氧化层厚度，包括总的栅介质厚度，多晶硅栅耗尽层以及反型层厚度。",[240,2904,2905,2906,2908,2909,2988],{},"电学厚度直接决定了晶体管的",[266,2907,579],{},"，如驱动电流 (",[279,2910,2912,2933],{"className":2911},[282],[279,2913,2915],{"className":2914},[286],[288,2916,2917],{"xmlns":290},[292,2918,2919,2931],{},[295,2920,2921],{},[298,2922,2923,2925],{},[301,2924,506],{},[295,2926,2927,2929],{},[301,2928,421],{},[301,2930,513],{},[312,2932,516],{"encoding":314},[279,2934,2936],{"className":2935,"ariaHidden":320},[319],[279,2937,2939,2942],{"className":2938},[324],[279,2940],{"className":2941,"style":329},[328],[279,2943,2945,2948],{"className":2944},[333],[279,2946,506],{"className":2947,"style":532},[333,337],[279,2949,2951],{"className":2950},[342],[279,2952,2954,2980],{"className":2953},[346,347],[279,2955,2957,2977],{"className":2956},[351],[279,2958,2960],{"className":2959,"style":456},[355],[279,2961,2962,2965],{"style":547},[279,2963],{"className":2964,"style":364},[363],[279,2966,2968],{"className":2967},[368,369,370,371],[279,2969,2971,2974],{"className":2970},[333,371],[279,2972,421],{"className":2973},[333,337,371],[279,2975,513],{"className":2976},[333,337,371],[279,2978,383],{"className":2979},[382],[279,2981,2983],{"className":2982},[351],[279,2984,2986],{"className":2985,"style":390},[355],[279,2987],{},") 和对沟道的控制能力（抑制短沟道效应）",[588,2990,2991,2993,3082],{},[240,2992,592],{},[240,2994,2794,2995,2998,2999,393,3002,3081],{},[266,2996,2997],{},"equivalent oxide thickness"," derived from electrical characteristics, (primarily the ",[266,3000,3001],{},"gate capacitance",[279,3003,3005,3026],{"className":3004},[282],[279,3006,3008],{"className":3007},[286],[288,3009,3010],{"xmlns":290},[292,3011,3012,3024],{},[295,3013,3014],{},[298,3015,3016,3018],{},[301,3017,2070],{},[295,3019,3020,3022],{},[301,3021,421],{},[301,3023,424],{},[312,3025,2079],{"encoding":314},[279,3027,3029],{"className":3028,"ariaHidden":320},[319],[279,3030,3032,3035],{"className":3031},[324],[279,3033],{"className":3034,"style":329},[328],[279,3036,3038,3041],{"className":3037},[333],[279,3039,2070],{"className":3040,"style":2095},[333,337],[279,3042,3044],{"className":3043},[342],[279,3045,3047,3073],{"className":3046},[346,347],[279,3048,3050,3070],{"className":3049},[351],[279,3051,3053],{"className":3052,"style":456},[355],[279,3054,3055,3058],{"style":2110},[279,3056],{"className":3057,"style":364},[363],[279,3059,3061],{"className":3060},[368,369,370,371],[279,3062,3064,3067],{"className":3063},[333,371],[279,3065,421],{"className":3066},[333,337,371],[279,3068,424],{"className":3069},[333,337,371],[279,3071,383],{"className":3072},[382],[279,3074,3076],{"className":3075},[351],[279,3077,3079],{"className":3078,"style":390},[355],[279,3080],{},") which includes the total gate dielectric thickness, the poly-silicon gate depletion layer thickness, and the inversion layer thickness.",[240,3083,3084,3085,3088,3089,3092,3093,3172,3173,3176],{},"Electrical thickness directly determines ",[266,3086,3087],{},"transistor performance",", such as the ",[266,3090,3091],{},"drive current"," (",[279,3094,3096,3117],{"className":3095},[282],[279,3097,3099],{"className":3098},[286],[288,3100,3101],{"xmlns":290},[292,3102,3103,3115],{},[295,3104,3105],{},[298,3106,3107,3109],{},[301,3108,506],{},[295,3110,3111,3113],{},[301,3112,421],{},[301,3114,513],{},[312,3116,516],{"encoding":314},[279,3118,3120],{"className":3119,"ariaHidden":320},[319],[279,3121,3123,3126],{"className":3122},[324],[279,3124],{"className":3125,"style":329},[328],[279,3127,3129,3132],{"className":3128},[333],[279,3130,506],{"className":3131,"style":532},[333,337],[279,3133,3135],{"className":3134},[342],[279,3136,3138,3164],{"className":3137},[346,347],[279,3139,3141,3161],{"className":3140},[351],[279,3142,3144],{"className":3143,"style":456},[355],[279,3145,3146,3149],{"style":547},[279,3147],{"className":3148,"style":364},[363],[279,3150,3152],{"className":3151},[368,369,370,371],[279,3153,3155,3158],{"className":3154},[333,371],[279,3156,421],{"className":3157},[333,337,371],[279,3159,513],{"className":3160},[333,337,371],[279,3162,383],{"className":3163},[382],[279,3165,3167],{"className":3166},[351],[279,3168,3170],{"className":3169,"style":390},[355],[279,3171],{},") and the ability to control the channel, specifically for ",[266,3174,3175],{},"suppressing short-channel effects"," (SCE).",[2772,3178,3179],{"id":3179},"对比",[240,3181,3182,3183,3262,3263,3266],{},"在传统的多晶硅栅 (Poly-Si Gate) ",[279,3184,3186,3207],{"className":3185},[282],[279,3187,3189],{"className":3188},[286],[288,3190,3191],{"xmlns":290},[292,3192,3193,3205],{},[295,3194,3195,3197,3199],{},[301,3196,1384],{},[301,3198,2167],{},[298,3200,3201,3203],{},[301,3202,2172],{},[970,3204,972],{},[312,3206,2177],{"encoding":314},[279,3208,3210],{"className":3209,"ariaHidden":320},[319],[279,3211,3213,3216,3219,3222],{"className":3212},[324],[279,3214],{"className":3215,"style":329},[328],[279,3217,1384],{"className":3218,"style":1551},[333,337],[279,3220,2167],{"className":3221},[333,337],[279,3223,3225,3228],{"className":3224},[333],[279,3226,2172],{"className":3227,"style":2199},[333,337],[279,3229,3231],{"className":3230},[342],[279,3232,3234,3254],{"className":3233},[346,347],[279,3235,3237,3251],{"className":3236},[351],[279,3238,3240],{"className":3239,"style":2212},[355],[279,3241,3242,3245],{"style":2215},[279,3243],{"className":3244,"style":364},[363],[279,3246,3248],{"className":3247},[368,369,370,371],[279,3249,972],{"className":3250},[333,371],[279,3252,383],{"className":3253},[382],[279,3255,3257],{"className":3256},[351],[279,3258,3260],{"className":3259,"style":390},[355],[279,3261],{}," 工艺中，电学厚度通常",[266,3264,3265],{},"大于","物理厚度，主要原因包括：",[244,3268,3269,3368],{},[247,3270,3271,3274],{},[266,3272,3273],{},"多晶硅耗尽效应 | Poly-depletion effect",[244,3275,3276,3279],{},[247,3277,3278],{},"多晶硅栅在反型时会形成耗尽层，这相当于串联了一个额外的电容，增加了等效的电学厚度。",[247,3280,3281,3282,623],{},"引入金属栅 (Metal-gate) 可以消除这一效应，从而减小",[279,3283,3285,3310],{"className":3284},[282],[279,3286,3288],{"className":3287},[286],[288,3289,3290],{"xmlns":290},[292,3291,3292,3307],{},[295,3293,3294],{},[298,3295,3296,3298],{},[301,3297,416],{},[295,3299,3300,3302,3304],{},[301,3301,421],{},[301,3303,424],{},[301,3305,3306],{},"e",[312,3308,3309],{"encoding":314},"T_{oxe}",[279,3311,3313],{"className":3312,"ariaHidden":320},[319],[279,3314,3316,3319],{"className":3315},[324],[279,3317],{"className":3318,"style":329},[328],[279,3320,3322,3325],{"className":3321},[333],[279,3323,416],{"className":3324,"style":443},[333,337],[279,3326,3328],{"className":3327},[342],[279,3329,3331,3360],{"className":3330},[346,347],[279,3332,3334,3357],{"className":3333},[351],[279,3335,3337],{"className":3336,"style":456},[355],[279,3338,3339,3342],{"style":459},[279,3340],{"className":3341,"style":364},[363],[279,3343,3345],{"className":3344},[368,369,370,371],[279,3346,3348,3351,3354],{"className":3347},[333,371],[279,3349,421],{"className":3350},[333,337,371],[279,3352,424],{"className":3353},[333,337,371],[279,3355,3306],{"className":3356},[333,337,371],[279,3358,383],{"className":3359},[382],[279,3361,3363],{"className":3362},[351],[279,3364,3366],{"className":3365,"style":390},[355],[279,3367],{},[247,3369,3370,3373],{},[266,3371,3372],{},"量子效应 | Quantum effect",[244,3374,3375],{},[247,3376,3377],{},"反型层电荷并非紧贴硅表面，而是有一定的分布深度，这也会增加电学厚度。",[270,3379,3381],{"id":3380},"应力硅-strained-silicon","应力硅 | Strained silicon",[240,3383,3384],{},"电子和空穴的迁移率可以通过施加的机械应力从而得到提高（降低）。",[240,3386,3387],{},"应力通过改变硅晶体的晶格常数，改变了E-k关系，从而改变了有效质量和迁移率。",[588,3389,3390,3392,3395],{},[240,3391,592],{},[240,3393,3394],{},"The mobility of electrons and holes can be enhanced (or reduced) through the careful application of mechanical strain.",[240,3396,3397],{},"Strain modifies the E-k relationship by altering the lattice constant of the silicon crystal, thereby changing the effective mass and carrier mobility.",[240,3399,3400],{},[257,3401],{"alt":259,"src":3402},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-12.png",[240,3404,3405],{},"上图中PFET提高空穴表面迁移率原理如下：（应该不会考这么深吧，只是放在这了）",[240,3407,3408],{},[257,3409],{"alt":3410,"src":3411},"fbd6000d5a338eebfc365f6b5f6f4daa.jpg","\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-24.png",[231,3413,3415],{"id":3414},"短沟道效应-short-channel-effect-sce","短沟道效应 | Short-Channel Effect (SCE)",[236,3417,3419],{"id":3418},"定性解释-qualitative-explanation-of-sce","定性解释 | Qualitative Explanation of SCE",[240,3421,3422,3423,3505],{},"在栅极下方形成反型层之前，栅极下方的硅表面必须先被耗尽（耗尽深度为 ",[279,3424,3426,3450],{"className":3425},[282],[279,3427,3429],{"className":3428},[286],[288,3430,3431],{"xmlns":290},[292,3432,3433,3447],{},[295,3434,3435],{},[298,3436,3437,3440],{},[301,3438,3439],{},"W",[295,3441,3442,3444],{},[301,3443,308],{},[301,3445,3446],{},"m",[312,3448,3449],{"encoding":314},"W_{dm}",[279,3451,3453],{"className":3452,"ariaHidden":320},[319],[279,3454,3456,3459],{"className":3455},[324],[279,3457],{"className":3458,"style":329},[328],[279,3460,3462,3465],{"className":3461},[333],[279,3463,3439],{"className":3464,"style":443},[333,337],[279,3466,3468],{"className":3467},[342],[279,3469,3471,3497],{"className":3470},[346,347],[279,3472,3474,3494],{"className":3473},[351],[279,3475,3477],{"className":3476,"style":356},[355],[279,3478,3479,3482],{"style":459},[279,3480],{"className":3481,"style":364},[363],[279,3483,3485],{"className":3484},[368,369,370,371],[279,3486,3488,3491],{"className":3487},[333,371],[279,3489,308],{"className":3490},[333,337,371],[279,3492,3446],{"className":3493},[333,337,371],[279,3495,383],{"className":3496},[382],[279,3498,3500],{"className":3499},[351],[279,3501,3503],{"className":3502,"style":390},[355],[279,3504],{},"）。",[240,3507,3508],{},"源极和漏极的 PN 结会协助耗尽栅极下方的硅区域。",[244,3510,3511,3514],{},[247,3512,3513],{},"沟道区域内的一部分耗尽电荷是由源\u002F漏 (S\u002FD) 区域的电荷平衡的，而不是由栅极电荷平衡。",[247,3515,3516,393,3519,3550,3551,3632,3633],{},[266,3517,3518],{},"结论",[279,3520,3522,3537],{"className":3521},[282],[279,3523,3525],{"className":3524},[286],[288,3526,3527],{"xmlns":290},[292,3528,3529,3534],{},[295,3530,3531],{},[938,3532,3533],{},"⇒",[312,3535,3536],{"encoding":314},"\\Rightarrow",[279,3538,3540],{"className":3539,"ariaHidden":320},[319],[279,3541,3543,3547],{"className":3542},[324],[279,3544],{"className":3545,"style":3546},[328],"height:0.3669em;",[279,3548,3533],{"className":3549},[1039]," 达到反型状态所需的栅极电荷减少（即阈值电压 ",[279,3552,3554,3577],{"className":3553},[282],[279,3555,3557],{"className":3556},[286],[288,3558,3559],{"xmlns":290},[292,3560,3561,3574],{},[295,3562,3563,3566,3572],{},[301,3564,3565],{"mathvariant":1380},"∣",[298,3567,3568,3570],{},[301,3569,303],{},[301,3571,416],{},[301,3573,3565],{"mathvariant":1380},[312,3575,3576],{"encoding":314},"|V_T|",[279,3578,3580],{"className":3579,"ariaHidden":320},[319],[279,3581,3583,3586,3589,3629],{"className":3582},[324],[279,3584],{"className":3585,"style":1049},[328],[279,3587,3565],{"className":3588},[333],[279,3590,3592,3595],{"className":3591},[333],[279,3593,303],{"className":3594,"style":338},[333,337],[279,3596,3598],{"className":3597},[342],[279,3599,3601,3621],{"className":3600},[346,347],[279,3602,3604,3618],{"className":3603},[351],[279,3605,3607],{"className":3606,"style":2674},[355],[279,3608,3609,3612],{"style":359},[279,3610],{"className":3611,"style":364},[363],[279,3613,3615],{"className":3614},[368,369,370,371],[279,3616,416],{"className":3617,"style":443},[333,337,371],[279,3619,383],{"className":3620},[382],[279,3622,3624],{"className":3623},[351],[279,3625,3627],{"className":3626,"style":390},[355],[279,3628],{},[279,3630,3565],{"className":3631},[333]," 降低）。\n",[257,3634],{"alt":259,"src":3635},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-01.png",[236,3637,3639],{"id":3638},"阈值电压滚降-threshold-voltage-roll-off","阈值电压滚降 | Threshold Voltage Roll-off",[240,3641,3642,3711,3712,3783,3784,393,3787,3856,3857,3926,3927,4011],{},[279,3643,3645,3662],{"className":3644},[282],[279,3646,3648],{"className":3647},[286],[288,3649,3650],{"xmlns":290},[292,3651,3652,3660],{},[295,3653,3654],{},[298,3655,3656,3658],{},[301,3657,303],{},[301,3659,684],{},[312,3661,687],{"encoding":314},[279,3663,3665],{"className":3664,"ariaHidden":320},[319],[279,3666,3668,3671],{"className":3667},[324],[279,3669],{"className":3670,"style":329},[328],[279,3672,3674,3677],{"className":3673},[333],[279,3675,303],{"className":3676,"style":338},[333,337],[279,3678,3680],{"className":3679},[342],[279,3681,3683,3703],{"className":3682},[346,347],[279,3684,3686,3700],{"className":3685},[351],[279,3687,3689],{"className":3688,"style":715},[355],[279,3690,3691,3694],{"style":359},[279,3692],{"className":3693,"style":364},[363],[279,3695,3697],{"className":3696},[368,369,370,371],[279,3698,684],{"className":3699},[333,337,371],[279,3701,383],{"className":3702},[382],[279,3704,3706],{"className":3705},[351],[279,3707,3709],{"className":3708,"style":390},[355],[279,3710],{}," 随着 ",[279,3713,3715,3734],{"className":3714},[282],[279,3716,3718],{"className":3717},[286],[288,3719,3720],{"xmlns":290},[292,3721,3722,3731],{},[295,3723,3724],{},[298,3725,3726,3729],{},[301,3727,3728],{},"L",[301,3730,2370],{},[312,3732,3733],{"encoding":314},"L_g",[279,3735,3737],{"className":3736,"ariaHidden":320},[319],[279,3738,3740,3743],{"className":3739},[324],[279,3741],{"className":3742,"style":778},[328],[279,3744,3746,3749],{"className":3745},[333],[279,3747,3728],{"className":3748},[333,337],[279,3750,3752],{"className":3751},[342],[279,3753,3755,3775],{"className":3754},[346,347],[279,3756,3758,3772],{"className":3757},[351],[279,3759,3761],{"className":3760,"style":456},[355],[279,3762,3763,3766],{"style":2483},[279,3764],{"className":3765,"style":364},[363],[279,3767,3769],{"className":3768},[368,369,370,371],[279,3770,2370],{"className":3771,"style":2500},[333,337,371],[279,3773,383],{"className":3774},[382],[279,3776,3778],{"className":3777},[351],[279,3779,3781],{"className":3780,"style":827},[355],[279,3782],{},"（栅极长度）的减小而减小。它决定了",[266,3785,3786],{},"最小可接受的",[279,3788,3790,3807],{"className":3789},[282],[279,3791,3793],{"className":3792},[286],[288,3794,3795],{"xmlns":290},[292,3796,3797,3805],{},[295,3798,3799],{},[298,3800,3801,3803],{},[301,3802,3728],{},[301,3804,2370],{},[312,3806,3733],{"encoding":314},[279,3808,3810],{"className":3809,"ariaHidden":320},[319],[279,3811,3813,3816],{"className":3812},[324],[279,3814],{"className":3815,"style":778},[328],[279,3817,3819,3822],{"className":3818},[333],[279,3820,3728],{"className":3821},[333,337],[279,3823,3825],{"className":3824},[342],[279,3826,3828,3848],{"className":3827},[346,347],[279,3829,3831,3845],{"className":3830},[351],[279,3832,3834],{"className":3833,"style":456},[355],[279,3835,3836,3839],{"style":2483},[279,3837],{"className":3838,"style":364},[363],[279,3840,3842],{"className":3841},[368,369,370,371],[279,3843,2370],{"className":3844,"style":2500},[333,337,371],[279,3846,383],{"className":3847},[382],[279,3849,3851],{"className":3850},[351],[279,3852,3854],{"className":3853,"style":827},[355],[279,3855],{},"，因为如果 ",[279,3858,3860,3877],{"className":3859},[282],[279,3861,3863],{"className":3862},[286],[288,3864,3865],{"xmlns":290},[292,3866,3867,3875],{},[295,3868,3869],{},[298,3870,3871,3873],{},[301,3872,303],{},[301,3874,684],{},[312,3876,687],{"encoding":314},[279,3878,3880],{"className":3879,"ariaHidden":320},[319],[279,3881,3883,3886],{"className":3882},[324],[279,3884],{"className":3885,"style":329},[328],[279,3887,3889,3892],{"className":3888},[333],[279,3890,303],{"className":3891,"style":338},[333,337],[279,3893,3895],{"className":3894},[342],[279,3896,3898,3918],{"className":3897},[346,347],[279,3899,3901,3915],{"className":3900},[351],[279,3902,3904],{"className":3903,"style":715},[355],[279,3905,3906,3909],{"style":359},[279,3907],{"className":3908,"style":364},[363],[279,3910,3912],{"className":3911},[368,369,370,371],[279,3913,684],{"className":3914},[333,337,371],[279,3916,383],{"className":3917},[382],[279,3919,3921],{"className":3920},[351],[279,3922,3924],{"className":3923,"style":390},[355],[279,3925],{}," 变得太小，关断电流 ",[279,3928,3930,3953],{"className":3929},[282],[279,3931,3933],{"className":3932},[286],[288,3934,3935],{"xmlns":290},[292,3936,3937,3951],{},[295,3938,3939],{},[298,3940,3941,3943],{},[301,3942,506],{},[295,3944,3945,3947,3949],{},[301,3946,421],{},[301,3948,763],{},[301,3950,763],{},[312,3952,768],{"encoding":314},[279,3954,3956],{"className":3955,"ariaHidden":320},[319],[279,3957,3959,3962],{"className":3958},[324],[279,3960],{"className":3961,"style":778},[328],[279,3963,3965,3968],{"className":3964},[333],[279,3966,506],{"className":3967,"style":532},[333,337],[279,3969,3971],{"className":3970},[342],[279,3972,3974,4003],{"className":3973},[346,347],[279,3975,3977,4000],{"className":3976},[351],[279,3978,3980],{"className":3979,"style":356},[355],[279,3981,3982,3985],{"style":547},[279,3983],{"className":3984,"style":364},[363],[279,3986,3988],{"className":3987},[368,369,370,371],[279,3989,3991,3994,3997],{"className":3990},[333,371],[279,3992,421],{"className":3993},[333,337,371],[279,3995,763],{"className":3996,"style":814},[333,337,371],[279,3998,763],{"className":3999,"style":814},[333,337,371],[279,4001,383],{"className":4002},[382],[279,4004,4006],{"className":4005},[351],[279,4007,4009],{"className":4008,"style":827},[355],[279,4010],{}," 会过大。",[240,4013,4014],{},[257,4015],{"alt":259,"src":4016},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-04.png",[240,4018,4019,393,4022,393,4091,393,4094,4122],{},[266,4020,4021],{},"为什么上图中数据是针对",[279,4023,4025,4042],{"className":4024},[282],[279,4026,4028],{"className":4027},[286],[288,4029,4030],{"xmlns":290},[292,4031,4032,4040],{},[295,4033,4034],{},[298,4035,4036,4038],{},[301,4037,3728],{},[301,4039,2370],{},[312,4041,3733],{"encoding":314},[279,4043,4045],{"className":4044,"ariaHidden":320},[319],[279,4046,4048,4051],{"className":4047},[324],[279,4049],{"className":4050,"style":778},[328],[279,4052,4054,4057],{"className":4053},[333],[279,4055,3728],{"className":4056},[333,337],[279,4058,4060],{"className":4059},[342],[279,4061,4063,4083],{"className":4062},[346,347],[279,4064,4066,4080],{"className":4065},[351],[279,4067,4069],{"className":4068,"style":456},[355],[279,4070,4071,4074],{"style":2483},[279,4072],{"className":4073,"style":364},[363],[279,4075,4077],{"className":4076},[368,369,370,371],[279,4078,2370],{"className":4079,"style":2500},[333,337,371],[279,4081,383],{"className":4082},[382],[279,4084,4086],{"className":4085},[351],[279,4087,4089],{"className":4088,"style":827},[355],[279,4090],{},[266,4092,4093],{},"（栅长）绘制的，而不是",[279,4095,4097,4110],{"className":4096},[282],[279,4098,4100],{"className":4099},[286],[288,4101,4102],{"xmlns":290},[292,4103,4104,4108],{},[295,4105,4106],{},[301,4107,3728],{},[312,4109,3728],{"encoding":314},[279,4111,4113],{"className":4112,"ariaHidden":320},[319],[279,4114,4116,4119],{"className":4115},[324],[279,4117],{"className":4118,"style":2437},[328],[279,4120,3728],{"className":4121},[333,337],[266,4123,4124],{},"（沟道长度）？",[240,4126,4127,4155,4156,4225,4226,4295],{},[279,4128,4130,4143],{"className":4129},[282],[279,4131,4133],{"className":4132},[286],[288,4134,4135],{"xmlns":290},[292,4136,4137,4141],{},[295,4138,4139],{},[301,4140,3728],{},[312,4142,3728],{"encoding":314},[279,4144,4146],{"className":4145,"ariaHidden":320},[319],[279,4147,4149,4152],{"className":4148},[324],[279,4150],{"className":4151,"style":2437},[328],[279,4153,3728],{"className":4154},[333,337]," 难以直接准确测量，而 ",[279,4157,4159,4176],{"className":4158},[282],[279,4160,4162],{"className":4161},[286],[288,4163,4164],{"xmlns":290},[292,4165,4166,4174],{},[295,4167,4168],{},[298,4169,4170,4172],{},[301,4171,3728],{},[301,4173,2370],{},[312,4175,3733],{"encoding":314},[279,4177,4179],{"className":4178,"ariaHidden":320},[319],[279,4180,4182,4185],{"className":4181},[324],[279,4183],{"className":4184,"style":778},[328],[279,4186,4188,4191],{"className":4187},[333],[279,4189,3728],{"className":4190},[333,337],[279,4192,4194],{"className":4193},[342],[279,4195,4197,4217],{"className":4196},[346,347],[279,4198,4200,4214],{"className":4199},[351],[279,4201,4203],{"className":4202,"style":456},[355],[279,4204,4205,4208],{"style":2483},[279,4206],{"className":4207,"style":364},[363],[279,4209,4211],{"className":4210},[368,369,370,371],[279,4212,2370],{"className":4213,"style":2500},[333,337,371],[279,4215,383],{"className":4216},[382],[279,4218,4220],{"className":4219},[351],[279,4221,4223],{"className":4222,"style":827},[355],[279,4224],{}," 容易测量。此外，",[279,4227,4229,4246],{"className":4228},[282],[279,4230,4232],{"className":4231},[286],[288,4233,4234],{"xmlns":290},[292,4235,4236,4244],{},[295,4237,4238],{},[298,4239,4240,4242],{},[301,4241,3728],{},[301,4243,2370],{},[312,4245,3733],{"encoding":314},[279,4247,4249],{"className":4248,"ariaHidden":320},[319],[279,4250,4252,4255],{"className":4251},[324],[279,4253],{"className":4254,"style":778},[328],[279,4256,4258,4261],{"className":4257},[333],[279,4259,3728],{"className":4260},[333,337],[279,4262,4264],{"className":4263},[342],[279,4265,4267,4287],{"className":4266},[346,347],[279,4268,4270,4284],{"className":4269},[351],[279,4271,4273],{"className":4272,"style":456},[355],[279,4274,4275,4278],{"style":2483},[279,4276],{"className":4277,"style":364},[363],[279,4279,4281],{"className":4280},[368,369,370,371],[279,4282,2370],{"className":4283,"style":2500},[333,337,371],[279,4285,383],{"className":4286},[382],[279,4288,4290],{"className":4289},[351],[279,4291,4293],{"className":4292,"style":827},[355],[279,4294],{}," 是制造工程师可以直接控制的物理量。",[588,4297,4298],{},[240,4299,4300],{},"L is difficult to measure. Lg is. Also, Lg is the quantity that manufacturing engineers can control directly.",[270,4302,4304],{"id":4303},"why-does-vt-decrease-with-l",[266,4305,4306],{},"Why Does Vt Decrease with L？",[588,4308,4309,4312,4315],{},[240,4310,4311],{},"实际上这里是两种解释方法  你看这样对不对",[240,4313,4314],{},"第一个是从势垒层面上看，存在两种效应：",[4316,4317,4318,4350,4353,4356],"ol",{},[247,4319,4320,4321,4349],{},"当沟道长度 ",[279,4322,4324,4337],{"className":4323},[282],[279,4325,4327],{"className":4326},[286],[288,4328,4329],{"xmlns":290},[292,4330,4331,4335],{},[295,4332,4333],{},[301,4334,3728],{},[312,4336,3728],{"encoding":314},[279,4338,4340],{"className":4339,"ariaHidden":320},[319],[279,4341,4343,4346],{"className":4342},[324],[279,4344],{"className":4345,"style":2437},[328],[279,4347,3728],{"className":4348},[333,337]," 缩短时，源\u002F漏区的静电场耦合增强，即便是Vds=0，Vt也会有一定程度的下降——Vt roll off产生",[247,4351,4352],{},"对于Vds逐渐增大的情况，对于短沟道，产生了DIBL——漏致势垒降低\n第二个从具体模型去解释",[247,4354,4355],{},"耗尽层模型解释的是Vt Roll off现象，由于源漏共享耗尽区电荷 导致栅极电压只能控制矩形区域的电荷",[247,4357,4358,4359,5126,5129,5130,5132,5133,5213],{},"简单电容模型解释的就是由于外加的Vds，导致了Vt在Vds比较大的时候意外减小，同时考虑公式：",[279,4360,4362],{"className":4361},[2333],[279,4363,4365,4510],{"className":4364},[282],[279,4366,4368],{"className":4367},[286],[288,4369,4370],{"xmlns":290,"display":2342},[292,4371,4372,4507],{},[295,4373,4374,4380,4382,4403,4405,4407,4418,4421,4424,4426,4429,4447,4450,4453,4456,4462,4465],{},[298,4375,4376,4378],{},[301,4377,303],{},[301,4379,684],{},[938,4381,2356],{},[298,4383,4384,4386],{},[301,4385,303],{},[295,4387,4388,4390,4394,4397,4399,4401],{},[301,4389,684],{},[4391,4392,4393],"mtext",{},"-",[301,4395,4396],{},"l",[301,4398,421],{},[301,4400,513],{},[301,4402,2370],{},[938,4404,957],{},[938,4406,944],{"stretchy":943},[298,4408,4409,4411],{},[301,4410,303],{},[295,4412,4413,4415],{},[301,4414,308],{},[301,4416,4417],{},"s",[938,4419,4420],{},"+",[970,4422,4423],{},"0.4",[938,4425,832],{"stretchy":943},[4391,4427,4428],{}," ",[965,4430,4431,4433],{},[301,4432,3306],{},[295,4434,4435,4437,4439,4441],{},[938,4436,957],{},[301,4438,3728],{},[301,4440,1381],{"mathvariant":1380},[298,4442,4443,4445],{},[301,4444,4396],{},[301,4446,308],{},[938,4448,4449],{"separator":320},",",[1034,4451],{"linebreak":4452},"newline",[4391,4454,4455],{},"where ",[298,4457,4458,4460],{},[301,4459,4396],{},[301,4461,308],{},[938,4463,4464],{},"≈",[4466,4467,4468,4504],"mroot",{},[295,4469,4470,4480,4482,4494,4496],{},[298,4471,4472,4474],{},[301,4473,416],{},[295,4475,4476,4478],{},[301,4477,421],{},[301,4479,424],{},[4391,4481,4428],{},[298,4483,4484,4486],{},[301,4485,3439],{},[295,4487,4488,4490,4492],{},[301,4489,308],{},[301,4491,3306],{},[301,4493,240],{},[4391,4495,4428],{},[298,4497,4498,4501],{},[301,4499,4500],{},"X",[301,4502,4503],{},"j",[970,4505,4506],{},"3",[312,4508,4509],{"encoding":314},"V_t = V_{t\\text{-}long} - (V_{ds} + 0.4)\\, e^{-L\u002Fl_d}, \\\\\n\\text{where}\\ l_d \\approx \\sqrt[3]{T_{ox}\\, W_{dep}\\, X_j}",[279,4511,4513,4568,4646,4710,4814,4817,4885],{"className":4512,"ariaHidden":320},[319],[279,4514,4516,4519,4559,4562,4565],{"className":4515},[324],[279,4517],{"className":4518,"style":329},[328],[279,4520,4522,4525],{"className":4521},[333],[279,4523,303],{"className":4524,"style":338},[333,337],[279,4526,4528],{"className":4527},[342],[279,4529,4531,4551],{"className":4530},[346,347],[279,4532,4534,4548],{"className":4533},[351],[279,4535,4537],{"className":4536,"style":715},[355],[279,4538,4539,4542],{"style":359},[279,4540],{"className":4541,"style":364},[363],[279,4543,4545],{"className":4544},[368,369,370,371],[279,4546,684],{"className":4547},[333,337,371],[279,4549,383],{"className":4550},[382],[279,4552,4554],{"className":4553},[351],[279,4555,4557],{"className":4556,"style":390},[355],[279,4558],{},[279,4560],{"className":4561,"style":1035},[1034],[279,4563,2356],{"className":4564},[1039],[279,4566],{"className":4567,"style":1035},[1034],[279,4569,4571,4574,4637,4640,4643],{"className":4570},[324],[279,4572],{"className":4573,"style":778},[328],[279,4575,4577,4580],{"className":4576},[333],[279,4578,303],{"className":4579,"style":338},[333,337],[279,4581,4583],{"className":4582},[342],[279,4584,4586,4629],{"className":4585},[346,347],[279,4587,4589,4626],{"className":4588},[351],[279,4590,4592],{"className":4591,"style":356},[355],[279,4593,4594,4597],{"style":359},[279,4595],{"className":4596,"style":364},[363],[279,4598,4600],{"className":4599},[368,369,370,371],[279,4601,4603,4606,4613,4617,4620,4623],{"className":4602},[333,371],[279,4604,684],{"className":4605},[333,337,371],[279,4607,4610],{"className":4608},[333,4609,371],"text",[279,4611,4393],{"className":4612},[333,371],[279,4614,4396],{"className":4615,"style":4616},[333,337,371],"margin-right:0.0197em;",[279,4618,421],{"className":4619},[333,337,371],[279,4621,513],{"className":4622},[333,337,371],[279,4624,2370],{"className":4625,"style":2500},[333,337,371],[279,4627,383],{"className":4628},[382],[279,4630,4632],{"className":4631},[351],[279,4633,4635],{"className":4634,"style":827},[355],[279,4636],{},[279,4638],{"className":4639,"style":338},[1034],[279,4641,957],{"className":4642},[1103],[279,4644],{"className":4645,"style":338},[1034],[279,4647,4649,4652,4655,4701,4704,4707],{"className":4648},[324],[279,4650],{"className":4651,"style":1049},[328],[279,4653,944],{"className":4654},[1053],[279,4656,4658,4661],{"className":4657},[333],[279,4659,303],{"className":4660,"style":338},[333,337],[279,4662,4664],{"className":4663},[342],[279,4665,4667,4693],{"className":4666},[346,347],[279,4668,4670,4690],{"className":4669},[351],[279,4671,4673],{"className":4672,"style":356},[355],[279,4674,4675,4678],{"style":359},[279,4676],{"className":4677,"style":364},[363],[279,4679,4681],{"className":4680},[368,369,370,371],[279,4682,4684,4687],{"className":4683},[333,371],[279,4685,308],{"className":4686},[333,337,371],[279,4688,4417],{"className":4689},[333,337,371],[279,4691,383],{"className":4692},[382],[279,4694,4696],{"className":4695},[351],[279,4697,4699],{"className":4698,"style":390},[355],[279,4700],{},[279,4702],{"className":4703,"style":338},[1034],[279,4705,4420],{"className":4706},[1103],[279,4708],{"className":4709,"style":338},[1034],[279,4711,4713,4717,4720,4723,4727,4810],{"className":4712},[324],[279,4714],{"className":4715,"style":4716},[328],"height:1.188em;vertical-align:-0.25em;",[279,4718,4423],{"className":4719},[333],[279,4721,832],{"className":4722},[1157],[279,4724],{"className":4725,"style":4726},[1034],"margin-right:0.1667em;",[279,4728,4730,4733],{"className":4729},[333],[279,4731,3306],{"className":4732},[333,337],[279,4734,4736],{"className":4735},[342],[279,4737,4739],{"className":4738},[346],[279,4740,4742],{"className":4741},[351],[279,4743,4746],{"className":4744,"style":4745},[355],"height:0.938em;",[279,4747,4749,4752],{"style":4748},"top:-3.113em;margin-right:0.05em;",[279,4750],{"className":4751,"style":364},[363],[279,4753,4755],{"className":4754},[368,369,370,371],[279,4756,4758,4761,4764,4767],{"className":4757},[333,371],[279,4759,957],{"className":4760},[333,371],[279,4762,3728],{"className":4763},[333,337,371],[279,4765,1381],{"className":4766},[333,371],[279,4768,4770,4773],{"className":4769},[333,371],[279,4771,4396],{"className":4772,"style":4616},[333,337,371],[279,4774,4776],{"className":4775},[342],[279,4777,4779,4801],{"className":4778},[346,347],[279,4780,4782,4798],{"className":4781},[351],[279,4783,4786],{"className":4784,"style":4785},[355],"height:0.3448em;",[279,4787,4789,4792],{"style":4788},"top:-2.3488em;margin-left:-0.0197em;margin-right:0.0714em;",[279,4790],{"className":4791,"style":1524},[363],[279,4793,4795],{"className":4794},[368,1528,1529,371],[279,4796,308],{"className":4797},[333,337,371],[279,4799,383],{"className":4800},[382],[279,4802,4804],{"className":4803},[351],[279,4805,4808],{"className":4806,"style":4807},[355],"height:0.1512em;",[279,4809],{},[279,4811,4449],{"className":4812},[4813],"mpunct",[279,4815],{"className":4816},[1034,4452],[279,4818,4820,4824,4831,4835,4876,4879,4882],{"className":4819},[324],[279,4821],{"className":4822,"style":4823},[328],"height:0.8444em;vertical-align:-0.15em;",[279,4825,4827],{"className":4826},[333,4609],[279,4828,4830],{"className":4829},[333],"where",[279,4832,4834],{"className":4833},[1034]," ",[279,4836,4838,4841],{"className":4837},[333],[279,4839,4396],{"className":4840,"style":4616},[333,337],[279,4842,4844],{"className":4843},[342],[279,4845,4847,4868],{"className":4846},[346,347],[279,4848,4850,4865],{"className":4849},[351],[279,4851,4853],{"className":4852,"style":356},[355],[279,4854,4856,4859],{"style":4855},"top:-2.55em;margin-left:-0.0197em;margin-right:0.05em;",[279,4857],{"className":4858,"style":364},[363],[279,4860,4862],{"className":4861},[368,369,370,371],[279,4863,308],{"className":4864},[333,337,371],[279,4866,383],{"className":4867},[382],[279,4869,4871],{"className":4870},[351],[279,4872,4874],{"className":4873,"style":390},[355],[279,4875],{},[279,4877],{"className":4878,"style":1035},[1034],[279,4880,4464],{"className":4881},[1039],[279,4883],{"className":4884,"style":1035},[1034],[279,4886,4888,4892],{"className":4887},[324],[279,4889],{"className":4890,"style":4891},[328],"height:1.24em;vertical-align:-0.3075em;",[279,4893,4896,4925],{"className":4894},[333,4895],"sqrt",[279,4897,4900],{"className":4898},[4899],"root",[279,4901,4903],{"className":4902},[346],[279,4904,4906],{"className":4905},[351],[279,4907,4910],{"className":4908,"style":4909},[355],"height:0.6972em;",[279,4911,4913,4916],{"style":4912},"top:-2.875em;",[279,4914],{"className":4915,"style":1524},[363],[279,4917,4919],{"className":4918},[368,369,1529,371],[279,4920,4922],{"className":4921},[333,371],[279,4923,4506],{"className":4924},[333,371],[279,4926,4928,5117],{"className":4927},[346,347],[279,4929,4931,5114],{"className":4930},[351],[279,4932,4935,5091],{"className":4933,"style":4934},[355],"height:0.9325em;",[279,4936,4940,4944],{"className":4937,"style":4939},[4938],"svg-align","top:-3.2em;",[279,4941],{"className":4942,"style":4943},[363],"height:3.2em;",[279,4945,4948,4994,4997,5046,5049],{"className":4946,"style":4947},[333],"padding-left:1em;",[279,4949,4951,4954],{"className":4950},[333],[279,4952,416],{"className":4953,"style":443},[333,337],[279,4955,4957],{"className":4956},[342],[279,4958,4960,4986],{"className":4959},[346,347],[279,4961,4963,4983],{"className":4962},[351],[279,4964,4966],{"className":4965,"style":456},[355],[279,4967,4968,4971],{"style":459},[279,4969],{"className":4970,"style":364},[363],[279,4972,4974],{"className":4973},[368,369,370,371],[279,4975,4977,4980],{"className":4976},[333,371],[279,4978,421],{"className":4979},[333,337,371],[279,4981,424],{"className":4982},[333,337,371],[279,4984,383],{"className":4985},[382],[279,4987,4989],{"className":4988},[351],[279,4990,4992],{"className":4991,"style":390},[355],[279,4993],{},[279,4995],{"className":4996,"style":4726},[1034],[279,4998,5000,5003],{"className":4999},[333],[279,5001,3439],{"className":5002,"style":443},[333,337],[279,5004,5006],{"className":5005},[342],[279,5007,5009,5038],{"className":5008},[346,347],[279,5010,5012,5035],{"className":5011},[351],[279,5013,5015],{"className":5014,"style":356},[355],[279,5016,5017,5020],{"style":459},[279,5018],{"className":5019,"style":364},[363],[279,5021,5023],{"className":5022},[368,369,370,371],[279,5024,5026,5029,5032],{"className":5025},[333,371],[279,5027,308],{"className":5028},[333,337,371],[279,5030,3306],{"className":5031},[333,337,371],[279,5033,240],{"className":5034},[333,337,371],[279,5036,383],{"className":5037},[382],[279,5039,5041],{"className":5040},[351],[279,5042,5044],{"className":5043,"style":827},[355],[279,5045],{},[279,5047],{"className":5048,"style":4726},[1034],[279,5050,5052,5055],{"className":5051},[333],[279,5053,4500],{"className":5054,"style":532},[333,337],[279,5056,5058],{"className":5057},[342],[279,5059,5061,5083],{"className":5060},[346,347],[279,5062,5064,5080],{"className":5063},[351],[279,5065,5068],{"className":5066,"style":5067},[355],"height:0.3117em;",[279,5069,5070,5073],{"style":547},[279,5071],{"className":5072,"style":364},[363],[279,5074,5076],{"className":5075},[368,369,370,371],[279,5077,4503],{"className":5078,"style":5079},[333,337,371],"margin-right:0.0572em;",[279,5081,383],{"className":5082},[382],[279,5084,5086],{"className":5085},[351],[279,5087,5089],{"className":5088,"style":827},[355],[279,5090],{},[279,5092,5094,5097],{"style":5093},"top:-2.8925em;",[279,5095],{"className":5096,"style":4943},[363],[279,5098,5102],{"className":5099,"style":5101},[5100],"hide-tail","min-width:1.02em;height:1.28em;",[5103,5104,5110],"svg",{"xmlns":5105,"width":5106,"height":5107,"viewBox":5108,"preserveAspectRatio":5109},"http:\u002F\u002Fwww.w3.org\u002F2000\u002Fsvg","400em","1.28em","0 0 400000 1296","xMinYMin slice",[5111,5112],"path",{"d":5113},"M263,681c0.7,0,18,39.7,52,119\nc34,79.3,68.167,158.7,102.5,238c34.3,79.3,51.8,119.3,52.5,120\nc340,-704.7,510.7,-1060.3,512,-1067\nl0 -0\nc4.7,-7.3,11,-11,19,-11\nH40000v40H1012.3\ns-271.3,567,-271.3,567c-38.7,80.7,-84,175,-136,283c-52,108,-89.167,185.3,-111.5,232\nc-22.3,46.7,-33.8,70.3,-34.5,71c-4.7,4.7,-12.3,7,-23,7s-12,-1,-12,-1\ns-109,-253,-109,-253c-72.7,-168,-109.3,-252,-110,-252c-10.7,8,-22,16.7,-34,26\nc-22,17.3,-33.3,26,-34,26s-26,-26,-26,-26s76,-59,76,-59s76,-60,76,-60z\nM1001 80h400000v40h-400000z",[279,5115,383],{"className":5116},[382],[279,5118,5120],{"className":5119},[351],[279,5121,5124],{"className":5122,"style":5123},[355],"height:0.3075em;",[279,5125],{},[5127,5128],"br",{},"对于L减小——Vt roll off效应",[5127,5131],{},"对于",[279,5134,5136,5158],{"className":5135},[282],[279,5137,5139],{"className":5138},[286],[288,5140,5141],{"xmlns":290},[292,5142,5143,5155],{},[295,5144,5145],{},[298,5146,5147,5149],{},[301,5148,303],{},[295,5150,5151,5153],{},[301,5152,308],{},[301,5154,4417],{},[312,5156,5157],{"encoding":314},"V_{ds}",[279,5159,5161],{"className":5160,"ariaHidden":320},[319],[279,5162,5164,5167],{"className":5163},[324],[279,5165],{"className":5166,"style":329},[328],[279,5168,5170,5173],{"className":5169},[333],[279,5171,303],{"className":5172,"style":338},[333,337],[279,5174,5176],{"className":5175},[342],[279,5177,5179,5205],{"className":5178},[346,347],[279,5180,5182,5202],{"className":5181},[351],[279,5183,5185],{"className":5184,"style":356},[355],[279,5186,5187,5190],{"style":359},[279,5188],{"className":5189,"style":364},[363],[279,5191,5193],{"className":5192},[368,369,370,371],[279,5194,5196,5199],{"className":5195},[333,371],[279,5197,308],{"className":5198},[333,337,371],[279,5200,4417],{"className":5201},[333,337,371],[279,5203,383],{"className":5204},[382],[279,5206,5208],{"className":5207},[351],[279,5209,5211],{"className":5210,"style":390},[355],[279,5212],{},"变化——DIBL效应",[2772,5215,5217],{"id":5216},"_1-势垒理论-potential-barrier-concept",[266,5218,5219],{},"1 势垒理论 | Potential Barrier Concept",[240,5221,5222],{},"当L较小时，需要更小的Vg即可将势垒降低至0.2V，即Vt更小。",[5224,5225,5227],"table",{"style":5226},"width: 100%; border: 0; border-collapse: collapse; border-spacing: 0;",[5228,5229,5230],"tbody",{},[5231,5232,5234,5235,5234,5244],"tr",{"style":5233},"border: none;","\n  ",[5236,5237,5239,5234],"td",{"style":5238},"width: 54.9%; text-align: center; border: none; padding: 0.3em; margin: 0;",[240,5240,5241],{},[257,5242],{"alt":259,"src":5243},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-08.png",[5236,5245,5247,5234],{"style":5246},"width: 45.1%; text-align: center; border: none; padding: 0.3em; margin: 0;",[240,5248,5249],{},[257,5250],{"alt":5251,"src":5252},"31a0f253fe1457617c919c7e54566be1.jpg","\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-06.png",[4316,5254,5255],{},[247,5256,5257,5258,5286,5287,5390,5391,5394],{},"一种解释方法是：当沟道长度 ",[279,5259,5261,5274],{"className":5260},[282],[279,5262,5264],{"className":5263},[286],[288,5265,5266],{"xmlns":290},[292,5267,5268,5272],{},[295,5269,5270],{},[301,5271,3728],{},[312,5273,3728],{"encoding":314},[279,5275,5277],{"className":5276,"ariaHidden":320},[319],[279,5278,5280,5283],{"className":5279},[324],[279,5281],{"className":5282,"style":2437},[328],[279,5284,3728],{"className":5285},[333,337]," 缩短时，源\u002F漏区的静电场耦合增强(coupling这个有点抽象，这个其实和下面那个矩形边上被吃掉两个小三角讲的是一个东西，到时候可以边上画个图)，导致即使在 ",[279,5288,5290,5316],{"className":5289},[282],[279,5291,5293],{"className":5292},[286],[288,5294,5295],{"xmlns":290},[292,5296,5297,5313],{},[295,5298,5299,5309,5311],{},[298,5300,5301,5303],{},[301,5302,303],{},[295,5304,5305,5307],{},[301,5306,2370],{},[301,5308,4417],{},[938,5310,2356],{},[970,5312,1472],{},[312,5314,5315],{"encoding":314},"V_{gs}=0",[279,5317,5319,5380],{"className":5318,"ariaHidden":320},[319],[279,5320,5322,5325,5371,5374,5377],{"className":5321},[324],[279,5323],{"className":5324,"style":778},[328],[279,5326,5328,5331],{"className":5327},[333],[279,5329,303],{"className":5330,"style":338},[333,337],[279,5332,5334],{"className":5333},[342],[279,5335,5337,5363],{"className":5336},[346,347],[279,5338,5340,5360],{"className":5339},[351],[279,5341,5343],{"className":5342,"style":456},[355],[279,5344,5345,5348],{"style":359},[279,5346],{"className":5347,"style":364},[363],[279,5349,5351],{"className":5350},[368,369,370,371],[279,5352,5354,5357],{"className":5353},[333,371],[279,5355,2370],{"className":5356,"style":2500},[333,337,371],[279,5358,4417],{"className":5359},[333,337,371],[279,5361,383],{"className":5362},[382],[279,5364,5366],{"className":5365},[351],[279,5367,5369],{"className":5368,"style":827},[355],[279,5370],{},[279,5372],{"className":5373,"style":1035},[1034],[279,5375,2356],{"className":5376},[1039],[279,5378],{"className":5379,"style":1035},[1034],[279,5381,5383,5387],{"className":5382},[324],[279,5384],{"className":5385,"style":5386},[328],"height:0.6444em;",[279,5388,1472],{"className":5389},[333]," 时，源极与沟道之间的",[266,5392,5393],{},"势垒高度","（Source\u002FChannel Barrier）也已经比长沟道器件要低。",[588,5396,5397],{},[240,5398,5399],{},"As the channel length L scales down, the electrostatic coupling between the source and drain regions intensifies. Consequently, even at Vgs=0, the source-to-channel potential barrier is already lower than that of a long-channel device.",[240,5401,5402],{},[257,5403],{"alt":259,"src":5404},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-16.png",[4316,5406,5407],{},[247,5408,5409,5410,5489,5490,5493],{},"还有一种解释方法：对于短沟道器件，漏极电压 ",[279,5411,5413,5434],{"className":5412},[282],[279,5414,5416],{"className":5415},[286],[288,5417,5418],{"xmlns":290},[292,5419,5420,5432],{},[295,5421,5422],{},[298,5423,5424,5426],{},[301,5425,303],{},[295,5427,5428,5430],{},[301,5429,308],{},[301,5431,4417],{},[312,5433,5157],{"encoding":314},[279,5435,5437],{"className":5436,"ariaHidden":320},[319],[279,5438,5440,5443],{"className":5439},[324],[279,5441],{"className":5442,"style":329},[328],[279,5444,5446,5449],{"className":5445},[333],[279,5447,303],{"className":5448,"style":338},[333,337],[279,5450,5452],{"className":5451},[342],[279,5453,5455,5481],{"className":5454},[346,347],[279,5456,5458,5478],{"className":5457},[351],[279,5459,5461],{"className":5460,"style":356},[355],[279,5462,5463,5466],{"style":359},[279,5464],{"className":5465,"style":364},[363],[279,5467,5469],{"className":5468},[368,369,370,371],[279,5470,5472,5475],{"className":5471},[333,371],[279,5473,308],{"className":5474},[333,337,371],[279,5476,4417],{"className":5477},[333,337,371],[279,5479,383],{"className":5480},[382],[279,5482,5484],{"className":5483},[351],[279,5485,5487],{"className":5486,"style":390},[355],[279,5488],{}," 的增加会进一步向下“拉低”沟道电势，使源极端的势垒进一步降低。这就是",[266,5491,5492],{},"漏致势垒降低","（DIBL, Drain-Induced Barrier Lowering）现象。",[588,5495,5496],{},[240,5497,5498,5499,5578],{},"For short-channel devices, an increase in the drain voltage ",[279,5500,5502,5523],{"className":5501},[282],[279,5503,5505],{"className":5504},[286],[288,5506,5507],{"xmlns":290},[292,5508,5509,5521],{},[295,5510,5511],{},[298,5512,5513,5515],{},[301,5514,303],{},[295,5516,5517,5519],{},[301,5518,308],{},[301,5520,4417],{},[312,5522,5157],{"encoding":314},[279,5524,5526],{"className":5525,"ariaHidden":320},[319],[279,5527,5529,5532],{"className":5528},[324],[279,5530],{"className":5531,"style":329},[328],[279,5533,5535,5538],{"className":5534},[333],[279,5536,303],{"className":5537,"style":338},[333,337],[279,5539,5541],{"className":5540},[342],[279,5542,5544,5570],{"className":5543},[346,347],[279,5545,5547,5567],{"className":5546},[351],[279,5548,5550],{"className":5549,"style":356},[355],[279,5551,5552,5555],{"style":359},[279,5553],{"className":5554,"style":364},[363],[279,5556,5558],{"className":5557},[368,369,370,371],[279,5559,5561,5564],{"className":5560},[333,371],[279,5562,308],{"className":5563},[333,337,371],[279,5565,4417],{"className":5566},[333,337,371],[279,5568,383],{"className":5569},[382],[279,5571,5573],{"className":5572},[351],[279,5574,5576],{"className":5575,"style":390},[355],[279,5577],{}," further 'pulls down' the channel potential, leading to a further reduction in the potential barrier at the source end. This is the phenomenon of Drain-Induced Barrier Lowering (DIBL).",[240,5580,5581],{},[257,5582],{"alt":259,"src":5583},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-21.png",[2772,5585,5587],{"id":5586},"_2-耗尽层模型-depletion-layer-model",[266,5588,5589],{},"2 耗尽层模型 | Depletion Layer Model",[240,5591,5592,5593,5664,5665,5735],{},"沟道越短 L 越小，源\u002F漏 pn 结分担（balance）掉的耗尽电荷比例越大，所以栅需要提供的电荷更少，更小的 ",[279,5594,5596,5615],{"className":5595},[282],[279,5597,5599],{"className":5598},[286],[288,5600,5601],{"xmlns":290},[292,5602,5603,5612],{},[295,5604,5605],{},[298,5606,5607,5609],{},[301,5608,303],{},[301,5610,5611],{},"G",[312,5613,5614],{"encoding":314},"V_G",[279,5616,5618],{"className":5617,"ariaHidden":320},[319],[279,5619,5621,5624],{"className":5620},[324],[279,5622],{"className":5623,"style":329},[328],[279,5625,5627,5630],{"className":5626},[333],[279,5628,303],{"className":5629,"style":338},[333,337],[279,5631,5633],{"className":5632},[342],[279,5634,5636,5656],{"className":5635},[346,347],[279,5637,5639,5653],{"className":5638},[351],[279,5640,5642],{"className":5641,"style":2674},[355],[279,5643,5644,5647],{"style":359},[279,5645],{"className":5646,"style":364},[363],[279,5648,5650],{"className":5649},[368,369,370,371],[279,5651,5611],{"className":5652},[333,337,371],[279,5654,383],{"className":5655},[382],[279,5657,5659],{"className":5658},[351],[279,5660,5662],{"className":5661,"style":390},[355],[279,5663],{},"就能达到反型，阈值电压 ",[279,5666,5668,5686],{"className":5667},[282],[279,5669,5671],{"className":5670},[286],[288,5672,5673],{"xmlns":290},[292,5674,5675,5683],{},[295,5676,5677],{},[298,5678,5679,5681],{},[301,5680,303],{},[301,5682,416],{},[312,5684,5685],{"encoding":314},"V_T",[279,5687,5689],{"className":5688,"ariaHidden":320},[319],[279,5690,5692,5695],{"className":5691},[324],[279,5693],{"className":5694,"style":329},[328],[279,5696,5698,5701],{"className":5697},[333],[279,5699,303],{"className":5700,"style":338},[333,337],[279,5702,5704],{"className":5703},[342],[279,5705,5707,5727],{"className":5706},[346,347],[279,5708,5710,5724],{"className":5709},[351],[279,5711,5713],{"className":5712,"style":2674},[355],[279,5714,5715,5718],{"style":359},[279,5716],{"className":5717,"style":364},[363],[279,5719,5721],{"className":5720},[368,369,370,371],[279,5722,416],{"className":5723,"style":443},[333,337,371],[279,5725,383],{"className":5726},[382],[279,5728,5730],{"className":5729},[351],[279,5731,5733],{"className":5732,"style":390},[355],[279,5734],{}," 下降（roll-off）。",[588,5737,5738],{},[240,5739,5740,5741,5810,5811,5880,5881,5950],{},"As the channel becomes shorter (smaller L), the source\u002Fdrain pn junctions “share” (balance) a larger fraction of the depletion charge. As a result, the gate needs to supply less charge, so inversion can be reached at a smaller ",[279,5742,5744,5761],{"className":5743},[282],[279,5745,5747],{"className":5746},[286],[288,5748,5749],{"xmlns":290},[292,5750,5751,5759],{},[295,5752,5753],{},[298,5754,5755,5757],{},[301,5756,303],{},[301,5758,5611],{},[312,5760,5614],{"encoding":314},[279,5762,5764],{"className":5763,"ariaHidden":320},[319],[279,5765,5767,5770],{"className":5766},[324],[279,5768],{"className":5769,"style":329},[328],[279,5771,5773,5776],{"className":5772},[333],[279,5774,303],{"className":5775,"style":338},[333,337],[279,5777,5779],{"className":5778},[342],[279,5780,5782,5802],{"className":5781},[346,347],[279,5783,5785,5799],{"className":5784},[351],[279,5786,5788],{"className":5787,"style":2674},[355],[279,5789,5790,5793],{"style":359},[279,5791],{"className":5792,"style":364},[363],[279,5794,5796],{"className":5795},[368,369,370,371],[279,5797,5611],{"className":5798},[333,337,371],[279,5800,383],{"className":5801},[382],[279,5803,5805],{"className":5804},[351],[279,5806,5808],{"className":5807,"style":390},[355],[279,5809],{},", leading to a reduced threshold voltage ",[279,5812,5814,5831],{"className":5813},[282],[279,5815,5817],{"className":5816},[286],[288,5818,5819],{"xmlns":290},[292,5820,5821,5829],{},[295,5822,5823],{},[298,5824,5825,5827],{},[301,5826,303],{},[301,5828,416],{},[312,5830,5685],{"encoding":314},[279,5832,5834],{"className":5833,"ariaHidden":320},[319],[279,5835,5837,5840],{"className":5836},[324],[279,5838],{"className":5839,"style":329},[328],[279,5841,5843,5846],{"className":5842},[333],[279,5844,303],{"className":5845,"style":338},[333,337],[279,5847,5849],{"className":5848},[342],[279,5850,5852,5872],{"className":5851},[346,347],[279,5853,5855,5869],{"className":5854},[351],[279,5856,5858],{"className":5857,"style":2674},[355],[279,5859,5860,5863],{"style":359},[279,5861],{"className":5862,"style":364},[363],[279,5864,5866],{"className":5865},[368,369,370,371],[279,5867,416],{"className":5868,"style":443},[333,337,371],[279,5870,383],{"className":5871},[382],[279,5873,5875],{"className":5874},[351],[279,5876,5878],{"className":5877,"style":390},[355],[279,5879],{}," (i.e., ",[279,5882,5884,5901],{"className":5883},[282],[279,5885,5887],{"className":5886},[286],[288,5888,5889],{"xmlns":290},[292,5890,5891,5899],{},[295,5892,5893],{},[298,5894,5895,5897],{},[301,5896,303],{},[301,5898,416],{},[312,5900,5685],{"encoding":314},[279,5902,5904],{"className":5903,"ariaHidden":320},[319],[279,5905,5907,5910],{"className":5906},[324],[279,5908],{"className":5909,"style":329},[328],[279,5911,5913,5916],{"className":5912},[333],[279,5914,303],{"className":5915,"style":338},[333,337],[279,5917,5919],{"className":5918},[342],[279,5920,5922,5942],{"className":5921},[346,347],[279,5923,5925,5939],{"className":5924},[351],[279,5926,5928],{"className":5927,"style":2674},[355],[279,5929,5930,5933],{"style":359},[279,5931],{"className":5932,"style":364},[363],[279,5934,5936],{"className":5935},[368,369,370,371],[279,5937,416],{"className":5938,"style":443},[333,337,371],[279,5940,383],{"className":5941},[382],[279,5943,5945],{"className":5944},[351],[279,5946,5948],{"className":5947,"style":390},[355],[279,5949],{}," roll-off).",[240,5952,5953],{},[257,5954],{"alt":259,"src":5955},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-11.png",[5957,5958,5960],"h6",{"id":5959},"一阶几何模型first-order-model梯形耗尽区",[266,5961,5962],{},"一阶几何模型（First-Order Model：梯形耗尽区）",[240,5964,5965,5966,5969,5970,3505],{},"理想长沟道：栅下耗尽区近似 ",[266,5967,5968],{},"矩形","（长度L，深度",[279,5971,5973,5994],{"className":5972},[282],[279,5974,5976],{"className":5975},[286],[288,5977,5978],{"xmlns":290},[292,5979,5980,5992],{},[295,5981,5982],{},[298,5983,5984,5986],{},[301,5985,3439],{},[295,5987,5988,5990],{},[301,5989,308],{},[301,5991,3446],{},[312,5993,3449],{"encoding":314},[279,5995,5997],{"className":5996,"ariaHidden":320},[319],[279,5998,6000,6003],{"className":5999},[324],[279,6001],{"className":6002,"style":329},[328],[279,6004,6006,6009],{"className":6005},[333],[279,6007,3439],{"className":6008,"style":443},[333,337],[279,6010,6012],{"className":6011},[342],[279,6013,6015,6041],{"className":6014},[346,347],[279,6016,6018,6038],{"className":6017},[351],[279,6019,6021],{"className":6020,"style":356},[355],[279,6022,6023,6026],{"style":459},[279,6024],{"className":6025,"style":364},[363],[279,6027,6029],{"className":6028},[368,369,370,371],[279,6030,6032,6035],{"className":6031},[333,371],[279,6033,308],{"className":6034},[333,337,371],[279,6036,3446],{"className":6037},[333,337,371],[279,6039,383],{"className":6040},[382],[279,6042,6044],{"className":6043},[351],[279,6045,6047],{"className":6046,"style":390},[355],[279,6048],{},[240,6050,6051,6052,6055,6056,6121],{},"短沟道：两侧源\u002F漏耗尽边界弯进来，使得“由栅控制的耗尽区”变成 ",[266,6053,6054],{},"梯形","，底边变短为 ",[279,6057,6059,6079],{"className":6058},[282],[279,6060,6062],{"className":6061},[286],[288,6063,6064],{"xmlns":290},[292,6065,6066,6076],{},[295,6067,6068],{},[965,6069,6070,6072],{},[301,6071,3728],{},[938,6073,6075],{"mathvariant":1380,"lspace":6074,"rspace":6074},"0em","′",[312,6077,6078],{"encoding":314},"L'",[279,6080,6082],{"className":6081,"ariaHidden":320},[319],[279,6083,6085,6089],{"className":6084},[324],[279,6086],{"className":6087,"style":6088},[328],"height:0.7519em;",[279,6090,6092,6095],{"className":6091},[333],[279,6093,3728],{"className":6094},[333,337],[279,6096,6098],{"className":6097},[342],[279,6099,6101],{"className":6100},[346],[279,6102,6104],{"className":6103},[351],[279,6105,6107],{"className":6106,"style":6088},[355],[279,6108,6109,6112],{"style":1176},[279,6110],{"className":6111,"style":364},[363],[279,6113,6115],{"className":6114},[368,369,370,371],[279,6116,6118],{"className":6117},[333,371],[279,6119,6075],{"className":6120},[333,371],"（图中标出）。",[240,6123,6124,6125],{},"矩形耗尽区面积：",[279,6126,6128,6164],{"className":6127},[282],[279,6129,6131],{"className":6130},[286],[288,6132,6133],{"xmlns":290},[292,6134,6135,6161],{},[295,6136,6137,6145,6147,6149,6151],{},[298,6138,6139,6142],{},[301,6140,6141],{},"A",[4391,6143,6144],{},"rect",[938,6146,2356],{},[301,6148,3728],{},[938,6150,2380],{},[298,6152,6153,6155],{},[301,6154,3439],{},[295,6156,6157,6159],{},[301,6158,308],{},[301,6160,3446],{},[312,6162,6163],{"encoding":314},"A_{\\text{rect}} = L \\cdot W_{dm}",[279,6165,6167,6228,6246],{"className":6166,"ariaHidden":320},[319],[279,6168,6170,6173,6219,6222,6225],{"className":6169},[324],[279,6171],{"className":6172,"style":329},[328],[279,6174,6176,6179],{"className":6175},[333],[279,6177,6141],{"className":6178},[333,337],[279,6180,6182],{"className":6181},[342],[279,6183,6185,6211],{"className":6184},[346,347],[279,6186,6188,6208],{"className":6187},[351],[279,6189,6191],{"className":6190,"style":715},[355],[279,6192,6193,6196],{"style":2483},[279,6194],{"className":6195,"style":364},[363],[279,6197,6199],{"className":6198},[368,369,370,371],[279,6200,6202],{"className":6201},[333,371],[279,6203,6205],{"className":6204},[333,4609,371],[279,6206,6144],{"className":6207},[333,371],[279,6209,383],{"className":6210},[382],[279,6212,6214],{"className":6213},[351],[279,6215,6217],{"className":6216,"style":390},[355],[279,6218],{},[279,6220],{"className":6221,"style":1035},[1034],[279,6223,2356],{"className":6224},[1039],[279,6226],{"className":6227,"style":1035},[1034],[279,6229,6231,6234,6237,6240,6243],{"className":6230},[324],[279,6232],{"className":6233,"style":2437},[328],[279,6235,3728],{"className":6236},[333,337],[279,6238],{"className":6239,"style":338},[1034],[279,6241,2380],{"className":6242},[1103],[279,6244],{"className":6245,"style":338},[1034],[279,6247,6249,6252],{"className":6248},[324],[279,6250],{"className":6251,"style":329},[328],[279,6253,6255,6258],{"className":6254},[333],[279,6256,3439],{"className":6257,"style":443},[333,337],[279,6259,6261],{"className":6260},[342],[279,6262,6264,6290],{"className":6263},[346,347],[279,6265,6267,6287],{"className":6266},[351],[279,6268,6270],{"className":6269,"style":356},[355],[279,6271,6272,6275],{"style":459},[279,6273],{"className":6274,"style":364},[363],[279,6276,6278],{"className":6277},[368,369,370,371],[279,6279,6281,6284],{"className":6280},[333,371],[279,6282,308],{"className":6283},[333,337,371],[279,6285,3446],{"className":6286},[333,337,371],[279,6288,383],{"className":6289},[382],[279,6291,6293],{"className":6292},[351],[279,6294,6296],{"className":6295,"style":390},[355],[279,6297],{},[240,6299,6300,6301],{},"梯形耗尽区面积：",[279,6302,6304,6353],{"className":6303},[282],[279,6305,6307],{"className":6306},[286],[288,6308,6309],{"xmlns":290},[292,6310,6311,6350],{},[295,6312,6313,6320,6322,6338,6340],{},[298,6314,6315,6317],{},[301,6316,6141],{},[4391,6318,6319],{},"trap",[938,6321,2356],{},[2386,6323,6324,6336],{},[295,6325,6326,6328,6330],{},[301,6327,3728],{},[938,6329,4420],{},[965,6331,6332,6334],{},[301,6333,3728],{},[938,6335,6075],{"mathvariant":1380,"lspace":6074,"rspace":6074},[970,6337,972],{},[938,6339,2380],{},[298,6341,6342,6344],{},[301,6343,3439],{},[295,6345,6346,6348],{},[301,6347,308],{},[301,6349,3446],{},[312,6351,6352],{"encoding":314},"A_{\\text{trap}} = \\frac{L + L'}{2}\\cdot W_{dm}",[279,6354,6356,6417,6542],{"className":6355,"ariaHidden":320},[319],[279,6357,6359,6362,6408,6411,6414],{"className":6358},[324],[279,6360],{"className":6361,"style":778},[328],[279,6363,6365,6368],{"className":6364},[333],[279,6366,6141],{"className":6367},[333,337],[279,6369,6371],{"className":6370},[342],[279,6372,6374,6400],{"className":6373},[346,347],[279,6375,6377,6397],{"className":6376},[351],[279,6378,6380],{"className":6379,"style":715},[355],[279,6381,6382,6385],{"style":2483},[279,6383],{"className":6384,"style":364},[363],[279,6386,6388],{"className":6387},[368,369,370,371],[279,6389,6391],{"className":6390},[333,371],[279,6392,6394],{"className":6393},[333,4609,371],[279,6395,6319],{"className":6396},[333,371],[279,6398,383],{"className":6399},[382],[279,6401,6403],{"className":6402},[351],[279,6404,6406],{"className":6405,"style":827},[355],[279,6407],{},[279,6409],{"className":6410,"style":1035},[1034],[279,6412,2356],{"className":6413},[1039],[279,6415],{"className":6416,"style":1035},[1034],[279,6418,6420,6424,6533,6536,6539],{"className":6419},[324],[279,6421],{"className":6422,"style":6423},[328],"height:1.3185em;vertical-align:-0.345em;",[279,6425,6427,6430,6530],{"className":6426},[333],[279,6428],{"className":6429},[1053,2557],[279,6431,6433],{"className":6432},[2386],[279,6434,6436,6521],{"className":6435},[346,347],[279,6437,6439,6518],{"className":6438},[351],[279,6440,6443,6458,6466],{"className":6441,"style":6442},[355],"height:0.9735em;",[279,6444,6446,6449],{"style":6445},"top:-2.655em;",[279,6447],{"className":6448,"style":2577},[363],[279,6450,6452],{"className":6451},[368,369,370,371],[279,6453,6455],{"className":6454},[333,371],[279,6456,972],{"className":6457},[333,371],[279,6459,6460,6463],{"style":2638},[279,6461],{"className":6462,"style":2577},[363],[279,6464],{"className":6465,"style":2646},[2645],[279,6467,6469,6472],{"style":6468},"top:-3.394em;",[279,6470],{"className":6471,"style":2577},[363],[279,6473,6475],{"className":6474},[368,369,370,371],[279,6476,6478,6481,6484],{"className":6477},[333,371],[279,6479,3728],{"className":6480},[333,337,371],[279,6482,4420],{"className":6483},[1103,371],[279,6485,6487,6490],{"className":6486},[333,371],[279,6488,3728],{"className":6489},[333,337,371],[279,6491,6493],{"className":6492},[342],[279,6494,6496],{"className":6495},[346],[279,6497,6499],{"className":6498},[351],[279,6500,6503],{"className":6501,"style":6502},[355],"height:0.8278em;",[279,6504,6506,6509],{"style":6505},"top:-2.931em;margin-right:0.0714em;",[279,6507],{"className":6508,"style":1524},[363],[279,6510,6512],{"className":6511},[368,1528,1529,371],[279,6513,6515],{"className":6514},[333,371],[279,6516,6075],{"className":6517},[333,371],[279,6519,383],{"className":6520},[382],[279,6522,6524],{"className":6523},[351],[279,6525,6528],{"className":6526,"style":6527},[355],"height:0.345em;",[279,6529],{},[279,6531],{"className":6532},[1157,2557],[279,6534],{"className":6535,"style":338},[1034],[279,6537,2380],{"className":6538},[1103],[279,6540],{"className":6541,"style":338},[1034],[279,6543,6545,6548],{"className":6544},[324],[279,6546],{"className":6547,"style":329},[328],[279,6549,6551,6554],{"className":6550},[333],[279,6552,3439],{"className":6553,"style":443},[333,337],[279,6555,6557],{"className":6556},[342],[279,6558,6560,6586],{"className":6559},[346,347],[279,6561,6563,6583],{"className":6562},[351],[279,6564,6566],{"className":6565,"style":356},[355],[279,6567,6568,6571],{"style":459},[279,6569],{"className":6570,"style":364},[363],[279,6572,6574],{"className":6573},[368,369,370,371],[279,6575,6577,6580],{"className":6576},[333,371],[279,6578,308],{"className":6579},[333,337,371],[279,6581,3446],{"className":6582},[333,337,371],[279,6584,383],{"className":6585},[382],[279,6587,6589],{"className":6588},[351],[279,6590,6592],{"className":6591,"style":390},[355],[279,6593],{},[240,6595,6596,6597,6600],{},"因此，",[266,6598,6599],{},"栅需要支持的耗尽电荷比例","大致按面积比缩小：",[279,6602,6604],{"className":6603},[2333],[279,6605,6607,6709],{"className":6606},[282],[279,6608,6610],{"className":6609},[286],[288,6611,6612],{"xmlns":290,"display":2342},[292,6613,6614,6706],{},[295,6615,6616,6668,6670,6684,6686],{},[2386,6617,6618,6641],{},[298,6619,6620,6623],{},[301,6621,6622],{},"Q",[295,6624,6625,6627,6629,6631,6633],{},[301,6626,308],{},[301,6628,3306],{},[301,6630,240],{},[938,6632,4449],{"separator":320},[295,6634,6635,6637,6639],{},[301,6636,3306],{"mathvariant":1380},[301,6638,763],{"mathvariant":1380},[301,6640,763],{"mathvariant":1380},[298,6642,6643,6645],{},[301,6644,6622],{},[295,6646,6647,6649,6651,6653,6655],{},[301,6648,308],{},[301,6650,3306],{},[301,6652,240],{},[938,6654,4449],{"separator":320},[295,6656,6657,6659,6661,6663,6666],{},[301,6658,2167],{"mathvariant":1380},[301,6660,308],{"mathvariant":1380},[301,6662,3306],{"mathvariant":1380},[301,6664,6665],{"mathvariant":1380},"a",[301,6667,4396],{"mathvariant":1380},[938,6669,4464],{},[2386,6671,6672,6678],{},[298,6673,6674,6676],{},[301,6675,6141],{},[4391,6677,6319],{},[298,6679,6680,6682],{},[301,6681,6141],{},[4391,6683,6144],{},[938,6685,2356],{},[2386,6687,6688,6700],{},[295,6689,6690,6692,6694],{},[301,6691,3728],{},[938,6693,4420],{},[965,6695,6696,6698],{},[301,6697,3728],{},[938,6699,6075],{"mathvariant":1380,"lspace":6074,"rspace":6074},[295,6701,6702,6704],{},[970,6703,972],{},[301,6705,3728],{},[312,6707,6708],{"encoding":314},"\\frac{Q_{dep,\\mathrm{eff}}}{Q_{dep,\\mathrm{ideal}}} \\approx \\frac{A_{\\text{trap}}}{A_{\\text{rect}}} = \\frac{L + L'}{2L}",[279,6710,6712,6905,7070],{"className":6711,"ariaHidden":320},[319],[279,6713,6715,6719,6896,6899,6902],{"className":6714},[324],[279,6716],{"className":6717,"style":6718},[328],"height:2.3324em;vertical-align:-0.9721em;",[279,6720,6722,6725,6893],{"className":6721},[333],[279,6723],{"className":6724},[1053,2557],[279,6726,6728],{"className":6727},[2386],[279,6729,6731,6885],{"className":6730},[346,347],[279,6732,6734,6882],{"className":6733},[351],[279,6735,6738,6806,6814],{"className":6736,"style":6737},[355],"height:1.3603em;",[279,6739,6740,6743],{"style":2573},[279,6741],{"className":6742,"style":2577},[363],[279,6744,6746],{"className":6745},[333],[279,6747,6749,6752],{"className":6748},[333],[279,6750,6622],{"className":6751},[333,337],[279,6753,6755],{"className":6754},[342],[279,6756,6758,6798],{"className":6757},[346,347],[279,6759,6761,6795],{"className":6760},[351],[279,6762,6764],{"className":6763,"style":356},[355],[279,6765,6766,6769],{"style":2483},[279,6767],{"className":6768,"style":364},[363],[279,6770,6772],{"className":6771},[368,369,370,371],[279,6773,6775,6778,6781,6784,6787],{"className":6774},[333,371],[279,6776,308],{"className":6777},[333,337,371],[279,6779,3306],{"className":6780},[333,337,371],[279,6782,240],{"className":6783},[333,337,371],[279,6785,4449],{"className":6786},[4813,371],[279,6788,6790],{"className":6789},[333,371],[279,6791,6794],{"className":6792},[333,6793,371],"mathrm","ideal",[279,6796,383],{"className":6797},[382],[279,6799,6801],{"className":6800},[351],[279,6802,6804],{"className":6803,"style":827},[355],[279,6805],{},[279,6807,6808,6811],{"style":2638},[279,6809],{"className":6810,"style":2577},[363],[279,6812],{"className":6813,"style":2646},[2645],[279,6815,6816,6819],{"style":2649},[279,6817],{"className":6818,"style":2577},[363],[279,6820,6822],{"className":6821},[333],[279,6823,6825,6828],{"className":6824},[333],[279,6826,6622],{"className":6827},[333,337],[279,6829,6831],{"className":6830},[342],[279,6832,6834,6874],{"className":6833},[346,347],[279,6835,6837,6871],{"className":6836},[351],[279,6838,6840],{"className":6839,"style":356},[355],[279,6841,6842,6845],{"style":2483},[279,6843],{"className":6844,"style":364},[363],[279,6846,6848],{"className":6847},[368,369,370,371],[279,6849,6851,6854,6857,6860,6863],{"className":6850},[333,371],[279,6852,308],{"className":6853},[333,337,371],[279,6855,3306],{"className":6856},[333,337,371],[279,6858,240],{"className":6859},[333,337,371],[279,6861,4449],{"className":6862},[4813,371],[279,6864,6866],{"className":6865},[333,371],[279,6867,6870],{"className":6868,"style":6869},[333,6793,371],"margin-right:0.0778em;","eff",[279,6872,383],{"className":6873},[382],[279,6875,6877],{"className":6876},[351],[279,6878,6880],{"className":6879,"style":827},[355],[279,6881],{},[279,6883,383],{"className":6884},[382],[279,6886,6888],{"className":6887},[351],[279,6889,6891],{"className":6890,"style":2755},[355],[279,6892],{},[279,6894],{"className":6895},[1157,2557],[279,6897],{"className":6898,"style":1035},[1034],[279,6900,4464],{"className":6901},[1039],[279,6903],{"className":6904,"style":1035},[1034],[279,6906,6908,6912,7061,7064,7067],{"className":6907},[324],[279,6909],{"className":6910,"style":6911},[328],"height:2.1963em;vertical-align:-0.836em;",[279,6913,6915,6918,7058],{"className":6914},[333],[279,6916],{"className":6917},[1053,2557],[279,6919,6921],{"className":6920},[2386],[279,6922,6924,7049],{"className":6923},[346,347],[279,6925,6927,7046],{"className":6926},[351],[279,6928,6930,6984,6992],{"className":6929,"style":6737},[355],[279,6931,6932,6935],{"style":2573},[279,6933],{"className":6934,"style":2577},[363],[279,6936,6938],{"className":6937},[333],[279,6939,6941,6944],{"className":6940},[333],[279,6942,6141],{"className":6943},[333,337],[279,6945,6947],{"className":6946},[342],[279,6948,6950,6976],{"className":6949},[346,347],[279,6951,6953,6973],{"className":6952},[351],[279,6954,6956],{"className":6955,"style":715},[355],[279,6957,6958,6961],{"style":2483},[279,6959],{"className":6960,"style":364},[363],[279,6962,6964],{"className":6963},[368,369,370,371],[279,6965,6967],{"className":6966},[333,371],[279,6968,6970],{"className":6969},[333,4609,371],[279,6971,6144],{"className":6972},[333,371],[279,6974,383],{"className":6975},[382],[279,6977,6979],{"className":6978},[351],[279,6980,6982],{"className":6981,"style":390},[355],[279,6983],{},[279,6985,6986,6989],{"style":2638},[279,6987],{"className":6988,"style":2577},[363],[279,6990],{"className":6991,"style":2646},[2645],[279,6993,6994,6997],{"style":2649},[279,6995],{"className":6996,"style":2577},[363],[279,6998,7000],{"className":6999},[333],[279,7001,7003,7006],{"className":7002},[333],[279,7004,6141],{"className":7005},[333,337],[279,7007,7009],{"className":7008},[342],[279,7010,7012,7038],{"className":7011},[346,347],[279,7013,7015,7035],{"className":7014},[351],[279,7016,7018],{"className":7017,"style":715},[355],[279,7019,7020,7023],{"style":2483},[279,7021],{"className":7022,"style":364},[363],[279,7024,7026],{"className":7025},[368,369,370,371],[279,7027,7029],{"className":7028},[333,371],[279,7030,7032],{"className":7031},[333,4609,371],[279,7033,6319],{"className":7034},[333,371],[279,7036,383],{"className":7037},[382],[279,7039,7041],{"className":7040},[351],[279,7042,7044],{"className":7043,"style":827},[355],[279,7045],{},[279,7047,383],{"className":7048},[382],[279,7050,7052],{"className":7051},[351],[279,7053,7056],{"className":7054,"style":7055},[355],"height:0.836em;",[279,7057],{},[279,7059],{"className":7060},[1157,2557],[279,7062],{"className":7063,"style":1035},[1034],[279,7065,2356],{"className":7066},[1039],[279,7068],{"className":7069,"style":1035},[1034],[279,7071,7073,7077],{"className":7072},[324],[279,7074],{"className":7075,"style":7076},[328],"height:2.1149em;vertical-align:-0.686em;",[279,7078,7080,7083,7182],{"className":7079},[333],[279,7081],{"className":7082},[1053,2557],[279,7084,7086],{"className":7085},[2386],[279,7087,7089,7173],{"className":7088},[346,347],[279,7090,7092,7170],{"className":7091},[351],[279,7093,7096,7110,7118],{"className":7094,"style":7095},[355],"height:1.4289em;",[279,7097,7098,7101],{"style":2573},[279,7099],{"className":7100,"style":2577},[363],[279,7102,7104,7107],{"className":7103},[333],[279,7105,972],{"className":7106},[333],[279,7108,3728],{"className":7109},[333,337],[279,7111,7112,7115],{"style":2638},[279,7113],{"className":7114,"style":2577},[363],[279,7116],{"className":7117,"style":2646},[2645],[279,7119,7120,7123],{"style":2649},[279,7121],{"className":7122,"style":2577},[363],[279,7124,7126,7129,7132,7135,7138],{"className":7125},[333],[279,7127,3728],{"className":7128},[333,337],[279,7130],{"className":7131,"style":338},[1034],[279,7133,4420],{"className":7134},[1103],[279,7136],{"className":7137,"style":338},[1034],[279,7139,7141,7144],{"className":7140},[333],[279,7142,3728],{"className":7143},[333,337],[279,7145,7147],{"className":7146},[342],[279,7148,7150],{"className":7149},[346],[279,7151,7153],{"className":7152},[351],[279,7154,7156],{"className":7155,"style":6088},[355],[279,7157,7158,7161],{"style":1176},[279,7159],{"className":7160,"style":364},[363],[279,7162,7164],{"className":7163},[368,369,370,371],[279,7165,7167],{"className":7166},[333,371],[279,7168,6075],{"className":7169},[333,371],[279,7171,383],{"className":7172},[382],[279,7174,7176],{"className":7175},[351],[279,7177,7180],{"className":7178,"style":7179},[355],"height:0.686em;",[279,7181],{},[279,7183],{"className":7184},[1157,2557],[240,7186,7187,7188,7361],{},"则被源\u002F漏极分担的耗尽电荷的比例为",[279,7189,7191,7227],{"className":7190},[282],[279,7192,7194],{"className":7193},[286],[288,7195,7196],{"xmlns":290},[292,7197,7198,7224],{},[295,7199,7200,7202,7204],{},[970,7201,1465],{},[938,7203,957],{},[2386,7205,7206,7218],{},[295,7207,7208,7210,7212],{},[301,7209,3728],{},[938,7211,4420],{},[965,7213,7214,7216],{},[301,7215,3728],{},[938,7217,6075],{"mathvariant":1380,"lspace":6074,"rspace":6074},[295,7219,7220,7222],{},[970,7221,972],{},[301,7223,3728],{},[312,7225,7226],{"encoding":314},"1 - \\frac{L + L'}{2L}",[279,7228,7230,7249],{"className":7229,"ariaHidden":320},[319],[279,7231,7233,7237,7240,7243,7246],{"className":7232},[324],[279,7234],{"className":7235,"style":7236},[328],"height:0.7278em;vertical-align:-0.0833em;",[279,7238,1465],{"className":7239},[333],[279,7241],{"className":7242,"style":338},[1034],[279,7244,957],{"className":7245},[1103],[279,7247],{"className":7248,"style":338},[1034],[279,7250,7252,7255],{"className":7251},[324],[279,7253],{"className":7254,"style":6423},[328],[279,7256,7258,7261,7358],{"className":7257},[333],[279,7259],{"className":7260},[1053,2557],[279,7262,7264],{"className":7263},[2386],[279,7265,7267,7350],{"className":7266},[346,347],[279,7268,7270,7347],{"className":7269},[351],[279,7271,7273,7290,7298],{"className":7272,"style":6442},[355],[279,7274,7275,7278],{"style":6445},[279,7276],{"className":7277,"style":2577},[363],[279,7279,7281],{"className":7280},[368,369,370,371],[279,7282,7284,7287],{"className":7283},[333,371],[279,7285,972],{"className":7286},[333,371],[279,7288,3728],{"className":7289},[333,337,371],[279,7291,7292,7295],{"style":2638},[279,7293],{"className":7294,"style":2577},[363],[279,7296],{"className":7297,"style":2646},[2645],[279,7299,7300,7303],{"style":6468},[279,7301],{"className":7302,"style":2577},[363],[279,7304,7306],{"className":7305},[368,369,370,371],[279,7307,7309,7312,7315],{"className":7308},[333,371],[279,7310,3728],{"className":7311},[333,337,371],[279,7313,4420],{"className":7314},[1103,371],[279,7316,7318,7321],{"className":7317},[333,371],[279,7319,3728],{"className":7320},[333,337,371],[279,7322,7324],{"className":7323},[342],[279,7325,7327],{"className":7326},[346],[279,7328,7330],{"className":7329},[351],[279,7331,7333],{"className":7332,"style":6502},[355],[279,7334,7335,7338],{"style":6505},[279,7336],{"className":7337,"style":1524},[363],[279,7339,7341],{"className":7340},[368,1528,1529,371],[279,7342,7344],{"className":7343},[333,371],[279,7345,6075],{"className":7346},[333,371],[279,7348,383],{"className":7349},[382],[279,7351,7353],{"className":7352},[351],[279,7354,7356],{"className":7355,"style":6527},[355],[279,7357],{},[279,7359],{"className":7360},[1157,2557],"，这就是缩减因子。",[240,7363,7364,7365],{},"由图中的几何关系可以得到：",[279,7366,7368,7442],{"className":7367},[282],[279,7369,7371],{"className":7370},[286],[288,7372,7373],{"xmlns":290},[292,7374,7375,7439],{},[295,7376,7377,7383,7385,7387,7389,7391,7398],{},[965,7378,7379,7381],{},[301,7380,3728],{},[938,7382,6075],{"mathvariant":1380,"lspace":6074,"rspace":6074},[938,7384,2356],{},[301,7386,3728],{},[938,7388,957],{},[970,7390,972],{},[298,7392,7393,7396],{},[301,7394,7395],{},"r",[301,7397,4503],{},[295,7399,7400,7402,7433,7435,7437],{},[938,7401,944],{"fence":320},[7403,7404,7405],"msqrt",{},[295,7406,7407,7409,7411],{},[970,7408,1465],{},[938,7410,4420],{},[2386,7412,7413,7427],{},[295,7414,7415,7417],{},[970,7416,972],{},[298,7418,7419,7421],{},[301,7420,3439],{},[295,7422,7423,7425],{},[301,7424,308],{},[301,7426,3446],{},[298,7428,7429,7431],{},[301,7430,7395],{},[301,7432,4503],{},[938,7434,957],{},[970,7436,1465],{},[938,7438,832],{"fence":320},[312,7440,7441],{"encoding":314},"L' = L - 2r_j\\left(\\sqrt{1 + \\frac{2W_{dm}}{r_j}} - 1\\right)",[279,7443,7445,7492,7511],{"className":7444,"ariaHidden":320},[319],[279,7446,7448,7451,7483,7486,7489],{"className":7447},[324],[279,7449],{"className":7450,"style":6088},[328],[279,7452,7454,7457],{"className":7453},[333],[279,7455,3728],{"className":7456},[333,337],[279,7458,7460],{"className":7459},[342],[279,7461,7463],{"className":7462},[346],[279,7464,7466],{"className":7465},[351],[279,7467,7469],{"className":7468,"style":6088},[355],[279,7470,7471,7474],{"style":1176},[279,7472],{"className":7473,"style":364},[363],[279,7475,7477],{"className":7476},[368,369,370,371],[279,7478,7480],{"className":7479},[333,371],[279,7481,6075],{"className":7482},[333,371],[279,7484],{"className":7485,"style":1035},[1034],[279,7487,2356],{"className":7488},[1039],[279,7490],{"className":7491,"style":1035},[1034],[279,7493,7495,7499,7502,7505,7508],{"className":7494},[324],[279,7496],{"className":7497,"style":7498},[328],"height:0.7667em;vertical-align:-0.0833em;",[279,7500,3728],{"className":7501},[333,337],[279,7503],{"className":7504,"style":338},[1034],[279,7506,957],{"className":7507},[1103],[279,7509],{"className":7510,"style":338},[1034],[279,7512,7514,7518,7521,7561,7564],{"className":7513},[324],[279,7515],{"className":7516,"style":7517},[328],"height:1.84em;vertical-align:-0.6791em;",[279,7519,972],{"className":7520},[333],[279,7522,7524,7527],{"className":7523},[333],[279,7525,7395],{"className":7526,"style":2199},[333,337],[279,7528,7530],{"className":7529},[342],[279,7531,7533,7553],{"className":7532},[346,347],[279,7534,7536,7550],{"className":7535},[351],[279,7537,7539],{"className":7538,"style":5067},[355],[279,7540,7541,7544],{"style":2215},[279,7542],{"className":7543,"style":364},[363],[279,7545,7547],{"className":7546},[368,369,370,371],[279,7548,4503],{"className":7549,"style":5079},[333,337,371],[279,7551,383],{"className":7552},[382],[279,7554,7556],{"className":7555},[351],[279,7557,7559],{"className":7558,"style":827},[355],[279,7560],{},[279,7562],{"className":7563,"style":4726},[1034],[279,7565,7567,7574,7796,7799,7802,7805,7808],{"className":7566},[2541],[279,7568,7570],{"className":7569,"style":2546},[1053,2545],[279,7571,944],{"className":7572},[2550,7573],"size2",[279,7575,7577],{"className":7576},[333,4895],[279,7578,7580,7787],{"className":7579},[346,347],[279,7581,7583,7784],{"className":7582},[351],[279,7584,7587,7767],{"className":7585,"style":7586},[355],"height:1.1609em;",[279,7588,7591,7595],{"className":7589,"style":7590},[4938],"top:-3.8em;",[279,7592],{"className":7593,"style":7594},[363],"height:3.8em;",[279,7596,7598,7601,7604,7607,7610],{"className":7597,"style":4947},[333],[279,7599,1465],{"className":7600},[333],[279,7602],{"className":7603,"style":338},[1034],[279,7605,4420],{"className":7606},[1103],[279,7608],{"className":7609,"style":338},[1034],[279,7611,7613,7616,7764],{"className":7612},[333],[279,7614],{"className":7615},[1053,2557],[279,7617,7619],{"className":7618},[2386],[279,7620,7622,7755],{"className":7621},[346,347],[279,7623,7625,7752],{"className":7624},[351],[279,7626,7629,7682,7690],{"className":7627,"style":7628},[355],"height:0.8942em;",[279,7630,7631,7634],{"style":6445},[279,7632],{"className":7633,"style":2577},[363],[279,7635,7637],{"className":7636},[368,369,370,371],[279,7638,7640],{"className":7639},[333,371],[279,7641,7643,7646],{"className":7642},[333,371],[279,7644,7395],{"className":7645,"style":2199},[333,337,371],[279,7647,7649],{"className":7648},[342],[279,7650,7652,7673],{"className":7651},[346,347],[279,7653,7655,7670],{"className":7654},[351],[279,7656,7659],{"className":7657,"style":7658},[355],"height:0.3281em;",[279,7660,7661,7664],{"style":2713},[279,7662],{"className":7663,"style":1524},[363],[279,7665,7667],{"className":7666},[368,1528,1529,371],[279,7668,4503],{"className":7669,"style":5079},[333,337,371],[279,7671,383],{"className":7672},[382],[279,7674,7676],{"className":7675},[351],[279,7677,7680],{"className":7678,"style":7679},[355],"height:0.2819em;",[279,7681],{},[279,7683,7684,7687],{"style":2638},[279,7685],{"className":7686,"style":2577},[363],[279,7688],{"className":7689,"style":2646},[2645],[279,7691,7693,7696],{"style":7692},"top:-3.4159em;",[279,7694],{"className":7695,"style":2577},[363],[279,7697,7699],{"className":7698},[368,369,370,371],[279,7700,7702,7705],{"className":7701},[333,371],[279,7703,972],{"className":7704},[333,371],[279,7706,7708,7711],{"className":7707},[333,371],[279,7709,3439],{"className":7710,"style":443},[333,337,371],[279,7712,7714],{"className":7713},[342],[279,7715,7717,7744],{"className":7716},[346,347],[279,7718,7720,7741],{"className":7719},[351],[279,7721,7723],{"className":7722,"style":4785},[355],[279,7724,7726,7729],{"style":7725},"top:-2.3488em;margin-left:-0.1389em;margin-right:0.0714em;",[279,7727],{"className":7728,"style":1524},[363],[279,7730,7732],{"className":7731},[368,1528,1529,371],[279,7733,7735,7738],{"className":7734},[333,371],[279,7736,308],{"className":7737},[333,337,371],[279,7739,3446],{"className":7740},[333,337,371],[279,7742,383],{"className":7743},[382],[279,7745,7747],{"className":7746},[351],[279,7748,7750],{"className":7749,"style":4807},[355],[279,7751],{},[279,7753,383],{"className":7754},[382],[279,7756,7758],{"className":7757},[351],[279,7759,7762],{"className":7760,"style":7761},[355],"height:0.5423em;",[279,7763],{},[279,7765],{"className":7766},[1157,2557],[279,7768,7770,7773],{"style":7769},"top:-3.1209em;",[279,7771],{"className":7772,"style":7594},[363],[279,7774,7777],{"className":7775,"style":7776},[5100],"min-width:1.02em;height:1.88em;",[5103,7778,7781],{"xmlns":5105,"width":5106,"height":7779,"viewBox":7780,"preserveAspectRatio":5109},"1.88em","0 0 400000 1944",[5111,7782],{"d":7783},"M983 90\nl0 -0\nc4,-6.7,10,-10,18,-10 H400000v40\nH1013.1s-83.4,268,-264.1,840c-180.7,572,-277,876.3,-289,913c-4.7,4.7,-12.7,7,-24,7\ns-12,0,-12,0c-1.3,-3.3,-3.7,-11.7,-7,-25c-35.3,-125.3,-106.7,-373.3,-214,-744\nc-10,12,-21,25,-33,39s-32,39,-32,39c-6,-5.3,-15,-14,-27,-26s25,-30,25,-30\nc26.7,-32.7,52,-63,76,-91s52,-60,52,-60s208,722,208,722\nc56,-175.3,126.3,-397.3,211,-666c84.7,-268.7,153.8,-488.2,207.5,-658.5\nc53.7,-170.3,84.5,-266.8,92.5,-289.5z\nM1001 80h400000v40h-400000z",[279,7785,383],{"className":7786},[382],[279,7788,7790],{"className":7789},[351],[279,7791,7794],{"className":7792,"style":7793},[355],"height:0.6791em;",[279,7795],{},[279,7797],{"className":7798,"style":338},[1034],[279,7800,957],{"className":7801},[1103],[279,7803],{"className":7804,"style":338},[1034],[279,7806,1465],{"className":7807},[333],[279,7809,7811],{"className":7810,"style":2546},[1157,2545],[279,7812,832],{"className":7813},[2550,7573],[240,7815,7816],{},[257,7817],{"alt":259,"src":7818},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-10.png",[240,7820,7821,7822,7891],{},"在一阶几何模型的条件下，计算出阈值电压",[279,7823,7825,7842],{"className":7824},[282],[279,7826,7828],{"className":7827},[286],[288,7829,7830],{"xmlns":290},[292,7831,7832,7840],{},[295,7833,7834],{},[298,7835,7836,7838],{},[301,7837,303],{},[301,7839,416],{},[312,7841,5685],{"encoding":314},[279,7843,7845],{"className":7844,"ariaHidden":320},[319],[279,7846,7848,7851],{"className":7847},[324],[279,7849],{"className":7850,"style":329},[328],[279,7852,7854,7857],{"className":7853},[333],[279,7855,303],{"className":7856,"style":338},[333,337],[279,7858,7860],{"className":7859},[342],[279,7861,7863,7883],{"className":7862},[346,347],[279,7864,7866,7880],{"className":7865},[351],[279,7867,7869],{"className":7868,"style":2674},[355],[279,7870,7871,7874],{"style":359},[279,7872],{"className":7873,"style":364},[363],[279,7875,7877],{"className":7876},[368,369,370,371],[279,7878,416],{"className":7879,"style":443},[333,337,371],[279,7881,383],{"className":7882},[382],[279,7884,7886],{"className":7885},[351],[279,7887,7889],{"className":7888,"style":390},[355],[279,7890],{},"的下降量为：",[279,7893,7895],{"className":7894},[2333],[279,7896,7898,8049],{"className":7897},[282],[279,7899,7901],{"className":7900},[286],[288,7902,7903],{"xmlns":290,"display":2342},[292,7904,7905,8046],{},[295,7906,7907,7919,7921,7942,7945,7948,7954,7956,7958,7994,7996,8006],{},[295,7908,7909,7911,7917],{},[938,7910,3565],{"fence":320},[298,7912,7913,7915],{},[301,7914,303],{},[301,7916,416],{},[938,7918,3565],{"fence":320},[938,7920,957],{},[295,7922,7923,7925,7940],{},[938,7924,3565],{"fence":320},[298,7926,7927,7929],{},[301,7928,303],{},[295,7930,7931,7933,7935,7938],{},[301,7932,416],{},[938,7934,944],{"stretchy":943},[4391,7936,7937],{},"long-channel",[938,7939,832],{"stretchy":943},[938,7941,3565],{"fence":320},[938,7943,7944],{},"≡",[301,7946,7947],{"mathvariant":1380},"Δ",[298,7949,7950,7952],{},[301,7951,303],{},[301,7953,416],{},[938,7955,2356],{},[938,7957,957],{},[2386,7959,7960,7982],{},[295,7961,7962,7965,7972],{},[301,7963,7964],{},"q",[298,7966,7967,7970],{},[301,7968,7969],{},"N",[301,7971,6141],{},[298,7973,7974,7976],{},[301,7975,3439],{},[295,7977,7978,7980],{},[301,7979,308],{},[301,7981,3446],{},[298,7983,7984,7986],{},[301,7985,2070],{},[295,7987,7988,7990,7992],{},[301,7989,421],{},[301,7991,424],{},[301,7993,3306],{},[938,7995,2380],{},[2386,7997,7998,8004],{},[298,7999,8000,8002],{},[301,8001,7395],{},[301,8003,4503],{},[301,8005,3728],{},[295,8007,8008,8010,8040,8042,8044],{},[938,8009,944],{"fence":320},[7403,8011,8012],{},[295,8013,8014,8016,8018],{},[970,8015,1465],{},[938,8017,4420],{},[2386,8019,8020,8034],{},[295,8021,8022,8024],{},[970,8023,972],{},[298,8025,8026,8028],{},[301,8027,3439],{},[295,8029,8030,8032],{},[301,8031,308],{},[301,8033,3446],{},[298,8035,8036,8038],{},[301,8037,7395],{},[301,8039,4503],{},[938,8041,957],{},[970,8043,1465],{},[938,8045,832],{"fence":320},[312,8047,8048],{"encoding":314},"\\left|V_T\\right| - \\left|V_{T(\\text{long-channel})}\\right| \\equiv \\Delta V_T\n= -\\frac{q N_A W_{dm}}{C_{oxe}} \\cdot \\frac{r_j}{L}\n\\left(\\sqrt{1 + \\frac{2W_{dm}}{r_j}} - 1\\right)",[279,8050,8052,8116,8275,8333,8547],{"className":8051,"ariaHidden":320},[319],[279,8053,8055,8058,8107,8110,8113],{"className":8054},[324],[279,8056],{"className":8057,"style":1049},[328],[279,8059,8061,8064,8104],{"className":8060},[2541],[279,8062,3565],{"className":8063,"style":2546},[1053,2545],[279,8065,8067,8070],{"className":8066},[333],[279,8068,303],{"className":8069,"style":338},[333,337],[279,8071,8073],{"className":8072},[342],[279,8074,8076,8096],{"className":8075},[346,347],[279,8077,8079,8093],{"className":8078},[351],[279,8080,8082],{"className":8081,"style":2674},[355],[279,8083,8084,8087],{"style":359},[279,8085],{"className":8086,"style":364},[363],[279,8088,8090],{"className":8089},[368,369,370,371],[279,8091,416],{"className":8092,"style":443},[333,337,371],[279,8094,383],{"className":8095},[382],[279,8097,8099],{"className":8098},[351],[279,8100,8102],{"className":8101,"style":390},[355],[279,8103],{},[279,8105,3565],{"className":8106,"style":2546},[1157,2545],[279,8108],{"className":8109,"style":338},[1034],[279,8111,957],{"className":8112},[1103],[279,8114],{"className":8115,"style":338},[1034],[279,8117,8119,8123,8266,8269,8272],{"className":8118},[324],[279,8120],{"className":8121,"style":8122},[328],"height:1.2052em;vertical-align:-0.3552em;",[279,8124,8126,8172,8229],{"className":8125},[2541],[279,8127,8129],{"className":8128},[1053],[279,8130,8133],{"className":8131},[2550,8132],"mult",[279,8134,8136,8163],{"className":8135},[346,347],[279,8137,8139,8160],{"className":8138},[351],[279,8140,8143],{"className":8141,"style":8142},[355],"height:0.85em;",[279,8144,8146,8149],{"style":8145},"top:-2.85em;",[279,8147],{"className":8148,"style":4943},[363],[279,8150,8152],{"style":8151},"width:0.333em;height:1.2em;",[5103,8153,8157],{"xmlns":5105,"width":8154,"height":8155,"viewBox":8156},"0.333em","1.2em","0 0 333 1200",[5111,8158],{"d":8159},"M145 15 v585 v0 v585 c2.667,10,9.667,15,21,15\nc10,0,16.667,-5,20,-15 v-585 v0 v-585 c-2.667,-10,-9.667,-15,-21,-15\nc-10,0,-16.667,5,-20,15z M188 15 H145 v585 v0 v585 h43z",[279,8161,383],{"className":8162},[382],[279,8164,8166],{"className":8165},[351],[279,8167,8170],{"className":8168,"style":8169},[355],"height:0.35em;",[279,8171],{},[279,8173,8175,8178],{"className":8174},[333],[279,8176,303],{"className":8177,"style":338},[333,337],[279,8179,8181],{"className":8180},[342],[279,8182,8184,8220],{"className":8183},[346,347],[279,8185,8187,8217],{"className":8186},[351],[279,8188,8190],{"className":8189,"style":4785},[355],[279,8191,8193,8196],{"style":8192},"top:-2.5198em;margin-left:-0.2222em;margin-right:0.05em;",[279,8194],{"className":8195,"style":364},[363],[279,8197,8199],{"className":8198},[368,369,370,371],[279,8200,8202,8205,8208,8214],{"className":8201},[333,371],[279,8203,416],{"className":8204,"style":443},[333,337,371],[279,8206,944],{"className":8207},[1053,371],[279,8209,8211],{"className":8210},[333,4609,371],[279,8212,7937],{"className":8213},[333,371],[279,8215,832],{"className":8216},[1157,371],[279,8218,383],{"className":8219},[382],[279,8221,8223],{"className":8222},[351],[279,8224,8227],{"className":8225,"style":8226},[355],"height:0.3552em;",[279,8228],{},[279,8230,8232],{"className":8231},[1157],[279,8233,8235],{"className":8234},[2550,8132],[279,8236,8238,8258],{"className":8237},[346,347],[279,8239,8241,8255],{"className":8240},[351],[279,8242,8244],{"className":8243,"style":8142},[355],[279,8245,8246,8249],{"style":8145},[279,8247],{"className":8248,"style":4943},[363],[279,8250,8251],{"style":8151},[5103,8252,8253],{"xmlns":5105,"width":8154,"height":8155,"viewBox":8156},[5111,8254],{"d":8159},[279,8256,383],{"className":8257},[382],[279,8259,8261],{"className":8260},[351],[279,8262,8264],{"className":8263,"style":8169},[355],[279,8265],{},[279,8267],{"className":8268,"style":1035},[1034],[279,8270,7944],{"className":8271},[1039],[279,8273],{"className":8274,"style":1035},[1034],[279,8276,8278,8281,8284,8324,8327,8330],{"className":8277},[324],[279,8279],{"className":8280,"style":329},[328],[279,8282,7947],{"className":8283},[333],[279,8285,8287,8290],{"className":8286},[333],[279,8288,303],{"className":8289,"style":338},[333,337],[279,8291,8293],{"className":8292},[342],[279,8294,8296,8316],{"className":8295},[346,347],[279,8297,8299,8313],{"className":8298},[351],[279,8300,8302],{"className":8301,"style":2674},[355],[279,8303,8304,8307],{"style":359},[279,8305],{"className":8306,"style":364},[363],[279,8308,8310],{"className":8309},[368,369,370,371],[279,8311,416],{"className":8312,"style":443},[333,337,371],[279,8314,383],{"className":8315},[382],[279,8317,8319],{"className":8318},[351],[279,8320,8322],{"className":8321,"style":390},[355],[279,8323],{},[279,8325],{"className":8326,"style":1035},[1034],[279,8328,2356],{"className":8329},[1039],[279,8331],{"className":8332,"style":1035},[1034],[279,8334,8336,8339,8342,8538,8541,8544],{"className":8335},[324],[279,8337],{"className":8338,"style":6911},[328],[279,8340,957],{"className":8341},[333],[279,8343,8345,8348,8535],{"className":8344},[333],[279,8346],{"className":8347},[1053,2557],[279,8349,8351],{"className":8350},[2386],[279,8352,8354,8527],{"className":8353},[346,347],[279,8355,8357,8524],{"className":8356},[351],[279,8358,8360,8417,8425],{"className":8359,"style":6737},[355],[279,8361,8362,8365],{"style":2573},[279,8363],{"className":8364,"style":2577},[363],[279,8366,8368],{"className":8367},[333],[279,8369,8371,8374],{"className":8370},[333],[279,8372,2070],{"className":8373,"style":2095},[333,337],[279,8375,8377],{"className":8376},[342],[279,8378,8380,8409],{"className":8379},[346,347],[279,8381,8383,8406],{"className":8382},[351],[279,8384,8386],{"className":8385,"style":456},[355],[279,8387,8388,8391],{"style":2110},[279,8389],{"className":8390,"style":364},[363],[279,8392,8394],{"className":8393},[368,369,370,371],[279,8395,8397,8400,8403],{"className":8396},[333,371],[279,8398,421],{"className":8399},[333,337,371],[279,8401,424],{"className":8402},[333,337,371],[279,8404,3306],{"className":8405},[333,337,371],[279,8407,383],{"className":8408},[382],[279,8410,8412],{"className":8411},[351],[279,8413,8415],{"className":8414,"style":390},[355],[279,8416],{},[279,8418,8419,8422],{"style":2638},[279,8420],{"className":8421,"style":2577},[363],[279,8423],{"className":8424,"style":2646},[2645],[279,8426,8427,8430],{"style":2649},[279,8428],{"className":8429,"style":2577},[363],[279,8431,8433,8436,8478],{"className":8432},[333],[279,8434,7964],{"className":8435,"style":2500},[333,337],[279,8437,8439,8443],{"className":8438},[333],[279,8440,7969],{"className":8441,"style":8442},[333,337],"margin-right:0.109em;",[279,8444,8446],{"className":8445},[342],[279,8447,8449,8470],{"className":8448},[346,347],[279,8450,8452,8467],{"className":8451},[351],[279,8453,8455],{"className":8454,"style":2674},[355],[279,8456,8458,8461],{"style":8457},"top:-2.55em;margin-left:-0.109em;margin-right:0.05em;",[279,8459],{"className":8460,"style":364},[363],[279,8462,8464],{"className":8463},[368,369,370,371],[279,8465,6141],{"className":8466},[333,337,371],[279,8468,383],{"className":8469},[382],[279,8471,8473],{"className":8472},[351],[279,8474,8476],{"className":8475,"style":390},[355],[279,8477],{},[279,8479,8481,8484],{"className":8480},[333],[279,8482,3439],{"className":8483,"style":443},[333,337],[279,8485,8487],{"className":8486},[342],[279,8488,8490,8516],{"className":8489},[346,347],[279,8491,8493,8513],{"className":8492},[351],[279,8494,8496],{"className":8495,"style":356},[355],[279,8497,8498,8501],{"style":459},[279,8499],{"className":8500,"style":364},[363],[279,8502,8504],{"className":8503},[368,369,370,371],[279,8505,8507,8510],{"className":8506},[333,371],[279,8508,308],{"className":8509},[333,337,371],[279,8511,3446],{"className":8512},[333,337,371],[279,8514,383],{"className":8515},[382],[279,8517,8519],{"className":8518},[351],[279,8520,8522],{"className":8521,"style":390},[355],[279,8523],{},[279,8525,383],{"className":8526},[382],[279,8528,8530],{"className":8529},[351],[279,8531,8533],{"className":8532,"style":7055},[355],[279,8534],{},[279,8536],{"className":8537},[1157,2557],[279,8539],{"className":8540,"style":338},[1034],[279,8542,2380],{"className":8543},[1103],[279,8545],{"className":8546,"style":338},[1034],[279,8548,8550,8554,8653,8656],{"className":8549},[324],[279,8551],{"className":8552,"style":8553},[328],"height:3.078em;vertical-align:-1.25em;",[279,8555,8557,8560,8650],{"className":8556},[333],[279,8558],{"className":8559},[1053,2557],[279,8561,8563],{"className":8562},[2386],[279,8564,8566,8642],{"className":8565},[346,347],[279,8567,8569,8639],{"className":8568},[351],[279,8570,8572,8583,8591],{"className":8571,"style":2570},[355],[279,8573,8574,8577],{"style":2573},[279,8575],{"className":8576,"style":2577},[363],[279,8578,8580],{"className":8579},[333],[279,8581,3728],{"className":8582},[333,337],[279,8584,8585,8588],{"style":2638},[279,8586],{"className":8587,"style":2577},[363],[279,8589],{"className":8590,"style":2646},[2645],[279,8592,8593,8596],{"style":2649},[279,8594],{"className":8595,"style":2577},[363],[279,8597,8599],{"className":8598},[333],[279,8600,8602,8605],{"className":8601},[333],[279,8603,7395],{"className":8604,"style":2199},[333,337],[279,8606,8608],{"className":8607},[342],[279,8609,8611,8631],{"className":8610},[346,347],[279,8612,8614,8628],{"className":8613},[351],[279,8615,8617],{"className":8616,"style":5067},[355],[279,8618,8619,8622],{"style":2215},[279,8620],{"className":8621,"style":364},[363],[279,8623,8625],{"className":8624},[368,369,370,371],[279,8626,4503],{"className":8627,"style":5079},[333,337,371],[279,8629,383],{"className":8630},[382],[279,8632,8634],{"className":8633},[351],[279,8635,8637],{"className":8636,"style":827},[355],[279,8638],{},[279,8640,383],{"className":8641},[382],[279,8643,8645],{"className":8644},[351],[279,8646,8648],{"className":8647,"style":7179},[355],[279,8649],{},[279,8651],{"className":8652},[1157,2557],[279,8654],{"className":8655,"style":4726},[1034],[279,8657,8659,8666,8876,8879,8882,8885,8888],{"className":8658},[2541],[279,8660,8662],{"className":8661,"style":2546},[1053,2545],[279,8663,944],{"className":8664},[2550,8665],"size4",[279,8667,8669],{"className":8668},[333,4895],[279,8670,8672,8867],{"className":8671},[346,347],[279,8673,8675,8864],{"className":8674},[351],[279,8676,8679,8847],{"className":8677,"style":8678},[355],"height:1.828em;",[279,8680,8683,8687],{"className":8681,"style":8682},[4938],"top:-5em;",[279,8684],{"className":8685,"style":8686},[363],"height:5em;",[279,8688,8690,8693,8696,8699,8702],{"className":8689,"style":4947},[333],[279,8691,1465],{"className":8692},[333],[279,8694],{"className":8695,"style":338},[1034],[279,8697,4420],{"className":8698},[1103],[279,8700],{"className":8701,"style":338},[1034],[279,8703,8705,8708,8844],{"className":8704},[333],[279,8706],{"className":8707},[1053,2557],[279,8709,8711],{"className":8710},[2386],[279,8712,8714,8836],{"className":8713},[346,347],[279,8715,8717,8833],{"className":8716},[351],[279,8718,8720,8768,8776],{"className":8719,"style":6737},[355],[279,8721,8722,8725],{"style":2573},[279,8723],{"className":8724,"style":2577},[363],[279,8726,8728],{"className":8727},[333],[279,8729,8731,8734],{"className":8730},[333],[279,8732,7395],{"className":8733,"style":2199},[333,337],[279,8735,8737],{"className":8736},[342],[279,8738,8740,8760],{"className":8739},[346,347],[279,8741,8743,8757],{"className":8742},[351],[279,8744,8746],{"className":8745,"style":5067},[355],[279,8747,8748,8751],{"style":2215},[279,8749],{"className":8750,"style":364},[363],[279,8752,8754],{"className":8753},[368,369,370,371],[279,8755,4503],{"className":8756,"style":5079},[333,337,371],[279,8758,383],{"className":8759},[382],[279,8761,8763],{"className":8762},[351],[279,8764,8766],{"className":8765,"style":827},[355],[279,8767],{},[279,8769,8770,8773],{"style":2638},[279,8771],{"className":8772,"style":2577},[363],[279,8774],{"className":8775,"style":2646},[2645],[279,8777,8778,8781],{"style":2649},[279,8779],{"className":8780,"style":2577},[363],[279,8782,8784,8787],{"className":8783},[333],[279,8785,972],{"className":8786},[333],[279,8788,8790,8793],{"className":8789},[333],[279,8791,3439],{"className":8792,"style":443},[333,337],[279,8794,8796],{"className":8795},[342],[279,8797,8799,8825],{"className":8798},[346,347],[279,8800,8802,8822],{"className":8801},[351],[279,8803,8805],{"className":8804,"style":356},[355],[279,8806,8807,8810],{"style":459},[279,8808],{"className":8809,"style":364},[363],[279,8811,8813],{"className":8812},[368,369,370,371],[279,8814,8816,8819],{"className":8815},[333,371],[279,8817,308],{"className":8818},[333,337,371],[279,8820,3446],{"className":8821},[333,337,371],[279,8823,383],{"className":8824},[382],[279,8826,8828],{"className":8827},[351],[279,8829,8831],{"className":8830,"style":390},[355],[279,8832],{},[279,8834,383],{"className":8835},[382],[279,8837,8839],{"className":8838},[351],[279,8840,8842],{"className":8841,"style":2755},[355],[279,8843],{},[279,8845],{"className":8846},[1157,2557],[279,8848,8850,8853],{"style":8849},"top:-3.788em;",[279,8851],{"className":8852,"style":8686},[363],[279,8854,8857],{"className":8855,"style":8856},[5100],"min-width:1.02em;height:3.08em;",[5103,8858,8861],{"xmlns":5105,"width":5106,"height":8859,"viewBox":8860,"preserveAspectRatio":5109},"3.08em","0 0 400000 3240",[5111,8862],{"d":8863},"M473,2793\nc339.3,-1799.3,509.3,-2700,510,-2702 l0 -0\nc3.3,-7.3,9.3,-11,18,-11 H400000v40H1017.7\ns-90.5,478,-276.2,1466c-185.7,988,-279.5,1483,-281.5,1485c-2,6,-10,9,-24,9\nc-8,0,-12,-0.7,-12,-2c0,-1.3,-5.3,-32,-16,-92c-50.7,-293.3,-119.7,-693.3,-207,-1200\nc0,-1.3,-5.3,8.7,-16,30c-10.7,21.3,-21.3,42.7,-32,64s-16,33,-16,33s-26,-26,-26,-26\ns76,-153,76,-153s77,-151,77,-151c0.7,0.7,35.7,202,105,604c67.3,400.7,102,602.7,104,\n606zM1001 80h400000v40H1017.7z",[279,8865,383],{"className":8866},[382],[279,8868,8870],{"className":8869},[351],[279,8871,8874],{"className":8872,"style":8873},[355],"height:1.212em;",[279,8875],{},[279,8877],{"className":8878,"style":338},[1034],[279,8880,957],{"className":8881},[1103],[279,8883],{"className":8884,"style":338},[1034],[279,8886,1465],{"className":8887},[333],[279,8889,8891],{"className":8890,"style":2546},[1157,2545],[279,8892,832],{"className":8893},[2550,8665],[240,8895,8896],{},[257,8897],{"alt":259,"src":8898},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-09.png",[651,8900,8901,8980,9392],{"type":653},[240,8902,8903,8904,8979],{},"减小",[279,8905,8907,8927],{"className":8906},[282],[279,8908,8910],{"className":8909},[286],[288,8911,8912],{"xmlns":290},[292,8913,8914,8924],{},[295,8915,8916,8918],{},[301,8917,7947],{"mathvariant":1380},[298,8919,8920,8922],{},[301,8921,303],{},[301,8923,416],{},[312,8925,8926],{"encoding":314},"\\Delta V_T",[279,8928,8930],{"className":8929,"ariaHidden":320},[319],[279,8931,8933,8936,8939],{"className":8932},[324],[279,8934],{"className":8935,"style":329},[328],[279,8937,7947],{"className":8938},[333],[279,8940,8942,8945],{"className":8941},[333],[279,8943,303],{"className":8944,"style":338},[333,337],[279,8946,8948],{"className":8947},[342],[279,8949,8951,8971],{"className":8950},[346,347],[279,8952,8954,8968],{"className":8953},[351],[279,8955,8957],{"className":8956,"style":2674},[355],[279,8958,8959,8962],{"style":359},[279,8960],{"className":8961,"style":364},[363],[279,8963,8965],{"className":8964},[368,369,370,371],[279,8966,416],{"className":8967,"style":443},[333,337,371],[279,8969,383],{"className":8970},[382],[279,8972,8974],{"className":8973},[351],[279,8975,8977],{"className":8976,"style":390},[355],[279,8978],{},"的方法：",[4316,8981,8982,9157,9233],{},[247,8983,8984,393,8986,9070,9071,9156],{},[266,8985,8903],{},[279,8987,8989,9012],{"className":8988},[282],[279,8990,8992],{"className":8991},[286],[288,8993,8994],{"xmlns":290},[292,8995,8996,9010],{},[295,8997,8998],{},[298,8999,9000,9002],{},[301,9001,416],{},[295,9003,9004,9006,9008],{},[301,9005,421],{},[301,9007,424],{},[301,9009,3306],{},[312,9011,3309],{"encoding":314},[279,9013,9015],{"className":9014,"ariaHidden":320},[319],[279,9016,9018,9021],{"className":9017},[324],[279,9019],{"className":9020,"style":329},[328],[279,9022,9024,9027],{"className":9023},[333],[279,9025,416],{"className":9026,"style":443},[333,337],[279,9028,9030],{"className":9029},[342],[279,9031,9033,9062],{"className":9032},[346,347],[279,9034,9036,9059],{"className":9035},[351],[279,9037,9039],{"className":9038,"style":456},[355],[279,9040,9041,9044],{"style":459},[279,9042],{"className":9043,"style":364},[363],[279,9045,9047],{"className":9046},[368,369,370,371],[279,9048,9050,9053,9056],{"className":9049},[333,371],[279,9051,421],{"className":9052},[333,337,371],[279,9054,424],{"className":9055},[333,337,371],[279,9057,3306],{"className":9058},[333,337,371],[279,9060,383],{"className":9061},[382],[279,9063,9065],{"className":9064},[351],[279,9066,9068],{"className":9067,"style":390},[355],[279,9069],{},"（更薄栅氧 \u002F 更大 ",[279,9072,9074,9098],{"className":9073},[282],[279,9075,9077],{"className":9076},[286],[288,9078,9079],{"xmlns":290},[292,9080,9081,9095],{},[295,9082,9083],{},[298,9084,9085,9087],{},[301,9086,2070],{},[295,9088,9089,9091,9093],{},[301,9090,421],{},[301,9092,424],{},[301,9094,3306],{},[312,9096,9097],{"encoding":314},"C_{oxe}",[279,9099,9101],{"className":9100,"ariaHidden":320},[319],[279,9102,9104,9107],{"className":9103},[324],[279,9105],{"className":9106,"style":329},[328],[279,9108,9110,9113],{"className":9109},[333],[279,9111,2070],{"className":9112,"style":2095},[333,337],[279,9114,9116],{"className":9115},[342],[279,9117,9119,9148],{"className":9118},[346,347],[279,9120,9122,9145],{"className":9121},[351],[279,9123,9125],{"className":9124,"style":456},[355],[279,9126,9127,9130],{"style":2110},[279,9128],{"className":9129,"style":364},[363],[279,9131,9133],{"className":9132},[368,369,370,371],[279,9134,9136,9139,9142],{"className":9135},[333,371],[279,9137,421],{"className":9138},[333,337,371],[279,9140,424],{"className":9141},[333,337,371],[279,9143,3306],{"className":9144},[333,337,371],[279,9146,383],{"className":9147},[382],[279,9149,9151],{"className":9150},[351],[279,9152,9154],{"className":9153,"style":390},[355],[279,9155],{},"），栅对沟道势垒控制增强，弱化源漏的控制。",[247,9158,9159,393,9161,9232],{},[266,9160,8903],{},[279,9162,9164,9182],{"className":9163},[282],[279,9165,9167],{"className":9166},[286],[288,9168,9169],{"xmlns":290},[292,9170,9171,9179],{},[295,9172,9173],{},[298,9174,9175,9177],{},[301,9176,7395],{},[301,9178,4503],{},[312,9180,9181],{"encoding":314},"r_j",[279,9183,9185],{"className":9184,"ariaHidden":320},[319],[279,9186,9188,9192],{"className":9187},[324],[279,9189],{"className":9190,"style":9191},[328],"height:0.7167em;vertical-align:-0.2861em;",[279,9193,9195,9198],{"className":9194},[333],[279,9196,7395],{"className":9197,"style":2199},[333,337],[279,9199,9201],{"className":9200},[342],[279,9202,9204,9224],{"className":9203},[346,347],[279,9205,9207,9221],{"className":9206},[351],[279,9208,9210],{"className":9209,"style":5067},[355],[279,9211,9212,9215],{"style":2215},[279,9213],{"className":9214,"style":364},[363],[279,9216,9218],{"className":9217},[368,369,370,371],[279,9219,4503],{"className":9220,"style":5079},[333,337,371],[279,9222,383],{"className":9223},[382],[279,9225,9227],{"className":9226},[351],[279,9228,9230],{"className":9229,"style":827},[355],[279,9231],{},"（做浅结、浅源漏），源漏耗尽区更不容易向栅下延伸，电荷共享减弱。",[247,9234,9235,393,9238,9308,9309,9388,9389],{},[266,9236,9237],{},"增大",[279,9239,9241,9259],{"className":9240},[282],[279,9242,9244],{"className":9243},[286],[288,9245,9246],{"xmlns":290},[292,9247,9248,9256],{},[295,9249,9250],{},[298,9251,9252,9254],{},[301,9253,7969],{},[301,9255,6141],{},[312,9257,9258],{"encoding":314},"N_A",[279,9260,9262],{"className":9261,"ariaHidden":320},[319],[279,9263,9265,9268],{"className":9264},[324],[279,9266],{"className":9267,"style":329},[328],[279,9269,9271,9274],{"className":9270},[333],[279,9272,7969],{"className":9273,"style":8442},[333,337],[279,9275,9277],{"className":9276},[342],[279,9278,9280,9300],{"className":9279},[346,347],[279,9281,9283,9297],{"className":9282},[351],[279,9284,9286],{"className":9285,"style":2674},[355],[279,9287,9288,9291],{"style":8457},[279,9289],{"className":9290,"style":364},[363],[279,9292,9294],{"className":9293},[368,369,370,371],[279,9295,6141],{"className":9296},[333,337,371],[279,9298,383],{"className":9299},[382],[279,9301,9303],{"className":9302},[351],[279,9304,9306],{"className":9305,"style":390},[355],[279,9307],{},"（提高沟道\u002F衬底掺杂），耗尽层更“薄”（",[279,9310,9312,9333],{"className":9311},[282],[279,9313,9315],{"className":9314},[286],[288,9316,9317],{"xmlns":290},[292,9318,9319,9331],{},[295,9320,9321],{},[298,9322,9323,9325],{},[301,9324,3439],{},[295,9326,9327,9329],{},[301,9328,308],{},[301,9330,3446],{},[312,9332,3449],{"encoding":314},[279,9334,9336],{"className":9335,"ariaHidden":320},[319],[279,9337,9339,9342],{"className":9338},[324],[279,9340],{"className":9341,"style":329},[328],[279,9343,9345,9348],{"className":9344},[333],[279,9346,3439],{"className":9347,"style":443},[333,337],[279,9349,9351],{"className":9350},[342],[279,9352,9354,9380],{"className":9353},[346,347],[279,9355,9357,9377],{"className":9356},[351],[279,9358,9360],{"className":9359,"style":356},[355],[279,9361,9362,9365],{"style":459},[279,9363],{"className":9364,"style":364},[363],[279,9366,9368],{"className":9367},[368,369,370,371],[279,9369,9371,9374],{"className":9370},[333,371],[279,9372,308],{"className":9373},[333,337,371],[279,9375,3446],{"className":9376},[333,337,371],[279,9378,383],{"className":9379},[382],[279,9381,9383],{"className":9382},[351],[279,9384,9386],{"className":9385,"style":390},[355],[279,9387],{}," 变小），共享空间变小。\n但 trade-off：",[266,9390,9391],{},"degraded μ, m",[244,9393,9394,9397],{},[247,9395,9396],{},"m（指体效应\u002F亚阈值因子）变差，亚阈值摆幅变差",[247,9398,9399],{},"μ（迁移率）因杂质散射降低，驱动电流可能下降",[5957,9401,9403,9406],{"id":9402},"漏源延伸区-source-and-drain-extensions改进方法",[266,9404,9405],{},"漏源延伸区 | Source and Drain extensions",[266,9407,9408],{},"——改进方法",[240,9410,9411,9412,9481,9482,9485,9615],{},"想减小短沟道效应（SCE）就要浅源漏（",[279,9413,9415,9432],{"className":9414},[282],[279,9416,9418],{"className":9417},[286],[288,9419,9420],{"xmlns":290},[292,9421,9422,9430],{},[295,9423,9424],{},[298,9425,9426,9428],{},[301,9427,7395],{},[301,9429,4503],{},[312,9431,9181],{"encoding":314},[279,9433,9435],{"className":9434,"ariaHidden":320},[319],[279,9436,9438,9441],{"className":9437},[324],[279,9439],{"className":9440,"style":9191},[328],[279,9442,9444,9447],{"className":9443},[333],[279,9445,7395],{"className":9446,"style":2199},[333,337],[279,9448,9450],{"className":9449},[342],[279,9451,9453,9473],{"className":9452},[346,347],[279,9454,9456,9470],{"className":9455},[351],[279,9457,9459],{"className":9458,"style":5067},[355],[279,9460,9461,9464],{"style":2215},[279,9462],{"className":9463,"style":364},[363],[279,9465,9467],{"className":9466},[368,369,370,371],[279,9468,4503],{"className":9469,"style":5079},[333,337,371],[279,9471,383],{"className":9472},[382],[279,9474,9476],{"className":9475},[351],[279,9477,9479],{"className":9478,"style":827},[355],[279,9480],{},"小），但浅源漏会导致 ",[266,9483,9484],{},"源\u002F漏寄生串联电阻变大。",[279,9486,9488,9514],{"className":9487},[282],[279,9489,9491],{"className":9490},[286],[288,9492,9493],{"xmlns":290},[292,9494,9495,9511],{},[295,9496,9497,9500,9502,9505],{},[301,9498,9499],{},"R",[938,9501,2356],{},[301,9503,9504],{},"ρ",[2386,9506,9507,9509],{},[301,9508,3728],{},[301,9510,6141],{},[312,9512,9513],{"encoding":314},"R=\\rho \\frac{L}{A}",[279,9515,9517,9536],{"className":9516,"ariaHidden":320},[319],[279,9518,9520,9523,9527,9530,9533],{"className":9519},[324],[279,9521],{"className":9522,"style":2437},[328],[279,9524,9499],{"className":9525,"style":9526},[333,337],"margin-right:0.0077em;",[279,9528],{"className":9529,"style":1035},[1034],[279,9531,2356],{"className":9532},[1039],[279,9534],{"className":9535,"style":1035},[1034],[279,9537,9539,9543,9546],{"className":9538},[324],[279,9540],{"className":9541,"style":9542},[328],"height:1.2173em;vertical-align:-0.345em;",[279,9544,9504],{"className":9545},[333,337],[279,9547,9549,9552,9612],{"className":9548},[333],[279,9550],{"className":9551},[1053,2557],[279,9553,9555],{"className":9554},[2386],[279,9556,9558,9604],{"className":9557},[346,347],[279,9559,9561,9601],{"className":9560},[351],[279,9562,9565,9579,9587],{"className":9563,"style":9564},[355],"height:0.8723em;",[279,9566,9567,9570],{"style":6445},[279,9568],{"className":9569,"style":2577},[363],[279,9571,9573],{"className":9572},[368,369,370,371],[279,9574,9576],{"className":9575},[333,371],[279,9577,6141],{"className":9578},[333,337,371],[279,9580,9581,9584],{"style":2638},[279,9582],{"className":9583,"style":2577},[363],[279,9585],{"className":9586,"style":2646},[2645],[279,9588,9589,9592],{"style":6468},[279,9590],{"className":9591,"style":2577},[363],[279,9593,9595],{"className":9594},[368,369,370,371],[279,9596,9598],{"className":9597},[333,371],[279,9599,3728],{"className":9600},[333,337,371],[279,9602,383],{"className":9603},[382],[279,9605,9607],{"className":9606},[351],[279,9608,9610],{"className":9609,"style":6527},[355],[279,9611],{},[279,9613],{"className":9614},[1157,2557],"，等效截面积小了",[240,9617,9618,9619,9622],{},"所以工程上用 ",[266,9620,9621],{},"S\u002FD extensions（浅延伸区）"," 进行折中。",[240,9624,9625],{},[257,9626],{"alt":259,"src":9627},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-23.png",[240,9629,9630,9633,9634,9703],{},[266,9631,9632],{},"靠近沟道处","做一个较浅的 S\u002FD 延伸区（有效减小“靠近栅边缘”的 ",[279,9635,9637,9654],{"className":9636},[282],[279,9638,9640],{"className":9639},[286],[288,9641,9642],{"xmlns":290},[292,9643,9644,9652],{},[295,9645,9646],{},[298,9647,9648,9650],{},[301,9649,7395],{},[301,9651,4503],{},[312,9653,9181],{"encoding":314},[279,9655,9657],{"className":9656,"ariaHidden":320},[319],[279,9658,9660,9663],{"className":9659},[324],[279,9661],{"className":9662,"style":9191},[328],[279,9664,9666,9669],{"className":9665},[333],[279,9667,7395],{"className":9668,"style":2199},[333,337],[279,9670,9672],{"className":9671},[342],[279,9673,9675,9695],{"className":9674},[346,347],[279,9676,9678,9692],{"className":9677},[351],[279,9679,9681],{"className":9680,"style":5067},[355],[279,9682,9683,9686],{"style":2215},[279,9684],{"className":9685,"style":364},[363],[279,9687,9689],{"className":9688},[368,369,370,371],[279,9690,4503],{"className":9691,"style":5079},[333,337,371],[279,9693,383],{"className":9694},[382],[279,9696,9698],{"className":9697},[351],[279,9699,9701],{"className":9700,"style":827},[355],[279,9702],{},"，抑制 SCE）。",[240,9705,9706,9709],{},[266,9707,9708],{},"远离沟道处","仍保持更深\u002F更低电阻的重掺杂源漏，以免整体片电阻\u002F串联电阻过大。",[588,9711,9712,9785],{},[240,9713,9714,9715,9784],{},"Create a shallower source\u002Fdrain (S\u002FD) extension region near the channel (effectively reducing the local ",[279,9716,9718,9735],{"className":9717},[282],[279,9719,9721],{"className":9720},[286],[288,9722,9723],{"xmlns":290},[292,9724,9725,9733],{},[295,9726,9727],{},[298,9728,9729,9731],{},[301,9730,7395],{},[301,9732,4503],{},[312,9734,9181],{"encoding":314},[279,9736,9738],{"className":9737,"ariaHidden":320},[319],[279,9739,9741,9744],{"className":9740},[324],[279,9742],{"className":9743,"style":9191},[328],[279,9745,9747,9750],{"className":9746},[333],[279,9748,7395],{"className":9749,"style":2199},[333,337],[279,9751,9753],{"className":9752},[342],[279,9754,9756,9776],{"className":9755},[346,347],[279,9757,9759,9773],{"className":9758},[351],[279,9760,9762],{"className":9761,"style":5067},[355],[279,9763,9764,9767],{"style":2215},[279,9765],{"className":9766,"style":364},[363],[279,9768,9770],{"className":9769},[368,369,370,371],[279,9771,4503],{"className":9772,"style":5079},[333,337,371],[279,9774,383],{"className":9775},[382],[279,9777,9779],{"className":9778},[351],[279,9780,9782],{"className":9781,"style":827},[355],[279,9783],{}," near the gate edge, thereby suppressing short-channel effects, SCE).",[240,9786,9787],{},"Farther away from the channel, keep the source\u002Fdrain heavily doped and deeper (lower resistance) so that the overall sheet resistance\u002Fseries resistance does not become too large.",[2772,9789,9791,9792],{"id":9790},"_3-简单电容模型-simple-capacitance-model","3 简单电容模型 | ",[266,9793,9794],{},"Simple Capacitance Model",[240,9796,9797,9867,9868,9937],{},[279,9798,9800,9818],{"className":9799},[282],[279,9801,9803],{"className":9802},[286],[288,9804,9805],{"xmlns":290},[292,9806,9807,9815],{},[295,9808,9809],{},[298,9810,9811,9813],{},[301,9812,2070],{},[301,9814,308],{},[312,9816,9817],{"encoding":314},"C_d",[279,9819,9821],{"className":9820,"ariaHidden":320},[319],[279,9822,9824,9827],{"className":9823},[324],[279,9825],{"className":9826,"style":329},[328],[279,9828,9830,9833],{"className":9829},[333],[279,9831,2070],{"className":9832,"style":2095},[333,337],[279,9834,9836],{"className":9835},[342],[279,9837,9839,9859],{"className":9838},[346,347],[279,9840,9842,9856],{"className":9841},[351],[279,9843,9845],{"className":9844,"style":356},[355],[279,9846,9847,9850],{"style":2110},[279,9848],{"className":9849,"style":364},[363],[279,9851,9853],{"className":9852},[368,369,370,371],[279,9854,308],{"className":9855},[333,337,371],[279,9857,383],{"className":9858},[382],[279,9860,9862],{"className":9861},[351],[279,9863,9865],{"className":9864,"style":390},[355],[279,9866],{},"描述的是沟道到漏的静电耦合，当沟道长度减小时，漏到沟道距离减小，因而",[279,9869,9871,9888],{"className":9870},[282],[279,9872,9874],{"className":9873},[286],[288,9875,9876],{"xmlns":290},[292,9877,9878,9886],{},[295,9879,9880],{},[298,9881,9882,9884],{},[301,9883,2070],{},[301,9885,308],{},[312,9887,9817],{"encoding":314},[279,9889,9891],{"className":9890,"ariaHidden":320},[319],[279,9892,9894,9897],{"className":9893},[324],[279,9895],{"className":9896,"style":329},[328],[279,9898,9900,9903],{"className":9899},[333],[279,9901,2070],{"className":9902,"style":2095},[333,337],[279,9904,9906],{"className":9905},[342],[279,9907,9909,9929],{"className":9908},[346,347],[279,9910,9912,9926],{"className":9911},[351],[279,9913,9915],{"className":9914,"style":356},[355],[279,9916,9917,9920],{"style":2110},[279,9918],{"className":9919,"style":364},[363],[279,9921,9923],{"className":9922},[368,369,370,371],[279,9924,308],{"className":9925},[333,337,371],[279,9927,383],{"className":9928},[382],[279,9930,9932],{"className":9931},[351],[279,9933,9935],{"className":9934,"style":390},[355],[279,9936],{},"增加。",[588,9939,9940],{},[240,9941,9942],{},"As the channel length is reduced, drain to channel distance is reduced→ Cd increases",[240,9944,9945],{},"从电路图中可以看出，漏极电压对于沟道电势与栅极电压起到类似的作用，Vds 和 Vgs 共同决定沟道势垒的高度。当 Vds 存在时，需要更小的 Vgs 将势垒拉低，因而 Vt 会降低。",[240,9947,9948,9949],{},"Vt下降的公式：",[279,9950,9952,10024],{"className":9951},[282],[279,9953,9955],{"className":9954},[286],[288,9956,9957],{"xmlns":290},[292,9958,9959,10021],{},[295,9960,9961,9967,9969,9987,9989,9999,10001],{},[298,9962,9963,9965],{},[301,9964,303],{},[301,9966,684],{},[938,9968,2356],{},[298,9970,9971,9973],{},[301,9972,303],{},[295,9974,9975,9977,9979,9981,9983,9985],{},[301,9976,684],{},[4391,9978,4393],{},[301,9980,4396],{},[301,9982,421],{},[301,9984,513],{},[301,9986,2370],{},[938,9988,957],{},[298,9990,9991,9993],{},[301,9992,303],{},[295,9994,9995,9997],{},[301,9996,308],{},[301,9998,4417],{},[938,10000,2380],{},[2386,10002,10003,10009],{},[298,10004,10005,10007],{},[301,10006,2070],{},[301,10008,308],{},[298,10010,10011,10013],{},[301,10012,2070],{},[295,10014,10015,10017,10019],{},[301,10016,421],{},[301,10018,424],{},[301,10020,3306],{},[312,10022,10023],{"encoding":314},"V_t = V_{t\\text{-}long} - V_{ds}\\cdot \\frac{C_d}{C_{oxe}}",[279,10025,10027,10082,10158,10219],{"className":10026,"ariaHidden":320},[319],[279,10028,10030,10033,10073,10076,10079],{"className":10029},[324],[279,10031],{"className":10032,"style":329},[328],[279,10034,10036,10039],{"className":10035},[333],[279,10037,303],{"className":10038,"style":338},[333,337],[279,10040,10042],{"className":10041},[342],[279,10043,10045,10065],{"className":10044},[346,347],[279,10046,10048,10062],{"className":10047},[351],[279,10049,10051],{"className":10050,"style":715},[355],[279,10052,10053,10056],{"style":359},[279,10054],{"className":10055,"style":364},[363],[279,10057,10059],{"className":10058},[368,369,370,371],[279,10060,684],{"className":10061},[333,337,371],[279,10063,383],{"className":10064},[382],[279,10066,10068],{"className":10067},[351],[279,10069,10071],{"className":10070,"style":390},[355],[279,10072],{},[279,10074],{"className":10075,"style":1035},[1034],[279,10077,2356],{"className":10078},[1039],[279,10080],{"className":10081,"style":1035},[1034],[279,10083,10085,10088,10149,10152,10155],{"className":10084},[324],[279,10086],{"className":10087,"style":778},[328],[279,10089,10091,10094],{"className":10090},[333],[279,10092,303],{"className":10093,"style":338},[333,337],[279,10095,10097],{"className":10096},[342],[279,10098,10100,10141],{"className":10099},[346,347],[279,10101,10103,10138],{"className":10102},[351],[279,10104,10106],{"className":10105,"style":356},[355],[279,10107,10108,10111],{"style":359},[279,10109],{"className":10110,"style":364},[363],[279,10112,10114],{"className":10113},[368,369,370,371],[279,10115,10117,10120,10126,10129,10132,10135],{"className":10116},[333,371],[279,10118,684],{"className":10119},[333,337,371],[279,10121,10123],{"className":10122},[333,4609,371],[279,10124,4393],{"className":10125},[333,371],[279,10127,4396],{"className":10128,"style":4616},[333,337,371],[279,10130,421],{"className":10131},[333,337,371],[279,10133,513],{"className":10134},[333,337,371],[279,10136,2370],{"className":10137,"style":2500},[333,337,371],[279,10139,383],{"className":10140},[382],[279,10142,10144],{"className":10143},[351],[279,10145,10147],{"className":10146,"style":827},[355],[279,10148],{},[279,10150],{"className":10151,"style":338},[1034],[279,10153,957],{"className":10154},[1103],[279,10156],{"className":10157,"style":338},[1034],[279,10159,10161,10164,10210,10213,10216],{"className":10160},[324],[279,10162],{"className":10163,"style":329},[328],[279,10165,10167,10170],{"className":10166},[333],[279,10168,303],{"className":10169,"style":338},[333,337],[279,10171,10173],{"className":10172},[342],[279,10174,10176,10202],{"className":10175},[346,347],[279,10177,10179,10199],{"className":10178},[351],[279,10180,10182],{"className":10181,"style":356},[355],[279,10183,10184,10187],{"style":359},[279,10185],{"className":10186,"style":364},[363],[279,10188,10190],{"className":10189},[368,369,370,371],[279,10191,10193,10196],{"className":10192},[333,371],[279,10194,308],{"className":10195},[333,337,371],[279,10197,4417],{"className":10198},[333,337,371],[279,10200,383],{"className":10201},[382],[279,10203,10205],{"className":10204},[351],[279,10206,10208],{"className":10207,"style":390},[355],[279,10209],{},[279,10211],{"className":10212,"style":338},[1034],[279,10214,2380],{"className":10215},[1103],[279,10217],{"className":10218,"style":338},[1034],[279,10220,10222,10226],{"className":10221},[324],[279,10223],{"className":10224,"style":10225},[328],"height:1.3393em;vertical-align:-0.4451em;",[279,10227,10229,10232,10378],{"className":10228},[333],[279,10230],{"className":10231},[1053,2557],[279,10233,10235],{"className":10234},[2386],[279,10236,10238,10369],{"className":10237},[346,347],[279,10239,10241,10366],{"className":10240},[351],[279,10242,10244,10306,10314],{"className":10243,"style":7628},[355],[279,10245,10246,10249],{"style":6445},[279,10247],{"className":10248,"style":2577},[363],[279,10250,10252],{"className":10251},[368,369,370,371],[279,10253,10255],{"className":10254},[333,371],[279,10256,10258,10261],{"className":10257},[333,371],[279,10259,2070],{"className":10260,"style":2095},[333,337,371],[279,10262,10264],{"className":10263},[342],[279,10265,10267,10298],{"className":10266},[346,347],[279,10268,10270,10295],{"className":10269},[351],[279,10271,10274],{"className":10272,"style":10273},[355],"height:0.1645em;",[279,10275,10277,10280],{"style":10276},"top:-2.357em;margin-left:-0.0715em;margin-right:0.0714em;",[279,10278],{"className":10279,"style":1524},[363],[279,10281,10283],{"className":10282},[368,1528,1529,371],[279,10284,10286,10289,10292],{"className":10285},[333,371],[279,10287,421],{"className":10288},[333,337,371],[279,10290,424],{"className":10291},[333,337,371],[279,10293,3306],{"className":10294},[333,337,371],[279,10296,383],{"className":10297},[382],[279,10299,10301],{"className":10300},[351],[279,10302,10304],{"className":10303,"style":1542},[355],[279,10305],{},[279,10307,10308,10311],{"style":2638},[279,10309],{"className":10310,"style":2577},[363],[279,10312],{"className":10313,"style":2646},[2645],[279,10315,10316,10319],{"style":7692},[279,10317],{"className":10318,"style":2577},[363],[279,10320,10322],{"className":10321},[368,369,370,371],[279,10323,10325],{"className":10324},[333,371],[279,10326,10328,10331],{"className":10327},[333,371],[279,10329,2070],{"className":10330,"style":2095},[333,337,371],[279,10332,10334],{"className":10333},[342],[279,10335,10337,10358],{"className":10336},[346,347],[279,10338,10340,10355],{"className":10339},[351],[279,10341,10343],{"className":10342,"style":4785},[355],[279,10344,10346,10349],{"style":10345},"top:-2.3488em;margin-left:-0.0715em;margin-right:0.0714em;",[279,10347],{"className":10348,"style":1524},[363],[279,10350,10352],{"className":10351},[368,1528,1529,371],[279,10353,308],{"className":10354},[333,337,371],[279,10356,383],{"className":10357},[382],[279,10359,10361],{"className":10360},[351],[279,10362,10364],{"className":10363,"style":4807},[355],[279,10365],{},[279,10367,383],{"className":10368},[382],[279,10370,10372],{"className":10371},[351],[279,10373,10376],{"className":10374,"style":10375},[355],"height:0.4451em;",[279,10377],{},[279,10379],{"className":10380},[1157,2557],[240,10382,10383,10384,10387,10388,10469],{},"由于",[266,10385,10386],{},"N⁻沟道 与 N⁺ 源\u002F漏之间存在内建电势（built-in potential）","，所以帮助实现反型的电压不只是外加的 ",[279,10389,10391,10414],{"className":10390},[282],[279,10392,10394],{"className":10393},[286],[288,10395,10396],{"xmlns":290},[292,10397,10398,10411],{},[295,10399,10400],{},[298,10401,10402,10404],{},[301,10403,303],{},[295,10405,10406,10409],{},[301,10407,10408],{},"D",[301,10410,1384],{},[312,10412,10413],{"encoding":314},"V_{DS}",[279,10415,10417],{"className":10416,"ariaHidden":320},[319],[279,10418,10420,10423],{"className":10419},[324],[279,10421],{"className":10422,"style":329},[328],[279,10424,10426,10429],{"className":10425},[333],[279,10427,303],{"className":10428,"style":338},[333,337],[279,10430,10432],{"className":10431},[342],[279,10433,10435,10461],{"className":10434},[346,347],[279,10436,10438,10458],{"className":10437},[351],[279,10439,10441],{"className":10440,"style":2674},[355],[279,10442,10443,10446],{"style":359},[279,10444],{"className":10445,"style":364},[363],[279,10447,10449],{"className":10448},[368,369,370,371],[279,10450,10452,10455],{"className":10451},[333,371],[279,10453,10408],{"className":10454,"style":2199},[333,337,371],[279,10456,1384],{"className":10457,"style":1551},[333,337,371],[279,10459,383],{"className":10460},[382],[279,10462,10464],{"className":10463},[351],[279,10465,10467],{"className":10466,"style":390},[355],[279,10468],{},"，还要加上大约 0.4 V 的内建项：",[279,10471,10473],{"className":10472},[2333],[279,10474,10476,10556],{"className":10475},[282],[279,10477,10479],{"className":10478},[286],[288,10480,10481],{"xmlns":290,"display":2342},[292,10482,10483,10553],{},[295,10484,10485,10491,10493,10511,10513,10515,10525,10527,10529,10531,10533],{},[298,10486,10487,10489],{},[301,10488,303],{},[301,10490,684],{},[938,10492,2356],{},[298,10494,10495,10497],{},[301,10496,303],{},[295,10498,10499,10501,10503,10505,10507,10509],{},[301,10500,684],{},[4391,10502,4393],{},[301,10504,4396],{},[301,10506,421],{},[301,10508,513],{},[301,10510,2370],{},[938,10512,957],{},[938,10514,944],{"stretchy":943},[298,10516,10517,10519],{},[301,10518,303],{},[295,10520,10521,10523],{},[301,10522,308],{},[301,10524,4417],{},[938,10526,4420],{},[970,10528,4423],{},[938,10530,832],{"stretchy":943},[938,10532,2380],{},[2386,10534,10535,10541],{},[298,10536,10537,10539],{},[301,10538,2070],{},[301,10540,308],{},[298,10542,10543,10545],{},[301,10544,2070],{},[295,10546,10547,10549,10551],{},[301,10548,421],{},[301,10550,424],{},[301,10552,3306],{},[312,10554,10555],{"encoding":314},"V_t = V_{t\\text{-}long} - (V_{ds} + 0.4)\\cdot \\frac{C_d}{C_{oxe}}",[279,10557,10559,10614,10690,10754,10775],{"className":10558,"ariaHidden":320},[319],[279,10560,10562,10565,10605,10608,10611],{"className":10561},[324],[279,10563],{"className":10564,"style":329},[328],[279,10566,10568,10571],{"className":10567},[333],[279,10569,303],{"className":10570,"style":338},[333,337],[279,10572,10574],{"className":10573},[342],[279,10575,10577,10597],{"className":10576},[346,347],[279,10578,10580,10594],{"className":10579},[351],[279,10581,10583],{"className":10582,"style":715},[355],[279,10584,10585,10588],{"style":359},[279,10586],{"className":10587,"style":364},[363],[279,10589,10591],{"className":10590},[368,369,370,371],[279,10592,684],{"className":10593},[333,337,371],[279,10595,383],{"className":10596},[382],[279,10598,10600],{"className":10599},[351],[279,10601,10603],{"className":10602,"style":390},[355],[279,10604],{},[279,10606],{"className":10607,"style":1035},[1034],[279,10609,2356],{"className":10610},[1039],[279,10612],{"className":10613,"style":1035},[1034],[279,10615,10617,10620,10681,10684,10687],{"className":10616},[324],[279,10618],{"className":10619,"style":778},[328],[279,10621,10623,10626],{"className":10622},[333],[279,10624,303],{"className":10625,"style":338},[333,337],[279,10627,10629],{"className":10628},[342],[279,10630,10632,10673],{"className":10631},[346,347],[279,10633,10635,10670],{"className":10634},[351],[279,10636,10638],{"className":10637,"style":356},[355],[279,10639,10640,10643],{"style":359},[279,10641],{"className":10642,"style":364},[363],[279,10644,10646],{"className":10645},[368,369,370,371],[279,10647,10649,10652,10658,10661,10664,10667],{"className":10648},[333,371],[279,10650,684],{"className":10651},[333,337,371],[279,10653,10655],{"className":10654},[333,4609,371],[279,10656,4393],{"className":10657},[333,371],[279,10659,4396],{"className":10660,"style":4616},[333,337,371],[279,10662,421],{"className":10663},[333,337,371],[279,10665,513],{"className":10666},[333,337,371],[279,10668,2370],{"className":10669,"style":2500},[333,337,371],[279,10671,383],{"className":10672},[382],[279,10674,10676],{"className":10675},[351],[279,10677,10679],{"className":10678,"style":827},[355],[279,10680],{},[279,10682],{"className":10683,"style":338},[1034],[279,10685,957],{"className":10686},[1103],[279,10688],{"className":10689,"style":338},[1034],[279,10691,10693,10696,10699,10745,10748,10751],{"className":10692},[324],[279,10694],{"className":10695,"style":1049},[328],[279,10697,944],{"className":10698},[1053],[279,10700,10702,10705],{"className":10701},[333],[279,10703,303],{"className":10704,"style":338},[333,337],[279,10706,10708],{"className":10707},[342],[279,10709,10711,10737],{"className":10710},[346,347],[279,10712,10714,10734],{"className":10713},[351],[279,10715,10717],{"className":10716,"style":356},[355],[279,10718,10719,10722],{"style":359},[279,10720],{"className":10721,"style":364},[363],[279,10723,10725],{"className":10724},[368,369,370,371],[279,10726,10728,10731],{"className":10727},[333,371],[279,10729,308],{"className":10730},[333,337,371],[279,10732,4417],{"className":10733},[333,337,371],[279,10735,383],{"className":10736},[382],[279,10738,10740],{"className":10739},[351],[279,10741,10743],{"className":10742,"style":390},[355],[279,10744],{},[279,10746],{"className":10747,"style":338},[1034],[279,10749,4420],{"className":10750},[1103],[279,10752],{"className":10753,"style":338},[1034],[279,10755,10757,10760,10763,10766,10769,10772],{"className":10756},[324],[279,10758],{"className":10759,"style":1049},[328],[279,10761,4423],{"className":10762},[333],[279,10764,832],{"className":10765},[1157],[279,10767],{"className":10768,"style":338},[1034],[279,10770,2380],{"className":10771},[1103],[279,10773],{"className":10774,"style":338},[1034],[279,10776,10778,10781],{"className":10777},[324],[279,10779],{"className":10780,"style":6911},[328],[279,10782,10784,10787,10923],{"className":10783},[333],[279,10785],{"className":10786},[1053,2557],[279,10788,10790],{"className":10789},[2386],[279,10791,10793,10915],{"className":10792},[346,347],[279,10794,10796,10912],{"className":10795},[351],[279,10797,10799,10856,10864],{"className":10798,"style":6737},[355],[279,10800,10801,10804],{"style":2573},[279,10802],{"className":10803,"style":2577},[363],[279,10805,10807],{"className":10806},[333],[279,10808,10810,10813],{"className":10809},[333],[279,10811,2070],{"className":10812,"style":2095},[333,337],[279,10814,10816],{"className":10815},[342],[279,10817,10819,10848],{"className":10818},[346,347],[279,10820,10822,10845],{"className":10821},[351],[279,10823,10825],{"className":10824,"style":456},[355],[279,10826,10827,10830],{"style":2110},[279,10828],{"className":10829,"style":364},[363],[279,10831,10833],{"className":10832},[368,369,370,371],[279,10834,10836,10839,10842],{"className":10835},[333,371],[279,10837,421],{"className":10838},[333,337,371],[279,10840,424],{"className":10841},[333,337,371],[279,10843,3306],{"className":10844},[333,337,371],[279,10846,383],{"className":10847},[382],[279,10849,10851],{"className":10850},[351],[279,10852,10854],{"className":10853,"style":390},[355],[279,10855],{},[279,10857,10858,10861],{"style":2638},[279,10859],{"className":10860,"style":2577},[363],[279,10862],{"className":10863,"style":2646},[2645],[279,10865,10866,10869],{"style":2649},[279,10867],{"className":10868,"style":2577},[363],[279,10870,10872],{"className":10871},[333],[279,10873,10875,10878],{"className":10874},[333],[279,10876,2070],{"className":10877,"style":2095},[333,337],[279,10879,10881],{"className":10880},[342],[279,10882,10884,10904],{"className":10883},[346,347],[279,10885,10887,10901],{"className":10886},[351],[279,10888,10890],{"className":10889,"style":356},[355],[279,10891,10892,10895],{"style":2110},[279,10893],{"className":10894,"style":364},[363],[279,10896,10898],{"className":10897},[368,369,370,371],[279,10899,308],{"className":10900},[333,337,371],[279,10902,383],{"className":10903},[382],[279,10905,10907],{"className":10906},[351],[279,10908,10910],{"className":10909,"style":390},[355],[279,10911],{},[279,10913,383],{"className":10914},[382],[279,10916,10918],{"className":10917},[351],[279,10919,10921],{"className":10920,"style":7055},[355],[279,10922],{},[279,10924],{"className":10925},[1157,2557],[240,10927,10928,10929,10998],{},"2D Poisson 方程的解显示 ",[279,10930,10932,10949],{"className":10931},[282],[279,10933,10935],{"className":10934},[286],[288,10936,10937],{"xmlns":290},[292,10938,10939,10947],{},[295,10940,10941],{},[298,10942,10943,10945],{},[301,10944,2070],{},[301,10946,308],{},[312,10948,9817],{"encoding":314},[279,10950,10952],{"className":10951,"ariaHidden":320},[319],[279,10953,10955,10958],{"className":10954},[324],[279,10956],{"className":10957,"style":329},[328],[279,10959,10961,10964],{"className":10960},[333],[279,10962,2070],{"className":10963,"style":2095},[333,337],[279,10965,10967],{"className":10966},[342],[279,10968,10970,10990],{"className":10969},[346,347],[279,10971,10973,10987],{"className":10972},[351],[279,10974,10976],{"className":10975,"style":356},[355],[279,10977,10978,10981],{"style":2110},[279,10979],{"className":10980,"style":364},[363],[279,10982,10984],{"className":10983},[368,369,370,371],[279,10985,308],{"className":10986},[333,337,371],[279,10988,383],{"className":10989},[382],[279,10991,10993],{"className":10992},[351],[279,10994,10996],{"className":10995,"style":390},[355],[279,10997],{}," 是 L 的指数函数，因此上式可以改写为：",[279,11000,11002],{"className":11001},[2333],[279,11003,11005,11146],{"className":11004},[282],[279,11006,11008],{"className":11007},[286],[288,11009,11010],{"xmlns":290,"display":2342},[292,11011,11012,11143],{},[295,11013,11014,11020,11022,11040,11042,11044,11054,11056,11058,11060,11062,11080,11082,11084,11087,11089,11091,11093,11095,11097,11103,11105],{},[298,11015,11016,11018],{},[301,11017,303],{},[301,11019,684],{},[938,11021,2356],{},[298,11023,11024,11026],{},[301,11025,303],{},[295,11027,11028,11030,11032,11034,11036,11038],{},[301,11029,684],{},[4391,11031,4393],{},[301,11033,4396],{},[301,11035,421],{},[301,11037,513],{},[301,11039,2370],{},[938,11041,957],{},[938,11043,944],{"stretchy":943},[298,11045,11046,11048],{},[301,11047,303],{},[295,11049,11050,11052],{},[301,11051,308],{},[301,11053,4417],{},[938,11055,4420],{},[970,11057,4423],{},[938,11059,832],{"stretchy":943},[4391,11061,4428],{},[965,11063,11064,11066],{},[301,11065,3306],{},[295,11067,11068,11070,11072,11074],{},[938,11069,957],{},[301,11071,3728],{},[301,11073,1381],{"mathvariant":1380},[298,11075,11076,11078],{},[301,11077,4396],{},[301,11079,308],{},[938,11081,4449],{"separator":320},[1034,11083],{"linebreak":4452},[301,11085,11086],{},"w",[301,11088,2365],{},[301,11090,3306],{},[301,11092,7395],{},[301,11094,3306],{},[4391,11096,4834],{},[298,11098,11099,11101],{},[301,11100,4396],{},[301,11102,308],{},[938,11104,4464],{},[4466,11106,11107,11141],{},[295,11108,11109,11119,11121,11133,11135],{},[298,11110,11111,11113],{},[301,11112,416],{},[295,11114,11115,11117],{},[301,11116,421],{},[301,11118,424],{},[4391,11120,4428],{},[298,11122,11123,11125],{},[301,11124,3439],{},[295,11126,11127,11129,11131],{},[301,11128,308],{},[301,11130,3306],{},[301,11132,240],{},[4391,11134,4428],{},[298,11136,11137,11139],{},[301,11138,4500],{},[301,11140,4503],{},[970,11142,4506],{},[312,11144,11145],{"encoding":314},"V_t = V_{t\\text{-}long} - (V_{ds} + 0.4)\\, e^{-L\u002Fl_d}, \\\\where\\ l_d \\approx \\sqrt[3]{T_{ox}\\, W_{dep}\\, X_j}",[279,11147,11149,11204,11280,11344,11440,11443,11515],{"className":11148,"ariaHidden":320},[319],[279,11150,11152,11155,11195,11198,11201],{"className":11151},[324],[279,11153],{"className":11154,"style":329},[328],[279,11156,11158,11161],{"className":11157},[333],[279,11159,303],{"className":11160,"style":338},[333,337],[279,11162,11164],{"className":11163},[342],[279,11165,11167,11187],{"className":11166},[346,347],[279,11168,11170,11184],{"className":11169},[351],[279,11171,11173],{"className":11172,"style":715},[355],[279,11174,11175,11178],{"style":359},[279,11176],{"className":11177,"style":364},[363],[279,11179,11181],{"className":11180},[368,369,370,371],[279,11182,684],{"className":11183},[333,337,371],[279,11185,383],{"className":11186},[382],[279,11188,11190],{"className":11189},[351],[279,11191,11193],{"className":11192,"style":390},[355],[279,11194],{},[279,11196],{"className":11197,"style":1035},[1034],[279,11199,2356],{"className":11200},[1039],[279,11202],{"className":11203,"style":1035},[1034],[279,11205,11207,11210,11271,11274,11277],{"className":11206},[324],[279,11208],{"className":11209,"style":778},[328],[279,11211,11213,11216],{"className":11212},[333],[279,11214,303],{"className":11215,"style":338},[333,337],[279,11217,11219],{"className":11218},[342],[279,11220,11222,11263],{"className":11221},[346,347],[279,11223,11225,11260],{"className":11224},[351],[279,11226,11228],{"className":11227,"style":356},[355],[279,11229,11230,11233],{"style":359},[279,11231],{"className":11232,"style":364},[363],[279,11234,11236],{"className":11235},[368,369,370,371],[279,11237,11239,11242,11248,11251,11254,11257],{"className":11238},[333,371],[279,11240,684],{"className":11241},[333,337,371],[279,11243,11245],{"className":11244},[333,4609,371],[279,11246,4393],{"className":11247},[333,371],[279,11249,4396],{"className":11250,"style":4616},[333,337,371],[279,11252,421],{"className":11253},[333,337,371],[279,11255,513],{"className":11256},[333,337,371],[279,11258,2370],{"className":11259,"style":2500},[333,337,371],[279,11261,383],{"className":11262},[382],[279,11264,11266],{"className":11265},[351],[279,11267,11269],{"className":11268,"style":827},[355],[279,11270],{},[279,11272],{"className":11273,"style":338},[1034],[279,11275,957],{"className":11276},[1103],[279,11278],{"className":11279,"style":338},[1034],[279,11281,11283,11286,11289,11335,11338,11341],{"className":11282},[324],[279,11284],{"className":11285,"style":1049},[328],[279,11287,944],{"className":11288},[1053],[279,11290,11292,11295],{"className":11291},[333],[279,11293,303],{"className":11294,"style":338},[333,337],[279,11296,11298],{"className":11297},[342],[279,11299,11301,11327],{"className":11300},[346,347],[279,11302,11304,11324],{"className":11303},[351],[279,11305,11307],{"className":11306,"style":356},[355],[279,11308,11309,11312],{"style":359},[279,11310],{"className":11311,"style":364},[363],[279,11313,11315],{"className":11314},[368,369,370,371],[279,11316,11318,11321],{"className":11317},[333,371],[279,11319,308],{"className":11320},[333,337,371],[279,11322,4417],{"className":11323},[333,337,371],[279,11325,383],{"className":11326},[382],[279,11328,11330],{"className":11329},[351],[279,11331,11333],{"className":11332,"style":390},[355],[279,11334],{},[279,11336],{"className":11337,"style":338},[1034],[279,11339,4420],{"className":11340},[1103],[279,11342],{"className":11343,"style":338},[1034],[279,11345,11347,11350,11353,11356,11359,11437],{"className":11346},[324],[279,11348],{"className":11349,"style":4716},[328],[279,11351,4423],{"className":11352},[333],[279,11354,832],{"className":11355},[1157],[279,11357],{"className":11358,"style":4726},[1034],[279,11360,11362,11365],{"className":11361},[333],[279,11363,3306],{"className":11364},[333,337],[279,11366,11368],{"className":11367},[342],[279,11369,11371],{"className":11370},[346],[279,11372,11374],{"className":11373},[351],[279,11375,11377],{"className":11376,"style":4745},[355],[279,11378,11379,11382],{"style":4748},[279,11380],{"className":11381,"style":364},[363],[279,11383,11385],{"className":11384},[368,369,370,371],[279,11386,11388,11391,11394,11397],{"className":11387},[333,371],[279,11389,957],{"className":11390},[333,371],[279,11392,3728],{"className":11393},[333,337,371],[279,11395,1381],{"className":11396},[333,371],[279,11398,11400,11403],{"className":11399},[333,371],[279,11401,4396],{"className":11402,"style":4616},[333,337,371],[279,11404,11406],{"className":11405},[342],[279,11407,11409,11429],{"className":11408},[346,347],[279,11410,11412,11426],{"className":11411},[351],[279,11413,11415],{"className":11414,"style":4785},[355],[279,11416,11417,11420],{"style":4788},[279,11418],{"className":11419,"style":1524},[363],[279,11421,11423],{"className":11422},[368,1528,1529,371],[279,11424,308],{"className":11425},[333,337,371],[279,11427,383],{"className":11428},[382],[279,11430,11432],{"className":11431},[351],[279,11433,11435],{"className":11434,"style":4807},[355],[279,11436],{},[279,11438,4449],{"className":11439},[4813],[279,11441],{"className":11442},[1034,4452],[279,11444,11446,11449,11453,11456,11460,11463,11466,11506,11509,11512],{"className":11445},[324],[279,11447],{"className":11448,"style":4823},[328],[279,11450,11086],{"className":11451,"style":11452},[333,337],"margin-right:0.0269em;",[279,11454,2365],{"className":11455},[333,337],[279,11457,11459],{"className":11458,"style":2199},[333,337],"er",[279,11461,3306],{"className":11462},[333,337],[279,11464,4834],{"className":11465},[1034],[279,11467,11469,11472],{"className":11468},[333],[279,11470,4396],{"className":11471,"style":4616},[333,337],[279,11473,11475],{"className":11474},[342],[279,11476,11478,11498],{"className":11477},[346,347],[279,11479,11481,11495],{"className":11480},[351],[279,11482,11484],{"className":11483,"style":356},[355],[279,11485,11486,11489],{"style":4855},[279,11487],{"className":11488,"style":364},[363],[279,11490,11492],{"className":11491},[368,369,370,371],[279,11493,308],{"className":11494},[333,337,371],[279,11496,383],{"className":11497},[382],[279,11499,11501],{"className":11500},[351],[279,11502,11504],{"className":11503,"style":390},[355],[279,11505],{},[279,11507],{"className":11508,"style":1035},[1034],[279,11510,4464],{"className":11511},[1039],[279,11513],{"className":11514,"style":1035},[1034],[279,11516,11518,11521],{"className":11517},[324],[279,11519],{"className":11520,"style":4891},[328],[279,11522,11524,11550],{"className":11523},[333,4895],[279,11525,11527],{"className":11526},[4899],[279,11528,11530],{"className":11529},[346],[279,11531,11533],{"className":11532},[351],[279,11534,11536],{"className":11535,"style":4909},[355],[279,11537,11538,11541],{"style":4912},[279,11539],{"className":11540,"style":1524},[363],[279,11542,11544],{"className":11543},[368,369,1529,371],[279,11545,11547],{"className":11546},[333,371],[279,11548,4506],{"className":11549},[333,371],[279,11551,11553,11724],{"className":11552},[346,347],[279,11554,11556,11721],{"className":11555},[351],[279,11557,11559,11709],{"className":11558,"style":4934},[355],[279,11560,11562,11565],{"className":11561,"style":4939},[4938],[279,11563],{"className":11564,"style":4943},[363],[279,11566,11568,11614,11617,11666,11669],{"className":11567,"style":4947},[333],[279,11569,11571,11574],{"className":11570},[333],[279,11572,416],{"className":11573,"style":443},[333,337],[279,11575,11577],{"className":11576},[342],[279,11578,11580,11606],{"className":11579},[346,347],[279,11581,11583,11603],{"className":11582},[351],[279,11584,11586],{"className":11585,"style":456},[355],[279,11587,11588,11591],{"style":459},[279,11589],{"className":11590,"style":364},[363],[279,11592,11594],{"className":11593},[368,369,370,371],[279,11595,11597,11600],{"className":11596},[333,371],[279,11598,421],{"className":11599},[333,337,371],[279,11601,424],{"className":11602},[333,337,371],[279,11604,383],{"className":11605},[382],[279,11607,11609],{"className":11608},[351],[279,11610,11612],{"className":11611,"style":390},[355],[279,11613],{},[279,11615],{"className":11616,"style":4726},[1034],[279,11618,11620,11623],{"className":11619},[333],[279,11621,3439],{"className":11622,"style":443},[333,337],[279,11624,11626],{"className":11625},[342],[279,11627,11629,11658],{"className":11628},[346,347],[279,11630,11632,11655],{"className":11631},[351],[279,11633,11635],{"className":11634,"style":356},[355],[279,11636,11637,11640],{"style":459},[279,11638],{"className":11639,"style":364},[363],[279,11641,11643],{"className":11642},[368,369,370,371],[279,11644,11646,11649,11652],{"className":11645},[333,371],[279,11647,308],{"className":11648},[333,337,371],[279,11650,3306],{"className":11651},[333,337,371],[279,11653,240],{"className":11654},[333,337,371],[279,11656,383],{"className":11657},[382],[279,11659,11661],{"className":11660},[351],[279,11662,11664],{"className":11663,"style":827},[355],[279,11665],{},[279,11667],{"className":11668,"style":4726},[1034],[279,11670,11672,11675],{"className":11671},[333],[279,11673,4500],{"className":11674,"style":532},[333,337],[279,11676,11678],{"className":11677},[342],[279,11679,11681,11701],{"className":11680},[346,347],[279,11682,11684,11698],{"className":11683},[351],[279,11685,11687],{"className":11686,"style":5067},[355],[279,11688,11689,11692],{"style":547},[279,11690],{"className":11691,"style":364},[363],[279,11693,11695],{"className":11694},[368,369,370,371],[279,11696,4503],{"className":11697,"style":5079},[333,337,371],[279,11699,383],{"className":11700},[382],[279,11702,11704],{"className":11703},[351],[279,11705,11707],{"className":11706,"style":827},[355],[279,11708],{},[279,11710,11711,11714],{"style":5093},[279,11712],{"className":11713,"style":4943},[363],[279,11715,11717],{"className":11716,"style":5101},[5100],[5103,11718,11719],{"xmlns":5105,"width":5106,"height":5107,"viewBox":5108,"preserveAspectRatio":5109},[5111,11720],{"d":5113},[279,11722,383],{"className":11723},[382],[279,11725,11727],{"className":11726},[351],[279,11728,11730],{"className":11729,"style":5123},[355],[279,11731],{},[240,11733,11734,11735,11805],{},"这里的",[279,11736,11738,11756],{"className":11737},[282],[279,11739,11741],{"className":11740},[286],[288,11742,11743],{"xmlns":290},[292,11744,11745,11753],{},[295,11746,11747],{},[298,11748,11749,11751],{},[301,11750,4500],{},[301,11752,4503],{},[312,11754,11755],{"encoding":314},"X_j",[279,11757,11759],{"className":11758,"ariaHidden":320},[319],[279,11760,11762,11765],{"className":11761},[324],[279,11763],{"className":11764,"style":778},[328],[279,11766,11768,11771],{"className":11767},[333],[279,11769,4500],{"className":11770,"style":532},[333,337],[279,11772,11774],{"className":11773},[342],[279,11775,11777,11797],{"className":11776},[346,347],[279,11778,11780,11794],{"className":11779},[351],[279,11781,11783],{"className":11782,"style":5067},[355],[279,11784,11785,11788],{"style":547},[279,11786],{"className":11787,"style":364},[363],[279,11789,11791],{"className":11790},[368,369,370,371],[279,11792,4503],{"className":11793,"style":5079},[333,337,371],[279,11795,383],{"className":11796},[382],[279,11798,11800],{"className":11799},[351],[279,11801,11803],{"className":11802,"style":827},[355],[279,11804],{},"指的是漏区的结深",[240,11807,11808],{},[257,11809],{"alt":259,"src":11810},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-18.png",[236,11812,11814],{"id":11813},"沟道方向电场分布-electric-field-along-channel","沟道方向电场分布 | Electric Field Along Channel",[240,11816,11817,11818,11897,11898,623],{},"MOSFET 沟道内的横向电场在漏端最强，并且短沟道\u002F高",[279,11819,11821,11842],{"className":11820},[282],[279,11822,11824],{"className":11823},[286],[288,11825,11826],{"xmlns":290},[292,11827,11828,11840],{},[295,11829,11830],{},[298,11831,11832,11834],{},[301,11833,303],{},[295,11835,11836,11838],{},[301,11837,10408],{},[301,11839,1384],{},[312,11841,10413],{"encoding":314},[279,11843,11845],{"className":11844,"ariaHidden":320},[319],[279,11846,11848,11851],{"className":11847},[324],[279,11849],{"className":11850,"style":329},[328],[279,11852,11854,11857],{"className":11853},[333],[279,11855,303],{"className":11856,"style":338},[333,337],[279,11858,11860],{"className":11859},[342],[279,11861,11863,11889],{"className":11862},[346,347],[279,11864,11866,11886],{"className":11865},[351],[279,11867,11869],{"className":11868,"style":2674},[355],[279,11870,11871,11874],{"style":359},[279,11872],{"className":11873,"style":364},[363],[279,11875,11877],{"className":11876},[368,369,370,371],[279,11878,11880,11883],{"className":11879},[333,371],[279,11881,10408],{"className":11882,"style":2199},[333,337,371],[279,11884,1384],{"className":11885,"style":1551},[333,337,371],[279,11887,383],{"className":11888},[382],[279,11890,11892],{"className":11891},[351],[279,11893,11895],{"className":11894,"style":390},[355],[279,11896],{},"时会出现非常尖的峰值，甚至可以高达",[279,11899,11901,11939],{"className":11900},[282],[279,11902,11904],{"className":11903},[286],[288,11905,11906],{"xmlns":290},[292,11907,11908,11936],{},[295,11909,11910,11918,11920,11927,11929,11931,11934],{},[298,11911,11912,11915],{},[301,11913,2349],{"mathvariant":11914},"script",[4391,11916,11917],{},"peak",[938,11919,2356],{},[965,11921,11922,11924],{},[970,11923,1367],{},[970,11925,11926],{},"6",[301,11928,303],{},[301,11930,1381],{"mathvariant":1380},[301,11932,11933],{},"c",[301,11935,3446],{},[312,11937,11938],{"encoding":314},"\\mathcal{E}_{\\text{peak}} = 10^6 V\u002Fcm",[279,11940,11942,12006],{"className":11941,"ariaHidden":320},[319],[279,11943,11945,11948,11997,12000,12003],{"className":11944},[324],[279,11946],{"className":11947,"style":778},[328],[279,11949,11951,11956],{"className":11950},[333],[279,11952,2349],{"className":11953,"style":11955},[333,11954],"mathcal","margin-right:0.0894em;",[279,11957,11959],{"className":11958},[342],[279,11960,11962,11989],{"className":11961},[346,347],[279,11963,11965,11986],{"className":11964},[351],[279,11966,11968],{"className":11967,"style":356},[355],[279,11969,11971,11974],{"style":11970},"top:-2.55em;margin-left:-0.0894em;margin-right:0.05em;",[279,11972],{"className":11973,"style":364},[363],[279,11975,11977],{"className":11976},[368,369,370,371],[279,11978,11980],{"className":11979},[333,371],[279,11981,11983],{"className":11982},[333,4609,371],[279,11984,11917],{"className":11985},[333,371],[279,11987,383],{"className":11988},[382],[279,11990,11992],{"className":11991},[351],[279,11993,11995],{"className":11994,"style":827},[355],[279,11996],{},[279,11998],{"className":11999,"style":1035},[1034],[279,12001,2356],{"className":12002},[1039],[279,12004],{"className":12005,"style":1035},[1034],[279,12007,12009,12012,12015,12044,12047,12050,12053],{"className":12008},[324],[279,12010],{"className":12011,"style":1113},[328],[279,12013,1465],{"className":12014},[333],[279,12016,12018,12021],{"className":12017},[333],[279,12019,1472],{"className":12020},[333],[279,12022,12024],{"className":12023},[342],[279,12025,12027],{"className":12026},[346],[279,12028,12030],{"className":12029},[351],[279,12031,12033],{"className":12032,"style":1173},[355],[279,12034,12035,12038],{"style":1176},[279,12036],{"className":12037,"style":364},[363],[279,12039,12041],{"className":12040},[368,369,370,371],[279,12042,11926],{"className":12043},[333,371],[279,12045,303],{"className":12046,"style":338},[333,337],[279,12048,1381],{"className":12049},[333],[279,12051,11933],{"className":12052},[333,337],[279,12054,3446],{"className":12055},[333,337],[240,12057,12058,393,12061,12140,12143,12144,12147],{},[266,12059,12060],{},"在较大",[279,12062,12064,12085],{"className":12063},[282],[279,12065,12067],{"className":12066},[286],[288,12068,12069],{"xmlns":290},[292,12070,12071,12083],{},[295,12072,12073],{},[298,12074,12075,12077],{},[301,12076,303],{},[295,12078,12079,12081],{},[301,12080,10408],{},[301,12082,1384],{},[312,12084,10413],{"encoding":314},[279,12086,12088],{"className":12087,"ariaHidden":320},[319],[279,12089,12091,12094],{"className":12090},[324],[279,12092],{"className":12093,"style":329},[328],[279,12095,12097,12100],{"className":12096},[333],[279,12098,303],{"className":12099,"style":338},[333,337],[279,12101,12103],{"className":12102},[342],[279,12104,12106,12132],{"className":12105},[346,347],[279,12107,12109,12129],{"className":12108},[351],[279,12110,12112],{"className":12111,"style":2674},[355],[279,12113,12114,12117],{"style":359},[279,12115],{"className":12116,"style":364},[363],[279,12118,12120],{"className":12119},[368,369,370,371],[279,12121,12123,12126],{"className":12122},[333,371],[279,12124,10408],{"className":12125,"style":2199},[333,337,371],[279,12127,1384],{"className":12128,"style":1551},[333,337,371],[279,12130,383],{"className":12131},[382],[279,12133,12135],{"className":12134},[351],[279,12136,12138],{"className":12137,"style":390},[355],[279,12139],{},[266,12141,12142],{},"（接近\u002F进入饱和）时","，漏端附近会出现 ",[266,12145,12146],{},"pinch-off（夹断区）\u002F强电势突降区域","：电势在很短距离内掉很多，于是在漏端形成了很高的电场峰值。",[588,12149,12150],{},[240,12151,12152,12153,12232],{},"At larger",[279,12154,12156,12177],{"className":12155},[282],[279,12157,12159],{"className":12158},[286],[288,12160,12161],{"xmlns":290},[292,12162,12163,12175],{},[295,12164,12165],{},[298,12166,12167,12169],{},[301,12168,303],{},[295,12170,12171,12173],{},[301,12172,10408],{},[301,12174,1384],{},[312,12176,10413],{"encoding":314},[279,12178,12180],{"className":12179,"ariaHidden":320},[319],[279,12181,12183,12186],{"className":12182},[324],[279,12184],{"className":12185,"style":329},[328],[279,12187,12189,12192],{"className":12188},[333],[279,12190,303],{"className":12191,"style":338},[333,337],[279,12193,12195],{"className":12194},[342],[279,12196,12198,12224],{"className":12197},[346,347],[279,12199,12201,12221],{"className":12200},[351],[279,12202,12204],{"className":12203,"style":2674},[355],[279,12205,12206,12209],{"style":359},[279,12207],{"className":12208,"style":364},[363],[279,12210,12212],{"className":12211},[368,369,370,371],[279,12213,12215,12218],{"className":12214},[333,371],[279,12216,10408],{"className":12217,"style":2199},[333,337,371],[279,12219,1384],{"className":12220,"style":1551},[333,337,371],[279,12222,383],{"className":12223},[382],[279,12225,12227],{"className":12226},[351],[279,12228,12230],{"className":12229,"style":390},[355],[279,12231],{},"(near or in saturation), a pinch-off region (strong potential drop region) forms near the drain: the potential drops significantly over a very short distance, producing a very high peak electric field at the drain end.",[240,12234,12235],{},[257,12236],{"alt":259,"src":12237},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-17.png",[270,12239,12240],{"id":12240},"高电场带来的问题",[4316,12242,12243],{},[247,12244,12245,12248],{},[266,12246,12247],{},"撞击电离 | impact ionization","\n在漏端强电场区，载流子（电子\u002F空穴）会被加速到高能；",[240,12250,12251],{},"高能载流子撞击晶格，产生 e–h 对（电离）：",[244,12253,12254,12257],{},[247,12255,12256],{},"电子多数被漏端收集；",[247,12258,12259,12260,12263],{},"空穴可能注入衬底\u002F流向衬底接触，形成 ",[266,12261,12262],{},"substrate current（衬底电流）","。\n常见后果：额外漏端电流、寄生效应增强、可靠性变差（也常与热载流子效应相关联）。",[4316,12265,12266],{},[247,12267,12268,12271],{},[266,12269,12270],{},"栅氧\u002F界面\u002F体区损伤 | damage to gate-oxide interface and bulk","\n高能“热载流子”可能注入到氧化层或在 Si\u002FSiO2 界面产生陷阱；",[240,12273,12274],{},"长期会导致：阈值漂移、迁移率下降、跨导下降、漏电上升、器件老化等可靠性问题。",[236,12276,12277],{"id":12277},"轻掺杂漏极结构",[240,12279,12280],{},[257,12281],{"alt":259,"src":12282},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-20.png",[4316,12284,12285,12292,12298],{},[247,12286,12287,12288,12291],{},"Lower pn junction doping results in ",[266,12289,12290],{},"lower peak E-field","（好处）\n把漏端靠近沟道处的结（pn 结）做得更轻掺杂，可以把电势下降拉长，从而降低局部最大电场峰值。",[247,12293,12294,12297],{},[266,12295,12296],{},"Hot-carrier"," effects reduced（好处）\n当漏端峰值电场很大时，沟道末端的载流子会被强烈加速，变成“热载流子（hot carriers）”。而LDD 把漏端峰值电场压低，所以热载流子效应会明显减轻。",[247,12299,12300,12303,12304,12307,12308],{},[266,12301,12302],{},"Series resistance"," increased（代价）\nn− 延伸区",[266,12305,12306],{},"掺杂更轻，导致电阻率更高","，而且它又位于电流路径上（沟道—漏极之间），所以等效上会多出一段 ",[266,12309,12310],{},"源\u002F漏串联电阻。",[236,12312,12314,12315],{"id":12313},"寄生源漏电阻-parasitic-source-drain-resistance","寄生源漏电阻 | ",[266,12316,12317],{},"Parasitic Source-Drain Resistance",[240,12319,12320,12321,12392,12393,12483,12484,12573],{},"器件越缩小，寄生电阻",[279,12322,12324,12342],{"className":12323},[282],[279,12325,12327],{"className":12326},[286],[288,12328,12329],{"xmlns":290},[292,12330,12331,12339],{},[295,12332,12333],{},[298,12334,12335,12337],{},[301,12336,9499],{},[301,12338,4417],{},[312,12340,12341],{"encoding":314},"R_s",[279,12343,12345],{"className":12344,"ariaHidden":320},[319],[279,12346,12348,12351],{"className":12347},[324],[279,12349],{"className":12350,"style":329},[328],[279,12352,12354,12357],{"className":12353},[333],[279,12355,9499],{"className":12356,"style":9526},[333,337],[279,12358,12360],{"className":12359},[342],[279,12361,12363,12384],{"className":12362},[346,347],[279,12364,12366,12381],{"className":12365},[351],[279,12367,12369],{"className":12368,"style":456},[355],[279,12370,12372,12375],{"style":12371},"top:-2.55em;margin-left:-0.0077em;margin-right:0.05em;",[279,12373],{"className":12374,"style":364},[363],[279,12376,12378],{"className":12377},[368,369,370,371],[279,12379,4417],{"className":12380},[333,337,371],[279,12382,383],{"className":12383},[382],[279,12385,12387],{"className":12386},[351],[279,12388,12390],{"className":12389,"style":390},[355],[279,12391],{},"占比越高，",[279,12394,12396,12422],{"className":12395},[282],[279,12397,12399],{"className":12398},[286],[288,12400,12401],{"xmlns":290},[292,12402,12403,12419],{},[295,12404,12405],{},[298,12406,12407,12409],{},[301,12408,506],{},[295,12410,12411,12413,12415,12417],{},[301,12412,10408],{},[301,12414,4417],{},[301,12416,6665],{},[301,12418,684],{},[312,12420,12421],{"encoding":314},"I_{Dsat}",[279,12423,12425],{"className":12424,"ariaHidden":320},[319],[279,12426,12428,12431],{"className":12427},[324],[279,12429],{"className":12430,"style":329},[328],[279,12432,12434,12437],{"className":12433},[333],[279,12435,506],{"className":12436,"style":532},[333,337],[279,12438,12440],{"className":12439},[342],[279,12441,12443,12475],{"className":12442},[346,347],[279,12444,12446,12472],{"className":12445},[351],[279,12447,12449],{"className":12448,"style":2674},[355],[279,12450,12451,12454],{"style":547},[279,12452],{"className":12453,"style":364},[363],[279,12455,12457],{"className":12456},[368,369,370,371],[279,12458,12460,12463,12466,12469],{"className":12459},[333,371],[279,12461,10408],{"className":12462,"style":2199},[333,337,371],[279,12464,4417],{"className":12465},[333,337,371],[279,12467,6665],{"className":12468},[333,337,371],[279,12470,684],{"className":12471},[333,337,371],[279,12473,383],{"className":12474},[382],[279,12476,12478],{"className":12477},[351],[279,12479,12481],{"className":12480,"style":390},[355],[279,12482],{},"越小，0.1 µm MOSFET 里 ",[279,12485,12487,12512],{"className":12486},[282],[279,12488,12490],{"className":12489},[286],[288,12491,12492],{"xmlns":290},[292,12493,12494,12510],{},[295,12495,12496],{},[298,12497,12498,12500],{},[301,12499,506],{},[295,12501,12502,12504,12506,12508],{},[301,12503,10408],{},[301,12505,4417],{},[301,12507,6665],{},[301,12509,684],{},[312,12511,12421],{"encoding":314},[279,12513,12515],{"className":12514,"ariaHidden":320},[319],[279,12516,12518,12521],{"className":12517},[324],[279,12519],{"className":12520,"style":329},[328],[279,12522,12524,12527],{"className":12523},[333],[279,12525,506],{"className":12526,"style":532},[333,337],[279,12528,12530],{"className":12529},[342],[279,12531,12533,12565],{"className":12532},[346,347],[279,12534,12536,12562],{"className":12535},[351],[279,12537,12539],{"className":12538,"style":2674},[355],[279,12540,12541,12544],{"style":547},[279,12542],{"className":12543,"style":364},[363],[279,12545,12547],{"className":12546},[368,369,370,371],[279,12548,12550,12553,12556,12559],{"className":12549},[333,371],[279,12551,10408],{"className":12552,"style":2199},[333,337,371],[279,12554,4417],{"className":12555},[333,337,371],[279,12557,6665],{"className":12558},[333,337,371],[279,12560,684],{"className":12561},[333,337,371],[279,12563,383],{"className":12564},[382],[279,12566,12568],{"className":12567},[351],[279,12569,12571],{"className":12570,"style":390},[355],[279,12572],{}," 约降 15%。",[279,12575,12577],{"className":12576},[2333],[279,12578,12580,12638],{"className":12579},[282],[279,12581,12583],{"className":12582},[286],[288,12584,12585],{"xmlns":290,"display":2342},[292,12586,12587,12635],{},[295,12588,12589,12591,12593,12595,12611,12613,12615,12625,12627,12633],{},[301,12590,2167],{},[301,12592,763],{},[4391,12594,4834],{},[298,12596,12597,12599],{},[301,12598,506],{},[295,12600,12601,12603,12605,12607,12609],{},[301,12602,10408],{},[301,12604,4417],{},[301,12606,6665],{},[301,12608,684],{},[970,12610,1472],{},[938,12612,940],{},[938,12614,944],{"stretchy":943},[298,12616,12617,12619],{},[301,12618,303],{},[295,12620,12621,12623],{},[301,12622,5611],{},[301,12624,1384],{},[938,12626,957],{},[298,12628,12629,12631],{},[301,12630,303],{},[301,12632,416],{},[938,12634,832],{"stretchy":943},[312,12636,12637],{"encoding":314},"if \\ I_{Dsat0}∝(V_{GS}−V_T)",[279,12639,12641,12721,12783],{"className":12640,"ariaHidden":320},[319],[279,12642,12644,12648,12651,12654,12657,12712,12715,12718],{"className":12643},[324],[279,12645],{"className":12646,"style":12647},[328],"height:0.8889em;vertical-align:-0.1944em;",[279,12649,2167],{"className":12650},[333,337],[279,12652,763],{"className":12653,"style":814},[333,337],[279,12655,4834],{"className":12656},[1034],[279,12658,12660,12663],{"className":12659},[333],[279,12661,506],{"className":12662,"style":532},[333,337],[279,12664,12666],{"className":12665},[342],[279,12667,12669,12704],{"className":12668},[346,347],[279,12670,12672,12701],{"className":12671},[351],[279,12673,12675],{"className":12674,"style":2674},[355],[279,12676,12677,12680],{"style":547},[279,12678],{"className":12679,"style":364},[363],[279,12681,12683],{"className":12682},[368,369,370,371],[279,12684,12686,12689,12692,12695,12698],{"className":12685},[333,371],[279,12687,10408],{"className":12688,"style":2199},[333,337,371],[279,12690,4417],{"className":12691},[333,337,371],[279,12693,6665],{"className":12694},[333,337,371],[279,12696,684],{"className":12697},[333,337,371],[279,12699,1472],{"className":12700},[333,371],[279,12702,383],{"className":12703},[382],[279,12705,12707],{"className":12706},[351],[279,12708,12710],{"className":12709,"style":390},[355],[279,12711],{},[279,12713],{"className":12714,"style":1035},[1034],[279,12716,940],{"className":12717},[1039],[279,12719],{"className":12720,"style":1035},[1034],[279,12722,12724,12727,12730,12774,12777,12780],{"className":12723},[324],[279,12725],{"className":12726,"style":1049},[328],[279,12728,944],{"className":12729},[1053],[279,12731,12733,12736],{"className":12732},[333],[279,12734,303],{"className":12735,"style":338},[333,337],[279,12737,12739],{"className":12738},[342],[279,12740,12742,12766],{"className":12741},[346,347],[279,12743,12745,12763],{"className":12744},[351],[279,12746,12748],{"className":12747,"style":2674},[355],[279,12749,12750,12753],{"style":359},[279,12751],{"className":12752,"style":364},[363],[279,12754,12756],{"className":12755},[368,369,370,371],[279,12757,12759],{"className":12758},[333,371],[279,12760,12762],{"className":12761,"style":1551},[333,337,371],"GS",[279,12764,383],{"className":12765},[382],[279,12767,12769],{"className":12768},[351],[279,12770,12772],{"className":12771,"style":390},[355],[279,12773],{},[279,12775],{"className":12776,"style":338},[1034],[279,12778,957],{"className":12779},[1103],[279,12781],{"className":12782,"style":338},[1034],[279,12784,12786,12789,12829],{"className":12785},[324],[279,12787],{"className":12788,"style":1049},[328],[279,12790,12792,12795],{"className":12791},[333],[279,12793,303],{"className":12794,"style":338},[333,337],[279,12796,12798],{"className":12797},[342],[279,12799,12801,12821],{"className":12800},[346,347],[279,12802,12804,12818],{"className":12803},[351],[279,12805,12807],{"className":12806,"style":2674},[355],[279,12808,12809,12812],{"style":359},[279,12810],{"className":12811,"style":364},[363],[279,12813,12815],{"className":12814},[368,369,370,371],[279,12816,416],{"className":12817,"style":443},[333,337,371],[279,12819,383],{"className":12820},[382],[279,12822,12824],{"className":12823},[351],[279,12825,12827],{"className":12826,"style":390},[355],[279,12828],{},[279,12830,832],{"className":12831},[1157],[279,12833,12835],{"className":12834},[2333],[279,12836,12838,12943],{"className":12837},[282],[279,12839,12841],{"className":12840},[286],[288,12842,12843],{"xmlns":290,"display":2342},[292,12844,12845,12940],{},[295,12846,12847,12861,12863],{},[298,12848,12849,12851],{},[301,12850,506],{},[295,12852,12853,12855,12857,12859],{},[301,12854,10408],{},[301,12856,4417],{},[301,12858,6665],{},[301,12860,684],{},[938,12862,2356],{},[2386,12864,12865,12881],{},[298,12866,12867,12869],{},[301,12868,506],{},[295,12870,12871,12873,12875,12877,12879],{},[301,12872,10408],{},[301,12874,4417],{},[301,12876,6665],{},[301,12878,684],{},[970,12880,1472],{},[295,12882,12883,12885,12887],{},[970,12884,1465],{},[938,12886,4420],{},[12888,12889,12890],"mstyle",{"scriptlevel":1472,"displaystyle":320},[2386,12891,12892,12916],{},[295,12893,12894,12910],{},[298,12895,12896,12898],{},[301,12897,506],{},[295,12899,12900,12902,12904,12906,12908],{},[301,12901,10408],{},[301,12903,4417],{},[301,12905,6665],{},[301,12907,684],{},[970,12909,1472],{},[298,12911,12912,12914],{},[301,12913,9499],{},[301,12915,4417],{},[295,12917,12918,12920,12930,12932,12938],{},[938,12919,944],{"stretchy":943},[298,12921,12922,12924],{},[301,12923,303],{},[295,12925,12926,12928],{},[301,12927,5611],{},[301,12929,1384],{},[938,12931,957],{},[298,12933,12934,12936],{},[301,12935,303],{},[301,12937,416],{},[938,12939,832],{"stretchy":943},[312,12941,12942],{"encoding":314},"I_{Dsat}=\\frac{I_{Dsat0}}{1+\\dfrac{I_{Dsat0}R_s}{(V_{GS}-V_T)}}",[279,12944,12946,13013],{"className":12945,"ariaHidden":320},[319],[279,12947,12949,12952,13004,13007,13010],{"className":12948},[324],[279,12950],{"className":12951,"style":329},[328],[279,12953,12955,12958],{"className":12954},[333],[279,12956,506],{"className":12957,"style":532},[333,337],[279,12959,12961],{"className":12960},[342],[279,12962,12964,12996],{"className":12963},[346,347],[279,12965,12967,12993],{"className":12966},[351],[279,12968,12970],{"className":12969,"style":2674},[355],[279,12971,12972,12975],{"style":547},[279,12973],{"className":12974,"style":364},[363],[279,12976,12978],{"className":12977},[368,369,370,371],[279,12979,12981,12984,12987,12990],{"className":12980},[333,371],[279,12982,10408],{"className":12983,"style":2199},[333,337,371],[279,12985,4417],{"className":12986},[333,337,371],[279,12988,6665],{"className":12989},[333,337,371],[279,12991,684],{"className":12992},[333,337,371],[279,12994,383],{"className":12995},[382],[279,12997,12999],{"className":12998},[351],[279,13000,13002],{"className":13001,"style":390},[355],[279,13003],{},[279,13005],{"className":13006,"style":1035},[1034],[279,13008,2356],{"className":13009},[1039],[279,13011],{"className":13012,"style":1035},[1034],[279,13014,13016,13020],{"className":13015},[324],[279,13017],{"className":13018,"style":13019},[328],"height:3.5467em;vertical-align:-2.1863em;",[279,13021,13023,13026,13395],{"className":13022},[333],[279,13024],{"className":13025},[1053,2557],[279,13027,13029],{"className":13028},[2386],[279,13030,13032,13386],{"className":13031},[346,347],[279,13033,13035,13383],{"className":13034},[351],[279,13036,13038,13310,13319],{"className":13037,"style":6737},[355],[279,13039,13041,13045],{"style":13040},"top:-2.11em;",[279,13042],{"className":13043,"style":13044},[363],"height:3.3603em;",[279,13046,13048,13051,13054,13057,13060],{"className":13047},[333],[279,13049,1465],{"className":13050},[333],[279,13052],{"className":13053,"style":338},[1034],[279,13055,4420],{"className":13056},[1103],[279,13058],{"className":13059,"style":338},[1034],[279,13061,13063,13066,13307],{"className":13062},[333],[279,13064],{"className":13065},[1053,2557],[279,13067,13069],{"className":13068},[2386],[279,13070,13072,13298],{"className":13071},[346,347],[279,13073,13075,13295],{"className":13074},[351],[279,13076,13078,13184,13192],{"className":13077,"style":6737},[355],[279,13079,13080,13083],{"style":2573},[279,13081],{"className":13082,"style":2577},[363],[279,13084,13086,13089,13132,13135,13138,13141,13181],{"className":13085},[333],[279,13087,944],{"className":13088},[1053],[279,13090,13092,13095],{"className":13091},[333],[279,13093,303],{"className":13094,"style":338},[333,337],[279,13096,13098],{"className":13097},[342],[279,13099,13101,13124],{"className":13100},[346,347],[279,13102,13104,13121],{"className":13103},[351],[279,13105,13107],{"className":13106,"style":2674},[355],[279,13108,13109,13112],{"style":359},[279,13110],{"className":13111,"style":364},[363],[279,13113,13115],{"className":13114},[368,369,370,371],[279,13116,13118],{"className":13117},[333,371],[279,13119,12762],{"className":13120,"style":1551},[333,337,371],[279,13122,383],{"className":13123},[382],[279,13125,13127],{"className":13126},[351],[279,13128,13130],{"className":13129,"style":390},[355],[279,13131],{},[279,13133],{"className":13134,"style":338},[1034],[279,13136,957],{"className":13137},[1103],[279,13139],{"className":13140,"style":338},[1034],[279,13142,13144,13147],{"className":13143},[333],[279,13145,303],{"className":13146,"style":338},[333,337],[279,13148,13150],{"className":13149},[342],[279,13151,13153,13173],{"className":13152},[346,347],[279,13154,13156,13170],{"className":13155},[351],[279,13157,13159],{"className":13158,"style":2674},[355],[279,13160,13161,13164],{"style":359},[279,13162],{"className":13163,"style":364},[363],[279,13165,13167],{"className":13166},[368,369,370,371],[279,13168,416],{"className":13169,"style":443},[333,337,371],[279,13171,383],{"className":13172},[382],[279,13174,13176],{"className":13175},[351],[279,13177,13179],{"className":13178,"style":390},[355],[279,13180],{},[279,13182,832],{"className":13183},[1157],[279,13185,13186,13189],{"style":2638},[279,13187],{"className":13188,"style":2577},[363],[279,13190],{"className":13191,"style":2646},[2645],[279,13193,13194,13197],{"style":2649},[279,13195],{"className":13196,"style":2577},[363],[279,13198,13200,13255],{"className":13199},[333],[279,13201,13203,13206],{"className":13202},[333],[279,13204,506],{"className":13205,"style":532},[333,337],[279,13207,13209],{"className":13208},[342],[279,13210,13212,13247],{"className":13211},[346,347],[279,13213,13215,13244],{"className":13214},[351],[279,13216,13218],{"className":13217,"style":2674},[355],[279,13219,13220,13223],{"style":547},[279,13221],{"className":13222,"style":364},[363],[279,13224,13226],{"className":13225},[368,369,370,371],[279,13227,13229,13232,13235,13238,13241],{"className":13228},[333,371],[279,13230,10408],{"className":13231,"style":2199},[333,337,371],[279,13233,4417],{"className":13234},[333,337,371],[279,13236,6665],{"className":13237},[333,337,371],[279,13239,684],{"className":13240},[333,337,371],[279,13242,1472],{"className":13243},[333,371],[279,13245,383],{"className":13246},[382],[279,13248,13250],{"className":13249},[351],[279,13251,13253],{"className":13252,"style":390},[355],[279,13254],{},[279,13256,13258,13261],{"className":13257},[333],[279,13259,9499],{"className":13260,"style":9526},[333,337],[279,13262,13264],{"className":13263},[342],[279,13265,13267,13287],{"className":13266},[346,347],[279,13268,13270,13284],{"className":13269},[351],[279,13271,13273],{"className":13272,"style":456},[355],[279,13274,13275,13278],{"style":12371},[279,13276],{"className":13277,"style":364},[363],[279,13279,13281],{"className":13280},[368,369,370,371],[279,13282,4417],{"className":13283},[333,337,371],[279,13285,383],{"className":13286},[382],[279,13288,13290],{"className":13289},[351],[279,13291,13293],{"className":13292,"style":390},[355],[279,13294],{},[279,13296,383],{"className":13297},[382],[279,13299,13301],{"className":13300},[351],[279,13302,13305],{"className":13303,"style":13304},[355],"height:0.936em;",[279,13306],{},[279,13308],{"className":13309},[1157,2557],[279,13311,13313,13316],{"style":13312},"top:-3.5903em;",[279,13314],{"className":13315,"style":13044},[363],[279,13317],{"className":13318,"style":2646},[2645],[279,13320,13322,13325],{"style":13321},"top:-4.0373em;",[279,13323],{"className":13324,"style":13044},[363],[279,13326,13328],{"className":13327},[333],[279,13329,13331,13334],{"className":13330},[333],[279,13332,506],{"className":13333,"style":532},[333,337],[279,13335,13337],{"className":13336},[342],[279,13338,13340,13375],{"className":13339},[346,347],[279,13341,13343,13372],{"className":13342},[351],[279,13344,13346],{"className":13345,"style":2674},[355],[279,13347,13348,13351],{"style":547},[279,13349],{"className":13350,"style":364},[363],[279,13352,13354],{"className":13353},[368,369,370,371],[279,13355,13357,13360,13363,13366,13369],{"className":13356},[333,371],[279,13358,10408],{"className":13359,"style":2199},[333,337,371],[279,13361,4417],{"className":13362},[333,337,371],[279,13364,6665],{"className":13365},[333,337,371],[279,13367,684],{"className":13368},[333,337,371],[279,13370,1472],{"className":13371},[333,371],[279,13373,383],{"className":13374},[382],[279,13376,13378],{"className":13377},[351],[279,13379,13381],{"className":13380,"style":390},[355],[279,13382],{},[279,13384,383],{"className":13385},[382],[279,13387,13389],{"className":13388},[351],[279,13390,13393],{"className":13391,"style":13392},[355],"height:2.1863em;",[279,13394],{},[279,13396],{"className":13397},[1157,2557],[240,13399,13400],{},"上式可以用下面两个式子进行推导得出：",[279,13402,13404],{"className":13403},[2333],[279,13405,13407,13521],{"className":13406},[282],[279,13408,13410],{"className":13409},[286],[288,13411,13412],{"xmlns":290,"display":2342},[292,13413,13414,13518],{},[295,13415,13416,13430,13432,13434,13436,13438,13458,13460,13466,13468,13470,13472,13474,13476,13486,13488,13502,13508,13510,13516],{},[298,13417,13418,13420],{},[301,13419,506],{},[295,13421,13422,13424,13426,13428],{},[301,13423,10408],{},[301,13425,4417],{},[301,13427,6665],{},[301,13429,684],{},[938,13431,2356],{},[301,13433,2377],{},[4391,13435,4428],{},[938,13437,944],{"stretchy":943},[298,13439,13440,13442],{},[301,13441,303],{},[295,13443,13444,13446,13448,13450],{},[301,13445,5611],{},[301,13447,1384],{},[938,13449,4449],{"separator":320},[295,13451,13452,13454,13456],{},[301,13453,2167],{"mathvariant":1380},[301,13455,513],{"mathvariant":1380},[301,13457,684],{"mathvariant":1380},[938,13459,957],{},[298,13461,13462,13464],{},[301,13463,303],{},[301,13465,416],{},[938,13467,832],{"stretchy":943},[938,13469,2356],{},[301,13471,2377],{},[4391,13473,4428],{},[938,13475,944],{"stretchy":943},[298,13477,13478,13480],{},[301,13479,303],{},[295,13481,13482,13484],{},[301,13483,5611],{},[301,13485,1384],{},[938,13487,957],{},[298,13489,13490,13492],{},[301,13491,506],{},[295,13493,13494,13496,13498,13500],{},[301,13495,10408],{},[301,13497,4417],{},[301,13499,6665],{},[301,13501,684],{},[298,13503,13504,13506],{},[301,13505,9499],{},[301,13507,4417],{},[938,13509,957],{},[298,13511,13512,13514],{},[301,13513,303],{},[301,13515,416],{},[938,13517,832],{"stretchy":943},[312,13519,13520],{"encoding":314},"I_{Dsat}=k\\,(V_{GS,\\mathrm{int}}-V_T)=k\\,(V_{GS}-I_{Dsat}R_s-V_T)",[279,13522,13524,13591,13669,13727,13794,13901],{"className":13523,"ariaHidden":320},[319],[279,13525,13527,13530,13582,13585,13588],{"className":13526},[324],[279,13528],{"className":13529,"style":329},[328],[279,13531,13533,13536],{"className":13532},[333],[279,13534,506],{"className":13535,"style":532},[333,337],[279,13537,13539],{"className":13538},[342],[279,13540,13542,13574],{"className":13541},[346,347],[279,13543,13545,13571],{"className":13544},[351],[279,13546,13548],{"className":13547,"style":2674},[355],[279,13549,13550,13553],{"style":547},[279,13551],{"className":13552,"style":364},[363],[279,13554,13556],{"className":13555},[368,369,370,371],[279,13557,13559,13562,13565,13568],{"className":13558},[333,371],[279,13560,10408],{"className":13561,"style":2199},[333,337,371],[279,13563,4417],{"className":13564},[333,337,371],[279,13566,6665],{"className":13567},[333,337,371],[279,13569,684],{"className":13570},[333,337,371],[279,13572,383],{"className":13573},[382],[279,13575,13577],{"className":13576},[351],[279,13578,13580],{"className":13579,"style":390},[355],[279,13581],{},[279,13583],{"className":13584,"style":1035},[1034],[279,13586,2356],{"className":13587},[1039],[279,13589],{"className":13590,"style":1035},[1034],[279,13592,13594,13598,13601,13604,13607,13660,13663,13666],{"className":13593},[324],[279,13595],{"className":13596,"style":13597},[328],"height:1.0361em;vertical-align:-0.2861em;",[279,13599,2377],{"className":13600,"style":2510},[333,337],[279,13602],{"className":13603,"style":4726},[1034],[279,13605,944],{"className":13606},[1053],[279,13608,13610,13613],{"className":13609},[333],[279,13611,303],{"className":13612,"style":338},[333,337],[279,13614,13616],{"className":13615},[342],[279,13617,13619,13652],{"className":13618},[346,347],[279,13620,13622,13649],{"className":13621},[351],[279,13623,13625],{"className":13624,"style":2674},[355],[279,13626,13627,13630],{"style":359},[279,13628],{"className":13629,"style":364},[363],[279,13631,13633],{"className":13632},[368,369,370,371],[279,13634,13636,13639,13642],{"className":13635},[333,371],[279,13637,12762],{"className":13638,"style":1551},[333,337,371],[279,13640,4449],{"className":13641},[4813,371],[279,13643,13645],{"className":13644},[333,371],[279,13646,13648],{"className":13647},[333,6793,371],"int",[279,13650,383],{"className":13651},[382],[279,13653,13655],{"className":13654},[351],[279,13656,13658],{"className":13657,"style":827},[355],[279,13659],{},[279,13661],{"className":13662,"style":338},[1034],[279,13664,957],{"className":13665},[1103],[279,13667],{"className":13668,"style":338},[1034],[279,13670,13672,13675,13715,13718,13721,13724],{"className":13671},[324],[279,13673],{"className":13674,"style":1049},[328],[279,13676,13678,13681],{"className":13677},[333],[279,13679,303],{"className":13680,"style":338},[333,337],[279,13682,13684],{"className":13683},[342],[279,13685,13687,13707],{"className":13686},[346,347],[279,13688,13690,13704],{"className":13689},[351],[279,13691,13693],{"className":13692,"style":2674},[355],[279,13694,13695,13698],{"style":359},[279,13696],{"className":13697,"style":364},[363],[279,13699,13701],{"className":13700},[368,369,370,371],[279,13702,416],{"className":13703,"style":443},[333,337,371],[279,13705,383],{"className":13706},[382],[279,13708,13710],{"className":13709},[351],[279,13711,13713],{"className":13712,"style":390},[355],[279,13714],{},[279,13716,832],{"className":13717},[1157],[279,13719],{"className":13720,"style":1035},[1034],[279,13722,2356],{"className":13723},[1039],[279,13725],{"className":13726,"style":1035},[1034],[279,13728,13730,13733,13736,13739,13742,13785,13788,13791],{"className":13729},[324],[279,13731],{"className":13732,"style":1049},[328],[279,13734,2377],{"className":13735,"style":2510},[333,337],[279,13737],{"className":13738,"style":4726},[1034],[279,13740,944],{"className":13741},[1053],[279,13743,13745,13748],{"className":13744},[333],[279,13746,303],{"className":13747,"style":338},[333,337],[279,13749,13751],{"className":13750},[342],[279,13752,13754,13777],{"className":13753},[346,347],[279,13755,13757,13774],{"className":13756},[351],[279,13758,13760],{"className":13759,"style":2674},[355],[279,13761,13762,13765],{"style":359},[279,13763],{"className":13764,"style":364},[363],[279,13766,13768],{"className":13767},[368,369,370,371],[279,13769,13771],{"className":13770},[333,371],[279,13772,12762],{"className":13773,"style":1551},[333,337,371],[279,13775,383],{"className":13776},[382],[279,13778,13780],{"className":13779},[351],[279,13781,13783],{"className":13782,"style":390},[355],[279,13784],{},[279,13786],{"className":13787,"style":338},[1034],[279,13789,957],{"className":13790},[1103],[279,13792],{"className":13793,"style":338},[1034],[279,13795,13797,13800,13852,13892,13895,13898],{"className":13796},[324],[279,13798],{"className":13799,"style":329},[328],[279,13801,13803,13806],{"className":13802},[333],[279,13804,506],{"className":13805,"style":532},[333,337],[279,13807,13809],{"className":13808},[342],[279,13810,13812,13844],{"className":13811},[346,347],[279,13813,13815,13841],{"className":13814},[351],[279,13816,13818],{"className":13817,"style":2674},[355],[279,13819,13820,13823],{"style":547},[279,13821],{"className":13822,"style":364},[363],[279,13824,13826],{"className":13825},[368,369,370,371],[279,13827,13829,13832,13835,13838],{"className":13828},[333,371],[279,13830,10408],{"className":13831,"style":2199},[333,337,371],[279,13833,4417],{"className":13834},[333,337,371],[279,13836,6665],{"className":13837},[333,337,371],[279,13839,684],{"className":13840},[333,337,371],[279,13842,383],{"className":13843},[382],[279,13845,13847],{"className":13846},[351],[279,13848,13850],{"className":13849,"style":390},[355],[279,13851],{},[279,13853,13855,13858],{"className":13854},[333],[279,13856,9499],{"className":13857,"style":9526},[333,337],[279,13859,13861],{"className":13860},[342],[279,13862,13864,13884],{"className":13863},[346,347],[279,13865,13867,13881],{"className":13866},[351],[279,13868,13870],{"className":13869,"style":456},[355],[279,13871,13872,13875],{"style":12371},[279,13873],{"className":13874,"style":364},[363],[279,13876,13878],{"className":13877},[368,369,370,371],[279,13879,4417],{"className":13880},[333,337,371],[279,13882,383],{"className":13883},[382],[279,13885,13887],{"className":13886},[351],[279,13888,13890],{"className":13889,"style":390},[355],[279,13891],{},[279,13893],{"className":13894,"style":338},[1034],[279,13896,957],{"className":13897},[1103],[279,13899],{"className":13900,"style":338},[1034],[279,13902,13904,13907,13947],{"className":13903},[324],[279,13905],{"className":13906,"style":1049},[328],[279,13908,13910,13913],{"className":13909},[333],[279,13911,303],{"className":13912,"style":338},[333,337],[279,13914,13916],{"className":13915},[342],[279,13917,13919,13939],{"className":13918},[346,347],[279,13920,13922,13936],{"className":13921},[351],[279,13923,13925],{"className":13924,"style":2674},[355],[279,13926,13927,13930],{"style":359},[279,13928],{"className":13929,"style":364},[363],[279,13931,13933],{"className":13932},[368,369,370,371],[279,13934,416],{"className":13935,"style":443},[333,337,371],[279,13937,383],{"className":13938},[382],[279,13940,13942],{"className":13941},[351],[279,13943,13945],{"className":13944,"style":390},[355],[279,13946],{},[279,13948,832],{"className":13949},[1157],[279,13951,13953],{"className":13952},[2333],[279,13954,13956,14014],{"className":13955},[282],[279,13957,13959],{"className":13958},[286],[288,13960,13961],{"xmlns":290,"display":2342},[292,13962,13963,14011],{},[295,13964,13965,13983,13985,13987,13989,13991,14001,14003,14009],{},[298,13966,13967,13969],{},[301,13968,506],{},[295,13970,13971,13973,13975,13977],{},[301,13972,10408],{},[301,13974,4417],{},[301,13976,6665],{},[298,13978,13979,13981],{},[301,13980,684],{},[970,13982,1472],{},[938,13984,2356],{},[301,13986,2377],{},[4391,13988,4428],{},[938,13990,944],{"stretchy":943},[298,13992,13993,13995],{},[301,13994,303],{},[295,13996,13997,13999],{},[301,13998,5611],{},[301,14000,1384],{},[938,14002,957],{},[298,14004,14005,14007],{},[301,14006,303],{},[301,14008,416],{},[938,14010,832],{"stretchy":943},[312,14012,14013],{"encoding":314},"I_{Dsat_0}=k\\,(V_{GS}-V_T)",[279,14015,14017,14123,14190],{"className":14016,"ariaHidden":320},[319],[279,14018,14020,14024,14114,14117,14120],{"className":14019},[324],[279,14021],{"className":14022,"style":14023},[328],"height:0.9334em;vertical-align:-0.2501em;",[279,14025,14027,14030],{"className":14026},[333],[279,14028,506],{"className":14029,"style":532},[333,337],[279,14031,14033],{"className":14032},[342],[279,14034,14036,14106],{"className":14035},[346,347],[279,14037,14039,14103],{"className":14038},[351],[279,14040,14042],{"className":14041,"style":2674},[355],[279,14043,14044,14047],{"style":547},[279,14045],{"className":14046,"style":364},[363],[279,14048,14050],{"className":14049},[368,369,370,371],[279,14051,14053,14056,14059,14062],{"className":14052},[333,371],[279,14054,10408],{"className":14055,"style":2199},[333,337,371],[279,14057,4417],{"className":14058},[333,337,371],[279,14060,6665],{"className":14061},[333,337,371],[279,14063,14065,14068],{"className":14064},[333,371],[279,14066,684],{"className":14067},[333,337,371],[279,14069,14071],{"className":14070},[342],[279,14072,14074,14095],{"className":14073},[346,347],[279,14075,14077,14092],{"className":14076},[351],[279,14078,14080],{"className":14079,"style":2710},[355],[279,14081,14083,14086],{"style":14082},"top:-2.357em;margin-left:0em;margin-right:0.0714em;",[279,14084],{"className":14085,"style":1524},[363],[279,14087,14089],{"className":14088},[368,1528,1529,371],[279,14090,1472],{"className":14091},[333,371],[279,14093,383],{"className":14094},[382],[279,14096,14098],{"className":14097},[351],[279,14099,14101],{"className":14100,"style":1542},[355],[279,14102],{},[279,14104,383],{"className":14105},[382],[279,14107,14109],{"className":14108},[351],[279,14110,14112],{"className":14111,"style":2743},[355],[279,14113],{},[279,14115],{"className":14116,"style":1035},[1034],[279,14118,2356],{"className":14119},[1039],[279,14121],{"className":14122,"style":1035},[1034],[279,14124,14126,14129,14132,14135,14138,14181,14184,14187],{"className":14125},[324],[279,14127],{"className":14128,"style":1049},[328],[279,14130,2377],{"className":14131,"style":2510},[333,337],[279,14133],{"className":14134,"style":4726},[1034],[279,14136,944],{"className":14137},[1053],[279,14139,14141,14144],{"className":14140},[333],[279,14142,303],{"className":14143,"style":338},[333,337],[279,14145,14147],{"className":14146},[342],[279,14148,14150,14173],{"className":14149},[346,347],[279,14151,14153,14170],{"className":14152},[351],[279,14154,14156],{"className":14155,"style":2674},[355],[279,14157,14158,14161],{"style":359},[279,14159],{"className":14160,"style":364},[363],[279,14162,14164],{"className":14163},[368,369,370,371],[279,14165,14167],{"className":14166},[333,371],[279,14168,12762],{"className":14169,"style":1551},[333,337,371],[279,14171,383],{"className":14172},[382],[279,14174,14176],{"className":14175},[351],[279,14177,14179],{"className":14178,"style":390},[355],[279,14180],{},[279,14182],{"className":14183,"style":338},[1034],[279,14185,957],{"className":14186},[1103],[279,14188],{"className":14189,"style":338},[1034],[279,14191,14193,14196,14236],{"className":14192},[324],[279,14194],{"className":14195,"style":1049},[328],[279,14197,14199,14202],{"className":14198},[333],[279,14200,303],{"className":14201,"style":338},[333,337],[279,14203,14205],{"className":14204},[342],[279,14206,14208,14228],{"className":14207},[346,347],[279,14209,14211,14225],{"className":14210},[351],[279,14212,14214],{"className":14213,"style":2674},[355],[279,14215,14216,14219],{"style":359},[279,14217],{"className":14218,"style":364},[363],[279,14220,14222],{"className":14221},[368,369,370,371],[279,14223,416],{"className":14224,"style":443},[333,337,371],[279,14226,383],{"className":14227},[382],[279,14229,14231],{"className":14230},[351],[279,14232,14234],{"className":14233,"style":390},[355],[279,14235],{},[279,14237,832],{"className":14238},[1157],[240,14240,14241],{},[257,14242],{"alt":259,"src":14243},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-03.png",[588,14245,14246],{},[240,14247,14248],{},"Rs 源端寄生电阻（Source resistance）和 Rd 漏端寄生电阻（Drain resistance）两个电阻中，Rs 对MOSFET的性能影响更明显。",[240,14250,14251,14252,14637,14638,14728,14729,14808,14809,14898,14899,14902,14903,15034],{},"由式 ",[279,14253,14255,14335],{"className":14254},[282],[279,14256,14258],{"className":14257},[286],[288,14259,14260],{"xmlns":290},[292,14261,14262,14332],{},[295,14263,14264,14278,14280,14296,14298,14312,14314,14316,14322,14324,14330],{},[298,14265,14266,14268],{},[301,14267,303],{},[295,14269,14270,14272,14274,14276],{},[301,14271,10408],{},[301,14273,4417],{},[301,14275,6665],{},[301,14277,684],{},[938,14279,2356],{},[298,14281,14282,14284],{},[301,14283,303],{},[295,14285,14286,14288,14290,14292,14294],{},[301,14287,10408],{},[301,14289,4417],{},[301,14291,6665],{},[301,14293,684],{},[970,14295,1472],{},[938,14297,4420],{},[298,14299,14300,14302],{},[301,14301,506],{},[295,14303,14304,14306,14308,14310],{},[301,14305,10408],{},[301,14307,4417],{},[301,14309,6665],{},[301,14311,684],{},[4391,14313,4428],{},[938,14315,944],{"stretchy":943},[298,14317,14318,14320],{},[301,14319,9499],{},[301,14321,4417],{},[938,14323,4420],{},[298,14325,14326,14328],{},[301,14327,9499],{},[301,14329,308],{},[938,14331,832],{"stretchy":943},[312,14333,14334],{"encoding":314},"V_{Dsat}=V_{Dsat0}+I_{Dsat}\\,(R_s+R_d)",[279,14336,14338,14405,14475,14588],{"className":14337,"ariaHidden":320},[319],[279,14339,14341,14344,14396,14399,14402],{"className":14340},[324],[279,14342],{"className":14343,"style":329},[328],[279,14345,14347,14350],{"className":14346},[333],[279,14348,303],{"className":14349,"style":338},[333,337],[279,14351,14353],{"className":14352},[342],[279,14354,14356,14388],{"className":14355},[346,347],[279,14357,14359,14385],{"className":14358},[351],[279,14360,14362],{"className":14361,"style":2674},[355],[279,14363,14364,14367],{"style":359},[279,14365],{"className":14366,"style":364},[363],[279,14368,14370],{"className":14369},[368,369,370,371],[279,14371,14373,14376,14379,14382],{"className":14372},[333,371],[279,14374,10408],{"className":14375,"style":2199},[333,337,371],[279,14377,4417],{"className":14378},[333,337,371],[279,14380,6665],{"className":14381},[333,337,371],[279,14383,684],{"className":14384},[333,337,371],[279,14386,383],{"className":14387},[382],[279,14389,14391],{"className":14390},[351],[279,14392,14394],{"className":14393,"style":390},[355],[279,14395],{},[279,14397],{"className":14398,"style":1035},[1034],[279,14400,2356],{"className":14401},[1039],[279,14403],{"className":14404,"style":1035},[1034],[279,14406,14408,14411,14466,14469,14472],{"className":14407},[324],[279,14409],{"className":14410,"style":329},[328],[279,14412,14414,14417],{"className":14413},[333],[279,14415,303],{"className":14416,"style":338},[333,337],[279,14418,14420],{"className":14419},[342],[279,14421,14423,14458],{"className":14422},[346,347],[279,14424,14426,14455],{"className":14425},[351],[279,14427,14429],{"className":14428,"style":2674},[355],[279,14430,14431,14434],{"style":359},[279,14432],{"className":14433,"style":364},[363],[279,14435,14437],{"className":14436},[368,369,370,371],[279,14438,14440,14443,14446,14449,14452],{"className":14439},[333,371],[279,14441,10408],{"className":14442,"style":2199},[333,337,371],[279,14444,4417],{"className":14445},[333,337,371],[279,14447,6665],{"className":14448},[333,337,371],[279,14450,684],{"className":14451},[333,337,371],[279,14453,1472],{"className":14454},[333,371],[279,14456,383],{"className":14457},[382],[279,14459,14461],{"className":14460},[351],[279,14462,14464],{"className":14463,"style":390},[355],[279,14465],{},[279,14467],{"className":14468,"style":338},[1034],[279,14470,4420],{"className":14471},[1103],[279,14473],{"className":14474,"style":338},[1034],[279,14476,14478,14481,14533,14536,14539,14579,14582,14585],{"className":14477},[324],[279,14479],{"className":14480,"style":1049},[328],[279,14482,14484,14487],{"className":14483},[333],[279,14485,506],{"className":14486,"style":532},[333,337],[279,14488,14490],{"className":14489},[342],[279,14491,14493,14525],{"className":14492},[346,347],[279,14494,14496,14522],{"className":14495},[351],[279,14497,14499],{"className":14498,"style":2674},[355],[279,14500,14501,14504],{"style":547},[279,14502],{"className":14503,"style":364},[363],[279,14505,14507],{"className":14506},[368,369,370,371],[279,14508,14510,14513,14516,14519],{"className":14509},[333,371],[279,14511,10408],{"className":14512,"style":2199},[333,337,371],[279,14514,4417],{"className":14515},[333,337,371],[279,14517,6665],{"className":14518},[333,337,371],[279,14520,684],{"className":14521},[333,337,371],[279,14523,383],{"className":14524},[382],[279,14526,14528],{"className":14527},[351],[279,14529,14531],{"className":14530,"style":390},[355],[279,14532],{},[279,14534],{"className":14535,"style":4726},[1034],[279,14537,944],{"className":14538},[1053],[279,14540,14542,14545],{"className":14541},[333],[279,14543,9499],{"className":14544,"style":9526},[333,337],[279,14546,14548],{"className":14547},[342],[279,14549,14551,14571],{"className":14550},[346,347],[279,14552,14554,14568],{"className":14553},[351],[279,14555,14557],{"className":14556,"style":456},[355],[279,14558,14559,14562],{"style":12371},[279,14560],{"className":14561,"style":364},[363],[279,14563,14565],{"className":14564},[368,369,370,371],[279,14566,4417],{"className":14567},[333,337,371],[279,14569,383],{"className":14570},[382],[279,14572,14574],{"className":14573},[351],[279,14575,14577],{"className":14576,"style":390},[355],[279,14578],{},[279,14580],{"className":14581,"style":338},[1034],[279,14583,4420],{"className":14584},[1103],[279,14586],{"className":14587,"style":338},[1034],[279,14589,14591,14594,14634],{"className":14590},[324],[279,14592],{"className":14593,"style":1049},[328],[279,14595,14597,14600],{"className":14596},[333],[279,14598,9499],{"className":14599,"style":9526},[333,337],[279,14601,14603],{"className":14602},[342],[279,14604,14606,14626],{"className":14605},[346,347],[279,14607,14609,14623],{"className":14608},[351],[279,14610,14612],{"className":14611,"style":356},[355],[279,14613,14614,14617],{"style":12371},[279,14615],{"className":14616,"style":364},[363],[279,14618,14620],{"className":14619},[368,369,370,371],[279,14621,308],{"className":14622},[333,337,371],[279,14624,383],{"className":14625},[382],[279,14627,14629],{"className":14628},[351],[279,14630,14632],{"className":14631,"style":390},[355],[279,14633],{},[279,14635,832],{"className":14636},[1157]," 可以发现，外部看到的 ",[279,14639,14641,14667],{"className":14640},[282],[279,14642,14644],{"className":14643},[286],[288,14645,14646],{"xmlns":290},[292,14647,14648,14664],{},[295,14649,14650],{},[298,14651,14652,14654],{},[301,14653,303],{},[295,14655,14656,14658,14660,14662],{},[301,14657,10408],{},[301,14659,4417],{},[301,14661,6665],{},[301,14663,684],{},[312,14665,14666],{"encoding":314},"V_{Dsat}",[279,14668,14670],{"className":14669,"ariaHidden":320},[319],[279,14671,14673,14676],{"className":14672},[324],[279,14674],{"className":14675,"style":329},[328],[279,14677,14679,14682],{"className":14678},[333],[279,14680,303],{"className":14681,"style":338},[333,337],[279,14683,14685],{"className":14684},[342],[279,14686,14688,14720],{"className":14687},[346,347],[279,14689,14691,14717],{"className":14690},[351],[279,14692,14694],{"className":14693,"style":2674},[355],[279,14695,14696,14699],{"style":359},[279,14697],{"className":14698,"style":364},[363],[279,14700,14702],{"className":14701},[368,369,370,371],[279,14703,14705,14708,14711,14714],{"className":14704},[333,371],[279,14706,10408],{"className":14707,"style":2199},[333,337,371],[279,14709,4417],{"className":14710},[333,337,371],[279,14712,6665],{"className":14713},[333,337,371],[279,14715,684],{"className":14716},[333,337,371],[279,14718,383],{"className":14719},[382],[279,14721,14723],{"className":14722},[351],[279,14724,14726],{"className":14725,"style":390},[355],[279,14727],{}," 反而变大，这是由于外部施加的 ",[279,14730,14732,14753],{"className":14731},[282],[279,14733,14735],{"className":14734},[286],[288,14736,14737],{"xmlns":290},[292,14738,14739,14751],{},[295,14740,14741],{},[298,14742,14743,14745],{},[301,14744,303],{},[295,14746,14747,14749],{},[301,14748,10408],{},[301,14750,1384],{},[312,14752,10413],{"encoding":314},[279,14754,14756],{"className":14755,"ariaHidden":320},[319],[279,14757,14759,14762],{"className":14758},[324],[279,14760],{"className":14761,"style":329},[328],[279,14763,14765,14768],{"className":14764},[333],[279,14766,303],{"className":14767,"style":338},[333,337],[279,14769,14771],{"className":14770},[342],[279,14772,14774,14800],{"className":14773},[346,347],[279,14775,14777,14797],{"className":14776},[351],[279,14778,14780],{"className":14779,"style":2674},[355],[279,14781,14782,14785],{"style":359},[279,14783],{"className":14784,"style":364},[363],[279,14786,14788],{"className":14787},[368,369,370,371],[279,14789,14791,14794],{"className":14790},[333,371],[279,14792,10408],{"className":14793,"style":2199},[333,337,371],[279,14795,1384],{"className":14796,"style":1551},[333,337,371],[279,14798,383],{"className":14799},[382],[279,14801,14803],{"className":14802},[351],[279,14804,14806],{"className":14805,"style":390},[355],[279,14807],{}," 会被串联电阻占去一部分，致使",[279,14810,14812,14837],{"className":14811},[282],[279,14813,14815],{"className":14814},[286],[288,14816,14817],{"xmlns":290},[292,14818,14819,14835],{},[295,14820,14821],{},[298,14822,14823,14825],{},[301,14824,303],{},[295,14826,14827,14829,14831,14833],{},[301,14828,10408],{},[301,14830,4417],{},[301,14832,6665],{},[301,14834,684],{},[312,14836,14666],{"encoding":314},[279,14838,14840],{"className":14839,"ariaHidden":320},[319],[279,14841,14843,14846],{"className":14842},[324],[279,14844],{"className":14845,"style":329},[328],[279,14847,14849,14852],{"className":14848},[333],[279,14850,303],{"className":14851,"style":338},[333,337],[279,14853,14855],{"className":14854},[342],[279,14856,14858,14890],{"className":14857},[346,347],[279,14859,14861,14887],{"className":14860},[351],[279,14862,14864],{"className":14863,"style":2674},[355],[279,14865,14866,14869],{"style":359},[279,14867],{"className":14868,"style":364},[363],[279,14870,14872],{"className":14871},[368,369,370,371],[279,14873,14875,14878,14881,14884],{"className":14874},[333,371],[279,14876,10408],{"className":14877,"style":2199},[333,337,371],[279,14879,4417],{"className":14880},[333,337,371],[279,14882,6665],{"className":14883},[333,337,371],[279,14885,684],{"className":14886},[333,337,371],[279,14888,383],{"className":14889},[382],[279,14891,14893],{"className":14892},[351],[279,14894,14896],{"className":14895,"style":390},[355],[279,14897],{},"会比",[266,14900,14901],{},"内在晶体管","进入饱和所需的",[279,14904,14906,14936],{"className":14905},[282],[279,14907,14909],{"className":14908},[286],[288,14910,14911],{"xmlns":290},[292,14912,14913,14933],{},[295,14914,14915],{},[298,14916,14917,14919],{},[301,14918,303],{},[295,14920,14921,14923,14925,14927],{},[301,14922,10408],{},[301,14924,4417],{},[301,14926,6665],{},[298,14928,14929,14931],{},[301,14930,684],{},[970,14932,1472],{},[312,14934,14935],{"encoding":314},"V_{Dsat_0}",[279,14937,14939],{"className":14938,"ariaHidden":320},[319],[279,14940,14942,14945],{"className":14941},[324],[279,14943],{"className":14944,"style":14023},[328],[279,14946,14948,14951],{"className":14947},[333],[279,14949,303],{"className":14950,"style":338},[333,337],[279,14952,14954],{"className":14953},[342],[279,14955,14957,15026],{"className":14956},[346,347],[279,14958,14960,15023],{"className":14959},[351],[279,14961,14963],{"className":14962,"style":2674},[355],[279,14964,14965,14968],{"style":359},[279,14966],{"className":14967,"style":364},[363],[279,14969,14971],{"className":14970},[368,369,370,371],[279,14972,14974,14977,14980,14983],{"className":14973},[333,371],[279,14975,10408],{"className":14976,"style":2199},[333,337,371],[279,14978,4417],{"className":14979},[333,337,371],[279,14981,6665],{"className":14982},[333,337,371],[279,14984,14986,14989],{"className":14985},[333,371],[279,14987,684],{"className":14988},[333,337,371],[279,14990,14992],{"className":14991},[342],[279,14993,14995,15015],{"className":14994},[346,347],[279,14996,14998,15012],{"className":14997},[351],[279,14999,15001],{"className":15000,"style":2710},[355],[279,15002,15003,15006],{"style":14082},[279,15004],{"className":15005,"style":1524},[363],[279,15007,15009],{"className":15008},[368,1528,1529,371],[279,15010,1472],{"className":15011},[333,371],[279,15013,383],{"className":15014},[382],[279,15016,15018],{"className":15017},[351],[279,15019,15021],{"className":15020,"style":1542},[355],[279,15022],{},[279,15024,383],{"className":15025},[382],[279,15027,15029],{"className":15028},[351],[279,15030,15032],{"className":15031,"style":2743},[355],[279,15033],{},"更大。",[236,15036,15038],{"id":15037},"漏致势垒降低-drain-induced-barrier-lowering-dibl",[266,15039,15040],{},"漏致势垒降低 | Drain Induced Barrier Lowering (DIBL)",[240,15042,15043,15044,393,15047,393,15117,15120,15121,15190,15191,15194,15195],{},"当沟道变短、源漏更近时，",[266,15045,15046],{},"漏端电压",[279,15048,15050,15068],{"className":15049},[282],[279,15051,15053],{"className":15052},[286],[288,15054,15055],{"xmlns":290},[292,15056,15057,15065],{},[295,15058,15059],{},[298,15060,15061,15063],{},[301,15062,303],{},[301,15064,10408],{},[312,15066,15067],{"encoding":314},"V_D",[279,15069,15071],{"className":15070,"ariaHidden":320},[319],[279,15072,15074,15077],{"className":15073},[324],[279,15075],{"className":15076,"style":329},[328],[279,15078,15080,15083],{"className":15079},[333],[279,15081,303],{"className":15082,"style":338},[333,337],[279,15084,15086],{"className":15085},[342],[279,15087,15089,15109],{"className":15088},[346,347],[279,15090,15092,15106],{"className":15091},[351],[279,15093,15095],{"className":15094,"style":2674},[355],[279,15096,15097,15100],{"style":359},[279,15098],{"className":15099,"style":364},[363],[279,15101,15103],{"className":15102},[368,369,370,371],[279,15104,10408],{"className":15105,"style":2199},[333,337,371],[279,15107,383],{"className":15108},[382],[279,15110,15112],{"className":15111},[351],[279,15113,15115],{"className":15114,"style":390},[355],[279,15116],{},[266,15118,15119],{},"会降低源端与沟道的势垒高度","，从而减小",[279,15122,15124,15141],{"className":15123},[282],[279,15125,15127],{"className":15126},[286],[288,15128,15129],{"xmlns":290},[292,15130,15131,15139],{},[295,15132,15133],{},[298,15134,15135,15137],{},[301,15136,303],{},[301,15138,684],{},[312,15140,687],{"encoding":314},[279,15142,15144],{"className":15143,"ariaHidden":320},[319],[279,15145,15147,15150],{"className":15146},[324],[279,15148],{"className":15149,"style":329},[328],[279,15151,15153,15156],{"className":15152},[333],[279,15154,303],{"className":15155,"style":338},[333,337],[279,15157,15159],{"className":15158},[342],[279,15160,15162,15182],{"className":15161},[346,347],[279,15163,15165,15179],{"className":15164},[351],[279,15166,15168],{"className":15167,"style":715},[355],[279,15169,15170,15173],{"style":359},[279,15171],{"className":15172,"style":364},[363],[279,15174,15176],{"className":15175},[368,369,370,371],[279,15177,684],{"className":15178},[333,337,371],[279,15180,383],{"className":15181},[382],[279,15183,15185],{"className":15184},[351],[279,15186,15188],{"className":15187,"style":390},[355],[279,15189],{},"的现象称为",[266,15192,15193],{},"漏致势垒降低。","这会让载流子更容易从源端注入沟道，于是 ",[266,15196,15197],{},"亚阈值电流（subthreshold current）显著上升。",[588,15199,15200],{},[240,15201,15202,15203,15272,15273,15342],{},"When the channel becomes shorter and the source and drain move closer together, the drain voltage ",[279,15204,15206,15223],{"className":15205},[282],[279,15207,15209],{"className":15208},[286],[288,15210,15211],{"xmlns":290},[292,15212,15213,15221],{},[295,15214,15215],{},[298,15216,15217,15219],{},[301,15218,303],{},[301,15220,10408],{},[312,15222,15067],{"encoding":314},[279,15224,15226],{"className":15225,"ariaHidden":320},[319],[279,15227,15229,15232],{"className":15228},[324],[279,15230],{"className":15231,"style":329},[328],[279,15233,15235,15238],{"className":15234},[333],[279,15236,303],{"className":15237,"style":338},[333,337],[279,15239,15241],{"className":15240},[342],[279,15242,15244,15264],{"className":15243},[346,347],[279,15245,15247,15261],{"className":15246},[351],[279,15248,15250],{"className":15249,"style":2674},[355],[279,15251,15252,15255],{"style":359},[279,15253],{"className":15254,"style":364},[363],[279,15256,15258],{"className":15257},[368,369,370,371],[279,15259,10408],{"className":15260,"style":2199},[333,337,371],[279,15262,383],{"className":15263},[382],[279,15265,15267],{"className":15266},[351],[279,15268,15270],{"className":15269,"style":390},[355],[279,15271],{}," lowers the potential barrier between the source and the channel, thereby reducing the threshold voltage ",[279,15274,15276,15293],{"className":15275},[282],[279,15277,15279],{"className":15278},[286],[288,15280,15281],{"xmlns":290},[292,15282,15283,15291],{},[295,15284,15285],{},[298,15286,15287,15289],{},[301,15288,303],{},[301,15290,684],{},[312,15292,687],{"encoding":314},[279,15294,15296],{"className":15295,"ariaHidden":320},[319],[279,15297,15299,15302],{"className":15298},[324],[279,15300],{"className":15301,"style":329},[328],[279,15303,15305,15308],{"className":15304},[333],[279,15306,303],{"className":15307,"style":338},[333,337],[279,15309,15311],{"className":15310},[342],[279,15312,15314,15334],{"className":15313},[346,347],[279,15315,15317,15331],{"className":15316},[351],[279,15318,15320],{"className":15319,"style":715},[355],[279,15321,15322,15325],{"style":359},[279,15323],{"className":15324,"style":364},[363],[279,15326,15328],{"className":15327},[368,369,370,371],[279,15329,684],{"className":15330},[333,337,371],[279,15332,383],{"className":15333},[382],[279,15335,15337],{"className":15336},[351],[279,15338,15340],{"className":15339,"style":390},[355],[279,15341],{},". This effect is called drain-induced barrier lowering (DIBL). It makes it easier for carriers to be injected from the source into the channel, so the subthreshold current increases significantly.",[240,15344,15345],{},[257,15346],{"alt":15347,"src":15348},"e85c368ed6449426ec303e2f4b5c6ea8.jpg","\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-22.png",[240,15350,15351],{},"MOSFET的沟道长度 L 减小以后，亚阈值摆幅（SS）变大，这时的MOSFET会很难被关断。",[588,15353,15354,15357],{},[240,15355,15356],{},"引用自教材",[240,15358,15359,15360,15733,15734,15737,15738,15808,15809,15837,15838,15907,15908,15936,15937,16012,16013,16094,16095,16164,16165,16234,16235,16309,16310,16394,16395,16464,16465,16394,16534,16619,16620,623],{},"该式",[279,15361,15363,15441],{"className":15362},[282],[279,15364,15366],{"className":15365},[286],[288,15367,15368],{"xmlns":290},[292,15369,15370,15438],{},[295,15371,15372,15378,15380,15398,15400,15402,15412,15414,15416,15418,15420],{},[298,15373,15374,15376],{},[301,15375,303],{},[301,15377,684],{},[938,15379,2356],{},[298,15381,15382,15384],{},[301,15383,303],{},[295,15385,15386,15388,15390,15392,15394,15396],{},[301,15387,684],{},[4391,15389,4393],{},[301,15391,4396],{},[301,15393,421],{},[301,15395,513],{},[301,15397,2370],{},[938,15399,957],{},[938,15401,944],{"stretchy":943},[298,15403,15404,15406],{},[301,15405,303],{},[295,15407,15408,15410],{},[301,15409,308],{},[301,15411,4417],{},[938,15413,4420],{},[970,15415,4423],{},[938,15417,832],{"stretchy":943},[4391,15419,4428],{},[965,15421,15422,15424],{},[301,15423,3306],{},[295,15425,15426,15428,15430,15432],{},[938,15427,957],{},[301,15429,3728],{},[301,15431,1381],{"mathvariant":1380},[298,15433,15434,15436],{},[301,15435,4396],{},[301,15437,308],{},[312,15439,15440],{"encoding":314},"V_t = V_{t\\text{-}long} - (V_{ds} + 0.4)\\, e^{-L\u002Fl_d}",[279,15442,15444,15499,15575,15639],{"className":15443,"ariaHidden":320},[319],[279,15445,15447,15450,15490,15493,15496],{"className":15446},[324],[279,15448],{"className":15449,"style":329},[328],[279,15451,15453,15456],{"className":15452},[333],[279,15454,303],{"className":15455,"style":338},[333,337],[279,15457,15459],{"className":15458},[342],[279,15460,15462,15482],{"className":15461},[346,347],[279,15463,15465,15479],{"className":15464},[351],[279,15466,15468],{"className":15467,"style":715},[355],[279,15469,15470,15473],{"style":359},[279,15471],{"className":15472,"style":364},[363],[279,15474,15476],{"className":15475},[368,369,370,371],[279,15477,684],{"className":15478},[333,337,371],[279,15480,383],{"className":15481},[382],[279,15483,15485],{"className":15484},[351],[279,15486,15488],{"className":15487,"style":390},[355],[279,15489],{},[279,15491],{"className":15492,"style":1035},[1034],[279,15494,2356],{"className":15495},[1039],[279,15497],{"className":15498,"style":1035},[1034],[279,15500,15502,15505,15566,15569,15572],{"className":15501},[324],[279,15503],{"className":15504,"style":778},[328],[279,15506,15508,15511],{"className":15507},[333],[279,15509,303],{"className":15510,"style":338},[333,337],[279,15512,15514],{"className":15513},[342],[279,15515,15517,15558],{"className":15516},[346,347],[279,15518,15520,15555],{"className":15519},[351],[279,15521,15523],{"className":15522,"style":356},[355],[279,15524,15525,15528],{"style":359},[279,15526],{"className":15527,"style":364},[363],[279,15529,15531],{"className":15530},[368,369,370,371],[279,15532,15534,15537,15543,15546,15549,15552],{"className":15533},[333,371],[279,15535,684],{"className":15536},[333,337,371],[279,15538,15540],{"className":15539},[333,4609,371],[279,15541,4393],{"className":15542},[333,371],[279,15544,4396],{"className":15545,"style":4616},[333,337,371],[279,15547,421],{"className":15548},[333,337,371],[279,15550,513],{"className":15551},[333,337,371],[279,15553,2370],{"className":15554,"style":2500},[333,337,371],[279,15556,383],{"className":15557},[382],[279,15559,15561],{"className":15560},[351],[279,15562,15564],{"className":15563,"style":827},[355],[279,15565],{},[279,15567],{"className":15568,"style":338},[1034],[279,15570,957],{"className":15571},[1103],[279,15573],{"className":15574,"style":338},[1034],[279,15576,15578,15581,15584,15630,15633,15636],{"className":15577},[324],[279,15579],{"className":15580,"style":1049},[328],[279,15582,944],{"className":15583},[1053],[279,15585,15587,15590],{"className":15586},[333],[279,15588,303],{"className":15589,"style":338},[333,337],[279,15591,15593],{"className":15592},[342],[279,15594,15596,15622],{"className":15595},[346,347],[279,15597,15599,15619],{"className":15598},[351],[279,15600,15602],{"className":15601,"style":356},[355],[279,15603,15604,15607],{"style":359},[279,15605],{"className":15606,"style":364},[363],[279,15608,15610],{"className":15609},[368,369,370,371],[279,15611,15613,15616],{"className":15612},[333,371],[279,15614,308],{"className":15615},[333,337,371],[279,15617,4417],{"className":15618},[333,337,371],[279,15620,383],{"className":15621},[382],[279,15623,15625],{"className":15624},[351],[279,15626,15628],{"className":15627,"style":390},[355],[279,15629],{},[279,15631],{"className":15632,"style":338},[1034],[279,15634,4420],{"className":15635},[1103],[279,15637],{"className":15638,"style":338},[1034],[279,15640,15642,15646,15649,15652,15655],{"className":15641},[324],[279,15643],{"className":15644,"style":15645},[328],"height:1.138em;vertical-align:-0.25em;",[279,15647,4423],{"className":15648},[333],[279,15650,832],{"className":15651},[1157],[279,15653],{"className":15654,"style":4726},[1034],[279,15656,15658,15661],{"className":15657},[333],[279,15659,3306],{"className":15660},[333,337],[279,15662,15664],{"className":15663},[342],[279,15665,15667],{"className":15666},[346],[279,15668,15670],{"className":15669},[351],[279,15671,15673],{"className":15672,"style":1461},[355],[279,15674,15675,15678],{"style":1176},[279,15676],{"className":15677,"style":364},[363],[279,15679,15681],{"className":15680},[368,369,370,371],[279,15682,15684,15687,15690,15693],{"className":15683},[333,371],[279,15685,957],{"className":15686},[333,371],[279,15688,3728],{"className":15689},[333,337,371],[279,15691,1381],{"className":15692},[333,371],[279,15694,15696,15699],{"className":15695},[333,371],[279,15697,4396],{"className":15698,"style":4616},[333,337,371],[279,15700,15702],{"className":15701},[342],[279,15703,15705,15725],{"className":15704},[346,347],[279,15706,15708,15722],{"className":15707},[351],[279,15709,15711],{"className":15710,"style":4785},[355],[279,15712,15713,15716],{"style":4788},[279,15714],{"className":15715,"style":1524},[363],[279,15717,15719],{"className":15718},[368,1528,1529,371],[279,15720,308],{"className":15721},[333,337,371],[279,15723,383],{"className":15724},[382],[279,15726,15728],{"className":15727},[351],[279,15729,15731],{"className":15730,"style":4807},[355],[279,15732],{},"来自于",[266,15735,15736],{},"简单电容模型","，其中的",[279,15739,15741,15759],{"className":15740},[282],[279,15742,15744],{"className":15743},[286],[288,15745,15746],{"xmlns":290},[292,15747,15748,15756],{},[295,15749,15750],{},[298,15751,15752,15754],{},[301,15753,4396],{},[301,15755,308],{},[312,15757,15758],{"encoding":314},"l_d",[279,15760,15762],{"className":15761,"ariaHidden":320},[319],[279,15763,15765,15768],{"className":15764},[324],[279,15766],{"className":15767,"style":4823},[328],[279,15769,15771,15774],{"className":15770},[333],[279,15772,4396],{"className":15773,"style":4616},[333,337],[279,15775,15777],{"className":15776},[342],[279,15778,15780,15800],{"className":15779},[346,347],[279,15781,15783,15797],{"className":15782},[351],[279,15784,15786],{"className":15785,"style":356},[355],[279,15787,15788,15791],{"style":4855},[279,15789],{"className":15790,"style":364},[363],[279,15792,15794],{"className":15793},[368,369,370,371],[279,15795,308],{"className":15796},[333,337,371],[279,15798,383],{"className":15799},[382],[279,15801,15803],{"className":15802},[351],[279,15804,15806],{"className":15805,"style":390},[355],[279,15807],{},"可以被称为DIBL的特征长度。在新的工艺节点为了让 ",[279,15810,15812,15825],{"className":15811},[282],[279,15813,15815],{"className":15814},[286],[288,15816,15817],{"xmlns":290},[292,15818,15819,15823],{},[295,15820,15821],{},[301,15822,3728],{},[312,15824,3728],{"encoding":314},[279,15826,15828],{"className":15827,"ariaHidden":320},[319],[279,15829,15831,15834],{"className":15830},[324],[279,15832],{"className":15833,"style":2437},[328],[279,15835,3728],{"className":15836},[333,337]," 降低，",[279,15839,15841,15858],{"className":15840},[282],[279,15842,15844],{"className":15843},[286],[288,15845,15846],{"xmlns":290},[292,15847,15848,15856],{},[295,15849,15850],{},[298,15851,15852,15854],{},[301,15853,4396],{},[301,15855,308],{},[312,15857,15758],{"encoding":314},[279,15859,15861],{"className":15860,"ariaHidden":320},[319],[279,15862,15864,15867],{"className":15863},[324],[279,15865],{"className":15866,"style":4823},[328],[279,15868,15870,15873],{"className":15869},[333],[279,15871,4396],{"className":15872,"style":4616},[333,337],[279,15874,15876],{"className":15875},[342],[279,15877,15879,15899],{"className":15878},[346,347],[279,15880,15882,15896],{"className":15881},[351],[279,15883,15885],{"className":15884,"style":356},[355],[279,15886,15887,15890],{"style":4855},[279,15888],{"className":15889,"style":364},[363],[279,15891,15893],{"className":15892},[368,369,370,371],[279,15894,308],{"className":15895},[333,337,371],[279,15897,383],{"className":15898},[382],[279,15900,15902],{"className":15901},[351],[279,15903,15905],{"className":15904,"style":390},[355],[279,15906],{}," 应该随着 ",[279,15909,15911,15924],{"className":15910},[282],[279,15912,15914],{"className":15913},[286],[288,15915,15916],{"xmlns":290},[292,15917,15918,15922],{},[295,15919,15920],{},[301,15921,3728],{},[312,15923,3728],{"encoding":314},[279,15925,15927],{"className":15926,"ariaHidden":320},[319],[279,15928,15930,15933],{"className":15929},[324],[279,15931],{"className":15932,"style":2437},[328],[279,15934,3728],{"className":15935},[333,337]," 按比例降低。这意味着我们应该减小 ",[279,15938,15940,15960],{"className":15939},[282],[279,15941,15943],{"className":15942},[286],[288,15944,15945],{"xmlns":290},[292,15946,15947,15957],{},[295,15948,15949,15955],{},[298,15950,15951,15953],{},[301,15952,416],{},[301,15954,421],{},[301,15956,424],{},[312,15958,15959],{"encoding":314},"T_ox",[279,15961,15963],{"className":15962,"ariaHidden":320},[319],[279,15964,15966,15969,16009],{"className":15965},[324],[279,15967],{"className":15968,"style":329},[328],[279,15970,15972,15975],{"className":15971},[333],[279,15973,416],{"className":15974,"style":443},[333,337],[279,15976,15978],{"className":15977},[342],[279,15979,15981,16001],{"className":15980},[346,347],[279,15982,15984,15998],{"className":15983},[351],[279,15985,15987],{"className":15986,"style":456},[355],[279,15988,15989,15992],{"style":459},[279,15990],{"className":15991,"style":364},[363],[279,15993,15995],{"className":15994},[368,369,370,371],[279,15996,421],{"className":15997},[333,337,371],[279,15999,383],{"className":16000},[382],[279,16002,16004],{"className":16003},[351],[279,16005,16007],{"className":16006,"style":390},[355],[279,16008],{},[279,16010,424],{"className":16011},[333,337],"、",[279,16014,16016,16038],{"className":16015},[282],[279,16017,16019],{"className":16018},[286],[288,16020,16021],{"xmlns":290},[292,16022,16023,16035],{},[295,16024,16025,16031,16033],{},[298,16026,16027,16029],{},[301,16028,3439],{},[301,16030,308],{},[301,16032,3306],{},[301,16034,240],{},[312,16036,16037],{"encoding":314},"W_dep",[279,16039,16041],{"className":16040,"ariaHidden":320},[319],[279,16042,16044,16048,16088,16091],{"className":16043},[324],[279,16045],{"className":16046,"style":16047},[328],"height:0.8778em;vertical-align:-0.1944em;",[279,16049,16051,16054],{"className":16050},[333],[279,16052,3439],{"className":16053,"style":443},[333,337],[279,16055,16057],{"className":16056},[342],[279,16058,16060,16080],{"className":16059},[346,347],[279,16061,16063,16077],{"className":16062},[351],[279,16064,16066],{"className":16065,"style":356},[355],[279,16067,16068,16071],{"style":459},[279,16069],{"className":16070,"style":364},[363],[279,16072,16074],{"className":16073},[368,369,370,371],[279,16075,308],{"className":16076},[333,337,371],[279,16078,383],{"className":16079},[382],[279,16081,16083],{"className":16082},[351],[279,16084,16086],{"className":16085,"style":390},[355],[279,16087],{},[279,16089,3306],{"className":16090},[333,337],[279,16092,240],{"className":16093},[333,337]," 和\u002F或 ",[279,16096,16098,16115],{"className":16097},[282],[279,16099,16101],{"className":16100},[286],[288,16102,16103],{"xmlns":290},[292,16104,16105,16113],{},[295,16106,16107],{},[298,16108,16109,16111],{},[301,16110,4500],{},[301,16112,4503],{},[312,16114,11755],{"encoding":314},[279,16116,16118],{"className":16117,"ariaHidden":320},[319],[279,16119,16121,16124],{"className":16120},[324],[279,16122],{"className":16123,"style":778},[328],[279,16125,16127,16130],{"className":16126},[333],[279,16128,4500],{"className":16129,"style":532},[333,337],[279,16131,16133],{"className":16132},[342],[279,16134,16136,16156],{"className":16135},[346,347],[279,16137,16139,16153],{"className":16138},[351],[279,16140,16142],{"className":16141,"style":5067},[355],[279,16143,16144,16147],{"style":547},[279,16145],{"className":16146,"style":364},[363],[279,16148,16150],{"className":16149},[368,369,370,371],[279,16151,4503],{"className":16152,"style":5079},[333,337,371],[279,16154,383],{"className":16155},[382],[279,16157,16159],{"className":16158},[351],[279,16160,16162],{"className":16161,"style":827},[355],[279,16163],{},"。实际上，在每个工艺节点这三项都会降低，从而实现 ",[279,16166,16168,16185],{"className":16167},[282],[279,16169,16171],{"className":16170},[286],[288,16172,16173],{"xmlns":290},[292,16174,16175,16183],{},[295,16176,16177],{},[298,16178,16179,16181],{},[301,16180,4396],{},[301,16182,308],{},[312,16184,15758],{"encoding":314},[279,16186,16188],{"className":16187,"ariaHidden":320},[319],[279,16189,16191,16194],{"className":16190},[324],[279,16192],{"className":16193,"style":4823},[328],[279,16195,16197,16200],{"className":16196},[333],[279,16198,4396],{"className":16199,"style":4616},[333,337],[279,16201,16203],{"className":16202},[342],[279,16204,16206,16226],{"className":16205},[346,347],[279,16207,16209,16223],{"className":16208},[351],[279,16210,16212],{"className":16211,"style":356},[355],[279,16213,16214,16217],{"style":4855},[279,16215],{"className":16216,"style":364},[363],[279,16218,16220],{"className":16219},[368,369,370,371],[279,16221,308],{"className":16222},[333,337,371],[279,16224,383],{"className":16225},[382],[279,16227,16229],{"className":16228},[351],[279,16230,16232],{"className":16231,"style":390},[355],[279,16233],{}," 的降低。降低 ",[279,16236,16238,16257],{"className":16237},[282],[279,16239,16241],{"className":16240},[286],[288,16242,16243],{"xmlns":290},[292,16244,16245,16255],{},[295,16246,16247,16253],{},[298,16248,16249,16251],{},[301,16250,416],{},[301,16252,421],{},[301,16254,424],{},[312,16256,15959],{"encoding":314},[279,16258,16260],{"className":16259,"ariaHidden":320},[319],[279,16261,16263,16266,16306],{"className":16262},[324],[279,16264],{"className":16265,"style":329},[328],[279,16267,16269,16272],{"className":16268},[333],[279,16270,416],{"className":16271,"style":443},[333,337],[279,16273,16275],{"className":16274},[342],[279,16276,16278,16298],{"className":16277},[346,347],[279,16279,16281,16295],{"className":16280},[351],[279,16282,16284],{"className":16283,"style":456},[355],[279,16285,16286,16289],{"style":459},[279,16287],{"className":16288,"style":364},[363],[279,16290,16292],{"className":16291},[368,369,370,371],[279,16293,421],{"className":16294},[333,337,371],[279,16296,383],{"className":16297},[382],[279,16299,16301],{"className":16300},[351],[279,16302,16304],{"className":16303,"style":390},[355],[279,16305],{},[279,16307,424],{"className":16308},[333,337]," 可以增加栅控能力或者增加 ",[279,16311,16313,16336],{"className":16312},[282],[279,16314,16316],{"className":16315},[286],[288,16317,16318],{"xmlns":290},[292,16319,16320,16334],{},[295,16321,16322],{},[298,16323,16324,16326],{},[301,16325,2070],{},[295,16327,16328,16330,16332],{},[301,16329,421],{},[301,16331,424],{},[301,16333,3306],{},[312,16335,9097],{"encoding":314},[279,16337,16339],{"className":16338,"ariaHidden":320},[319],[279,16340,16342,16345],{"className":16341},[324],[279,16343],{"className":16344,"style":329},[328],[279,16346,16348,16351],{"className":16347},[333],[279,16349,2070],{"className":16350,"style":2095},[333,337],[279,16352,16354],{"className":16353},[342],[279,16355,16357,16386],{"className":16356},[346,347],[279,16358,16360,16383],{"className":16359},[351],[279,16361,16363],{"className":16362,"style":456},[355],[279,16364,16365,16368],{"style":2110},[279,16366],{"className":16367,"style":364},[363],[279,16369,16371],{"className":16370},[368,369,370,371],[279,16372,16374,16377,16380],{"className":16373},[333,371],[279,16375,421],{"className":16376},[333,337,371],[279,16378,424],{"className":16379},[333,337,371],[279,16381,3306],{"className":16382},[333,337,371],[279,16384,383],{"className":16385},[382],[279,16387,16389],{"className":16388},[351],[279,16390,16392],{"className":16391,"style":390},[355],[279,16393],{},"。减小 ",[279,16396,16398,16415],{"className":16397},[282],[279,16399,16401],{"className":16400},[286],[288,16402,16403],{"xmlns":290},[292,16404,16405,16413],{},[295,16406,16407],{},[298,16408,16409,16411],{},[301,16410,4500],{},[301,16412,4503],{},[312,16414,11755],{"encoding":314},[279,16416,16418],{"className":16417,"ariaHidden":320},[319],[279,16419,16421,16424],{"className":16420},[324],[279,16422],{"className":16423,"style":778},[328],[279,16425,16427,16430],{"className":16426},[333],[279,16428,4500],{"className":16429,"style":532},[333,337],[279,16431,16433],{"className":16432},[342],[279,16434,16436,16456],{"className":16435},[346,347],[279,16437,16439,16453],{"className":16438},[351],[279,16440,16442],{"className":16441,"style":5067},[355],[279,16443,16444,16447],{"style":547},[279,16445],{"className":16446,"style":364},[363],[279,16448,16450],{"className":16449},[368,369,370,371],[279,16451,4503],{"className":16452,"style":5079},[333,337,371],[279,16454,383],{"className":16455},[382],[279,16457,16459],{"className":16458},[351],[279,16460,16462],{"className":16461,"style":827},[355],[279,16463],{}," 通过减小漏区尺寸而减小 ",[279,16466,16468,16485],{"className":16467},[282],[279,16469,16471],{"className":16470},[286],[288,16472,16473],{"xmlns":290},[292,16474,16475,16483],{},[295,16476,16477],{},[298,16478,16479,16481],{},[301,16480,2070],{},[301,16482,308],{},[312,16484,9817],{"encoding":314},[279,16486,16488],{"className":16487,"ariaHidden":320},[319],[279,16489,16491,16494],{"className":16490},[324],[279,16492],{"className":16493,"style":329},[328],[279,16495,16497,16500],{"className":16496},[333],[279,16498,2070],{"className":16499,"style":2095},[333,337],[279,16501,16503],{"className":16502},[342],[279,16504,16506,16526],{"className":16505},[346,347],[279,16507,16509,16523],{"className":16508},[351],[279,16510,16512],{"className":16511,"style":356},[355],[279,16513,16514,16517],{"style":2110},[279,16515],{"className":16516,"style":364},[363],[279,16518,16520],{"className":16519},[368,369,370,371],[279,16521,308],{"className":16522},[333,337,371],[279,16524,383],{"className":16525},[382],[279,16527,16529],{"className":16528},[351],[279,16530,16532],{"className":16531,"style":390},[355],[279,16533],{},[279,16535,16537,16561],{"className":16536},[282],[279,16538,16540],{"className":16539},[286],[288,16541,16542],{"xmlns":290},[292,16543,16544,16558],{},[295,16545,16546],{},[298,16547,16548,16550],{},[301,16549,3439],{},[295,16551,16552,16554,16556],{},[301,16553,308],{},[301,16555,3306],{},[301,16557,240],{},[312,16559,16560],{"encoding":314},"W_{dep}",[279,16562,16564],{"className":16563,"ariaHidden":320},[319],[279,16565,16567,16570],{"className":16566},[324],[279,16568],{"className":16569,"style":778},[328],[279,16571,16573,16576],{"className":16572},[333],[279,16574,3439],{"className":16575,"style":443},[333,337],[279,16577,16579],{"className":16578},[342],[279,16580,16582,16611],{"className":16581},[346,347],[279,16583,16585,16608],{"className":16584},[351],[279,16586,16588],{"className":16587,"style":356},[355],[279,16589,16590,16593],{"style":459},[279,16591],{"className":16592,"style":364},[363],[279,16594,16596],{"className":16595},[368,369,370,371],[279,16597,16599,16602,16605],{"className":16598},[333,371],[279,16600,308],{"className":16601},[333,337,371],[279,16603,3306],{"className":16604},[333,337,371],[279,16606,240],{"className":16607},[333,337,371],[279,16609,383],{"className":16610},[382],[279,16612,16614],{"className":16613},[351],[279,16615,16617],{"className":16616,"style":827},[355],[279,16618],{}," 可以通过引入地平面（衬底的中性区或耗尽区底部），趋于从电学上屏蔽沟道和漏区之间的耦合，这样也可以减小 ",[279,16621,16623,16640],{"className":16622},[282],[279,16624,16626],{"className":16625},[286],[288,16627,16628],{"xmlns":290},[292,16629,16630,16638],{},[295,16631,16632],{},[298,16633,16634,16636],{},[301,16635,2070],{},[301,16637,308],{},[312,16639,9817],{"encoding":314},[279,16641,16643],{"className":16642,"ariaHidden":320},[319],[279,16644,16646,16649],{"className":16645},[324],[279,16647],{"className":16648,"style":329},[328],[279,16650,16652,16655],{"className":16651},[333],[279,16653,2070],{"className":16654,"style":2095},[333,337],[279,16656,16658],{"className":16657},[342],[279,16659,16661,16681],{"className":16660},[346,347],[279,16662,16664,16678],{"className":16663},[351],[279,16665,16667],{"className":16666,"style":356},[355],[279,16668,16669,16672],{"style":2110},[279,16670],{"className":16671,"style":364},[363],[279,16673,16675],{"className":16674},[368,369,370,371],[279,16676,308],{"className":16677},[333,337,371],[279,16679,383],{"className":16680},[382],[279,16682,16684],{"className":16683},[351],[279,16685,16687],{"className":16686,"style":390},[355],[279,16688],{},[236,16690,16692],{"id":16691},"mosfet-off-state-vs-on-state",[266,16693,16694],{},"MOSFET OFF State vs. ON State",[270,16696,16698],{"id":16697},"亚阈值区-sub-threshold-regime","亚阈值区 | Sub-threshold regime",[240,16700,16701,16702,16843,16844,16847,16848,3505],{},"当 ",[279,16703,16705,16736],{"className":16704},[282],[279,16706,16708],{"className":16707},[286],[288,16709,16710],{"xmlns":290},[292,16711,16712,16733],{},[295,16713,16714,16724,16727],{},[298,16715,16716,16718],{},[301,16717,303],{},[295,16719,16720,16722],{},[301,16721,5611],{},[301,16723,1384],{},[938,16725,16726],{},"\u003C",[298,16728,16729,16731],{},[301,16730,303],{},[301,16732,416],{},[312,16734,16735],{"encoding":314},"V_{GS}\u003CV_T",[279,16737,16739,16797],{"className":16738,"ariaHidden":320},[319],[279,16740,16742,16745,16788,16791,16794],{"className":16741},[324],[279,16743],{"className":16744,"style":329},[328],[279,16746,16748,16751],{"className":16747},[333],[279,16749,303],{"className":16750,"style":338},[333,337],[279,16752,16754],{"className":16753},[342],[279,16755,16757,16780],{"className":16756},[346,347],[279,16758,16760,16777],{"className":16759},[351],[279,16761,16763],{"className":16762,"style":2674},[355],[279,16764,16765,16768],{"style":359},[279,16766],{"className":16767,"style":364},[363],[279,16769,16771],{"className":16770},[368,369,370,371],[279,16772,16774],{"className":16773},[333,371],[279,16775,12762],{"className":16776,"style":1551},[333,337,371],[279,16778,383],{"className":16779},[382],[279,16781,16783],{"className":16782},[351],[279,16784,16786],{"className":16785,"style":390},[355],[279,16787],{},[279,16789],{"className":16790,"style":1035},[1034],[279,16792,16726],{"className":16793},[1039],[279,16795],{"className":16796,"style":1035},[1034],[279,16798,16800,16803],{"className":16799},[324],[279,16801],{"className":16802,"style":329},[328],[279,16804,16806,16809],{"className":16805},[333],[279,16807,303],{"className":16808,"style":338},[333,337],[279,16810,16812],{"className":16811},[342],[279,16813,16815,16835],{"className":16814},[346,347],[279,16816,16818,16832],{"className":16817},[351],[279,16819,16821],{"className":16820,"style":2674},[355],[279,16822,16823,16826],{"style":359},[279,16824],{"className":16825,"style":364},[363],[279,16827,16829],{"className":16828},[368,369,370,371],[279,16830,416],{"className":16831,"style":443},[333,337,371],[279,16833,383],{"className":16834},[382],[279,16836,16838],{"className":16837},[351],[279,16839,16841],{"className":16840,"style":390},[355],[279,16842],{}," 时，沟道没有形成强反型的低阻通道，源端到沟道之间存在势垒。载流子要从源端进入沟道，主要靠",[266,16845,16846],{},"热运动+浓度梯度","越过势垒（即",[266,16849,16850],{},"扩散电流",[2772,16852,16854],{"id":16853},"subthreshold-swing-s-与-dibl","Subthreshold swing S 与 DIBL",[240,16856,16857,16860],{},[266,16858,16859],{},"亚阈值摆幅","：SS 越小，说明栅控越强，关断更彻底。",[240,16862,16863,16866,16867,16936],{},[266,16864,16865],{},"DIBL","：漏端电压把源端势垒压低，OFF 漏电上升，等效 ",[279,16868,16870,16887],{"className":16869},[282],[279,16871,16873],{"className":16872},[286],[288,16874,16875],{"xmlns":290},[292,16876,16877,16885],{},[295,16878,16879],{},[298,16880,16881,16883],{},[301,16882,303],{},[301,16884,416],{},[312,16886,5685],{"encoding":314},[279,16888,16890],{"className":16889,"ariaHidden":320},[319],[279,16891,16893,16896],{"className":16892},[324],[279,16894],{"className":16895,"style":329},[328],[279,16897,16899,16902],{"className":16898},[333],[279,16900,303],{"className":16901,"style":338},[333,337],[279,16903,16905],{"className":16904},[342],[279,16906,16908,16928],{"className":16907},[346,347],[279,16909,16911,16925],{"className":16910},[351],[279,16912,16914],{"className":16913,"style":2674},[355],[279,16915,16916,16919],{"style":359},[279,16917],{"className":16918,"style":364},[363],[279,16920,16922],{"className":16921},[368,369,370,371],[279,16923,416],{"className":16924,"style":443},[333,337,371],[279,16926,383],{"className":16927},[382],[279,16929,16931],{"className":16930},[351],[279,16932,16934],{"className":16933,"style":390},[355],[279,16935],{}," 下降。",[240,16938,16939],{},[257,16940],{"alt":16941,"src":16942},"图片.png","\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-13.png",[270,16944,16946],{"id":16945},"导通区-on-state","导通区 | ON state",[240,16948,16949,16950,17021,17022,17025,17026,17106],{},"导通时沟道形成强反型层，相当于出现一条可导电的通道。载流子在横向电场 ",[279,16951,16953,16971],{"className":16952},[282],[279,16954,16956],{"className":16955},[286],[288,16957,16958],{"xmlns":290},[292,16959,16960,16968],{},[295,16961,16962],{},[298,16963,16964,16966],{},[301,16965,2349],{},[301,16967,424],{},[312,16969,16970],{"encoding":314},"E_x",[279,16972,16974],{"className":16973,"ariaHidden":320},[319],[279,16975,16977,16980],{"className":16976},[324],[279,16978],{"className":16979,"style":329},[328],[279,16981,16983,16986],{"className":16982},[333],[279,16984,2349],{"className":16985,"style":1551},[333,337],[279,16987,16989],{"className":16988},[342],[279,16990,16992,17013],{"className":16991},[346,347],[279,16993,16995,17010],{"className":16994},[351],[279,16996,16998],{"className":16997,"style":456},[355],[279,16999,17001,17004],{"style":17000},"top:-2.55em;margin-left:-0.0576em;margin-right:0.05em;",[279,17002],{"className":17003,"style":364},[363],[279,17005,17007],{"className":17006},[368,369,370,371],[279,17008,424],{"className":17009},[333,337,371],[279,17011,383],{"className":17012},[382],[279,17014,17016],{"className":17015},[351],[279,17017,17019],{"className":17018,"style":390},[355],[279,17020],{}," 下发生",[266,17023,17024],{},"漂移","，此时的",[279,17027,17029,17051],{"className":17028},[282],[279,17030,17032],{"className":17031},[286],[288,17033,17034],{"xmlns":290},[292,17035,17036,17048],{},[295,17037,17038],{},[298,17039,17040,17042],{},[301,17041,506],{},[295,17043,17044,17046],{},[301,17045,10408],{},[301,17047,1384],{},[312,17049,17050],{"encoding":314},"I_{DS}",[279,17052,17054],{"className":17053,"ariaHidden":320},[319],[279,17055,17057,17060],{"className":17056},[324],[279,17058],{"className":17059,"style":329},[328],[279,17061,17063,17066],{"className":17062},[333],[279,17064,506],{"className":17065,"style":532},[333,337],[279,17067,17069],{"className":17068},[342],[279,17070,17072,17098],{"className":17071},[346,347],[279,17073,17075,17095],{"className":17074},[351],[279,17076,17078],{"className":17077,"style":2674},[355],[279,17079,17080,17083],{"style":547},[279,17081],{"className":17082,"style":364},[363],[279,17084,17086],{"className":17085},[368,369,370,371],[279,17087,17089,17092],{"className":17088},[333,371],[279,17090,10408],{"className":17091,"style":2199},[333,337,371],[279,17093,1384],{"className":17094,"style":1551},[333,337,371],[279,17096,383],{"className":17097},[382],[279,17099,17101],{"className":17100},[351],[279,17102,17104],{"className":17103,"style":390},[355],[279,17105],{},"主要由漂移电流决定。",[2772,17108,17110],{"id":17109},"穿通寄生-bjt-punchthrough-parasitic-bjt","穿通&寄生 BJT | Punchthrough & parasitic BJT",[240,17112,17113,17116,17117,17196,17197,17276,17277,3505],{},[266,17114,17115],{},"Punchthrough（穿通）","：当",[279,17118,17120,17141],{"className":17119},[282],[279,17121,17123],{"className":17122},[286],[288,17124,17125],{"xmlns":290},[292,17126,17127,17139],{},[295,17128,17129],{},[298,17130,17131,17133],{},[301,17132,303],{},[295,17134,17135,17137],{},[301,17136,10408],{},[301,17138,1384],{},[312,17140,10413],{"encoding":314},[279,17142,17144],{"className":17143,"ariaHidden":320},[319],[279,17145,17147,17150],{"className":17146},[324],[279,17148],{"className":17149,"style":329},[328],[279,17151,17153,17156],{"className":17152},[333],[279,17154,303],{"className":17155,"style":338},[333,337],[279,17157,17159],{"className":17158},[342],[279,17160,17162,17188],{"className":17161},[346,347],[279,17163,17165,17185],{"className":17164},[351],[279,17166,17168],{"className":17167,"style":2674},[355],[279,17169,17170,17173],{"style":359},[279,17171],{"className":17172,"style":364},[363],[279,17174,17176],{"className":17175},[368,369,370,371],[279,17177,17179,17182],{"className":17178},[333,371],[279,17180,10408],{"className":17181,"style":2199},[333,337,371],[279,17183,1384],{"className":17184,"style":1551},[333,337,371],[279,17186,383],{"className":17187},[382],[279,17189,17191],{"className":17190},[351],[279,17192,17194],{"className":17193,"style":390},[355],[279,17195],{},"很大、沟道很短时，源漏耗尽区可能在沟道下方连接，导致源端势垒被严重削弱，即使栅控也压不住，",[279,17198,17200,17221],{"className":17199},[282],[279,17201,17203],{"className":17202},[286],[288,17204,17205],{"xmlns":290},[292,17206,17207,17219],{},[295,17208,17209],{},[298,17210,17211,17213],{},[301,17212,506],{},[295,17214,17215,17217],{},[301,17216,10408],{},[301,17218,1384],{},[312,17220,17050],{"encoding":314},[279,17222,17224],{"className":17223,"ariaHidden":320},[319],[279,17225,17227,17230],{"className":17226},[324],[279,17228],{"className":17229,"style":329},[328],[279,17231,17233,17236],{"className":17232},[333],[279,17234,506],{"className":17235,"style":532},[333,337],[279,17237,17239],{"className":17238},[342],[279,17240,17242,17268],{"className":17241},[346,347],[279,17243,17245,17265],{"className":17244},[351],[279,17246,17248],{"className":17247,"style":2674},[355],[279,17249,17250,17253],{"style":547},[279,17251],{"className":17252,"style":364},[363],[279,17254,17256],{"className":17255},[368,369,370,371],[279,17257,17259,17262],{"className":17258},[333,371],[279,17260,10408],{"className":17261,"style":2199},[333,337,371],[279,17263,1384],{"className":17264,"style":1551},[333,337,371],[279,17266,383],{"className":17267},[382],[279,17269,17271],{"className":17270},[351],[279,17272,17274],{"className":17273,"style":390},[355],[279,17275],{},"电流突然变大（类似",[266,17278,17279],{},"失控漏电",[240,17281,17282,17285,17286,623],{},[266,17283,17284],{},"寄生 BJT 效应","：MOSFET 的源\u002F体\u002F漏天然构成一个寄生双极管（例如 nMOS 中：源 n+—体 p—漏 n+）。高场下的碰撞电离产生的空穴会抬高体电位，可能触发寄生 BJT 导通，引发更大电流",[279,17287,17289,17310],{"className":17288},[282],[279,17290,17292],{"className":17291},[286],[288,17293,17294],{"xmlns":290},[292,17295,17296,17308],{},[295,17297,17298],{},[298,17299,17300,17302],{},[301,17301,506],{},[295,17303,17304,17306],{},[301,17305,10408],{},[301,17307,1384],{},[312,17309,17050],{"encoding":314},[279,17311,17313],{"className":17312,"ariaHidden":320},[319],[279,17314,17316,17319],{"className":17315},[324],[279,17317],{"className":17318,"style":329},[328],[279,17320,17322,17325],{"className":17321},[333],[279,17323,506],{"className":17324,"style":532},[333,337],[279,17326,17328],{"className":17327},[342],[279,17329,17331,17357],{"className":17330},[346,347],[279,17332,17334,17354],{"className":17333},[351],[279,17335,17337],{"className":17336,"style":2674},[355],[279,17338,17339,17342],{"style":547},[279,17340],{"className":17341,"style":364},[363],[279,17343,17345],{"className":17344},[368,369,370,371],[279,17346,17348,17351],{"className":17347},[333,371],[279,17349,10408],{"className":17350,"style":2199},[333,337,371],[279,17352,1384],{"className":17353,"style":1551},[333,337,371],[279,17355,383],{"className":17356},[382],[279,17358,17360],{"className":17359},[351],[279,17361,17363],{"className":17362,"style":390},[355],[279,17364],{},[2772,17366,17368],{"id":17367},"寄生串联电阻-parasitic-series-resistances","寄生串联电阻 | Parasitic series resistances",[240,17370,17371,17374,17443,17444,623],{},[266,17372,17373],{},"源端电阻",[279,17375,17377,17394],{"className":17376},[282],[279,17378,17380],{"className":17379},[286],[288,17381,17382],{"xmlns":290},[292,17383,17384,17392],{},[295,17385,17386],{},[298,17387,17388,17390],{},[301,17389,9499],{},[301,17391,4417],{},[312,17393,12341],{"encoding":314},[279,17395,17397],{"className":17396,"ariaHidden":320},[319],[279,17398,17400,17403],{"className":17399},[324],[279,17401],{"className":17402,"style":329},[328],[279,17404,17406,17409],{"className":17405},[333],[279,17407,9499],{"className":17408,"style":9526},[333,337],[279,17410,17412],{"className":17411},[342],[279,17413,17415,17435],{"className":17414},[346,347],[279,17416,17418,17432],{"className":17417},[351],[279,17419,17421],{"className":17420,"style":456},[355],[279,17422,17423,17426],{"style":12371},[279,17424],{"className":17425,"style":364},[363],[279,17427,17429],{"className":17428},[368,369,370,371],[279,17430,4417],{"className":17431},[333,337,371],[279,17433,383],{"className":17434},[382],[279,17436,17438],{"className":17437},[351],[279,17439,17441],{"className":17440,"style":390},[355],[279,17442],{},"会减小有效的",[279,17445,17447,17469],{"className":17446},[282],[279,17448,17450],{"className":17449},[286],[288,17451,17452],{"xmlns":290},[292,17453,17454,17466],{},[295,17455,17456],{},[298,17457,17458,17460],{},[301,17459,303],{},[295,17461,17462,17464],{},[301,17463,5611],{},[301,17465,1384],{},[312,17467,17468],{"encoding":314},"V_{GS}",[279,17470,17472],{"className":17471,"ariaHidden":320},[319],[279,17473,17475,17478],{"className":17474},[324],[279,17476],{"className":17477,"style":329},[328],[279,17479,17481,17484],{"className":17480},[333],[279,17482,303],{"className":17483,"style":338},[333,337],[279,17485,17487],{"className":17486},[342],[279,17488,17490,17513],{"className":17489},[346,347],[279,17491,17493,17510],{"className":17492},[351],[279,17494,17496],{"className":17495,"style":2674},[355],[279,17497,17498,17501],{"style":359},[279,17499],{"className":17500,"style":364},[363],[279,17502,17504],{"className":17503},[368,369,370,371],[279,17505,17507],{"className":17506},[333,371],[279,17508,12762],{"className":17509,"style":1551},[333,337,371],[279,17511,383],{"className":17512},[382],[279,17514,17516],{"className":17515},[351],[279,17517,17519],{"className":17518,"style":390},[355],[279,17520],{},[240,17522,17523,17526,17596,17598,17668,17671,17672,623],{},[266,17524,17525],{},"源端和漏端的电阻（",[279,17527,17529,17547],{"className":17528},[282],[279,17530,17532],{"className":17531},[286],[288,17533,17534],{"xmlns":290},[292,17535,17536,17544],{},[295,17537,17538],{},[298,17539,17540,17542],{},[301,17541,9499],{},[301,17543,1384],{},[312,17545,17546],{"encoding":314},"R_S",[279,17548,17550],{"className":17549,"ariaHidden":320},[319],[279,17551,17553,17556],{"className":17552},[324],[279,17554],{"className":17555,"style":329},[328],[279,17557,17559,17562],{"className":17558},[333],[279,17560,9499],{"className":17561,"style":9526},[333,337],[279,17563,17565],{"className":17564},[342],[279,17566,17568,17588],{"className":17567},[346,347],[279,17569,17571,17585],{"className":17570},[351],[279,17572,17574],{"className":17573,"style":2674},[355],[279,17575,17576,17579],{"style":12371},[279,17577],{"className":17578,"style":364},[363],[279,17580,17582],{"className":17581},[368,369,370,371],[279,17583,1384],{"className":17584,"style":1551},[333,337,371],[279,17586,383],{"className":17587},[382],[279,17589,17591],{"className":17590},[351],[279,17592,17594],{"className":17593,"style":390},[355],[279,17595],{},[266,17597,619],{},[279,17599,17601,17619],{"className":17600},[282],[279,17602,17604],{"className":17603},[286],[288,17605,17606],{"xmlns":290},[292,17607,17608,17616],{},[295,17609,17610],{},[298,17611,17612,17614],{},[301,17613,9499],{},[301,17615,10408],{},[312,17617,17618],{"encoding":314},"R_D",[279,17620,17622],{"className":17621,"ariaHidden":320},[319],[279,17623,17625,17628],{"className":17624},[324],[279,17626],{"className":17627,"style":329},[328],[279,17629,17631,17634],{"className":17630},[333],[279,17632,9499],{"className":17633,"style":9526},[333,337],[279,17635,17637],{"className":17636},[342],[279,17638,17640,17660],{"className":17639},[346,347],[279,17641,17643,17657],{"className":17642},[351],[279,17644,17646],{"className":17645,"style":2674},[355],[279,17647,17648,17651],{"style":12371},[279,17649],{"className":17650,"style":364},[363],[279,17652,17654],{"className":17653},[368,369,370,371],[279,17655,10408],{"className":17656,"style":2199},[333,337,371],[279,17658,383],{"className":17659},[382],[279,17661,17663],{"className":17662},[351],[279,17664,17666],{"className":17665,"style":390},[355],[279,17667],{},[266,17669,17670],{},"）","和会减小有效的",[279,17673,17675,17696],{"className":17674},[282],[279,17676,17678],{"className":17677},[286],[288,17679,17680],{"xmlns":290},[292,17681,17682,17694],{},[295,17683,17684],{},[298,17685,17686,17688],{},[301,17687,303],{},[295,17689,17690,17692],{},[301,17691,10408],{},[301,17693,1384],{},[312,17695,10413],{"encoding":314},[279,17697,17699],{"className":17698,"ariaHidden":320},[319],[279,17700,17702,17705],{"className":17701},[324],[279,17703],{"className":17704,"style":329},[328],[279,17706,17708,17711],{"className":17707},[333],[279,17709,303],{"className":17710,"style":338},[333,337],[279,17712,17714],{"className":17713},[342],[279,17715,17717,17743],{"className":17716},[346,347],[279,17718,17720,17740],{"className":17719},[351],[279,17721,17723],{"className":17722,"style":2674},[355],[279,17724,17725,17728],{"style":359},[279,17726],{"className":17727,"style":364},[363],[279,17729,17731],{"className":17730},[368,369,370,371],[279,17732,17734,17737],{"className":17733},[333,371],[279,17735,10408],{"className":17736,"style":2199},[333,337,371],[279,17738,1384],{"className":17739,"style":1551},[333,337,371],[279,17741,383],{"className":17742},[382],[279,17744,17746],{"className":17745},[351],[279,17747,17749],{"className":17748,"style":390},[355],[279,17750],{},[240,17752,17753],{},[257,17754],{"alt":16941,"src":17755},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-02.png",[236,17757,17759,17760],{"id":17758},"亚微米mosfet的结构与设计-submicron-mosfet-structure-and-design","亚微米MOSFET的结构与设计 | ",[266,17761,17762],{},"Submicron MOSFET: Structure and Design",[240,17764,17765,17768,17769,17838],{},[266,17766,17767],{},"Vertical (Channel) Engineering：纵向\u002F沟道工程","主要解决栅控与短沟道效应：",[279,17770,17772,17789],{"className":17771},[282],[279,17773,17775],{"className":17774},[286],[288,17776,17777],{"xmlns":290},[292,17778,17779,17787],{},[295,17780,17781],{},[298,17782,17783,17785],{},[301,17784,303],{},[301,17786,416],{},[312,17788,5685],{"encoding":314},[279,17790,17792],{"className":17791,"ariaHidden":320},[319],[279,17793,17795,17798],{"className":17794},[324],[279,17796],{"className":17797,"style":329},[328],[279,17799,17801,17804],{"className":17800},[333],[279,17802,303],{"className":17803,"style":338},[333,337],[279,17805,17807],{"className":17806},[342],[279,17808,17810,17830],{"className":17809},[346,347],[279,17811,17813,17827],{"className":17812},[351],[279,17814,17816],{"className":17815,"style":2674},[355],[279,17817,17818,17821],{"style":359},[279,17819],{"className":17820,"style":364},[363],[279,17822,17824],{"className":17823},[368,369,370,371],[279,17825,416],{"className":17826,"style":443},[333,337,371],[279,17828,383],{"className":17829},[382],[279,17831,17833],{"className":17832},[351],[279,17834,17836],{"className":17835,"style":390},[355],[279,17837],{}," roll-off、DIBL、亚阈值摆幅等。",[240,17840,17841,17844],{},[266,17842,17843],{},"Horizontal (Drain) Engineering：横向\u002F漏侧工程","主要解决漏端高电场相关问题：热载流子、穿通、寄生 BJT，同时兼顾串联电阻。",[240,17846,17847],{},[257,17848],{"alt":16941,"src":17849},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-19.png",[231,17851,17853,17854],{"id":17852},"减小栅绝缘层的电学厚度和隧穿电流-reducing-gate-insulator-electrical-thickness-and-tunneling-leakage","减小栅绝缘层的电学厚度和隧穿电流 | ",[266,17855,17856],{},"Reducing Gate-Insulator Electrical Thickness and Tunneling Leakage",[240,17858,17859],{},"减小氧化层厚度目的是",[244,17861,17862,18025,18028,18101,18104],{},[247,17863,17864,17865,17944,17945,18024],{},"增大 ",[279,17866,17868,17889],{"className":17867},[282],[279,17869,17871],{"className":17870},[286],[288,17872,17873],{"xmlns":290},[292,17874,17875,17887],{},[295,17876,17877],{},[298,17878,17879,17881],{},[301,17880,2070],{},[295,17882,17883,17885],{},[301,17884,421],{},[301,17886,424],{},[312,17888,2079],{"encoding":314},[279,17890,17892],{"className":17891,"ariaHidden":320},[319],[279,17893,17895,17898],{"className":17894},[324],[279,17896],{"className":17897,"style":329},[328],[279,17899,17901,17904],{"className":17900},[333],[279,17902,2070],{"className":17903,"style":2095},[333,337],[279,17905,17907],{"className":17906},[342],[279,17908,17910,17936],{"className":17909},[346,347],[279,17911,17913,17933],{"className":17912},[351],[279,17914,17916],{"className":17915,"style":456},[355],[279,17917,17918,17921],{"style":2110},[279,17919],{"className":17920,"style":364},[363],[279,17922,17924],{"className":17923},[368,369,370,371],[279,17925,17927,17930],{"className":17926},[333,371],[279,17928,421],{"className":17929},[333,337,371],[279,17931,424],{"className":17932},[333,337,371],[279,17934,383],{"className":17935},[382],[279,17937,17939],{"className":17938},[351],[279,17940,17942],{"className":17941,"style":390},[355],[279,17943],{}," 以提高 ",[279,17946,17948,17969],{"className":17947},[282],[279,17949,17951],{"className":17950},[286],[288,17952,17953],{"xmlns":290},[292,17954,17955,17967],{},[295,17956,17957],{},[298,17958,17959,17961],{},[301,17960,506],{},[295,17962,17963,17965],{},[301,17964,421],{},[301,17966,513],{},[312,17968,516],{"encoding":314},[279,17970,17972],{"className":17971,"ariaHidden":320},[319],[279,17973,17975,17978],{"className":17974},[324],[279,17976],{"className":17977,"style":329},[328],[279,17979,17981,17984],{"className":17980},[333],[279,17982,506],{"className":17983,"style":532},[333,337],[279,17985,17987],{"className":17986},[342],[279,17988,17990,18016],{"className":17989},[346,347],[279,17991,17993,18013],{"className":17992},[351],[279,17994,17996],{"className":17995,"style":456},[355],[279,17997,17998,18001],{"style":547},[279,17999],{"className":18000,"style":364},[363],[279,18002,18004],{"className":18003},[368,369,370,371],[279,18005,18007,18010],{"className":18006},[333,371],[279,18008,421],{"className":18009},[333,337,371],[279,18011,513],{"className":18012},[333,337,371],[279,18014,383],{"className":18015},[382],[279,18017,18019],{"className":18018},[351],[279,18020,18022],{"className":18021,"style":390},[355],[279,18023],{},"（导通电流）",[247,18026,18027],{},"降低亚阈值摆幅（subthreshold swing）",[247,18029,18030,18031,18100],{},"控制阈值电压 ",[279,18032,18034,18051],{"className":18033},[282],[279,18035,18037],{"className":18036},[286],[288,18038,18039],{"xmlns":290},[292,18040,18041,18049],{},[295,18042,18043],{},[298,18044,18045,18047],{},[301,18046,303],{},[301,18048,684],{},[312,18050,687],{"encoding":314},[279,18052,18054],{"className":18053,"ariaHidden":320},[319],[279,18055,18057,18060],{"className":18056},[324],[279,18058],{"className":18059,"style":329},[328],[279,18061,18063,18066],{"className":18062},[333],[279,18064,303],{"className":18065,"style":338},[333,337],[279,18067,18069],{"className":18068},[342],[279,18070,18072,18092],{"className":18071},[346,347],[279,18073,18075,18089],{"className":18074},[351],[279,18076,18078],{"className":18077,"style":715},[355],[279,18079,18080,18083],{"style":359},[279,18081],{"className":18082,"style":364},[363],[279,18084,18086],{"className":18085},[368,369,370,371],[279,18087,684],{"className":18088},[333,337,371],[279,18090,383],{"className":18091},[382],[279,18093,18095],{"className":18094},[351],[279,18096,18098],{"className":18097,"style":390},[355],[279,18099],{}," 的回落（roll-off）\n如果氧化层太薄也会产生很多问题",[247,18102,18103],{},"会因高电场导致击穿（breakdown）",[247,18105,18106,18107],{},"漏电流（leakage current）增大\n",[257,18108],{"alt":259,"src":18109},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-07.png",[236,18111,18113,18114],{"id":18112},"栅极隧穿漏电流-gate-tunneling-leakage-current","栅极隧穿漏电流 | ",[266,18115,18116],{},"Gate Tunneling Leakage Current",[240,18118,18119,18122,18123],{},[266,18120,18121],{},"当栅氧层（或等效栅氧厚度 EOT）被做得很薄时，栅极会出现“量子隧穿”泄漏电流（Gate Tunneling Leakage）","，并且它会成为继续缩小栅氧厚度的",[266,18124,18125],{},"主要限制因素。",[240,18127,18128],{},[257,18129],{"alt":259,"src":18130},"\u002Fimg\u002FMicroelectronicDevices\u002FLecture12-05.png",[240,18132,18133,18134,18137],{},"对于厚度低于 1.5 nm 的 SiO2 膜，",[266,18135,18136],{},"栅漏电会大到功耗\u002F可靠性都无法接受","，这将成为最严重的限制因素。",{"title":18139,"searchDepth":18140,"depth":18140,"links":18141},"",4,[18142,18160,18189],{"id":233,"depth":18143,"text":234,"children":18144},2,[18145,18147],{"id":238,"depth":18146,"text":238},3,{"id":263,"depth":18146,"text":18148,"children":18149},"技术路线图 | Technology Roadmap (Example)",[18150,18151,18152,18153,18159],{"id":272,"depth":18140,"text":273},{"id":609,"depth":18140,"text":609},{"id":2146,"depth":18140,"text":2147},{"id":2769,"depth":18140,"text":2770,"children":18154},[18155,18157,18158],{"id":2774,"depth":18156,"text":2777},5,{"id":2816,"depth":18156,"text":2819},{"id":3179,"depth":18156,"text":3179},{"id":3380,"depth":18140,"text":3381},{"id":3414,"depth":18143,"text":3415,"children":18161},[18162,18163,18171,18174,18175,18177,18178,18187],{"id":3418,"depth":18146,"text":3419},{"id":3638,"depth":18146,"text":3639,"children":18164},[18165],{"id":4303,"depth":18140,"text":4306,"children":18166},[18167,18168,18169],{"id":5216,"depth":18156,"text":5219},{"id":5586,"depth":18156,"text":5589},{"id":9790,"depth":18156,"text":18170},"3 简单电容模型 | Simple Capacitance Model",{"id":11813,"depth":18146,"text":11814,"children":18172},[18173],{"id":12240,"depth":18140,"text":12240},{"id":12277,"depth":18146,"text":12277},{"id":12313,"depth":18146,"text":18176},"寄生源漏电阻 | Parasitic Source-Drain Resistance",{"id":15037,"depth":18146,"text":15040},{"id":16691,"depth":18146,"text":16694,"children":18179},[18180,18183],{"id":16697,"depth":18140,"text":16698,"children":18181},[18182],{"id":16853,"depth":18156,"text":16854},{"id":16945,"depth":18140,"text":16946,"children":18184},[18185,18186],{"id":17109,"depth":18156,"text":17110},{"id":17367,"depth":18156,"text":17368},{"id":17758,"depth":18146,"text":18188},"亚微米MOSFET的结构与设计 | Submicron MOSFET: Structure and Design",{"id":17852,"depth":18143,"text":18190,"children":18191},"减小栅绝缘层的电学厚度和隧穿电流 | Reducing Gate-Insulator Electrical Thickness and Tunneling Leakage",[18192],{"id":18112,"depth":18146,"text":18193},"栅极隧穿漏电流 | Gate Tunneling Leakage Current",[189],"技术微缩与摩尔定律、短沟道效应、减小栅绝缘层电学厚度与隧穿电流","md",null,{"slots":18199},{},{"text":18201,"minutes":18202,"time":18203,"words":18204},"22 min read",21.18,1270800,4236,{"title":116,"description":18195},{"loc":115,"images":18207},[18208,18209,18210,18211,18212,18213,18214,18215,18216,18217,18218,18219,18220,18221,18222,18223,18224,18225,18226,18227,18228,18229,18230,18231],{"loc":260},{"loc":606},{"loc":3402},{"loc":3411},{"loc":3635},{"loc":4016},{"loc":5243},{"loc":5252},{"loc":5404},{"loc":5583},{"loc":5955},{"loc":7818},{"loc":8898},{"loc":9627},{"loc":11810},{"loc":12237},{"loc":12282},{"loc":14243},{"loc":15348},{"loc":16942},{"loc":17755},{"loc":17849},{"loc":18109},{"loc":18130},[176,18233],"课程笔记","tech","J4OsFB_1EQAhK49NEYGPWO7xe2re-bG3QH-XHDOcnDg",[18237,18238],{"title":111,"path":110,"stem":109,"date":112,"type":18234,"children":-1},{"title":121,"path":120,"stem":119,"date":122,"type":18234,"children":-1},1789011908134]